JP4873948B2 - Tape cutting device and tape cutting method - Google Patents

Description

  The present invention relates to a tape cutting device and a tape cutting method for cutting out a protective tape attached to the surface of a semiconductor wafer or the like along the outer periphery thereof, for example.

  In the semiconductor manufacturing process, the wafer surface is polished (back grind) after patterning processing is performed on the surface of the wafer, thereby achieving smoothness and thinning of the wafer. At this time, the surface is protected so that the surface is not damaged at the time of adsorption holding or polishing by sticking (laminating) a tape to the surface side on which the pattern is formed.

  Affixing such a protective tape is performed as follows. That is, the wafer surface is laminated so that the surface side on which the pattern is formed faces the pressure-sensitive adhesive side of the tape to which a certain tension is applied, and the two are brought into close contact with each other, thereby laminating the surface of the wafer. Then, the tape is cut out by rotating the cutter along the circumference. As a method for cutting out a thin sheet like a tape into a circle, methods shown in Patent Document 1 and Patent Document 2 have been proposed.

JP-A-8-174498 JP-A-5-36657

  By the way, a U-shaped or V-shaped notch called a notch is formed in a part of the periphery of the semiconductor wafer in order to indicate the orientation of the surface. Such notches are used for aligning crystal planes between a plurality of wafers, and for transport and alignment in various processing apparatuses and inspection apparatuses.

  However, as described above, after laminating and cutting the surface of the wafer, if excess protective tape remains in the notch, chips generated by polishing accumulate between the remaining portion and the notch, Cause damage. In particular, as shown in FIG. 15, a bevel portion Y (R portion) including the notch N exists on the end surface of the wafer W. For this reason, as shown in FIG. 16, the end portion of the tape T becomes like a shade and a gap is formed between the end portion of the tape T and the bevel portion Y, and the above-described adverse effects are likely to occur. Further, after bonding, there is a possibility that detection by an optical sensor cannot be performed at the time of alignment using a notch.

  As a cutting method corresponding to such a notch, conventionally, after laminating, one cutter is moved along the outer periphery of the wafer, and the cutter head is moved to a notch with a fine notch diameter (for example, about 1 mm). ), The outer periphery and the notch were continuously cut with a single stroke.

  However, in such a method, after cutting, a fine section corresponding to the notch part falls and tends to become a cut residue. Such cut residue adheres to the wafer and causes scratches or causes defects in the next process. Moreover, in order to make the cutter perform such an operation, the mechanism becomes complicated, and an excessive load is applied to the blade of the cutter, and the life is shortened due to wear.

  The present invention has been proposed in order to solve the above-described problems of the prior art, and the object thereof is to have a simple configuration without dropping the section, extending the life of the cutter and reducing failure. An object of the present invention is to provide a tape cutting device and a tape cutting method that can be achieved.

In order to achieve the above object, the invention of claim 1 is a tape cutting device for cutting a tape in accordance with a shape of a substrate, wherein the first cutter has a shape that fits a notch formed in the substrate, and the first Adjusting means for adjusting the relative position of the cutter and the substrate, detecting means for detecting the notch of the substrate, and the first cutter at a position corresponding to the notch of the substrate according to the detection of the detecting means The control means for controlling the adjusting means so that the insertion position of the tape is matched, the first drive unit for inserting and removing the first cutter at a position corresponding to the notch in the tape, and the linear track. It has a 2nd cutter and the 2nd drive part which moves the 2nd cutter along the external shape of a substrate, It is characterized by the above-mentioned.

The invention of claim 4 captures the invention of claim 1 from the viewpoint of the method, and in the tape cutting method of cutting the tape in accordance with the shape of the substrate, the detecting means detects the notch of the substrate and adjusts the means. However, according to the detection by the detection means, the insertion position of the first cutter having a shape matching the notch formed on the substrate matches the position corresponding to the notch of the substrate. The relative position of the tape is adjusted, the first cutter makes a cut at a position corresponding to the notch in the tape, and the second cutter that cuts the tape with a linear track cuts a portion other than the cut in the tape. characterized by the Turkey cut along the outer shape of the substrate.

In the inventions of claims 1 and 4 described above, the outer shape and the notch portion of the substrate are not continuously cut with a single stroke, but the notch portion is cut in advance by the first cutter, and then the second Since the portion other than the cut is cut by the cutter, a fine section is not generated, and scratches and defects due to the cut residue can be prevented. Since the operation | movement requested | required of a 1st cutter only makes a notch | incision, while a mechanism is simplified, the load concerning a blade is light and a lifetime becomes long. Further, since the first cutter can be inserted at an accurate position that matches the notch of the substrate, it is possible to prevent the substrate from being exposed and the tape from protruding at the notch portion.

  According to a second aspect of the present invention, there is provided the tape cutting device according to the first aspect, wherein the tape cutting device further comprises an adhesion means for bringing the tape into close contact with the substrate after the cutting by the first cutter and before the cutting by the second cutter. It is characterized by that.

  The invention of claim 5 captures the invention of claim 2 from the viewpoint of the method, and in the tape cutting method of claim 4, after the cutting by the first cutter, by the second cutter Before cutting, the tape is brought into close contact with the substrate.

  In the inventions of claims 2 and 5 as described above, since the notch portion is cut by the first cutter before the tape is brought into close contact with the substrate, damage due to the first cutter hitting the substrate is prevented. The

According to a third aspect of the present invention, in the tape cutting device according to the second aspect , the space in which the tape is brought into close contact with the substrate by the contact means is formed in a vacuum chamber that can be evacuated by a vacuum source .

According to a sixth aspect of the present invention, in the tape cutting method of the fifth aspect , the tape is brought into close contact with the substrate by the contact means in a vacuum .

In the inventions of claims 3 and 6 as described above, since the space in which the tape is in close contact with the substrate is evacuated, air bubbles are prevented from being mixed between the tape and the surface of the substrate.

  As described above, according to the present invention, it is possible to provide a tape cutting device and a tape cutting method with a simple configuration, without dropping a section, and capable of extending the life of the cutter and reducing the failure. Can do.

Next, embodiments of the present invention (hereinafter referred to as embodiments) will be specifically described with reference to the drawings.
[Constitution]
First, the configuration of the present embodiment (hereinafter referred to as the present apparatus) will be described with reference to FIGS. This apparatus constitutes a part of a laminating apparatus for laminating a protective tape on a wafer. Regarding a conveying apparatus for carrying in and out a substrate, a reel apparatus for feeding and winding a tape, etc. Since any known technique can be applied, the description is omitted. Further, in order to prevent air bubbles from being mixed when the tape is applied, the bonding space is configured in a vacuum chamber connected to a vacuum source.

  First, as shown in FIGS. 1 and 2, the present apparatus includes a guide unit 10, a pressure unit 20, a mounting unit 30, a notch cut unit 40, and a circle cut unit 50. The guide unit 10 is a means for guiding the tape T fed from the reel so as to be horizontal while maintaining a certain tension, and a pair of guide rollers 11 and 12 and guides 13 and 14 sandwiching the tape T at a predetermined interval. Are disposed in front of and behind the placement unit 30 (left and right in the figure).

  The pressurizing unit 20 is means for applying the tape T on the wafer W by pressurizing the tape T with the pressure roller 21. Although not shown, the pressure unit 20 includes a drive mechanism that moves the pressure roller 21 up and down in the direction of contacting and separating from the wafer W and horizontally moves back and forth.

  The placement unit 30 is a turntable or the like constituting a transfer device, and includes a susceptor 31 on which the wafer W is placed. The mounting portion 30 includes a rotation mechanism (not shown) that rotates the susceptor 31 for adjusting the notch N (adjustment means). Further, the mounting unit 30 is provided with an edge sensor 32 which is a detection unit that detects an edge of the notch N formed on the wafer W by an optical unit such as a laser.

  The notch cut portion 40 is a means for cutting the tape T at a position corresponding to the notch N (first cutter), and holds the notch cutter 41 matched to the shape of the notch N and the notch cutter 41. An elevating mechanism 42 (first driving unit) that elevates and lowers with respect to the tape T in a state is provided. The notch cutter 41 has, for example, a shape in which a blade is formed by obliquely cutting a cylindrical or columnar material as shown in FIG. 3A or a substantially U-shaped material as shown in FIG. It can be considered.

  The circle cutting unit 50 is a hand that cuts out portions other than the notch portion along the outer edge of the wafer W, and includes a circle cutter 51 (second cutter) that is inserted into the tape T and moves on a circumferential path, and a circle cutter 51. A circle cutter drive mechanism 52 (second drive unit) that moves up and down and rotates while being held is provided. The circle cutter 51 is provided so as to be movable in the radial direction, and is urged in a direction toward the rotation center by an elastic member such as a spring.

  Further, as shown in the functional block diagram of FIG. 4, the control device 100 that controls each mechanism described above has the following functions by controlling the computer by a program. That is, the control device 100 includes a count unit 110, a setting unit 120, and an instruction unit 130. The count unit 110 is a unit that counts pulses based on the internal clock signal when a signal for detecting the edge of the notch N is input from the edge sensor 32.

  The setting unit 120 is a means for setting the number of counts necessary for rotation from the edge detection position by the edge sensor 32 to the position corresponding to the notch cut unit 40 by input from the input unit 200 such as a keyboard, a touch panel, and a switch. is there. The instruction unit 130 is a means for outputting a stop instruction signal for the rotation mechanism of the susceptor 31 when the count value by the count unit 110 reaches the value set in the setting unit 120. Note that a program for realizing the above functions by operating a computer and a recording medium recording the program are also included in the present invention.

[Action]
A method of laminating a substrate using the present apparatus as described above will be described with reference to FIGS. Note that a count value corresponding to a rotation amount (see θ in FIG. 2) from the detection position of the edge sensor 32 to a position corresponding to the notch cut unit 40 is input in advance by the input unit 200 and set in the setting unit 120. It shall be.

  First, as shown in FIG. 1, the unused tape T fed from the reel is held horizontally by the guide unit 10. The wafer W is introduced into the lower portion of the tape T by the transport device while being placed on the susceptor 31.

  The wafer W starts to rotate when the rotation mechanism drives the susceptor 31, and the edge of the notch N is detected by the edge sensor 32. When the detection signal is input to the control device 100, the count unit 110 starts counting pulses. When the count value reaches the value set in the setting unit 120, the instruction unit 130 instructs the rotation mechanism to stop, so that the wafer W stops at a predetermined rotation angle (θ). Thereby, the notch N of the wafer W is positioned below the notch cut portion 40.

  Next, the elevating mechanism 42 is operated to lower the notch cut portion 40 and insert the notch cutter 41 into the tape T, and then the notch cut portion 40 is raised and the notch cutter 41 is removed from the tape T. As a result, as shown in FIG. 5, a cut C corresponding to the notch N enters the tape T.

  Then, as shown in FIGS. 6 and 7, the pressure roller 21 is lowered in a direction in contact with the wafer W, and moved horizontally forward (rightward in the figure) from a position slightly lowered from the outermost surface of the wafer W. By doing so, the tape T is pressure-bonded to the wafer W. Thereby, the surface of the wafer W is laminated. At this time, since the periphery of the crimping space is evacuated by the vacuum source, bubbles are prevented from being mixed between the tape T and the surface of the wafer W.

  Further, as shown in FIG. 8, the circle cutter 51 is lowered by operating the circle cutter driving mechanism 52 to insert the circle cutter 51 into one edge of the notch C in the tape T and rotate it. At this time, since the circle cutter 51 is urged in the direction toward the rotation center by the elastic member, the tape T is circularly formed along the outer periphery while contacting the outer periphery of the wafer W as shown in FIG. Cut into

  Then, when the other edge of the cut C is reached, the rotation is stopped. Thereby, as shown in FIG. 10, the cutout from which the part corresponding to the notch N protruded is made. Thereafter, the wafer W is transferred to another process by the transfer device.

[effect]
According to the present embodiment as described above, before the outer shape of the wafer W is cut out, an independent cut corresponding to the notch N is made in advance by the notch cutter 41 so that the wafer W is continuously cut with a single stroke. A fine slice is not generated. Accordingly, it is possible to prevent damage to the wafer W due to cutting waste and defects in the next process.

  Further, since the notch cutter 41 only needs to be moved up and down, and the circle cutter 51 only needs to be operated in a circle, the mechanism can be simplified and the manufacturing cost and failure can be reduced. Further, since it is not necessary to rotate the cutter at the notch N, an excessive load is not applied to the blade, and a long life can be maintained.

  Further, since the notch cutter 41 makes the cut C before the tape T is attached, damage due to the notch cutter 41 hitting the wafer W is prevented. Since the notch cutter 41 only moves up and down and its horizontal position is fixed, the wafer W can be easily positioned. Therefore, even with the simple configuration as described above, highly accurate positioning is possible.

[Other Embodiments]
The present invention is not limited to the embodiment as described above. For example, the method of laminating with a protective tape and the selection of the adhesive are free. For example, thermocompression bonding with a heater plate may be performed, or UV curing adhesive may be used so that it can be easily peeled off by UV curing. The material of the tape is generally PET or the like, but is not limited to a specific type. Further, in the above-described embodiment, the tape is pressure-bonded to the wafer after making a cut in advance, but the cut may be made after the tape is pressure-bonded.

  Further, the shape, insertion position, insertion angle, and the like of the first cutter corresponding to the notch portion are not limited to those exemplified in the above embodiment. It may be V-shaped or U-shaped according to the shape of the notch. If the shape fits the notch part to some extent, it is not necessary to match exactly. The first cutter preferably has a certain size so that there is a front end portion that fits in the notch portion and a rear end portion that exits from the outer shape of the substrate, rather than completely entering the notch portion. .

  There is also a degree of freedom in the insertion position of the first cutter. For example, as shown in FIG. 11, if cutting is performed at a position that does not hang on the bevel portion Y of the end surface of the wafer W, the end portion of the tape T does not have a shading portion, and chips or the like may accumulate in the gap. Absent. Further, as shown in FIG. 12, the cutting may be performed at a position close to the end face of the wafer W. As described above, even when the cutting is performed at the last position of the bevel portion Y or the end portion of the wafer W, in the present invention, since the cutting is performed before the tape T is applied, the blade does not hit the wafer W.

  The insertion angle of the first cutter may be in the vertical direction as shown in FIG. 13, but may be inclined as shown in FIG. By making the insertion angle slant, the cross section of the tape T can be slanted, so that chips are difficult to accumulate. If such an oblique cut is to be made, the mechanism becomes very complicated in the conventional one-stroke cut, but in the present invention, only the notch is cut independently, and therefore, it can be realized with a simple mechanism. 13 and 14 show the wafer W and the notch cutter 41 whose outer edges have been cut, naturally, the portion corresponding to the notch N may be cut before the tape T is attached.

  Further, the conveying device is not limited to a specific one. The substrate may be directly mounted on the turntable and transported. An endless transfer device such as a conveyor may be used. The adjusting means for adjusting the positions of the first cutter and the notch portion may also adjust the first cutter side. The type and position of the detection means are also free.

  Further, the size, shape, material, and the like of the wafer to which the present invention is applied are free, and can be applied to any one that will be employed in the future. Furthermore, the present invention can be applied not only to a semiconductor wafer but also to any substrate that requires bonding and cutting of sheets in a manufacturing process, such as a disk as a recording medium, a substrate for liquid crystal, or an organic EL.

  In other words, the “substrate” described in the claims is not limited to a semiconductor, a disk shape, or the like, but is a concept that widely includes planar products. Therefore, the trajectory of the second cutter is not limited to a circle as long as it follows the outer shape of the substrate. Further, the “notch” broadly means a recess or groove formed in the outer shape of the substrate, and is not limited to the notch of the wafer.

It is a side view which shows one Embodiment of the tape cut device of this invention. It is a top view of embodiment of FIG. It is the perspective view (A) which shows an example of the notch cutter of embodiment of FIG. 1, and the perspective view (B) which shows another example. It is a functional block diagram which shows the control apparatus in embodiment of FIG. It is a top view which shows the cutting position in embodiment of FIG. It is a side view which shows the crimping | compression-bonding start state of the tape in embodiment of FIG. It is a side view which shows the state after the crimping | compression-bonding of the tape in embodiment of FIG. It is a side view which shows the insertion state of the circle cutter in embodiment of FIG. It is a top view which shows the track | orbit of the circle cutter in embodiment of FIG. It is a top view which shows the tape after the cutting in embodiment of FIG. It is a perspective view which shows an example of the cut position of the notch part by this invention. It is a perspective view which shows another example of the cutting position of the notch part by this invention. It is a perspective view which shows an example of the insertion direction of the notch cutter by this invention. It is a perspective view which shows another example of the insertion direction of the notch cutter by this invention. It is a perspective view which shows the notch part of a common wafer. It is sectional drawing which shows the wafer after the conventional tape sticking and cutting.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Guide part 11 ... Guide roller 13 ... Guide 20 ... Pressure part 21 ... Pressure roller 30 ... Mounting part 31 ... Susceptor 32 ... Edge sensor 40 ... Notch cut part 41 ... Notch cutter 42 ... Lifting mechanism 50 ... Circle cut Section 51 ... Circle cutter 52 ... Circle cutter drive mechanism 100 ... Control device 110 ... Count section 120 ... Setting section 130 ... Instruction section 200 ... Input section N ... Notch T ... Tape W ... Wafer

Claims (6)

In the tape cutting device that cuts the tape according to the shape of the substrate,
A first cutter shaped to fit a notch formed in the substrate;
Adjusting means for adjusting a relative position between the first cutter and the substrate;
Detecting means for detecting a notch on the substrate;
Control means for controlling the adjusting means so that the insertion position of the first cutter matches the position corresponding to the notch of the substrate in accordance with the detection of the detection means;
A first drive unit for inserting and removing the first cutter at a position corresponding to a notch on the tape;
A second cutter that cuts the tape in a linear track,
A second drive unit for moving the second cutter along the outer shape of the substrate;
A tape cutting device comprising:   2. The tape cutting device according to claim 1, further comprising an adhesion means for bringing the tape into close contact with the substrate after being cut by the first cutter and before being cut by the second cutter. 3. The tape cutting device according to claim 2, wherein the space in which the tape is brought into close contact with the substrate by the contact means is formed in a vacuum chamber that can be evacuated by a vacuum source . In the tape cutting method to cut the tape according to the shape of the substrate,
The detection means detects the notch of the substrate,
In accordance with the detection by the detection means, the adjusting means and the first cutter so that the insertion position of the first cutter having a shape matching the notch formed on the substrate matches the position corresponding to the notch of the substrate. Adjust the position relative to the board,
With the first cutter, a cut is made at a position corresponding to the notch in the tape,
The second cutter to cut the tape in a linear trajectory, ribbon-cutting wherein the portion other than the cut said in the tape, and Turkey cut along the outer shape of the substrate.   The tape cutting method according to claim 4, wherein the tape is brought into close contact with the substrate after being cut by the first cutter and before being cut by the second cutter. 6. The tape cutting device according to claim 5 , wherein the tape is brought into close contact with the substrate by the contact means in a vacuum .