JP4856571B2 - プラズマ発生装置 - Google Patents
プラズマ発生装置 Download PDFInfo
- Publication number
- JP4856571B2 JP4856571B2 JP2007064426A JP2007064426A JP4856571B2 JP 4856571 B2 JP4856571 B2 JP 4856571B2 JP 2007064426 A JP2007064426 A JP 2007064426A JP 2007064426 A JP2007064426 A JP 2007064426A JP 4856571 B2 JP4856571 B2 JP 4856571B2
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- JP
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- Prior art keywords
- cathode
- plasma
- magnetic field
- deflection electrode
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32055—Arc discharge
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Physical Vapour Deposition (AREA)
Description
2 カソードの長辺部/蒸発可能な面
3 カソードの端部
4 側部シールド
5 アーク電源
6 側部偏向電極
7 端部偏向電極
8 電磁コイル
9 コイル電源
10 プラズマの流れ方向
11 プラズマ流
12 プラズマ流
13 出力開口
14 出力開口
15 偏向バイアス電源/マクロ粒子の軌跡
17 バッフル板(反らせ板)
19 電磁コイル
20 電磁コイル
21 磁束線
30 マクロ粒子
101 カソード
102 蒸発可能な面
103 面
104 カソード側シールド
106 偏向電極
107 偏向電極
119 主電磁コイル/第一の要素
141 二次的電磁コイル/第二の要素
142 二次的電磁コイル/第二の要素
143 磁気透過性の極片
145a アノード面
145b カソード側シールド面
148 多角度の面
160 低磁界領域
161 磁束線
201 カソード
204 カソード側シールド
206 偏向電極
207 偏向電極
241 二次的電磁コイル
242 二次的電磁コイル
250 円筒状カルーセル
251 基板
Claims (15)
- プラズマ、及びカソード材料の溶融液滴を含むマクロ粒子を備える材料を放射する形態とされた蒸発可能な面(102)を有するカソード(101)と、プラズマを向け得る出力開口(13、14)と、フィルタとを備え、前記フィルタは、少なくとも1つの偏向電極(106、107)を有し、前記マクロ粒子の少なくとも一部の出力開口(13、14)への伝達を防止しつつ、プラズマの少なくとも一部を出力開口(13、14)まで伝達する形態とされたフィルタとを備えるプラズマ発生装置において、
カソード(101)と少なくとも1つの偏向電極(106、107)との間にて第一の極性を有する第一の磁界成分を発生させる第一の要素(119)と、
前記第一の要素(119)に囲まれた状態で前記カソード(101)の近傍に配置された第二の要素(141、142)であって、第一の極性と反対の第二の極性をカソード(101)の蒸発可能な面(102)に有する第二の磁界成分を発生させ、蒸発可能な面(102)と少なくとも1つの偏向電極(106、107)との間において、前記蒸発可能な面(102)の付近に、前記偏向電極(106、107)付近の磁界よりも弱い磁界を有する低磁界領域が形成されるようにする第二の要素(141、142)とを備えることを特徴とする、プラズマ発生装置。 - 請求項1に記載の装置において、少なくとも1つの偏向電極(106、107)が蒸発可能な面(102)の少なくとも一部分に対してほぼ平行に且つ、該少なくとも一部分に面する状態に配設される、プラズマ発生装置。
- 請求項1に記載の装置において、第一の磁界成分は、蒸発可能な面(102)に対して実質的に平行な磁束線を有する、プラズマ発生装置。
- 請求項3に記載の装置において、磁束線はまた、少なくとも1つの偏向電極(106、107)の面に対して実質的に平行である、プラズマ発生装置。
- 請求項1に記載の装置において、少なくとも1つの偏向電極(106、107)は、少なくとも2つの偏向面を備える、プラズマ発生装置。
- 請求項5に記載の装置において、少なくとも2つの偏向面の各々は、蒸発可能な面(102)の長辺部の1つの対し平行に且つ、該長辺部の1つに面する状態に取り付けられる、プラズマ発生装置。
- 請求項6に記載の装置において、少なくとも1つの偏向電極(106、107)は、前記マクロ粒子の少なくとも一部分が出力開口に到達するのを防止しつつ、プラズマを少なくとも2つの偏向面に対して平行な2つの方向に向けて偏向する形態とされる、プラズマ発生装置。
- 請求項1に記載の装置において、出力開口(13、14)は、プラズマを向け得るように互いに反対方向に向きを決められる、プラズマ発生装置。
- 請求項1に記載の装置において、フィルタは、蒸発可能な面(102)の両側部に取り付けられ且つ、蒸発可能な面(102)から、選択された距離だけ外方に突出する少なくとも2つの面を有するカソード側シールド(104)を更に備える、プラズマ発生装置。
- 請求項9に記載の装置において、側部シールド(104)は、蒸発可能な面(102)から放射された前記マクロ粒子の少なくとも一部が出力開口(13、14)に到達するのを防止する形態とされる、プラズマ発生装置。
- 請求項1に記載の装置において、カソード(101)は、4つの長辺部と、2つの端部とを有する矩形のバーの形状をしており、また、蒸発可能な面(102)は、2つの対向する長辺部と、バーの両端とを備える、プラズマ発生装置。
- 請求項1ないし11の何れか1つの項に記載の装置において、第一の磁界を発生させる第一の要素(119)は、ソレノイドコイルを備える、プラズマ発生装置。
- 請求項12に記載の装置において、第二の磁界を発生させる第二の要素(141、142)は、少なくとも1つの電磁コイルを備える、プラズマ発生装置。
- 請求項1ないし11の何れか1つの項に記載の装置において、第一の要素(119)及び第二の要素(141、142)の少なくとも一方は永久磁石を備える、プラズマ発生装置。
- 請求項1ないし11の何れか1つの項に記載の装置において、第一の要素(119)及び第二の要素(141、142)の少なくとも一方は電磁石を備える、プラズマ発生装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/415,369 US7498587B2 (en) | 2006-05-01 | 2006-05-01 | Bi-directional filtered arc plasma source |
US11/415,369 | 2006-05-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007299733A JP2007299733A (ja) | 2007-11-15 |
JP4856571B2 true JP4856571B2 (ja) | 2012-01-18 |
Family
ID=38278900
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007064426A Active JP4856571B2 (ja) | 2006-05-01 | 2007-03-14 | プラズマ発生装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7498587B2 (ja) |
EP (1) | EP1852891B1 (ja) |
JP (1) | JP4856571B2 (ja) |
CN (1) | CN101068449B (ja) |
CA (1) | CA2581409C (ja) |
ES (1) | ES2379825T3 (ja) |
MX (1) | MX2007005041A (ja) |
PL (1) | PL1852891T3 (ja) |
Families Citing this family (16)
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US8784657B2 (en) * | 2007-08-07 | 2014-07-22 | Drexel University | Plasma discharge self-cleaning filtration system |
JP5730888B2 (ja) | 2009-10-26 | 2015-06-10 | ジェネラル・プラズマ・インコーポレーテッド | ロータリーマグネトロンマグネットバー、およびこれを含む高いターゲット利用のための装置 |
US20120199070A1 (en) * | 2011-02-03 | 2012-08-09 | Vapor Technologies, Inc. | Filter for arc source |
US8541069B2 (en) | 2011-04-11 | 2013-09-24 | United Technologies Corporation | Method of guided non-line of sight coating |
US10304665B2 (en) | 2011-09-07 | 2019-05-28 | Nano-Product Engineering, LLC | Reactors for plasma-assisted processes and associated methods |
US9761424B1 (en) | 2011-09-07 | 2017-09-12 | Nano-Product Engineering, LLC | Filtered cathodic arc method, apparatus and applications thereof |
US9793098B2 (en) | 2012-09-14 | 2017-10-17 | Vapor Technologies, Inc. | Low pressure arc plasma immersion coating vapor deposition and ion treatment |
US10056237B2 (en) | 2012-09-14 | 2018-08-21 | Vapor Technologies, Inc. | Low pressure arc plasma immersion coating vapor deposition and ion treatment |
US9412569B2 (en) | 2012-09-14 | 2016-08-09 | Vapor Technologies, Inc. | Remote arc discharge plasma assisted processes |
CL2014000626A1 (es) | 2013-03-15 | 2014-10-03 | Vapor Technologies Inc | Un sistema de revestimiento que comprende una camara de vacio y un ensamble de revestimiento que incluye, una fuente de vapor, un soporte de sustrato, un anodo remoto, un ensamblaje de cámara de catodos, una fuente de energia principal y otra secundaria; y metodo asociado. |
CA2867451C (en) | 2013-10-28 | 2021-06-29 | Vapor Technologies, Inc. | Low pressure arc plasma immersion coating vapor deposition and ion treatment |
JP6403269B2 (ja) * | 2014-07-30 | 2018-10-10 | 株式会社神戸製鋼所 | アーク蒸発源 |
US10151025B2 (en) | 2014-07-31 | 2018-12-11 | Seagate Technology Llc | Helmholtz coil assisted PECVD carbon source |
US11834204B1 (en) | 2018-04-05 | 2023-12-05 | Nano-Product Engineering, LLC | Sources for plasma assisted electric propulsion |
CN109044165B (zh) * | 2018-08-31 | 2020-12-01 | 温州莱益机械有限公司 | 一种基于磁力防掉的带有梳妆镜的毛巾架 |
CN111250016B (zh) * | 2020-02-06 | 2022-08-05 | 徐国栋 | 一种用于治疗肿瘤及皮肤病的液体式等离子体装置 |
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-
2006
- 2006-05-01 US US11/415,369 patent/US7498587B2/en not_active Expired - Fee Related
-
2007
- 2007-03-09 CA CA2581409A patent/CA2581409C/en active Active
- 2007-03-14 JP JP2007064426A patent/JP4856571B2/ja active Active
- 2007-03-19 PL PL07005608T patent/PL1852891T3/pl unknown
- 2007-03-19 ES ES07005608T patent/ES2379825T3/es active Active
- 2007-03-19 EP EP07005608A patent/EP1852891B1/en active Active
- 2007-04-26 MX MX2007005041A patent/MX2007005041A/es active IP Right Grant
- 2007-04-26 CN CN2007101011111A patent/CN101068449B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
ES2379825T3 (es) | 2012-05-04 |
CN101068449B (zh) | 2011-04-27 |
CN101068449A (zh) | 2007-11-07 |
EP1852891A3 (en) | 2010-09-01 |
EP1852891B1 (en) | 2012-02-01 |
PL1852891T3 (pl) | 2012-06-29 |
CA2581409C (en) | 2010-09-07 |
US7498587B2 (en) | 2009-03-03 |
EP1852891A2 (en) | 2007-11-07 |
MX2007005041A (es) | 2009-02-16 |
CA2581409A1 (en) | 2007-11-01 |
US20070251816A1 (en) | 2007-11-01 |
JP2007299733A (ja) | 2007-11-15 |
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