JP4912600B2 - カーボンナノチューブの水平成長方法およびカーボンナノチューブを含む素子 - Google Patents
カーボンナノチューブの水平成長方法およびカーボンナノチューブを含む素子 Download PDFInfo
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- JP4912600B2 JP4912600B2 JP2005046395A JP2005046395A JP4912600B2 JP 4912600 B2 JP4912600 B2 JP 4912600B2 JP 2005046395 A JP2005046395 A JP 2005046395A JP 2005046395 A JP2005046395 A JP 2005046395A JP 4912600 B2 JP4912600 B2 JP 4912600B2
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
- C30B29/602—Nanotubes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41F—PRINTING MACHINES OR PRESSES
- B41F23/00—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing
- B41F23/04—Devices for treating the surfaces of sheets, webs, or other articles in connection with printing by heat drying, by cooling, by applying powders
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30453—Carbon types
- H01J2201/30469—Carbon nanotubes (CNTs)
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Composite Materials (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Carbon And Carbon Compounds (AREA)
- Cold Cathode And The Manufacture (AREA)
Description
図1に示すとおり、基板100上に、一側面がパターニングされたアルミニウム層102aおよび絶縁層104aが順次に積層されている。前記アルミニウム層102aの一側面には複数のホール103が穿設され、それぞれのホール103から水平にCNT108が突設されている。前記ホール103の内奥底部には、前記CNT108の成長のための触媒金属層106が形成されている。
このとき、成長されるCNT108の直径(CNTの成長方向に直角の方向)は前記ホール103の孔径と同じレベルに限定され、数nmないし数十nm程度の直径を有する。
図3および図4から、数十nmの直径のCNTが水平方向に良好に成長していることがわかる。
102a アルミニウム層
103 ホール
104a 絶縁層
106 触媒金属層
108 CNT
Claims (6)
- 基板上にアルミニウム層を蒸着する第1段階と、
前記基板上に前記アルミニウム層を覆う絶縁層を形成する第2段階と、
前記基板上で前記絶縁層および前記アルミニウム層をパターニング成形して前記基板上に前記アルミニウム層の側面を露出させる第3段階と、
前記露出されたアルミニウム層の側面から所定の深さの複数のホールを形成する第4段階と、
前記ホールの内奥底部に触媒金属層を形成する第5段階と、
前記触媒金属層から水平にカーボンナノチューブを成長させる第6段階と、を含むことを特徴とするカーボンナノチューブの水平成長方法。 - 前記アルミニウム層は、スパッタリング法または電子ビーム蒸着法で形成することを特徴とする請求項1に記載のカーボンナノチューブの水平成長方法。
- 前記第4段階は、
前記第3段階の結果物を電解質溶液に浸漬して陽極酸化させる段階を含むことを特徴とする請求項1に記載のカーボンナノチューブの水平成長方法。 - 前記第5段階は、
硫酸金属塩、塩化金属塩、および硝酸金属塩の水溶液よりなる群から選択されるいずれか一つの水溶液に電圧を印加して前記触媒金属層を形成することを特徴とする請求項1に記載のカーボンナノチューブの水平成長方法。 - 前記触媒金属層は、Ni、FeおよびCoよりなる群から選択される少なくとも一つよりなることを特徴とする請求項1に記載のカーボンナノチューブの水平成長方法。
- 前記第6段階は、
熱化学気相蒸着法またはプラズマ補強化学気相蒸着法で炭素含有ガスを使用して前記触媒金属層の表面からカーボンナノチューブを成長させることを特徴とする請求項1に記載のカーボンナノチューブの水平成長方法。
Applications Claiming Priority (2)
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KR1020040012537A KR100695124B1 (ko) | 2004-02-25 | 2004-02-25 | 카본나노튜브의 수평성장방법 |
KR2004-012537 | 2004-02-25 |
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JP2005239541A JP2005239541A (ja) | 2005-09-08 |
JP4912600B2 true JP4912600B2 (ja) | 2012-04-11 |
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JP2005046395A Expired - Fee Related JP4912600B2 (ja) | 2004-02-25 | 2005-02-23 | カーボンナノチューブの水平成長方法およびカーボンナノチューブを含む素子 |
Country Status (4)
Country | Link |
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US (1) | US7115306B2 (ja) |
JP (1) | JP4912600B2 (ja) |
KR (1) | KR100695124B1 (ja) |
CN (1) | CN100584751C (ja) |
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US7371677B2 (en) * | 2005-09-30 | 2008-05-13 | Freescale Semiconductor, Inc. | Laterally grown nanotubes and method of formation |
US7485024B2 (en) * | 2005-10-12 | 2009-02-03 | Chunghwa Picture Tubes, Ltd. | Fabricating method of field emission triodes |
KR100707212B1 (ko) * | 2006-03-08 | 2007-04-13 | 삼성전자주식회사 | 나노 와이어 메모리 소자 및 그 제조 방법 |
US8679630B2 (en) * | 2006-05-17 | 2014-03-25 | Purdue Research Foundation | Vertical carbon nanotube device in nanoporous templates |
US7561760B2 (en) * | 2006-07-19 | 2009-07-14 | Northrop Grumman Systems Corporation | System and method for optical beam steering using nanowires and method of fabricating same |
KR100892366B1 (ko) * | 2006-12-26 | 2009-04-10 | 한국과학기술원 | 탄소나노튜브 전계방출 에미터 및 그 제조방법 |
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CN101465259B (zh) * | 2007-12-19 | 2011-12-21 | 清华大学 | 场发射电子器件 |
WO2010065517A1 (en) | 2008-12-01 | 2010-06-10 | The Trustees Of Columbia University In The City Of New York | Electromechanical devices and methods for fabrication of the same |
WO2010065518A1 (en) * | 2008-12-01 | 2010-06-10 | The Trustees Of Columbia University In The City Of New York | Methods for graphene-assisted fabrication of micro- and nanoscale structures and devices featuring the same |
US8715981B2 (en) * | 2009-01-27 | 2014-05-06 | Purdue Research Foundation | Electrochemical biosensor |
US8872154B2 (en) * | 2009-04-06 | 2014-10-28 | Purdue Research Foundation | Field effect transistor fabrication from carbon nanotubes |
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CN102465327B (zh) * | 2010-11-16 | 2016-01-06 | 富士康(昆山)电脑接插件有限公司 | 奈米碳管直立集束成型方法 |
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GB201321949D0 (en) * | 2013-12-12 | 2014-01-29 | Ibm | Semiconductor nanowire fabrication |
CN104401936B (zh) * | 2014-12-19 | 2016-04-13 | 武汉大学 | 一种在基片水平方向可控生长碳纳米管束的方法 |
CN104401935B (zh) * | 2014-12-19 | 2016-04-27 | 武汉大学 | 一种在基片水平方向可控生长碳纳米管束的方法 |
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- 2004-02-25 KR KR1020040012537A patent/KR100695124B1/ko not_active IP Right Cessation
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2005
- 2005-01-18 CN CN200510004590A patent/CN100584751C/zh not_active Expired - Fee Related
- 2005-01-18 US US11/036,379 patent/US7115306B2/en not_active Expired - Fee Related
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Also Published As
Publication number | Publication date |
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CN1660696A (zh) | 2005-08-31 |
CN100584751C (zh) | 2010-01-27 |
US7115306B2 (en) | 2006-10-03 |
KR100695124B1 (ko) | 2007-03-14 |
JP2005239541A (ja) | 2005-09-08 |
US20050188444A1 (en) | 2005-08-25 |
KR20050086161A (ko) | 2005-08-30 |
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