JP4931992B2 - 磁気弾性合金層を含む測定装置及び同合金層の形成方法 - Google Patents
磁気弾性合金層を含む測定装置及び同合金層の形成方法 Download PDFInfo
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- JP4931992B2 JP4931992B2 JP2009500328A JP2009500328A JP4931992B2 JP 4931992 B2 JP4931992 B2 JP 4931992B2 JP 2009500328 A JP2009500328 A JP 2009500328A JP 2009500328 A JP2009500328 A JP 2009500328A JP 4931992 B2 JP4931992 B2 JP 4931992B2
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- 229910045601 alloy Inorganic materials 0.000 title claims description 57
- 239000000956 alloy Substances 0.000 title claims description 57
- 238000000034 method Methods 0.000 title claims description 36
- 230000005291 magnetic effect Effects 0.000 claims description 40
- 238000010438 heat treatment Methods 0.000 claims description 36
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 34
- 239000002245 particle Substances 0.000 claims description 30
- 238000002425 crystallisation Methods 0.000 claims description 28
- 230000008025 crystallization Effects 0.000 claims description 28
- 230000035699 permeability Effects 0.000 claims description 25
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 23
- 229910052742 iron Inorganic materials 0.000 claims description 19
- 230000006698 induction Effects 0.000 claims description 12
- 238000005275 alloying Methods 0.000 claims description 11
- 229910052759 nickel Inorganic materials 0.000 claims description 11
- 239000002159 nanocrystal Substances 0.000 claims description 9
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- 238000009713 electroplating Methods 0.000 claims description 5
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- 238000005259 measurement Methods 0.000 description 15
- 230000009021 linear effect Effects 0.000 description 13
- 230000005415 magnetization Effects 0.000 description 13
- 229910003271 Ni-Fe Inorganic materials 0.000 description 11
- 230000005381 magnetic domain Effects 0.000 description 10
- 239000000203 mixture Substances 0.000 description 7
- 239000002707 nanocrystalline material Substances 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 229910017052 cobalt Inorganic materials 0.000 description 4
- 239000010941 cobalt Substances 0.000 description 4
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910001004 magnetic alloy Inorganic materials 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000011282 treatment Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910001374 Invar Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- SNIOPGDIGTZGOP-UHFFFAOYSA-N Nitroglycerin Chemical compound [O-][N+](=O)OCC(O[N+]([O-])=O)CO[N+]([O-])=O SNIOPGDIGTZGOP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 230000006355 external stress Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000009347 mechanical transmission Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
- G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
- G01L3/101—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means
- G01L3/102—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means involving magnetostrictive means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L3/00—Measuring torque, work, mechanical power, or mechanical efficiency, in general
- G01L3/02—Rotary-transmission dynamometers
- G01L3/04—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft
- G01L3/10—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating
- G01L3/101—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means
- G01L3/102—Rotary-transmission dynamometers wherein the torque-transmitting element comprises a torsionally-flexible shaft involving electric or magnetic means for indicating involving magnetic or electromagnetic means involving magnetostrictive means
- G01L3/103—Details about the magnetic material used
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N35/00—Magnetostrictive devices
- H10N35/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N35/00—Magnetostrictive devices
- H10N35/101—Magnetostrictive devices with mechanical input and electrical output, e.g. generators, sensors
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electroplating Methods And Accessories (AREA)
- Heat Treatment Of Articles (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Description
本発明の目的は、層を荷重支持部材の上に形成する方法を提供することにあり、本方法によって、上述の要求の内の一つ以上の要求に関して、かつ荷重支持部材の重要な特性を大きく変えることなく、層に生じる応力を測定する改良型装置を製造することが可能になる。
この目的は請求項1記載の方法によって達成される。
この目的は、請求項12記載の測定装置によって達成される。
相対透磁率:
この式では、最大磁場(maximum magnetizing field)
は1500A/mであり、そして磁気誘導
は、荷重が作用しない層に関して測定される。
差分相対透磁率(differential relative permeability):
最大のμdiffは、磁化曲線に沿った最大の差分相対透磁率である。
は最大磁場である。
は
での磁気誘導である。
μ0は自由空間透磁率である。
HC、すなわち保磁力は、磁気誘導Bを飽和磁化の後にゼロに戻すために必要な逆向きの磁場である。
Vf icは、結晶間物質の体積割合である。
従って、1500A/m未満の最大磁場に関して、μrに対する必要条件は、μr<500、そしてμdiffに対する必要条件は、μdiff<2μrと測定された。μr及びμdiffに対するこれらの必要条件が満たされる場合、磁化曲線はほぼ直線になり、これは、誘導磁界によって磁気飽和を起こさないことを意味する。この状態は、この状態によってこのような層を有するセンサを作製することが可能になり、このセンサが荷重を関数とする線形出力信号を有するので有利である。
Claims (21)
- 層(3)を荷重支持部材(1)の上に形成する方法であって、
この層は、荷重支持部材に加わる力によって生じる応力を測定するために設けられ、前記方法では:
50nmよりも小さい平均粒子サイズを有する磁気弾性合金ナノ結晶層を部材の表面に形成し;そして
層を、合金の結晶化が生じ、そして平均粒子サイズが100nm〜10000nmの範囲になるまで、層の融点未満の温度で熱処理する、方法。 - 前記層の平均粒子サイズは、100nm〜5000nmの範囲である、請求項1記載の方法。
- 層を、300℃〜1000℃の範囲の温度で熱処理する、請求項1又は2記載の方法。
- 合金は、23〜65wt%(重量%)の範囲の鉄を含む、請求項1乃至3のいずれか一項に記載の方法。
- 合金は、35〜77wt%の範囲のニッケルを含む、請求項4記載の方法。
- 合金は、10wt%未満の一つ以上の他の合金化元素を含む、請求項4又は5記載の方法。
- 熱処理は誘導加熱により行なわれる、請求項1乃至7のいずれか一項に記載の方法。
- 前記層は部材の上に電気メッキにより形成される、請求項1乃至8のいずれか一項に記載の方法。
- 層は、30秒未満の期間に亘って熱処理される、請求項1乃至9のいずれか一項に記載の方法。
- 層は、荷重支持部材に加わるトルクによって生じる応力を測定するために設けられる、請求項1乃至10のいずれか一項に記載の方法。
- 荷重支持部材(1)の上に形成される磁気弾性合金層(3)を含む測定装置であって、
この層は、荷重支持部材に加わる力によって生じる応力を測定するために設けられ、
前記層の平均粒子サイズが100nm〜10000nmの範囲であり、
50nmよりも小さい平均粒子サイズを有する磁気弾性合金ナノ結晶層を前記荷重支持部材の表面に形成し、この層を、層の融点未満の温度で、合金の結晶化が生じるまで熱処理することにより前記磁気弾性合金層を得ることを特徴とする、測定装置。 - 前記層の平均粒子サイズは、100nm〜5000nmの範囲である、請求項12記載の装置。
- 合金は、23〜65wt%の範囲の鉄を含む、請求項12又は13記載の装置。
- 合金は、35〜77wt%の範囲のニッケルを含む、請求項14記載の装置。
- 合金は、10wt%未満の他の合金化元素を含む、請求項14又は15記載の装置。
- 測定装置はトルクセンサである、請求項12乃至17のいずれか一項に記載の装置。
- 測定装置は力センサである、請求項12乃至17のいずれか一項に記載の装置。
- トルクセンサを作製するための請求項1乃至11のいずれか一項に記載の方法を使用してトルクセンサを作成する方法。
- 力センサを作製するための請求項1乃至11のいずれか一項に記載の方法を使用して力センサを作成する方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0600543A SE529789C8 (sv) | 2006-03-10 | 2006-03-10 | Mätanordning omfattande ett skikt av en magnetoelastisk legering och förfarande för tillverkning av mätanordningen |
SE0600543-3 | 2006-03-10 | ||
PCT/SE2007/050088 WO2007106024A1 (en) | 2006-03-10 | 2007-02-14 | A measuring device including a layer of a magnetoelastic alloy and a method for production thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009529692A JP2009529692A (ja) | 2009-08-20 |
JP4931992B2 true JP4931992B2 (ja) | 2012-05-16 |
Family
ID=38509762
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009500328A Active JP4931992B2 (ja) | 2006-03-10 | 2007-02-14 | 磁気弾性合金層を含む測定装置及び同合金層の形成方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8316724B2 (ja) |
EP (1) | EP2018530B1 (ja) |
JP (1) | JP4931992B2 (ja) |
CN (1) | CN101416036B (ja) |
SE (1) | SE529789C8 (ja) |
WO (1) | WO2007106024A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2169371B1 (en) * | 2008-09-25 | 2011-11-09 | Abb Ab | A sensor for measuring stresses including a layer of a magnetoelastic material |
CN103439034B (zh) * | 2013-09-09 | 2015-05-13 | 淮海工学院 | 一种多功能测力传感器 |
DE102015202240B3 (de) * | 2015-02-09 | 2016-02-25 | Schaeffler Technologies AG & Co. KG | Anordnung zur Messung einer Kraft oder eines Momentes mit mindestens drei Magnetfeldsensoren |
EP3343191B1 (en) * | 2015-10-01 | 2021-08-25 | Yamaha Hatsudoki Kabushiki Kaisha | Magnetostrictive sensor |
CN105466998B (zh) * | 2015-12-31 | 2018-11-06 | 爱德森(厦门)电子有限公司 | 一种利用变频变磁场激励测试铁磁材料硬度特性的方法 |
US20190178683A1 (en) | 2016-05-17 | 2019-06-13 | Kongsberg Inc. | System, Method And Object For High Accuracy Magnetic Position Sensing |
EP3551982A4 (en) | 2016-12-12 | 2020-08-05 | Kongsberg Inc. | DOUBLE BAND MAGNETOELASTIC TORQUE SENSOR |
US11927499B2 (en) * | 2018-06-21 | 2024-03-12 | Trafag Ag | Load measuring arrangement, method for producing said arrangement and load measuring method which can be carried out with said arrangement |
DE102019005859A1 (de) * | 2019-08-20 | 2021-02-25 | Methode Electronics Malta Ltd. | Verfahren zur Messung eines auf einen magnetoelastischen Körper aufgebrachten Drehmoments |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4896544A (en) * | 1986-12-05 | 1990-01-30 | Mag Dev Inc. | Magnetoelastic torque transducer |
KR910002375B1 (ko) * | 1987-07-14 | 1991-04-20 | 히다찌 긴조꾸 가부시끼가이샤 | 자성코어 및 그 제조방법 |
DE3814348A1 (de) * | 1988-04-28 | 1989-11-09 | Philips Patentverwaltung | Verfahren zur herstellung einer polykristallinen halbleitenden widerstandsschicht aus silicium auf einem siliciumtraeger |
US5142227A (en) * | 1990-06-04 | 1992-08-25 | Allied-Signal Inc. | Method and apparatus for measuring strain within a ferromagnetic material by sensing change in coercive field |
US5324571A (en) * | 1992-02-05 | 1994-06-28 | Konica Corporation | Magnetic recording medium comprising a support and a plurality of layers in which the magnetic layer has a specified plastic deformation |
DE4220226A1 (de) * | 1992-06-20 | 1993-12-23 | Bosch Gmbh Robert | Magnetostrikiver Wandler |
US5585574A (en) * | 1993-02-02 | 1996-12-17 | Mitsubishi Materials Corporation | Shaft having a magnetostrictive torque sensor and a method for making same |
JPH0815060A (ja) * | 1994-06-28 | 1996-01-19 | Mitsubishi Materials Corp | トルクセンサ用磁歪膜およびその製造方法 |
EP0980591A2 (en) * | 1998-03-05 | 2000-02-23 | Koninklijke Philips Electronics N.V. | Magnetostrictive stress sensor |
JPH11258077A (ja) * | 1998-03-10 | 1999-09-24 | Toyota Autom Loom Works Ltd | トルクセンサ |
US6258185B1 (en) * | 1999-05-25 | 2001-07-10 | Bechtel Bwxt Idaho, Llc | Methods of forming steel |
JP4337209B2 (ja) * | 2000-02-22 | 2009-09-30 | 日立金属株式会社 | 永久磁石薄膜およびその製造方法 |
JP2002107241A (ja) * | 2000-09-28 | 2002-04-10 | Hitachi Metals Ltd | トルク伝達軸およびそれを用いたトルクセンサ |
GB0107182D0 (en) * | 2001-03-22 | 2001-05-09 | Secr Defence | Stress sensor |
US7482065B2 (en) * | 2003-05-23 | 2009-01-27 | The Nanosteel Company, Inc. | Layered metallic material formed from iron based glass alloys |
-
2006
- 2006-03-10 SE SE0600543A patent/SE529789C8/sv unknown
-
2007
- 2007-02-14 WO PCT/SE2007/050088 patent/WO2007106024A1/en active Application Filing
- 2007-02-14 EP EP07709481.1A patent/EP2018530B1/en active Active
- 2007-02-14 US US12/282,352 patent/US8316724B2/en active Active
- 2007-02-14 CN CN200780008135.0A patent/CN101416036B/zh active Active
- 2007-02-14 JP JP2009500328A patent/JP4931992B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US8316724B2 (en) | 2012-11-27 |
SE0600543L (sv) | 2007-09-11 |
SE529789C8 (sv) | 2007-12-27 |
SE529789C2 (sv) | 2007-11-27 |
WO2007106024A1 (en) | 2007-09-20 |
EP2018530A1 (en) | 2009-01-28 |
CN101416036A (zh) | 2009-04-22 |
JP2009529692A (ja) | 2009-08-20 |
CN101416036B (zh) | 2010-12-01 |
US20090249893A1 (en) | 2009-10-08 |
EP2018530B1 (en) | 2013-06-19 |
EP2018530A4 (en) | 2011-06-29 |
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