JP4882595B2 - 光スキャナおよび画像形成装置 - Google Patents
光スキャナおよび画像形成装置 Download PDFInfo
- Publication number
- JP4882595B2 JP4882595B2 JP2006223659A JP2006223659A JP4882595B2 JP 4882595 B2 JP4882595 B2 JP 4882595B2 JP 2006223659 A JP2006223659 A JP 2006223659A JP 2006223659 A JP2006223659 A JP 2006223659A JP 4882595 B2 JP4882595 B2 JP 4882595B2
- Authority
- JP
- Japan
- Prior art keywords
- resin
- silicon
- mass
- elastic
- support substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000003287 optical effect Effects 0.000 title claims description 27
- 229920005989 resin Polymers 0.000 claims description 171
- 239000011347 resin Substances 0.000 claims description 171
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 131
- 239000010703 silicon Substances 0.000 claims description 95
- 229910052710 silicon Inorganic materials 0.000 claims description 95
- 239000000758 substrate Substances 0.000 claims description 72
- 239000000463 material Substances 0.000 claims description 53
- 238000001579 optical reflectometry Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 description 25
- 229910052751 metal Inorganic materials 0.000 description 17
- 239000002184 metal Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 11
- 238000005530 etching Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 6
- 229920001187 thermosetting polymer Polymers 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000004641 Diallyl-phthalate Substances 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910000828 alnico Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- QUDWYFHPNIMBFC-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,2-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC=C1C(=O)OCC=C QUDWYFHPNIMBFC-UHFFFAOYSA-N 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910001172 neodymium magnet Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 229910000938 samarium–cobalt magnet Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Images
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Facsimile Scanning Arrangements (AREA)
- Laser Beam Printer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006223659A JP4882595B2 (ja) | 2006-08-18 | 2006-08-18 | 光スキャナおよび画像形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006223659A JP4882595B2 (ja) | 2006-08-18 | 2006-08-18 | 光スキャナおよび画像形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008046512A JP2008046512A (ja) | 2008-02-28 |
| JP2008046512A5 JP2008046512A5 (enExample) | 2009-08-20 |
| JP4882595B2 true JP4882595B2 (ja) | 2012-02-22 |
Family
ID=39180288
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006223659A Expired - Fee Related JP4882595B2 (ja) | 2006-08-18 | 2006-08-18 | 光スキャナおよび画像形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4882595B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6507550B2 (ja) * | 2014-09-30 | 2019-05-08 | セイコーエプソン株式会社 | 光学デバイス、画像表示装置およびプロジェクター |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000081589A (ja) * | 1998-07-09 | 2000-03-21 | Olympus Optical Co Ltd | 光偏向器 |
| JP2000330067A (ja) * | 1999-05-20 | 2000-11-30 | Olympus Optical Co Ltd | ねじり揺動体 |
| JP2001235702A (ja) * | 2000-02-22 | 2001-08-31 | Olympus Optical Co Ltd | アクチュエータ |
| JP2005326465A (ja) * | 2004-05-12 | 2005-11-24 | Canon Inc | 光偏向器 |
-
2006
- 2006-08-18 JP JP2006223659A patent/JP4882595B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008046512A (ja) | 2008-02-28 |
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