JP4829495B2 - 振動波駆動装置 - Google Patents

振動波駆動装置 Download PDF

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Publication number
JP4829495B2
JP4829495B2 JP2004369438A JP2004369438A JP4829495B2 JP 4829495 B2 JP4829495 B2 JP 4829495B2 JP 2004369438 A JP2004369438 A JP 2004369438A JP 2004369438 A JP2004369438 A JP 2004369438A JP 4829495 B2 JP4829495 B2 JP 4829495B2
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JP
Japan
Prior art keywords
electrode film
piezoelectric element
energy conversion
vibration wave
conversion element
Prior art date
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Expired - Fee Related
Application number
JP2004369438A
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English (en)
Japanese (ja)
Other versions
JP2006179578A5 (enExample
JP2006179578A (ja
Inventor
潔 日塔
裕 丸山
貴之 月本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
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Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2004369438A priority Critical patent/JP4829495B2/ja
Priority to US11/298,796 priority patent/US7459832B2/en
Publication of JP2006179578A publication Critical patent/JP2006179578A/ja
Publication of JP2006179578A5 publication Critical patent/JP2006179578A5/ja
Priority to US12/249,820 priority patent/US7633215B2/en
Application granted granted Critical
Publication of JP4829495B2 publication Critical patent/JP4829495B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/106—Langevin motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/0015—Driving devices, e.g. vibrators using only bending modes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2027—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having cylindrical or annular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2004369438A 2004-12-21 2004-12-21 振動波駆動装置 Expired - Fee Related JP4829495B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004369438A JP4829495B2 (ja) 2004-12-21 2004-12-21 振動波駆動装置
US11/298,796 US7459832B2 (en) 2004-12-21 2005-12-09 Electro-mechanical energy converter and vibration wave driving
US12/249,820 US7633215B2 (en) 2004-12-21 2008-10-10 Electro-mechanical energy converter and vibration wave driving

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004369438A JP4829495B2 (ja) 2004-12-21 2004-12-21 振動波駆動装置

Publications (3)

Publication Number Publication Date
JP2006179578A JP2006179578A (ja) 2006-07-06
JP2006179578A5 JP2006179578A5 (enExample) 2008-01-24
JP4829495B2 true JP4829495B2 (ja) 2011-12-07

Family

ID=36594769

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004369438A Expired - Fee Related JP4829495B2 (ja) 2004-12-21 2004-12-21 振動波駆動装置

Country Status (2)

Country Link
US (2) US7459832B2 (enExample)
JP (1) JP4829495B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10516349B2 (en) 2015-12-04 2019-12-24 Canon Kabushiki Kaisha Method of driving vibration actuator with enhanced sliding efficiency, vibration drive device, and mechanical apparatus

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006352984A (ja) * 2005-06-15 2006-12-28 Tdk Corp 圧電薄膜振動子およびその製造方法、並びにそれを用いた駆動装置および圧電モータ
JP5099223B2 (ja) 2008-05-29 2012-12-19 株式会社村田製作所 圧電スピーカ、スピーカ装置およびタクタイルフィードバック装置
CN102047459B (zh) 2008-05-29 2013-10-16 株式会社村田制作所 片材型振动体以及音响设备
JP5222224B2 (ja) * 2008-12-04 2013-06-26 スミダコーポレーション株式会社 超音波モータ
DE102009049719A1 (de) * 2009-10-17 2011-04-21 Physik Instrumente (Pi) Gmbh & Co. Kg Aktuator
FR2992120B1 (fr) * 2012-06-15 2014-07-18 Commissariat Energie Atomique Actionneur pour moteur ultrasonique et moteur ultrasonique comportant au moins un tel actionneur
JP6025446B2 (ja) * 2012-08-10 2016-11-16 キヤノン株式会社 振動型アクチュエータ、撮像装置および、振動型アクチュエータを備えた装置
CN108802197B (zh) * 2018-06-13 2021-02-02 武汉科技大学 谐振频率可调的压电智能骨料
DE102022114863B3 (de) * 2022-06-13 2023-10-19 Physik Instrumente (PI) GmbH & Co KG Ultraschallmotor
JP2024034804A (ja) * 2022-09-01 2024-03-13 キヤノン株式会社 振動波モータ及び駆動装置
WO2024254384A2 (en) * 2023-06-09 2024-12-12 Worcester Polytechnic Institute Apparatus and methods for image-guided robotic surgical interventions

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3416233A (en) * 1966-11-04 1968-12-17 Aerojet General Co Extensometer and attachment
US5345137A (en) * 1991-04-08 1994-09-06 Olympus Optical Co., Ltd. Two-dimensionally driving ultrasonic motor
US5814919A (en) * 1995-04-28 1998-09-29 Canon Kabushiki Kaisha Electro-mechanical energy conversion element and a vibration wave actuator using the electro-mechanical energy conversion element
JP4704537B2 (ja) * 2000-01-31 2011-06-15 セイコーインスツル株式会社 超音波モータ及び超音波モータ付き電子機器
US6930436B2 (en) * 2001-01-22 2005-08-16 Canon Kabushiki Kaisha Vibration element and vibration wave driving apparatus
JP2003047266A (ja) 2001-07-27 2003-02-14 Canon Inc 振動波駆動装置
JP5031153B2 (ja) * 2001-07-31 2012-09-19 キヤノン株式会社 積層電気−機械エネルギー変換素子および振動波駆動装置
DE10233100A1 (de) * 2002-07-20 2004-01-29 Robert Bosch Gmbh Piezoelektrisches Aktormodul und Verfahren zur Montage eines piezoelektrischen Aktormoduls

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10516349B2 (en) 2015-12-04 2019-12-24 Canon Kabushiki Kaisha Method of driving vibration actuator with enhanced sliding efficiency, vibration drive device, and mechanical apparatus

Also Published As

Publication number Publication date
US7633215B2 (en) 2009-12-15
US20090039735A1 (en) 2009-02-12
US20060131999A1 (en) 2006-06-22
JP2006179578A (ja) 2006-07-06
US7459832B2 (en) 2008-12-02

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