JP4965091B2 - 導電性材料、半導体構造及び導電性材料を製造する方法 - Google Patents
導電性材料、半導体構造及び導電性材料を製造する方法Info
- Publication number
- JP4965091B2 JP4965091B2 JP2005199284A JP2005199284A JP4965091B2 JP 4965091 B2 JP4965091 B2 JP 4965091B2 JP 2005199284 A JP2005199284 A JP 2005199284A JP 2005199284 A JP2005199284 A JP 2005199284A JP 4965091 B2 JP4965091 B2 JP 4965091B2
- Authority
- JP
- Japan
- Prior art keywords
- copper
- atomic percent
- layer
- metals
- iridium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004020 conductor Substances 0.000 title claims description 76
- 239000004065 semiconductor Substances 0.000 title claims description 9
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 239000010410 layer Substances 0.000 claims description 186
- 239000010949 copper Substances 0.000 claims description 160
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 151
- 229910052802 copper Inorganic materials 0.000 claims description 150
- 229910052751 metal Inorganic materials 0.000 claims description 108
- 239000002184 metal Substances 0.000 claims description 108
- 150000002739 metals Chemical class 0.000 claims description 77
- 229910052741 iridium Inorganic materials 0.000 claims description 54
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 54
- 239000000463 material Substances 0.000 claims description 45
- 238000000034 method Methods 0.000 claims description 42
- 230000005012 migration Effects 0.000 claims description 38
- 238000013508 migration Methods 0.000 claims description 38
- 238000000137 annealing Methods 0.000 claims description 19
- 229910052762 osmium Inorganic materials 0.000 claims description 15
- 229910052702 rhenium Inorganic materials 0.000 claims description 15
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims description 14
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 claims description 14
- 238000005498 polishing Methods 0.000 claims description 9
- 239000003989 dielectric material Substances 0.000 claims description 7
- 239000002344 surface layer Substances 0.000 claims 1
- 230000004888 barrier function Effects 0.000 description 21
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 21
- 230000008569 process Effects 0.000 description 16
- 229910000881 Cu alloy Inorganic materials 0.000 description 12
- 229910052763 palladium Inorganic materials 0.000 description 11
- 229910052703 rhodium Inorganic materials 0.000 description 11
- 239000010948 rhodium Substances 0.000 description 11
- 238000000151 deposition Methods 0.000 description 10
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 10
- 230000008021 deposition Effects 0.000 description 8
- 238000005240 physical vapour deposition Methods 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 238000005229 chemical vapour deposition Methods 0.000 description 6
- 229910052715 tantalum Inorganic materials 0.000 description 6
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 230000009977 dual effect Effects 0.000 description 5
- 238000010899 nucleation Methods 0.000 description 5
- 229910052707 ruthenium Inorganic materials 0.000 description 5
- 229910052721 tungsten Inorganic materials 0.000 description 5
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 4
- 239000003082 abrasive agent Substances 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 230000006911 nucleation Effects 0.000 description 4
- 238000010561 standard procedure Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 229910001092 metal group alloy Inorganic materials 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- 244000132059 Carica parviflora Species 0.000 description 2
- 235000014653 Carica parviflora Nutrition 0.000 description 2
- 239000005749 Copper compound Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 238000005275 alloying Methods 0.000 description 2
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 150000001880 copper compounds Chemical class 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000005001 rutherford backscattering spectroscopy Methods 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052684 Cerium Inorganic materials 0.000 description 1
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229910052777 Praseodymium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002848 electrochemical method Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000000866 electrolytic etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 231100000572 poisoning Toxicity 0.000 description 1
- 230000000607 poisoning effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 238000004151 rapid thermal annealing Methods 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 238000005546 reactive sputtering Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- -1 tungsten nitride Chemical class 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/10—Electroplating with more than one layer of the same or of different metals
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/48—After-treatment of electroplated surfaces
- C25D5/50—After-treatment of electroplated surfaces by heat-treatment
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
- C25D7/123—Semiconductors first coated with a seed layer or a conductive layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76843—Barrier, adhesion or liner layers formed in openings in a dielectric
- H01L21/76849—Barrier, adhesion or liner layers formed in openings in a dielectric the layer being positioned on top of the main fill metal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76867—Barrier, adhesion or liner layers characterized by methods of formation other than PVD, CVD or deposition from a liquids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
- H01L21/76873—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for electroplating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
- H01L21/76871—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers
- H01L21/76874—Layers specifically deposited to enhance or enable the nucleation of further layers, i.e. seed layers for electroless plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76886—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53209—Conductive materials based on metals, e.g. alloys, metal silicides
- H01L23/53228—Conductive materials based on metals, e.g. alloys, metal silicides the principal metal being copper
- H01L23/53233—Copper alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Electrochemistry (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Description
障壁層TaN/Taが、物理的気相成長法によって導電性材料上に堆積される。障壁層に続いて、シード層が、銅合金ターゲットから堆積される。5原子百分率のイリジウムを含む銅ターゲットが、シード層に、約96Cu−4Ir原子百分率の銅合金濃度をもたらす。次に、業界標準技術を用いて、銅が、シード層上に電気めっきされる。めっきされた銅を有する材料が、1時間100℃の温度でアニールされる。このアニールは、大きな粒子サイズの銅をもたらし、さらに銅へのイリジウムのマイグレーションを最小に抑える。低温アニールに続いて、材料を研磨(CMP)し、研磨された銅の表面を形成する。次に、研磨材料が、1時間400℃の温度でアニールされる。標準CoWP浴化学を用いて、無電解CoWP膜をイリジウムの界接領域上に堆積させる。
障壁層TaN/Taが、物理的気相成長法によって導電性材料上に堆積される。障壁層に続いて、シード層が、銅合金ターゲットから堆積される。5%原子百分率のパラジウムを含む銅ターゲットが、シード層に、約96Cu−4Pd原子百分率の銅合金濃度をもたらす。次に、業界標準技術を用いて、銅が、シード層上に電気めっきされる。めっきされた銅を有する材料が、1時間100℃の温度でアニールされる。このアニールは、大きな粒子サイズの銅をもたらし、さらに銅へのパラジウムのマイグレーションを最小に抑える。低温アニールに続いて、材料を研磨(CMP)し、研磨された銅の表面を形成する。次に、研磨材料が、1時間400℃の温度でアニールされる。標準CoWP浴化学を用いて、無電解CoWP膜をパラジウムの界接領域上に堆積させる。
障壁層TaN/Taが、物理的気相成長法によって導電性材料上に堆積される。障壁層に続いて、シード層が、銅合金ターゲットから堆積される。5%原子百分率のロジウムを含む銅ターゲットが、シード層に、約96Cu−4Rh原子百分率の銅合金濃度をもたらす。次に、業界標準技術を用いて、銅が、シード層上に電気めっきされる。めっきされた銅を有する材料が、1時間100℃の温度でアニールされる。このアニールは、大きな粒子サイズの銅をもたらし、さらに銅へのロジウムのマイグレーションを最小に抑える。低温アニールに続いて、材料を研磨(CMP)し、研磨された銅の表面を形成する。次に、研磨材料が、1時間400℃の温度でアニールされる。標準CoWP浴化学を用いて、無電解CoWP膜をロジウムの界接領域上に堆積させる。
障壁層TaN/Taが、物理的気相成長法によって導電性材料上に堆積される。障壁層に続いて、シード層が、銅合金ターゲットから堆積される。5%原子百分率のタンタルを含む銅ターゲットが、シード層に、約96Cu−4Ta原子百分率の銅合金濃度をもたらす。次に、業界標準技術を用いて、銅が、シード層上に電気めっきされる。めっきされた銅を有する材料が、1時間100℃の温度でアニールされる。このアニールは、大きな粒子サイズの銅をもたらし、さらに銅へのタンタルのマイグレーションを最小に抑える。低温アニールに続いて、材料を研磨(CMP)し、銅の研磨面を形成する。次に、研磨材料が、1時間400℃の温度でアニールされる。標準CoWP浴化学を用いて、無電解CoWP膜をタンタルの界接領域上に堆積させる。
12:下層
14:シード層
16:主導体層
18:キャップ層
Claims (14)
- 下層上に設けられ、銅と、イリジウム、オスミウム及びレニウムからなる群から選択された1つ又はそれ以上の金属とを含むシード層と、
前記シード層と接触し、銅と、0.001原子百分率から0.6原子百分率までの前記1つ又はそれ以上の金属を含む銅導体コア領域と、
前記銅導体コア領域の上面に接触し、銅と、80原子百分率またはそれ以上の前記1つ又はそれ以上の金属からなる界面領域とを備える導電性材料。 - 前記銅導体コア領域が0.001原子百分率から0.4原子百分率までのイリジウムを含む、請求項1に記載の導電性材料。
- 前記シード層が、0.5原子百分率から4原子百分率までのイリジウムを含む、請求項1または2に記載の導電性材料。
- 前記界面領域の厚さが5Åから20Åまでである、請求項1ないし3のいずれか1項に記載の導電性材料。
- 前記導電性材料の抵抗率が2.3μΩ/cm又はそれ以下である、請求項2に記載の導電性材料。
- 誘電体材料の溝又はビア内に配置された下層と、
前記下層上に設けられ、銅と、イリジウム、オスミウム及びレニウムからなる群から選択された1つ又はそれ以上の金属とを含むシード層と、
前記シード層と接触し、銅と、0.01原子百分率から0.6原子百分率までの前記1つ又はそれ以上の金属を含む前記溝又はビア内の銅導体コアと、
前記銅導体コアの上面に接触し、銅と、80原子百分率またはそれ以上の前記1つ又はそれ以上の金属からなる界面層とを備えることを特徴とする半導体構造。 - 下層上に設けられ、銅と、0.3原子百分率から1.8原子百分率までのイリジウムとを含むシード領域と、
前記シード領域と接触し、銅と、0.04原子百分率から0.1原子百分率までのイリジウムとを含む導電性コア領域と、
前記導電性コア領域の上面に接触し、銅と、少なくとも98原子百分率のイリジウムを含む界面領域と、
を備える導電性材料。 - 導電性材料を製造する方法であって、
下層を形成するステップと、
前記下層を、銅と、イリジウム、オスミウム、及びレニウムからなる群から選択された1つ又はそれ以上の金属とを含むシード層と接触させるステップと、
銅を含む導電性層を前記シード層上に堆積させ、前記導電性層内の粒成長を引き起こし、さらに前記シード層から前記導電性層への前記1つ又はそれ以上の金属のマイグレーションを最小にするのに十分な温度で前記導電性層をアニールするステップと、
前記導電性層を研磨して、研磨された銅の表面材料を形成するステップと、
前記シード層から前記研磨された表面への前記1つ又はそれ以上の金属のマイグレーションを引き起こす温度で、前記研磨された銅の表面材料をアニールし、前記研磨された表面に、銅と80原子百分率またはそれ以上の前記1つ又はそれ以上の金属からなる界面領域を形成するとともに、前記界面領域と接触状態にある銅と0.001原子百分率から0.6原子百分率までの前記1つまたはそれ以上の金属を含む銅導体コア領域を形成するステップと、を含むことを特徴とする方法。 - 前記1つ又はそれ以上の金属がイリジウムを含み、前記シード層は、前記導電性層をアニールする前又は前記研磨された銅の表面材料をアニールする前に、1原子百分率から7原子百分率までのイリジウムを含む、請求項8に記載の方法。
- 前記導電性層をアニールするステップが、5分より長く、200℃の温度を超えないものである、請求項8に記載の方法。
- 前記研磨された銅の表面材料をアニールするステップが、30分又はそれ以上、250℃又はそれより高い温度を含む、請求項8に記載の方法。
- 前記研磨された銅の表面材料への前記1つ又はそれ以上の金属のマイグレーションにより、80原子百分率又はそれ以上のイリジウムを有する前記界面領域が形成される、請求項8に記載の方法。
- 前記イリジウムのマイグレーションにより、0.5原子百分率から4原子百分率までのイリジウムを有するシード領域が形成される、請求項9に記載の方法。
- 前記1つ又はそれ以上の金属のマイグレーションにより、5Åから20Åまでの厚さを有する前記界面領域が形成される、請求項8に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/887,087 US7119018B2 (en) | 2004-07-09 | 2004-07-09 | Copper conductor |
US10/887,087 | 2004-07-09 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006024943A JP2006024943A (ja) | 2006-01-26 |
JP2006024943A5 JP2006024943A5 (ja) | 2008-08-14 |
JP4965091B2 true JP4965091B2 (ja) | 2012-07-04 |
Family
ID=35540173
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005199284A Expired - Fee Related JP4965091B2 (ja) | 2004-07-09 | 2005-07-07 | 導電性材料、半導体構造及び導電性材料を製造する方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US7119018B2 (ja) |
JP (1) | JP4965091B2 (ja) |
CN (1) | CN100375280C (ja) |
TW (1) | TWI373095B (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7341947B2 (en) * | 2002-03-29 | 2008-03-11 | Micron Technology, Inc. | Methods of forming metal-containing films over surfaces of semiconductor substrates |
US6653236B2 (en) * | 2002-03-29 | 2003-11-25 | Micron Technology, Inc. | Methods of forming metal-containing films over surfaces of semiconductor substrates; and semiconductor constructions |
US20060163731A1 (en) * | 2005-01-21 | 2006-07-27 | Keishi Inoue | Dual damascene interconnections employing a copper alloy at the copper/barrier interface |
US7666787B2 (en) * | 2006-02-21 | 2010-02-23 | International Business Machines Corporation | Grain growth promotion layer for semiconductor interconnect structures |
US7528066B2 (en) * | 2006-03-01 | 2009-05-05 | International Business Machines Corporation | Structure and method for metal integration |
US20070269586A1 (en) * | 2006-05-17 | 2007-11-22 | 3M Innovative Properties Company | Method of making light emitting device with silicon-containing composition |
US7566653B2 (en) * | 2007-07-31 | 2009-07-28 | International Business Machines Corporation | Interconnect structure with grain growth promotion layer and method for forming the same |
US8168532B2 (en) | 2007-11-14 | 2012-05-01 | Fujitsu Limited | Method of manufacturing a multilayer interconnection structure in a semiconductor device |
KR100924865B1 (ko) * | 2007-12-27 | 2009-11-02 | 주식회사 동부하이텍 | 반도체 소자의 금속배선 형성방법 |
US7651943B2 (en) * | 2008-02-18 | 2010-01-26 | Taiwan Semicondcutor Manufacturing Company, Ltd. | Forming diffusion barriers by annealing copper alloy layers |
CN102203935A (zh) * | 2008-10-27 | 2011-09-28 | Nxp股份有限公司 | 生物兼容电极 |
JP2011009439A (ja) * | 2009-06-25 | 2011-01-13 | Renesas Electronics Corp | 半導体装置の製造方法および半導体装置 |
US8336204B2 (en) * | 2009-07-27 | 2012-12-25 | International Business Machines Corporation | Formation of alloy liner by reaction of diffusion barrier and seed layer for interconnect application |
US8409960B2 (en) * | 2011-04-08 | 2013-04-02 | Micron Technology, Inc. | Methods of patterning platinum-containing material |
US9418937B2 (en) | 2011-12-09 | 2016-08-16 | Infineon Technologies Ag | Integrated circuit and method of forming an integrated circuit |
US8736055B2 (en) | 2012-03-01 | 2014-05-27 | Lam Research Corporation | Methods and layers for metallization |
CN102891104B (zh) * | 2012-09-17 | 2015-07-29 | 上海华力微电子有限公司 | 一种提高Cu CMP效率的方法 |
US8673779B1 (en) * | 2013-02-27 | 2014-03-18 | Lam Research Corporation | Interconnect with self-formed barrier |
WO2021080726A1 (en) * | 2019-10-21 | 2021-04-29 | Applied Materials, Inc. | Method of depositing layers |
CN113363152A (zh) * | 2020-03-06 | 2021-09-07 | 长鑫存储技术有限公司 | 半导体结构及其制作方法 |
TWI796607B (zh) * | 2020-10-22 | 2023-03-21 | 龍華科技大學 | 銅銠鍍層的製備方法 |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3512225B2 (ja) * | 1994-02-28 | 2004-03-29 | 株式会社日立製作所 | 多層配線基板の製造方法 |
US5904665A (en) * | 1995-03-07 | 1999-05-18 | Vance Products Inc. | Automated prolonged slow release intrauterine insemination using self retaining intrauterine insemination catheter |
US6161012A (en) * | 1996-03-29 | 2000-12-12 | British Telecommunications Public Limited Company | Short code dialling |
JP3409831B2 (ja) * | 1997-02-14 | 2003-05-26 | 日本電信電話株式会社 | 半導体装置の配線構造の製造方法 |
US5801100A (en) * | 1997-03-07 | 1998-09-01 | Industrial Technology Research Institute | Electroless copper plating method for forming integrated circuit structures |
US5969422A (en) * | 1997-05-15 | 1999-10-19 | Advanced Micro Devices, Inc. | Plated copper interconnect structure |
US5893752A (en) * | 1997-12-22 | 1999-04-13 | Motorola, Inc. | Process for forming a semiconductor device |
US5904565A (en) * | 1997-07-17 | 1999-05-18 | Sharp Microelectronics Technology, Inc. | Low resistance contact between integrated circuit metal levels and method for same |
JPH11288936A (ja) * | 1998-04-01 | 1999-10-19 | Ricoh Co Ltd | 半導体装置の製造方法 |
US5968333A (en) * | 1998-04-07 | 1999-10-19 | Advanced Micro Devices, Inc. | Method of electroplating a copper or copper alloy interconnect |
US6181012B1 (en) * | 1998-04-27 | 2001-01-30 | International Business Machines Corporation | Copper interconnection structure incorporating a metal seed layer |
US6461675B2 (en) * | 1998-07-10 | 2002-10-08 | Cvc Products, Inc. | Method for forming a copper film on a substrate |
US6294836B1 (en) * | 1998-12-22 | 2001-09-25 | Cvc Products Inc. | Semiconductor chip interconnect barrier material and fabrication method |
JP4221100B2 (ja) * | 1999-01-13 | 2009-02-12 | エルピーダメモリ株式会社 | 半導体装置 |
JP2002075995A (ja) * | 2000-08-24 | 2002-03-15 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
US6599666B2 (en) * | 2001-03-15 | 2003-07-29 | Micron Technology, Inc. | Multi-layer, attenuated phase-shifting mask |
US7008872B2 (en) * | 2002-05-03 | 2006-03-07 | Intel Corporation | Use of conductive electrolessly deposited etch stop layers, liner layers and via plugs in interconnect structures |
US20040108217A1 (en) * | 2002-12-05 | 2004-06-10 | Dubin Valery M. | Methods for forming copper interconnect structures by co-plating of noble metals and structures formed thereby |
US6974768B1 (en) * | 2003-01-15 | 2005-12-13 | Novellus Systems, Inc. | Methods of providing an adhesion layer for adhesion of barrier and/or seed layers to dielectric films |
-
2004
- 2004-07-09 US US10/887,087 patent/US7119018B2/en not_active Expired - Lifetime
-
2005
- 2005-07-04 TW TW094122602A patent/TWI373095B/zh not_active IP Right Cessation
- 2005-07-05 CN CNB2005100820374A patent/CN100375280C/zh active Active
- 2005-07-07 JP JP2005199284A patent/JP4965091B2/ja not_active Expired - Fee Related
-
2006
- 2006-03-16 US US11/376,199 patent/US7495338B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20060157857A1 (en) | 2006-07-20 |
US7495338B2 (en) | 2009-02-24 |
TWI373095B (en) | 2012-09-21 |
US20060006070A1 (en) | 2006-01-12 |
CN1719606A (zh) | 2006-01-11 |
JP2006024943A (ja) | 2006-01-26 |
US7119018B2 (en) | 2006-10-10 |
TW200625526A (en) | 2006-07-16 |
CN100375280C (zh) | 2008-03-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4965091B2 (ja) | 導電性材料、半導体構造及び導電性材料を製造する方法 | |
US10062607B2 (en) | Methods for producing interconnects in semiconductor devices | |
US7129165B2 (en) | Method and structure to improve reliability of copper interconnects | |
US7452812B2 (en) | Method to create super secondary grain growth in narrow trenches | |
US7851357B2 (en) | Method of forming electrodeposited contacts | |
US8941240B2 (en) | Fabricating a contact rhodium structure by electroplating and electroplating composition | |
US20120161320A1 (en) | Cobalt metal barrier layers | |
US6506668B1 (en) | Utilization of annealing enhanced or repaired seed layer to improve copper interconnect reliability | |
US20100078820A1 (en) | Semiconductor device and method of manufacturing the same | |
US8169077B2 (en) | Dielectric interconnect structures and methods for forming the same | |
CN1516276A (zh) | 具有双覆盖层的半导体器件的互连及其制造方法 | |
US20060091551A1 (en) | Differentially metal doped copper damascenes | |
US7800229B2 (en) | Semiconductor device and method for manufacturing same | |
JP2002033323A (ja) | 銅相互接続部を有する半導体デバイスの製造方法 | |
TW201244005A (en) | Methods of forming at least one conductive element, methods of forming a semiconductor structure, methods of forming a memory cell and related semiconductor structures | |
TWI653367B (zh) | 具有高薄片電阻之工件上的電化學沉積 | |
KR100421913B1 (ko) | 반도체 소자의 금속 배선 형성방법 | |
KR100451767B1 (ko) | 반도체 소자의 금속 배선 형성방법 | |
KR100866110B1 (ko) | 반도체 소자의 구리배선 형성방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080630 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080630 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20090206 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110810 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110823 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110930 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111025 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111216 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120313 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120329 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150406 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |