JP4865399B2 - 光を調節可能に変化させるための方法および装置 - Google Patents

光を調節可能に変化させるための方法および装置 Download PDF

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Publication number
JP4865399B2
JP4865399B2 JP2006128585A JP2006128585A JP4865399B2 JP 4865399 B2 JP4865399 B2 JP 4865399B2 JP 2006128585 A JP2006128585 A JP 2006128585A JP 2006128585 A JP2006128585 A JP 2006128585A JP 4865399 B2 JP4865399 B2 JP 4865399B2
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Japan
Prior art keywords
light
radiation component
polarization
radiation
component
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Japanese (ja)
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JP2006313356A (ja
JP2006313356A5 (enExample
Inventor
ヴォレシェンスキー ラルフ
ミハエル、ケンペ
クロッペフライシュ ペーター
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Carl Zeiss Microscopy GmbH
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Carl Zeiss MicroImaging GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J3/4406—Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0224—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using polarising or depolarising elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/645—Specially adapted constructive features of fluorimeters
    • G01N21/6456—Spatial resolved fluorescence measurements; Imaging
    • G01N21/6458—Fluorescence microscopy
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0068—Optical details of the image generation arrangements using polarisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0076—Optical details of the image generation arrangements using fluorescence or luminescence
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N2021/6417—Spectrofluorimetric devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/64—Fluorescence; Phosphorescence
    • G01N21/6445—Measuring fluorescence polarisation

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2006128585A 2005-05-03 2006-05-02 光を調節可能に変化させるための方法および装置 Expired - Fee Related JP4865399B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005020543A DE102005020543A1 (de) 2005-05-03 2005-05-03 Verfahren und Vorrichtung zur einstellbaren Veränderung von Licht
DE102005020543.7 2005-05-03

Publications (3)

Publication Number Publication Date
JP2006313356A JP2006313356A (ja) 2006-11-16
JP2006313356A5 JP2006313356A5 (enExample) 2010-07-15
JP4865399B2 true JP4865399B2 (ja) 2012-02-01

Family

ID=36615723

Family Applications (1)

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JP2006128585A Expired - Fee Related JP4865399B2 (ja) 2005-05-03 2006-05-02 光を調節可能に変化させるための方法および装置

Country Status (4)

Country Link
US (1) US7605976B1 (enExample)
EP (1) EP1720054A3 (enExample)
JP (1) JP4865399B2 (enExample)
DE (1) DE102005020543A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7864423B2 (en) * 2007-08-10 2011-01-04 Aegis Lightwave, Inc. Spectrally adjustable filter
US8284489B2 (en) * 2007-09-11 2012-10-09 Aegis Lightwave, Inc. Spectrally adjustable filter
ITFI20070260A1 (it) * 2007-11-21 2009-05-22 Light 4 Tech Firenze S R L Dispositivo per illuminare un oggetto con una sorgente di luce multispettrale e rivelare lo spettro della luce emessa.
US7817272B2 (en) * 2008-06-09 2010-10-19 Aegis Lightwave, Inc. High-resolution spectrally adjustable filter
DE102008049748A1 (de) * 2008-09-30 2009-12-17 Carl Zeiss Ag Strahlteilereinrichtung
CN102597845B (zh) * 2009-11-02 2016-06-29 奥林巴斯株式会社 分束器装置、光源装置和扫描观测装置
DE102011077327B4 (de) * 2011-06-09 2022-03-03 Carl Zeiss Microscopy Gmbh Lichtrastermikroskop mit Strahlkombinierer zum Kombinieren von zwei jeweils eigenständig gescannten Beleuchtungsstrahlen
DE102012205722B4 (de) * 2012-04-05 2020-07-23 Carl Zeiss Microscopy Gmbh Abbildendes Farbteilermodul, Mikroskop mit einem solchen Farbteilermodul sowie Verfahren zum Abbilden eines Objektfeldes in eine erste und eine zweite Bildebene
DE102012019472B4 (de) * 2012-09-28 2023-05-04 Carl Zeiss Microscopy Gmbh Optische Filtervorrichtung, insbesondere für Mikroskope, und Mikroskop
JP2014092682A (ja) * 2012-11-02 2014-05-19 Olympus Corp 顕微鏡用照明装置及びそれを備えた顕微鏡
KR102659810B1 (ko) * 2015-09-11 2024-04-23 삼성디스플레이 주식회사 결정화도 측정 장치 및 그 측정 방법
CN110494738B (zh) * 2017-04-07 2022-04-19 威里利生命科学有限责任公司 用于落射荧光收集的图案化的光学器件
EP4361703A1 (en) * 2022-10-27 2024-05-01 ASML Netherlands B.V. An illumination module for a metrology device

Family Cites Families (16)

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Publication number Priority date Publication date Assignee Title
US6167173A (en) 1997-01-27 2000-12-26 Carl Zeiss Jena Gmbh Laser scanning microscope
DE19702753C2 (de) 1997-01-27 2003-04-10 Zeiss Carl Jena Gmbh Laser-Scanning-Mikroskop
EP1055144B1 (de) 1998-02-19 2015-01-14 Leica Microsystems CMS GmbH Optische anordnung mit spektral selektivem element
US6377344B2 (en) 1998-08-04 2002-04-23 Carl Zeiss Jena Gmbh Adjustable coupling in and/or detection of one or more wavelengths in a microscope
DE19842288A1 (de) 1998-08-04 2000-02-10 Zeiss Carl Jena Gmbh Einstellbare Einkopplung und/oder Detektion einer oder mehrerer Wellenlängen in einem Mikroskop
DE19936573A1 (de) 1998-12-22 2001-02-08 Zeiss Carl Jena Gmbh Anordnung zur Separierung von Anregungs- und Emissionslicht in einem Mikroskop
DE19923822A1 (de) 1999-05-19 2000-11-23 Zeiss Carl Jena Gmbh Scannende Anordnung, vorzugsweise zur Erfassung von Fluoreszenzlicht
DE19930532C2 (de) * 1999-06-30 2002-03-28 Zeiss Carl Jena Gmbh Anordnung zur Optimierung der Pulsform in einem Laser-Scanning-Mikroskop
US6958811B2 (en) 2000-06-29 2005-10-25 Carl Zeiss Jena Gmbh Method for the detection of dyes in fluorescence microscopy
DE10033180B4 (de) 2000-06-29 2006-08-31 Carl Zeiss Jena Gmbh Verfahren zur Detektion von Farbstoffen in der Fluoreszenzmikroskopie
WO2002082166A2 (en) * 2001-04-03 2002-10-17 Cidra Corporation Variable optical source
DE10137155B4 (de) 2001-07-30 2006-11-30 Leica Microsystems Cms Gmbh Optische Anordnung und Scanmikroskop
US6888148B2 (en) 2001-12-10 2005-05-03 Carl Zeiss Jena Gmbh Arrangement for the optical capture of excited and /or back scattered light beam in a sample
US6947127B2 (en) 2001-12-10 2005-09-20 Carl Zeiss Jena Gmbh Arrangement for the optical capture of excited and/or back scattered light beam in a sample
DE10241472B4 (de) * 2002-09-04 2019-04-11 Carl Zeiss Microscopy Gmbh Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität
DE10247247A1 (de) * 2002-10-10 2004-04-22 Leica Microsystems Heidelberg Gmbh Optische Anordnung und Mikroskop

Also Published As

Publication number Publication date
US7605976B1 (en) 2009-10-20
EP1720054A3 (de) 2006-11-22
EP1720054A2 (de) 2006-11-08
JP2006313356A (ja) 2006-11-16
DE102005020543A1 (de) 2006-11-09

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