JP4920494B2 - 試料作成方法 - Google Patents
試料作成方法 Download PDFInfo
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- JP4920494B2 JP4920494B2 JP2007139076A JP2007139076A JP4920494B2 JP 4920494 B2 JP4920494 B2 JP 4920494B2 JP 2007139076 A JP2007139076 A JP 2007139076A JP 2007139076 A JP2007139076 A JP 2007139076A JP 4920494 B2 JP4920494 B2 JP 4920494B2
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- JP
- Japan
- Prior art keywords
- ion beam
- gas cluster
- cluster ion
- removal
- residual gallium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005464 sample preparation method Methods 0.000 title 1
- 238000010884 ion-beam technique Methods 0.000 claims description 50
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 27
- 229910052733 gallium Inorganic materials 0.000 claims description 27
- 239000007789 gas Substances 0.000 claims description 26
- 239000004065 semiconductor Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 7
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 6
- 229910001882 dioxygen Inorganic materials 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 4
- 239000002019 doping agent Substances 0.000 description 25
- 239000000523 sample Substances 0.000 description 20
- 238000005259 measurement Methods 0.000 description 16
- 150000002500 ions Chemical class 0.000 description 14
- 239000010408 film Substances 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 238000001093 holography Methods 0.000 description 10
- 238000010894 electron beam technology Methods 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 5
- 230000001133 acceleration Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000002950 deficient Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000008119 colloidal silica Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 238000005430 electron energy loss spectroscopy Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Images
Description
X. D. Wang, C. L. Liu, A. Thean, E. Duda, R. Liu, Q. Xie, S. Lu, A. Barr, T. White, B. Y. Nguyen, M. Orlowski, J. Vac. Sci. Technol. B22 373-376(2004) 上田修、応用物理 72 539-549(2003) 近藤芳正、O plus E 25 899-903(2003)
2 残留ガリウム層を除去した薄片
3 残留ガリウム層
4 酸化膜
5 酸素ガスクラスターイオンビーム
6 集束イオンビーム装置で切り出した薄片
Claims (4)
- 半導体デバイスから、集束イオンビーム装置を用いて、ガリウムの集束イオンビームにより所望の断面を含む薄片を切り出す工程と、
該切り出した薄片の残留ガリウム除去をガスクラスターイオンビームで行う工程と、
残留ガリウム除去を施した前記薄片の表面に酸素ガスクラスターイオンビームを照射し、前記薄片の表面に表面酸化層を形成する工程と、を有する試料作成方法。 - 前記薄片の残留ガリウム除去は、前記薄片の両面に対し行なう請求項1記載の試料作成方法。
- 前記残留ガリウム除去後、前記ガスクラスターイオンビームを用いて更に薄片化を行なう請求項2記載の試料作成方法。
- 前記残留ガリウム除去は反応性ガスクラスターイオンビームで行い、前記残留ガリウム除去後の更なる薄片化は、希ガスクラスターイオンビームで行う請求項3記載の試料作成方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2007139076A JP4920494B2 (ja) | 2007-05-25 | 2007-05-25 | 試料作成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007139076A JP4920494B2 (ja) | 2007-05-25 | 2007-05-25 | 試料作成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008292351A JP2008292351A (ja) | 2008-12-04 |
JP4920494B2 true JP4920494B2 (ja) | 2012-04-18 |
Family
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JP2007139076A Active JP4920494B2 (ja) | 2007-05-25 | 2007-05-25 | 試料作成方法 |
Country Status (1)
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JP (1) | JP4920494B2 (ja) |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000230891A (ja) * | 1999-02-09 | 2000-08-22 | Fuji Electric Co Ltd | 透過型電子顕微鏡用試料の作製方法 |
US6375790B1 (en) * | 1999-07-19 | 2002-04-23 | Epion Corporation | Adaptive GCIB for smoothing surfaces |
JP2002277364A (ja) * | 2001-03-19 | 2002-09-25 | Seiko Epson Corp | 薄片試料加工方法及び薄片試料の作製方法 |
JP2002298774A (ja) * | 2001-03-29 | 2002-10-11 | Toshiba Corp | 電子顕微鏡 |
JP4335497B2 (ja) * | 2002-07-12 | 2009-09-30 | エスアイアイ・ナノテクノロジー株式会社 | イオンビーム装置およびイオンビーム加工方法 |
JP2004191358A (ja) * | 2002-11-27 | 2004-07-08 | Seiko Instruments Inc | 複合荷電粒子ビームによる試料作製方法および装置 |
TWI233154B (en) * | 2002-12-06 | 2005-05-21 | Soitec Silicon On Insulator | Method for recycling a substrate |
JP2004226079A (ja) * | 2003-01-20 | 2004-08-12 | Seiko Instruments Inc | 表面あるいは断面加工観察方法及びその装置 |
JP3768197B2 (ja) * | 2003-02-28 | 2006-04-19 | 株式会社東芝 | 透過型電子顕微鏡観察試料の作製方法 |
JP3816484B2 (ja) * | 2003-12-15 | 2006-08-30 | 日本航空電子工業株式会社 | ドライエッチング方法 |
JP2006093445A (ja) * | 2004-09-24 | 2006-04-06 | Toshiba Corp | 酸化膜形成方法 |
JP4486462B2 (ja) * | 2004-09-29 | 2010-06-23 | 日本電子株式会社 | 試料作製方法および試料作製装置 |
JP4699168B2 (ja) * | 2005-10-17 | 2011-06-08 | ルネサスエレクトロニクス株式会社 | 電子顕微鏡用試料の作製方法 |
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2007
- 2007-05-25 JP JP2007139076A patent/JP4920494B2/ja active Active
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JP2008292351A (ja) | 2008-12-04 |
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