JP4944090B2 - 共振微小電気機械システムの共振周波数を制御する装置 - Google Patents
共振微小電気機械システムの共振周波数を制御する装置 Download PDFInfo
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- 239000003990 capacitor Substances 0.000 description 27
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
- H03H9/02409—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5726—Signal processing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
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- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Acoustics & Sound (AREA)
- Micromachines (AREA)
- Gyroscopes (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
によって与えられる固有共振周波数ωRによって特徴付けられる動きによって釣り合いの位置Y0を中心にして振動することができ、この場合、KMを、ばね12に関連した(機械的な)弾性率とし、Mを、可動部11の質量とする。
によって与えられる。
となり、変位が小さい(YG≪ΔY)と仮定すると、
となる。
で与えられる静電弾性率KEを導入することができる。
によって与えられる等価弾性率KEQ及び変換された共振周波数ωRSによって特徴付けられる。
Claims (13)
- 共振微小電気機械システムの共振周波数を制御する装置であって、
第1ボディ(10)、及び前記第1ボディに容量的に結合されるとともに較正可能な共振周波数(ωR)で前記第1ボディに対して弾性的に共振可能な第2ボディ(11)を有し、前記第2ボディと前記第1ボディとの間の相対変位(ΔY)が外側から検出可能である微小構造(2)と、
前記微小構造に結合され、前記相対変位を検出する増幅器(21)とを具える装置において、この装置がさらに、
前記微小構造と前記増幅器との間に配置された直流減結合素子(23)と、
前記微小構造に結合され、前記較正可能な共振周波数を変更するよう前記第1ボディと前記第2ボディとの間に弾性力(F ER )を加える較正回路(27,35)とを具え、
前記直流減結合素子は、前記較正回路と前記増幅器との間に配置され、
前記微小構造が、前記第1ボディと前記第2ボディとの間に配置された容量性結合素子(13a,13b,14)を具え、前記較正回路が、前記較正可能な共振周波数を変更するよう前記容量性結合素子に変位電圧(V S )を供給する変位電圧源(27)を具え、
前記較正回路はさらに、前記変位電圧源に接続された調整回路(37)を具え、前記調整回路は、較正信号(S CAL )に応答して前記変位電圧を制御することを特徴とする装置。 - 請求項1記載の装置において、前記直流減結合素子を、前記増幅器の入力部及び前記容量性結合素子に接続したことを特徴とする装置。
- 請求項1または2に記載の装置において、前記直流減結合素子を容量性としたことを特徴とする装置。
- 請求項1から3のうちのいずれか1項に記載の装置において、前記増幅器を完全差動増幅器としたことを特徴とする装置。
- 請求項4記載の装置において、同相電圧(V CM )を前記増幅器に供給する同相電圧源(26)を具えることを特徴とする装置。
- 請求項5記載の装置において、前記変位電圧が前記同相電圧に依存しないことを特徴とする装置。
- 請求項6記載の装置において、前記増幅器の前記入力部と前記同相電圧源とを選択的に接続し及び切り離す第1のスイッチ(31)と、前記容量性結合素子と前記変位電圧源とを選択的に接続し及び切り離す第2のスイッチ(35)とを具えることを特徴とする装置。
- 請求項5から7のうちのいずれか1項に記載の装置において、前記直流減結合素子を前記変位電圧源と前記同相電圧源との間に接続したことを特徴とする装置。
- 請求項1から8のうちのいずれか1項に記載の装置において、前記微小構造が、前記第1ボディ及び前記第2ボディを弾性的に接続する弾性接続素子(12)を具え、前記弾性接続素子を、予め決定された軸(Y)に沿って前記第2ボディが前記第1ボディに対して共振することができるように形成したことを特徴とする装置。
- 請求項9記載の装置において、前記弾性接続素子が、弾性係数(K M )を有し、前記共振周波数が、前記弾性係数及び前記第2ボディの質量(M)に相関されることを特徴とする装置。
- 請求項1から10のうちのいずれか1項に記載の共振周波数を制御する装置を具える共振微小電気機械システム。
- 請求項11記載の微小電気機械システムにおいて、前記共振周波数を制御する装置と協働する制御ユニット(7)を具えることを特徴とする共振微小電気機械システム。
- 共振微小電気機械システムの共振周波数を制御する方法であって、
第1ボディ、及び前記第1ボディに容量的に結合されるとともに較正可能な共振周波数で前記第1ボディに対して弾性的に共振可能な第2ボディを有し、前記第1ボディと前記第2ボディとの間に容量性結合素子が配置され、前記第2ボディと前記第1ボディとの間の相対変位が外側から検出可能である微小構造をセッティングするステップと、
前記相対変位を検出する増幅器を前記微小構造に接続するステップと、
直流減結合素子を用いて、前記増幅器を前記微小構造から直流減結合するステップを具える方法において、
前記較正可能な共振周波数を変更するよう前記容量性結合素子に変位電圧を供給する変位電圧源を具えて、前記較正可能な共振周波数を変更するよう前記第1ボディと前記第2ボディとの間に弾性力を加える較正回路を、前記微小構造に結合するステップと、
前記直流減結合素子を、前記較正回路と前記増幅器との間に配置するステップと、
前記変位電圧源に接続された調整回路を前記較正回路に設けて、前記調整回路が、較正信号に応答して前記変位電圧を制御するステップと
を具えることを特徴とする方法。
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Application Number | Priority Date | Filing Date | Title |
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EP05425185.5A EP1715580B1 (en) | 2005-03-31 | 2005-03-31 | Device for controlling the resonance frequency of a MEMS resonator |
EP05425185.5 | 2005-03-31 | ||
PCT/EP2006/061118 WO2006103247A1 (en) | 2005-03-31 | 2006-03-28 | Device for controlling the frequency of resonance of an oscillating micro-electromechanical system |
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JP4944090B2 true JP4944090B2 (ja) | 2012-05-30 |
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US (1) | US7616078B2 (ja) |
EP (1) | EP1715580B1 (ja) |
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CN (1) | CN101189793B (ja) |
WO (1) | WO2006103247A1 (ja) |
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EP1715580B1 (en) | 2018-11-28 |
US20080106351A1 (en) | 2008-05-08 |
WO2006103247A1 (en) | 2006-10-05 |
CN101189793B (zh) | 2012-05-23 |
CN101189793A (zh) | 2008-05-28 |
JP2008537658A (ja) | 2008-09-18 |
EP1715580A1 (en) | 2006-10-25 |
US7616078B2 (en) | 2009-11-10 |
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