JP4904737B2 - Ｉｃ一体型薄膜振動片の製造方法。 - Google Patents

Ｉｃ一体型薄膜振動片の製造方法。 Download PDF

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Publication number
JP4904737B2
JP4904737B2 JP2005216876A JP2005216876A JP4904737B2 JP 4904737 B2 JP4904737 B2 JP 4904737B2 JP 2005216876 A JP2005216876 A JP 2005216876A JP 2005216876 A JP2005216876 A JP 2005216876A JP 4904737 B2 JP4904737 B2 JP 4904737B2
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thin film
electrode
zno
sio
piezoelectric
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Japanese (ja)
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JP2007036656A (ja
JP2007036656A5 (enrdf_load_stackoverflow
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誠 古畑
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Seiko Epson Corp
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Seiko Epson Corp
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  • Oscillators With Electromechanical Resonators (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2005216876A 2005-07-27 2005-07-27 Ｉｃ一体型薄膜振動片の製造方法。 Expired - Fee Related JP4904737B2 (ja)

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JP2005216876A JP4904737B2 (ja) 2005-07-27 2005-07-27 Ｉｃ一体型薄膜振動片の製造方法。

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JP2005216876A JP4904737B2 (ja) 2005-07-27 2005-07-27 Ｉｃ一体型薄膜振動片の製造方法。

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JP2007036656A JP2007036656A (ja) 2007-02-08
JP2007036656A5 JP2007036656A5 (enrdf_load_stackoverflow) 2008-08-21
JP4904737B2 true JP4904737B2 (ja) 2012-03-28

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Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105794107B (zh) 2013-12-27 2018-12-25 株式会社村田制作所 弹性波装置以及其制造方法
DE112016002835B4 (de) * 2015-06-25 2023-02-02 Murata Manufacturing Co., Ltd. Vorrichtung für elastische Wellen
DE112016002901B4 (de) 2015-06-25 2021-09-23 Murata Manufacturing Co., Ltd. Vorrichtung für elastische Wellen
JP6432558B2 (ja) * 2015-06-25 2018-12-05 株式会社村田製作所 弾性波装置
JP6468357B2 (ja) * 2015-06-25 2019-02-13 株式会社村田製作所 弾性波装置
CN106841383B (zh) * 2016-12-27 2019-06-18 华中科技大学 一种集成式阻抗负载声表面波气体传感器
CN111066244B (zh) 2017-08-29 2023-03-24 株式会社村田制作所 弹性波装置、高频前端电路以及通信装置
JP7364196B2 (ja) * 2021-09-24 2023-10-18 三安ジャパンテクノロジー株式会社 弾性波デバイス、モジュール

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2836375B2 (ja) * 1992-04-28 1998-12-14 日本電気株式会社 半導体弾性表面波複合装置
US5838089A (en) * 1997-02-18 1998-11-17 Kobe Steel Usa Inc. Acoustic wave devices on diamond with an interlayer
KR100316383B1 (ko) * 1998-10-30 2002-02-19 윤덕용 모노리딕직접회로위에박막또는후막단결정압전소자를집적한단일칩라디오구조및그제조방법
JP4385607B2 (ja) * 2003-01-29 2009-12-16 セイコーエプソン株式会社 表面弾性波素子、周波数フィルタ、発振器、電子回路並びに電子機器
JP2004297359A (ja) * 2003-03-26 2004-10-21 Seiko Epson Corp 表面弾性波素子、周波数フィルタ、発振器、電子回路、及び電子機器
JP2004312309A (ja) * 2003-04-04 2004-11-04 Seiko Epson Corp 半導体振動子複合装置、電子デバイスおよび電子機器
JP4428064B2 (ja) * 2004-01-21 2010-03-10 セイコーエプソン株式会社 薄膜弾性表面波デバイス

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