JP4859250B2 - 検査物に関する距離調整装置及び方法、検査装置及び方法 - Google Patents

検査物に関する距離調整装置及び方法、検査装置及び方法 Download PDF

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JP4859250B2
JP4859250B2 JP2008165175A JP2008165175A JP4859250B2 JP 4859250 B2 JP4859250 B2 JP 4859250B2 JP 2008165175 A JP2008165175 A JP 2008165175A JP 2008165175 A JP2008165175 A JP 2008165175A JP 4859250 B2 JP4859250 B2 JP 4859250B2
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distance
transmission line
terahertz wave
inspection object
unit
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JP2009075071A5 (enExample
JP2009075071A (ja
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泰史 小山
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Canon Inc
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Canon Inc
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JP2008165175A 2007-08-31 2008-06-25 検査物に関する距離調整装置及び方法、検査装置及び方法 Expired - Fee Related JP4859250B2 (ja)

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JP2008165175A JP4859250B2 (ja) 2007-08-31 2008-06-25 検査物に関する距離調整装置及び方法、検査装置及び方法
US12/201,745 US7737402B2 (en) 2007-08-31 2008-08-29 Distance adjusting apparatus and method, and object examining apparatus and method

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JP2007224942 2007-08-31
JP2007224942 2007-08-31
JP2008165175A JP4859250B2 (ja) 2007-08-31 2008-06-25 検査物に関する距離調整装置及び方法、検査装置及び方法

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JP2009075071A JP2009075071A (ja) 2009-04-09
JP2009075071A5 JP2009075071A5 (enExample) 2010-03-11
JP4859250B2 true JP4859250B2 (ja) 2012-01-25

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US9194829B2 (en) * 2012-12-28 2015-11-24 Fei Company Process for performing automated mineralogy
DE102018109250A1 (de) * 2018-04-18 2019-10-24 INOEX GmbH Innovationen und Ausrüstungen für die Extrusionstechnik Verfahren und THz-Messgerät zur Vermessung eines Messobjektes mit elektromagnetischer Strahlung
CN115951221B (zh) * 2022-01-04 2023-07-25 国仪量子(合肥)技术有限公司 电池包漏放电性能的检测方法和检测设备

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JP3950820B2 (ja) * 2003-06-25 2007-08-01 キヤノン株式会社 高周波電気信号制御装置及びセンシングシステム
JP2006218193A (ja) * 2005-02-14 2006-08-24 Pentax Corp 光学素子
JP4636917B2 (ja) * 2005-03-28 2011-02-23 キヤノン株式会社 検体保持用のデバイス、それを用いた検体検出装置及び検体検出方法
JP2006275910A (ja) * 2005-03-30 2006-10-12 Canon Inc 位置センシング装置及び位置センシング方法

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