JP4944025B2 - 集積回路基板を洗浄するのに使用される洗浄液を帯電させるためのシステムおよび方法 - Google Patents
集積回路基板を洗浄するのに使用される洗浄液を帯電させるためのシステムおよび方法 Download PDFInfo
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- JP4944025B2 JP4944025B2 JP2007520560A JP2007520560A JP4944025B2 JP 4944025 B2 JP4944025 B2 JP 4944025B2 JP 2007520560 A JP2007520560 A JP 2007520560A JP 2007520560 A JP2007520560 A JP 2007520560A JP 4944025 B2 JP4944025 B2 JP 4944025B2
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- solution
- solute
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- 238000004140 cleaning Methods 0.000 title claims description 92
- 239000000758 substrate Substances 0.000 title claims description 90
- 238000000034 method Methods 0.000 title claims description 56
- 238000007600 charging Methods 0.000 title claims description 40
- 239000012530 fluid Substances 0.000 title 1
- 239000000243 solution Substances 0.000 claims description 122
- 239000002904 solvent Substances 0.000 claims description 42
- 238000002156 mixing Methods 0.000 claims description 23
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical group [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 claims description 18
- 239000000908 ammonium hydroxide Substances 0.000 claims description 18
- 238000010790 dilution Methods 0.000 claims description 15
- 239000012895 dilution Substances 0.000 claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical group O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 239000008367 deionised water Substances 0.000 claims description 9
- 229910021641 deionized water Inorganic materials 0.000 claims description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical group N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 8
- 238000007865 diluting Methods 0.000 claims description 5
- 230000001427 coherent effect Effects 0.000 claims description 2
- 238000001914 filtration Methods 0.000 claims 1
- 230000003134 recirculating effect Effects 0.000 claims 1
- 238000012545 processing Methods 0.000 description 34
- 239000002245 particle Substances 0.000 description 33
- 239000000356 contaminant Substances 0.000 description 24
- 230000008569 process Effects 0.000 description 10
- 239000007788 liquid Substances 0.000 description 9
- 239000000203 mixture Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 239000003381 stabilizer Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000003623 enhancer Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000002203 pretreatment Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- -1 O 3 Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000006385 ozonation reaction Methods 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02041—Cleaning
- H01L21/02043—Cleaning before device manufacture, i.e. Begin-Of-Line process
- H01L21/02052—Wet cleaning only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Weting (AREA)
Description
102 溶剤貯槽
104 溶質貯槽
106 バルブ
108 バルブ
110 混合チャンバ
112 バルブ
114 第1の音響エネルギー源
116 結合チャンバ
118 帯電チャンバ
120 バルブ
122 第2の音響エネルギー源
124 結合チャンバ
126 処理チャンバ
128 IC基板
130 第2の接続
132 第1の接続
134 スーパージャ
200 非帯電の溶液
202 溶質粒子
210 帯電した溶液
212 クラスタ
214 溶質粒子
Claims (20)
- 溶質と溶剤とを含む溶液を、帯電された溶液を製造するための第1チャンバ内で帯電させる段階であって、前記帯電された溶液は溶質クラスタを含み、前記溶質クラスタの各々は前記溶質が複数の溶剤分子によって囲まれるように構成される段階と、
集積回路基板を洗浄する溶液を製造するために前記第1チャンバ内の前記帯電された溶液を再循環させる段階と、を含む帯電された溶液を製造する方法。 - 前記帯電させる段階が前記溶液を音響学的に振動させる段階を含む、請求項1に記載の方法。
- 前記振動させる段階がメガソニックエネルギーによって引き起こされる、請求項2に記載の方法。
- 前記メガソニックは3ワット/cm2以下の出力を有する、請求項3に記載の方法。
- 前記メガソニックは5ワット/cm2以上の出力を有する、請求項3に記載の方法。
- 前記溶質が水酸化アンモニウムである、請求項1に記載の方法。
- 前記帯電させる段階は前記水酸化アンモニウムが約5×10−5:1から約1×10−24:1までの間の体積比で溶剤中に存在するように前記溶液を希釈する段階を含む、請求項6に記載の方法。
- 前記水酸化アンモニウムが約1×10−6:1から約1×10−24:1までの間の体積比で前記溶剤中に存在する、請求項7に記載の方法。
- 前記水酸化アンモニウムが約1×10−8:1から約1×10−24:1までの間の体積比で前記溶剤中に存在する、請求項8に記載の方法。
- さらに帯電された溶液を製造するため前記帯電された溶液を希釈する段階をさらに含む、請求項1に記載の方法。
- 前記溶液を音響学的に振動させる前記段階の前に、前記溶液を製造するため溶剤と前記溶質とを混合する段階をさらに含む、請求項1に記載の方法。
- 前記混合する段階により、約3×10−5:1から約1×10−24:1までの間の体積比で前記溶剤中に存在する前記溶質を有する前記溶液が製造される、請求項11に記載の方法。
- 前記溶剤が脱イオン水である、請求項1に記載の方法。
- 前記溶質は、O3、HCl、H2O2、NH4OH、HFおよびNH3のうち何れか1つを含む、請求項1に記載の方法。
- 前記帯電させる段階は、前記溶液を帯電させるのに十分なエネルギーを供給する段階を含み、前記第1チャンバ内に凝集性溶液を生成する、請求項1に記載の方法。
- 前記再循環は、帯電された溶液を再循環するために配列された1つ以上のチャンバ内で実行される、請求項1に記載の方法。
- 前記チャンバの各々の内部に前記帯電された溶液の一層の希釈物を含む、請求項16に記載の方法。
- 前記溶質がアンモニアガスであり、前記溶剤が脱イオン水であり、以下の段階をさらに含む請求項1に記載の方法:
アンモニアガスを精製する段階;および
前記帯電させる段階の前に前記アンモニアガスと前記脱イオン水とを混合する段階。 - 前記精製する段階が、純度が約99.99999%になるように前記アンモニアガスを濾過する段階を含む、請求項18に記載の方法。
- 前記溶質クラスタが起電力を有する、請求項1に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/886,785 US7655094B2 (en) | 2004-07-07 | 2004-07-07 | Systems and methods for charging a cleaning solution used for cleaning integrated circuit substrates |
US10/886,785 | 2004-07-07 | ||
PCT/US2005/024366 WO2006010052A1 (en) | 2004-07-07 | 2005-07-07 | Systems and methods for charging a cleaning solution used for cleaning integrated circuit substrates |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008506266A JP2008506266A (ja) | 2008-02-28 |
JP4944025B2 true JP4944025B2 (ja) | 2012-05-30 |
Family
ID=35350231
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007520560A Expired - Fee Related JP4944025B2 (ja) | 2004-07-07 | 2005-07-07 | 集積回路基板を洗浄するのに使用される洗浄液を帯電させるためのシステムおよび方法 |
Country Status (5)
Country | Link |
---|---|
US (4) | US7655094B2 (ja) |
EP (1) | EP1774578A1 (ja) |
JP (1) | JP4944025B2 (ja) |
KR (1) | KR101194138B1 (ja) |
WO (1) | WO2006010052A1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7655094B2 (en) | 2004-07-07 | 2010-02-02 | Nano Om, Llc | Systems and methods for charging a cleaning solution used for cleaning integrated circuit substrates |
US7731800B2 (en) | 2004-07-07 | 2010-06-08 | Nano Om, Llc | Systems and methods for single integrated substrate cleaning and rinsing |
US7863201B2 (en) * | 2008-03-24 | 2011-01-04 | Samsung Electronics Co., Ltd. | Methods of forming field effect transistors having silicided source/drain contacts with low contact resistance |
US8138482B2 (en) * | 2008-05-23 | 2012-03-20 | Nano Green Technology, Inc. | Evaluating a cleaning solution using UV absorbance |
US9005464B2 (en) | 2011-06-27 | 2015-04-14 | International Business Machines Corporation | Tool for manufacturing semiconductor structures and method of use |
US9327322B2 (en) * | 2012-06-03 | 2016-05-03 | Tokyo Electron Limited | Sonic energy to generate active species for surface preparation, cleaning, and etching |
CN114308909B (zh) * | 2021-12-27 | 2022-11-29 | 深圳市世纪众云科技有限公司 | 一种集成电路加工用清洁设备 |
Citations (5)
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JPH08187474A (ja) * | 1995-01-06 | 1996-07-23 | Tadahiro Omi | 洗浄方法 |
WO2000024687A1 (en) * | 1998-10-26 | 2000-05-04 | Yieldup International | Method and apparatus for cleaning objects using dilute ammonium bearing solutions |
JP2002219467A (ja) * | 2001-01-25 | 2002-08-06 | Daimo:Kk | 水処理装置 |
JP2002367949A (ja) * | 2001-06-04 | 2002-12-20 | Memc Japan Ltd | シリコンウェハの洗浄方法 |
JP2002543976A (ja) * | 1999-05-13 | 2002-12-24 | エフエスアイ インターナショナル インコーポレイテッド | 超希薄洗浄液を使用して、ミクロ電子基材を洗浄する方法 |
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-
2004
- 2004-07-07 US US10/886,785 patent/US7655094B2/en active Active
-
2005
- 2005-07-07 EP EP05771351A patent/EP1774578A1/en not_active Withdrawn
- 2005-07-07 JP JP2007520560A patent/JP4944025B2/ja not_active Expired - Fee Related
- 2005-07-07 WO PCT/US2005/024366 patent/WO2006010052A1/en active Application Filing
- 2005-07-07 KR KR1020077002948A patent/KR101194138B1/ko not_active IP Right Cessation
-
2009
- 2009-07-15 US US12/503,302 patent/US20090272411A1/en not_active Abandoned
- 2009-07-15 US US12/503,283 patent/US8377217B2/en active Active
- 2009-07-15 US US12/503,262 patent/US7914624B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH08187474A (ja) * | 1995-01-06 | 1996-07-23 | Tadahiro Omi | 洗浄方法 |
WO2000024687A1 (en) * | 1998-10-26 | 2000-05-04 | Yieldup International | Method and apparatus for cleaning objects using dilute ammonium bearing solutions |
JP2002543976A (ja) * | 1999-05-13 | 2002-12-24 | エフエスアイ インターナショナル インコーポレイテッド | 超希薄洗浄液を使用して、ミクロ電子基材を洗浄する方法 |
JP2002219467A (ja) * | 2001-01-25 | 2002-08-06 | Daimo:Kk | 水処理装置 |
JP2002367949A (ja) * | 2001-06-04 | 2002-12-20 | Memc Japan Ltd | シリコンウェハの洗浄方法 |
Also Published As
Publication number | Publication date |
---|---|
US20090272411A1 (en) | 2009-11-05 |
KR20070048717A (ko) | 2007-05-09 |
US20060019849A1 (en) | 2006-01-26 |
US20100179085A1 (en) | 2010-07-15 |
US8377217B2 (en) | 2013-02-19 |
KR101194138B1 (ko) | 2012-10-23 |
US7655094B2 (en) | 2010-02-02 |
EP1774578A1 (en) | 2007-04-18 |
US20090272401A1 (en) | 2009-11-05 |
JP2008506266A (ja) | 2008-02-28 |
WO2006010052A1 (en) | 2006-01-26 |
US7914624B2 (en) | 2011-03-29 |
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