JP4885209B2 - 可変フィルタ用のインターデジット型駆動電極を有するコラプシングジッパー型バラクタ - Google Patents
可変フィルタ用のインターデジット型駆動電極を有するコラプシングジッパー型バラクタ Download PDFInfo
- Publication number
- JP4885209B2 JP4885209B2 JP2008504233A JP2008504233A JP4885209B2 JP 4885209 B2 JP4885209 B2 JP 4885209B2 JP 2008504233 A JP2008504233 A JP 2008504233A JP 2008504233 A JP2008504233 A JP 2008504233A JP 4885209 B2 JP4885209 B2 JP 4885209B2
- Authority
- JP
- Japan
- Prior art keywords
- varactor
- electrode
- drive
- voltage
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 239000003990 capacitor Substances 0.000 claims description 26
- 239000000758 substrate Substances 0.000 claims description 15
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 6
- 229920005591 polysilicon Polymers 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 5
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000004088 simulation Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
- H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
- Filters And Equalizers (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
基板;
前記基板上に備えられた複数の駆動電極;
前記基板上に備えられた複数の底部電極;
2つ以上の前記底部電極に備えられた部分成分群を有するキャパシタ;及び
前記基板上に備えられた屈曲可能な頂部電極であり、前記駆動電極の1つ以上に第1の電圧が印加されたとき、前記駆動電極側に第1の大きさだけつぶれ、前記駆動電極に第2の電圧が印加されたとき、前記駆動電極側に第2の大きさだけつぶれる頂部電極;
を有する。
微小電気機械(MEMS)バラクタの1つ以上の駆動電極に第1の電圧を印加する段階;
前記第1の電圧が印加されたことに応答して、屈曲可能な頂部電極が前記駆動電極側に第1の大きさだけ屈曲する段階;
前記第1の電圧を増大させることにより、前記1つ以上の駆動電極に第2の電圧を印加する段階;及び
前記第2の電圧が印加されたことに応答して、前記頂部電極が前記駆動電極側に第2の大きさだけ屈曲する段階;
を有する。
1つ以上のインダクタ;並びに
前記インダクタに結合された微小電気機械(MEMS)バラクタであり:
基板;
前記基板上に備えられた複数の駆動電極;
部分成分群を有するキャパシタ;及び
前記基板上に備えられた屈曲可能な頂部電極であり、前記駆動電極の1つ以上に第1の電圧が印加されたとき、前記駆動電極側に第1の大きさだけつぶれ、前記駆動電極に第2の電圧が印加されたとき、前記駆動電極側に第2の大きさだけつぶれる頂部電極;
を有するバラクタ;
を有する。
Claims (11)
- 基板;
前記基板上に備えられた複数の駆動電極;
前記基板上に備えられた複数の底部電極であり、該複数の底部電極と前記複数の駆動電極とが交互に配置された、複数の底部電極;
2つ以上の前記底部電極に備えられた部分成分群を有するキャパシタ;及び
前記基板上に備えられた屈曲可能な頂部電極であり、前記駆動電極の1つ以上に第1の電圧が印加されたとき、前記駆動電極側に第1の大きさだけつぶれ、前記複数の駆動電極に第2の電圧が印加されたとき、前記駆動電極側に第2の大きさだけつぶれる頂部電極;
を有する微小電気機械(MEMS)バラクタ。 - 前記キャパシタの静電容量を増大させるように、前記複数の底部電極上に堆積された誘電体層を更に有する請求項1に記載のバラクタ。
- 前記頂部電極と前記駆動電極との間に所定のギャップを維持するように、前記頂部プレートに備えられたストッパを更に有する請求項2に記載のバラクタ。
- 前記頂部電極は前記第1の電圧が印加されたとき、第1の駆動電極の位置で作動させられ、第2の駆動電極の位置で作動させられない、請求項1に記載のバラクタ。
- 前記頂部電極は前記第2の電圧が印加されたとき、前記第1の駆動電極及び前記第2の駆動電極の位置で作動させられる、請求項4に記載のバラクタ。
- 前記駆動電極の各々に同時に電圧が印加される、請求項1に記載のバラクタ。
- 前記駆動電極の各々に別々に電圧が印加される、請求項1に記載のバラクタ。
- 前記頂部ビームは金属から成る、請求項1に記載のバラクタ。
- 前記頂部ビームはポリシリコンと金属とから成る、請求項1に記載のバラクタ。
- 前記頂部ビームは両持ち梁である、請求項1に記載のバラクタ。
- 前記キャパシタの各部分成分は異なる静電容量値を有する、請求項1に記載のバラクタ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/092,022 | 2005-03-29 | ||
US11/092,022 US7319580B2 (en) | 2005-03-29 | 2005-03-29 | Collapsing zipper varactor with inter-digit actuation electrodes for tunable filters |
PCT/US2006/011134 WO2006105031A1 (en) | 2005-03-29 | 2006-03-24 | A collapsing zipper varactor with inter-digit actuation electrodes for tunable filters |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008536308A JP2008536308A (ja) | 2008-09-04 |
JP4885209B2 true JP4885209B2 (ja) | 2012-02-29 |
Family
ID=36645326
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008504233A Expired - Fee Related JP4885209B2 (ja) | 2005-03-29 | 2006-03-24 | 可変フィルタ用のインターデジット型駆動電極を有するコラプシングジッパー型バラクタ |
Country Status (5)
Country | Link |
---|---|
US (1) | US7319580B2 (ja) |
EP (1) | EP1864307A1 (ja) |
JP (1) | JP4885209B2 (ja) |
TW (1) | TWI301990B (ja) |
WO (1) | WO2006105031A1 (ja) |
Families Citing this family (30)
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US7321275B2 (en) * | 2005-06-23 | 2008-01-22 | Intel Corporation | Ultra-low voltage capable zipper switch |
US7602261B2 (en) * | 2005-12-22 | 2009-10-13 | Intel Corporation | Micro-electromechanical system (MEMS) switch |
US20070228870A1 (en) * | 2006-03-28 | 2007-10-04 | White James R | Variable electrical circuit component |
US7554421B2 (en) * | 2006-05-16 | 2009-06-30 | Intel Corporation | Micro-electromechanical system (MEMS) trampoline switch/varactor |
US7605675B2 (en) * | 2006-06-20 | 2009-10-20 | Intel Corporation | Electromechanical switch with partially rigidified electrode |
NL1034082C2 (nl) * | 2007-07-03 | 2009-01-06 | Univ Leiden | PWM-versterker. |
US20100001355A1 (en) * | 2008-07-07 | 2010-01-07 | Honeywell International Inc. | RF MEMS Switch |
WO2010103474A1 (en) | 2009-03-11 | 2010-09-16 | Nxp B.V. | Mems electrostatic actuator |
US8363380B2 (en) | 2009-05-28 | 2013-01-29 | Qualcomm Incorporated | MEMS varactors |
US8218228B2 (en) * | 2009-12-18 | 2012-07-10 | Qualcomm Mems Technologies, Inc. | Two-terminal variable capacitance MEMS device |
US20110148837A1 (en) * | 2009-12-18 | 2011-06-23 | Qualcomm Mems Technologies, Inc. | Charge control techniques for selectively activating an array of devices |
WO2011152192A1 (ja) * | 2010-05-31 | 2011-12-08 | 株式会社村田製作所 | 可変容量素子 |
WO2012090721A1 (ja) * | 2010-12-28 | 2012-07-05 | 株式会社村田製作所 | 周波数可変回路及びマルチバンドアンテナ装置 |
JP5637308B2 (ja) * | 2011-06-02 | 2014-12-10 | 富士通株式会社 | 電子デバイスとその製造方法、及び電子デバイスの駆動方法 |
US9120667B2 (en) * | 2011-06-20 | 2015-09-01 | International Business Machines Corporation | Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures |
US8973250B2 (en) | 2011-06-20 | 2015-03-10 | International Business Machines Corporation | Methods of manufacturing a micro-electro-mechanical system (MEMS) structure |
KR102005335B1 (ko) * | 2011-09-02 | 2019-07-30 | 카벤디시 키네틱스, 인크. | 향상된 rf 성능의 mems 가변 커패시터 |
US8940570B2 (en) | 2012-01-03 | 2015-01-27 | International Business Machines Corporation | Micro-electro-mechanical system (MEMS) structures and design structures |
TWI538000B (zh) | 2012-05-10 | 2016-06-11 | 杜比實驗室特許公司 | 多階段過濾器,音頻編碼器,音頻解碼器,施行多階段過濾的方法,用以編碼音頻資料的方法,用以將編碼音頻資料解碼的方法,及用以處理編碼位元流的方法和裝置 |
WO2014038086A1 (ja) * | 2012-09-10 | 2014-03-13 | 富士通株式会社 | 可変容量回路及びインピーダンス整合回路 |
CN108439325B (zh) * | 2013-03-15 | 2023-03-14 | 瑞声科技(新加坡)有限公司 | 微电子机械系统装置及调整其可动部件的形状的方法 |
EP2981981B1 (en) | 2013-04-04 | 2019-02-06 | Cavendish Kinetics Inc. | Mems digital variable capacitor design with high linearity |
US9233832B2 (en) * | 2013-05-10 | 2016-01-12 | Globalfoundries Inc. | Micro-electro-mechanical system (MEMS) structures and design structures |
JP2015176877A (ja) * | 2014-03-13 | 2015-10-05 | 株式会社東芝 | Mems装置 |
WO2016054648A1 (en) * | 2014-10-03 | 2016-04-07 | Wispry, Inc. | Systems, devices, and methods to reduce dielectric charging in micro-electromechanical systems devices |
EP3322666A4 (en) * | 2015-07-15 | 2019-03-20 | Michael J. Dueweke | TUNABLE REACTOR DEVICES AND METHODS OF MAKING AND USING THE SAME |
JP6581849B2 (ja) * | 2015-09-01 | 2019-09-25 | アズビル株式会社 | 微細機械装置 |
EP3510684A4 (en) | 2016-09-07 | 2020-08-05 | Michael J. Dueweke | AUTOMATIC ADJUSTMENT MICRO-ELECTROMECHANICAL IMPEDANCE ADAPTATION CIRCUITS AND MANUFACTURING PROCESSES |
US10636936B2 (en) | 2018-03-05 | 2020-04-28 | Sharp Kabushiki Kaisha | MEMS array system and method of manipulating objects |
US10899605B2 (en) | 2018-03-05 | 2021-01-26 | Sharp Kabushiki Kaisha | MEMS device and manipulation method for micro-objects |
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-
2006
- 2006-03-24 EP EP06739741A patent/EP1864307A1/en not_active Withdrawn
- 2006-03-24 JP JP2008504233A patent/JP4885209B2/ja not_active Expired - Fee Related
- 2006-03-24 WO PCT/US2006/011134 patent/WO2006105031A1/en active Application Filing
- 2006-03-28 TW TW095110733A patent/TWI301990B/zh not_active IP Right Cessation
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Also Published As
Publication number | Publication date |
---|---|
US7319580B2 (en) | 2008-01-15 |
TWI301990B (en) | 2008-10-11 |
TW200703389A (en) | 2007-01-16 |
EP1864307A1 (en) | 2007-12-12 |
JP2008536308A (ja) | 2008-09-04 |
WO2006105031A1 (en) | 2006-10-05 |
US20060226501A1 (en) | 2006-10-12 |
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