JP4963446B2 - サーボ弁及びこれを用いたエアアクチュエータ - Google Patents

サーボ弁及びこれを用いたエアアクチュエータ Download PDF

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Publication number
JP4963446B2
JP4963446B2 JP2007182432A JP2007182432A JP4963446B2 JP 4963446 B2 JP4963446 B2 JP 4963446B2 JP 2007182432 A JP2007182432 A JP 2007182432A JP 2007182432 A JP2007182432 A JP 2007182432A JP 4963446 B2 JP4963446 B2 JP 4963446B2
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JP
Japan
Prior art keywords
valve body
air
pressure
spool
valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007182432A
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English (en)
Japanese (ja)
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JP2009019684A (ja
Inventor
智浩 小川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2007182432A priority Critical patent/JP4963446B2/ja
Priority to PCT/JP2008/062222 priority patent/WO2009008384A1/fr
Publication of JP2009019684A publication Critical patent/JP2009019684A/ja
Application granted granted Critical
Publication of JP4963446B2 publication Critical patent/JP4963446B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/0401—Valve members; Fluid interconnections therefor
    • F15B13/0402—Valve members; Fluid interconnections therefor for linearly sliding valves, e.g. spool valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/044—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors
    • F15B13/0446—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors with moving coil, e.g. voice coil
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
    • F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
    • F16K11/07—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with cylindrical slides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0603—Multiple-way valves
    • F16K31/061—Sliding valves
    • F16K31/0613—Sliding valves with cylindrical slides

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Multiple-Way Valves (AREA)
  • Actuator (AREA)
  • Magnetically Actuated Valves (AREA)
  • Servomotors (AREA)
JP2007182432A 2007-07-11 2007-07-11 サーボ弁及びこれを用いたエアアクチュエータ Active JP4963446B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007182432A JP4963446B2 (ja) 2007-07-11 2007-07-11 サーボ弁及びこれを用いたエアアクチュエータ
PCT/JP2008/062222 WO2009008384A1 (fr) 2007-07-11 2008-07-04 Soupape asservie et actionneur pneumatique l'utilisant

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007182432A JP4963446B2 (ja) 2007-07-11 2007-07-11 サーボ弁及びこれを用いたエアアクチュエータ

Publications (2)

Publication Number Publication Date
JP2009019684A JP2009019684A (ja) 2009-01-29
JP4963446B2 true JP4963446B2 (ja) 2012-06-27

Family

ID=40228555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007182432A Active JP4963446B2 (ja) 2007-07-11 2007-07-11 サーボ弁及びこれを用いたエアアクチュエータ

Country Status (2)

Country Link
JP (1) JP4963446B2 (fr)
WO (1) WO2009008384A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220186752A1 (en) * 2020-12-10 2022-06-16 Sumitomo Heavy Industries, Ltd. Spool type flow control valve and manufacturing method thereof

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5904639B2 (ja) 2012-04-27 2016-04-13 国立大学法人東京工業大学 ３ポートバルブ
JP6203605B2 (ja) * 2013-11-07 2017-09-27 三菱重工業株式会社 スプールバルブ組立体、油圧機械及び発電装置
US11803047B2 (en) * 2019-02-04 2023-10-31 Thorlabs Measurement Systems Inc. Actuator and beam steering mechanism using an actuator
JP7439423B2 (ja) * 2019-09-09 2024-02-28 Smc株式会社 サーボバルブ
JP2021110338A (ja) * 2020-01-06 2021-08-02 住友重機械工業株式会社 スプール型流量制御弁

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0235097Y2 (fr) * 1985-10-31 1990-09-21
JPH0246384A (ja) * 1988-08-04 1990-02-15 Toyoda Mach Works Ltd 電磁弁
JPH03109097U (fr) * 1990-02-17 1991-11-08
JPH11210919A (ja) * 1998-01-27 1999-08-06 Denso Corp スプール弁型油圧制御弁
JP3109097U (ja) * 2004-11-30 2005-05-12 金子産業株式会社 切換え弁装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220186752A1 (en) * 2020-12-10 2022-06-16 Sumitomo Heavy Industries, Ltd. Spool type flow control valve and manufacturing method thereof

Also Published As

Publication number Publication date
WO2009008384A1 (fr) 2009-01-15
JP2009019684A (ja) 2009-01-29

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