JP4848876B2 - 固体撮像素子カバー及び固体撮像装置 - Google Patents
固体撮像素子カバー及び固体撮像装置 Download PDFInfo
- Publication number
- JP4848876B2 JP4848876B2 JP2006204259A JP2006204259A JP4848876B2 JP 4848876 B2 JP4848876 B2 JP 4848876B2 JP 2006204259 A JP2006204259 A JP 2006204259A JP 2006204259 A JP2006204259 A JP 2006204259A JP 4848876 B2 JP4848876 B2 JP 4848876B2
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- JP
- Japan
- Prior art keywords
- solid
- layer
- imaging device
- state imaging
- image sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000003384 imaging method Methods 0.000 title claims description 62
- 239000010408 film Substances 0.000 claims description 137
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 39
- 239000010936 titanium Substances 0.000 claims description 28
- 239000010453 quartz Substances 0.000 claims description 23
- 229910052746 lanthanum Inorganic materials 0.000 claims description 19
- 229910052719 titanium Inorganic materials 0.000 claims description 19
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 17
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 17
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 16
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 9
- 239000013078 crystal Substances 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 5
- 230000007547 defect Effects 0.000 description 14
- 239000011521 glass Substances 0.000 description 14
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 10
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 10
- 230000002411 adverse Effects 0.000 description 9
- 239000000428 dust Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 229910001385 heavy metal Inorganic materials 0.000 description 7
- 239000012535 impurity Substances 0.000 description 7
- 230000015572 biosynthetic process Effects 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 239000012788 optical film Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000037452 priming Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Images
Landscapes
- Surface Treatment Of Optical Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006204259A JP4848876B2 (ja) | 2006-07-27 | 2006-07-27 | 固体撮像素子カバー及び固体撮像装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006204259A JP4848876B2 (ja) | 2006-07-27 | 2006-07-27 | 固体撮像素子カバー及び固体撮像装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008034502A JP2008034502A (ja) | 2008-02-14 |
| JP2008034502A5 JP2008034502A5 (enrdf_load_stackoverflow) | 2009-09-03 |
| JP4848876B2 true JP4848876B2 (ja) | 2011-12-28 |
Family
ID=39123638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006204259A Expired - Fee Related JP4848876B2 (ja) | 2006-07-27 | 2006-07-27 | 固体撮像素子カバー及び固体撮像装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4848876B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2474848A4 (en) * | 2009-08-31 | 2016-03-16 | Olympus Corp | Imaging device |
| JP5721370B2 (ja) | 2010-08-27 | 2015-05-20 | キヤノン株式会社 | 光センサの製造方法、光センサ及びカメラ |
| JP6056186B2 (ja) * | 2012-05-08 | 2017-01-11 | 株式会社ニコン | 撮像素子 |
| JP2016195185A (ja) * | 2015-03-31 | 2016-11-17 | キヤノン株式会社 | 光学部品の製造方法、光学部品、光学装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002353352A (ja) * | 2001-05-30 | 2002-12-06 | Kyocera Corp | 撮像素子収納用パッケージ |
| JP2002365590A (ja) * | 2001-06-06 | 2002-12-18 | Tochigi Nikon Corp | 光学素子、光学素子の製造方法、および、光アイソレータ |
| JP2004221634A (ja) * | 2003-01-09 | 2004-08-05 | Seiko Epson Corp | 光モジュール及びその製造方法並びに電子機器 |
| JP2006084733A (ja) * | 2004-09-15 | 2006-03-30 | Epson Toyocom Corp | 偏光解消板及び電子光学機器 |
-
2006
- 2006-07-27 JP JP2006204259A patent/JP4848876B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008034502A (ja) | 2008-02-14 |
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