JP4919907B2 - 除電装置 - Google Patents
除電装置 Download PDFInfo
- Publication number
- JP4919907B2 JP4919907B2 JP2007238453A JP2007238453A JP4919907B2 JP 4919907 B2 JP4919907 B2 JP 4919907B2 JP 2007238453 A JP2007238453 A JP 2007238453A JP 2007238453 A JP2007238453 A JP 2007238453A JP 4919907 B2 JP4919907 B2 JP 4919907B2
- Authority
- JP
- Japan
- Prior art keywords
- air
- gas
- air supply
- static eliminator
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003068 static effect Effects 0.000 title claims description 243
- 238000007664 blowing Methods 0.000 claims description 240
- 150000002500 ions Chemical class 0.000 claims description 83
- 230000008030 elimination Effects 0.000 claims description 28
- 238000003379 elimination reaction Methods 0.000 claims description 28
- 239000011247 coating layer Substances 0.000 claims 1
- 238000006386 neutralization reaction Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 195
- 230000008878 coupling Effects 0.000 description 26
- 238000010168 coupling process Methods 0.000 description 26
- 238000005859 coupling reaction Methods 0.000 description 26
- 238000010586 diagram Methods 0.000 description 16
- 238000004891 communication Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 14
- 239000012535 impurity Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 13
- 230000007246 mechanism Effects 0.000 description 10
- 238000003780 insertion Methods 0.000 description 9
- 230000037431 insertion Effects 0.000 description 9
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 230000002093 peripheral effect Effects 0.000 description 7
- 238000009434 installation Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 239000000470 constituent Substances 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 210000000078 claw Anatomy 0.000 description 2
- 230000037427 ion transport Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Images
Landscapes
- Elimination Of Static Electricity (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007238453A JP4919907B2 (ja) | 2007-09-13 | 2007-09-13 | 除電装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007238453A JP4919907B2 (ja) | 2007-09-13 | 2007-09-13 | 除電装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009070706A JP2009070706A (ja) | 2009-04-02 |
| JP2009070706A5 JP2009070706A5 (enExample) | 2010-05-06 |
| JP4919907B2 true JP4919907B2 (ja) | 2012-04-18 |
Family
ID=40606740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007238453A Expired - Fee Related JP4919907B2 (ja) | 2007-09-13 | 2007-09-13 | 除電装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4919907B2 (enExample) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001035686A (ja) * | 1999-07-15 | 2001-02-09 | Kasuga Electric Works Ltd | 直流除電器 |
| JP4634186B2 (ja) * | 2005-02-24 | 2011-02-16 | 株式会社テクノ菱和 | シースエア式イオナイザー |
| JP4704192B2 (ja) * | 2005-11-09 | 2011-06-15 | 株式会社キーエンス | イオン化装置の電極針ユニットおよびイオン化装置 |
-
2007
- 2007-09-13 JP JP2007238453A patent/JP4919907B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009070706A (ja) | 2009-04-02 |
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