JP4937722B2 - 光プリフォームを製造するための装置および方法 - Google Patents
光プリフォームを製造するための装置および方法 Download PDFInfo
- Publication number
- JP4937722B2 JP4937722B2 JP2006335348A JP2006335348A JP4937722B2 JP 4937722 B2 JP4937722 B2 JP 4937722B2 JP 2006335348 A JP2006335348 A JP 2006335348A JP 2006335348 A JP2006335348 A JP 2006335348A JP 4937722 B2 JP4937722 B2 JP 4937722B2
- Authority
- JP
- Japan
- Prior art keywords
- tube
- discharge
- substrate
- supply
- substrate tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 9
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 7
- 238000000034 method Methods 0.000 title claims description 19
- 239000000758 substrate Substances 0.000 claims abstract description 88
- 238000007496 glass forming Methods 0.000 claims abstract description 9
- 239000002243 precursor Substances 0.000 claims abstract description 9
- 239000000470 constituent Substances 0.000 claims abstract description 8
- 238000007599 discharging Methods 0.000 claims abstract description 3
- 238000003780 insertion Methods 0.000 claims description 57
- 230000037431 insertion Effects 0.000 claims description 57
- 239000007787 solid Substances 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 8
- 239000011521 glass Substances 0.000 claims description 8
- 238000005019 vapor deposition process Methods 0.000 claims description 6
- 230000007704 transition Effects 0.000 claims description 4
- 238000007790 scraping Methods 0.000 claims description 3
- 238000005137 deposition process Methods 0.000 abstract description 7
- 239000010453 quartz Substances 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000000151 deposition Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000003365 glass fiber Substances 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 210000000744 eyelid Anatomy 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
- C03B37/01846—Means for after-treatment or catching of worked reactant gases
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
- Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL1030749A NL1030749C2 (nl) | 2005-12-22 | 2005-12-22 | Inrichting en werkwijze voor het vervaardigen van een optische voorvorm. |
| NL1030749 | 2005-12-22 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007169149A JP2007169149A (ja) | 2007-07-05 |
| JP2007169149A5 JP2007169149A5 (enExample) | 2010-01-28 |
| JP4937722B2 true JP4937722B2 (ja) | 2012-05-23 |
Family
ID=36809303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006335348A Active JP4937722B2 (ja) | 2005-12-22 | 2006-12-13 | 光プリフォームを製造するための装置および方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US7854148B2 (enExample) |
| EP (1) | EP1801081B1 (enExample) |
| JP (1) | JP4937722B2 (enExample) |
| KR (1) | KR101248270B1 (enExample) |
| CN (1) | CN1986468B (enExample) |
| AT (1) | ATE465135T1 (enExample) |
| DE (1) | DE602006013774D1 (enExample) |
| NL (1) | NL1030749C2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL1033763C2 (nl) * | 2007-04-26 | 2008-10-28 | Draka Comteq Bv | Inrichting en werkwijze voor het vervaardigen van een optische voorvorm. |
| NL1034059C2 (nl) * | 2007-06-29 | 2008-12-30 | Draka Comteq Bv | Werkwijze voor het vervaardigen van een voorvorm voor optische vezels onder toepassing van een dampdepositieproces. |
| NL2006962C2 (nl) | 2011-06-17 | 2012-12-18 | Draka Comteq Bv | Inrichting en werkwijze voor het vervaardigen van een optische voorvorm. |
| NL2010724C2 (en) | 2013-04-26 | 2014-10-29 | Draka Comteq Bv | A pcvd method for manufacturing a primary preform for optical fibers. |
| NL2011077C2 (en) | 2013-07-01 | 2015-01-05 | Draka Comteq Bv | A method for manufacturing a precursor for a primary preform for optical fibres by means of an internal plasma chemical vapour deposition (pcvd) process. |
| NL2012866B1 (en) * | 2014-05-22 | 2016-03-15 | Draka Comteq Bv | A method and a device for manufacturing an optical preform by means of an internal vapour deposition process, as well as corresponding substrate tube assembly. |
| CN107879618A (zh) * | 2017-11-10 | 2018-04-06 | 长飞光纤光缆股份有限公司 | 一种pcvd沉积过程中防堵稳压的方法 |
| DE102018100443A1 (de) * | 2018-01-10 | 2019-07-11 | Schott Ag | Verfahren und Vorrichtung zur Herstellung von Glasvorprodukten und von Glasprodukten |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5851894B2 (ja) * | 1979-06-29 | 1983-11-18 | 富士通株式会社 | 光フアイバ用母材の製造装置 |
| US4278459A (en) * | 1980-03-03 | 1981-07-14 | Western Electric Company, Inc. | Method and apparatus for exhausting optical fiber preform tubes |
| JPS5845892B2 (ja) * | 1980-06-23 | 1983-10-13 | 大阪真空化学株式会社 | スパツタ蒸着装置 |
| US4389229A (en) * | 1981-10-01 | 1983-06-21 | Western Electric Co., Inc. | Methods and apparatus for fabricating a lightguide preform |
| CA1220853A (en) * | 1983-05-16 | 1987-04-21 | Edward Gershenson | Disk drive control apparatus with hierarchical control |
| JPS60186428A (ja) * | 1984-03-01 | 1985-09-21 | Furukawa Electric Co Ltd:The | 光フアイバ用プリフオ−ム形成方法 |
| US4826288A (en) * | 1987-04-09 | 1989-05-02 | Polaroid Corporation, Patent Department | Method for fabricating optical fibers having cores with high rare earth content |
| FI78891C (fi) | 1987-09-11 | 1989-10-10 | Nokia Oy Ab | Anordning foer avlaegsnande av pulverformigt material som samlas i den roerformiga bakdelen vid tillverkning av en optisk fibers aemne. |
| US6192713B1 (en) * | 1998-06-30 | 2001-02-27 | Sdl, Inc. | Apparatus for the manufacture of glass preforms |
| US6430967B1 (en) * | 1999-10-26 | 2002-08-13 | Fitel Usa Corp. | Pressure monitoring system using disposable seals |
| JP2002114534A (ja) * | 2000-09-29 | 2002-04-16 | Hitachi Cable Ltd | 光ファイバプリフォームの製造方法及び製造装置 |
| JP2002154839A (ja) | 2000-11-15 | 2002-05-28 | Shin Etsu Chem Co Ltd | 光ファイバ用石英プリフォームの製造方法 |
| US7003984B2 (en) * | 2001-04-30 | 2006-02-28 | Verrillon, Inc. | Hybrid manufacturing process for optical fibers |
| US6732551B2 (en) * | 2001-05-04 | 2004-05-11 | Corning Incorporated | Method and feedstock for making silica |
| US6901775B2 (en) * | 2001-09-21 | 2005-06-07 | Corning Incorporated | Method and apparatus for providing a uniform coating thickness along an axial direction within a substrate tube |
| JP2004083353A (ja) * | 2002-08-28 | 2004-03-18 | Sumitomo Electric Ind Ltd | ガラス部材の製造方法及び装置 |
| KR100526534B1 (ko) * | 2003-11-27 | 2005-11-08 | 삼성전자주식회사 | 광섬유 모재 제작 방법과 장치 |
| KR100579340B1 (ko) * | 2004-03-19 | 2006-05-12 | 엘에스전선 주식회사 | Mcvd 공법의 수트 제거방법 및 그 장치 |
| KR100774952B1 (ko) | 2005-04-14 | 2007-11-09 | 엘지전자 주식회사 | 플라즈마 디스플레이 장치, 플라즈마 디스플레이 패널 및그의 제조방법 |
-
2005
- 2005-12-22 NL NL1030749A patent/NL1030749C2/nl active Search and Examination
-
2006
- 2006-11-29 AT AT06077130T patent/ATE465135T1/de not_active IP Right Cessation
- 2006-11-29 EP EP06077130A patent/EP1801081B1/en active Active
- 2006-11-29 DE DE602006013774T patent/DE602006013774D1/de active Active
- 2006-12-13 JP JP2006335348A patent/JP4937722B2/ja active Active
- 2006-12-19 US US11/612,936 patent/US7854148B2/en active Active
- 2006-12-21 KR KR1020060131976A patent/KR101248270B1/ko active Active
- 2006-12-21 CN CN2006101692518A patent/CN1986468B/zh active Active
-
2010
- 2010-09-28 US US12/892,395 patent/US8499585B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| KR20070066956A (ko) | 2007-06-27 |
| EP1801081B1 (en) | 2010-04-21 |
| US7854148B2 (en) | 2010-12-21 |
| KR101248270B1 (ko) | 2013-03-27 |
| CN1986468B (zh) | 2011-05-04 |
| NL1030749C2 (nl) | 2007-06-25 |
| US20110023552A1 (en) | 2011-02-03 |
| ATE465135T1 (de) | 2010-05-15 |
| CN1986468A (zh) | 2007-06-27 |
| DE602006013774D1 (de) | 2010-06-02 |
| US8499585B2 (en) | 2013-08-06 |
| US20070158864A1 (en) | 2007-07-12 |
| EP1801081A1 (en) | 2007-06-27 |
| JP2007169149A (ja) | 2007-07-05 |
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