JP4826052B2 - 窒化物半導体レーザ素子 - Google Patents

窒化物半導体レーザ素子 Download PDF

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Publication number
JP4826052B2
JP4826052B2 JP2003027517A JP2003027517A JP4826052B2 JP 4826052 B2 JP4826052 B2 JP 4826052B2 JP 2003027517 A JP2003027517 A JP 2003027517A JP 2003027517 A JP2003027517 A JP 2003027517A JP 4826052 B2 JP4826052 B2 JP 4826052B2
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Japan
Prior art keywords
layer
nitride semiconductor
stripe
protective film
ridge
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Expired - Fee Related
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JP2003027517A
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Japanese (ja)
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JP2003243775A (ja
JP2003243775A5 (enExample
Inventor
拓明 松村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nichia Corp
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Nichia Corp
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Priority to JP2003027517A priority Critical patent/JP4826052B2/ja
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Publication of JP2003243775A5 publication Critical patent/JP2003243775A5/ja
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JP2003027517A 2003-02-04 2003-02-04 窒化物半導体レーザ素子 Expired - Fee Related JP4826052B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003027517A JP4826052B2 (ja) 2003-02-04 2003-02-04 窒化物半導体レーザ素子

Applications Claiming Priority (1)

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JP2003027517A JP4826052B2 (ja) 2003-02-04 2003-02-04 窒化物半導体レーザ素子

Related Parent Applications (1)

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JP2000023297A Division JP3424634B2 (ja) 2000-01-27 2000-01-27 窒化物半導体レーザ素子

Publications (3)

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JP2003243775A JP2003243775A (ja) 2003-08-29
JP2003243775A5 JP2003243775A5 (enExample) 2007-03-15
JP4826052B2 true JP4826052B2 (ja) 2011-11-30

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ID=27785764

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JP2003027517A Expired - Fee Related JP4826052B2 (ja) 2003-02-04 2003-02-04 窒化物半導体レーザ素子

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JP (1) JP4826052B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006303052A (ja) * 2005-04-19 2006-11-02 Nec Electronics Corp 半導体レーザ装置及び半導体レーザ装置の製造方法
JP2008311434A (ja) 2007-06-14 2008-12-25 Mitsubishi Electric Corp 半導体光素子の製造方法
JP2008103772A (ja) * 2008-01-17 2008-05-01 Matsushita Electric Ind Co Ltd 半導体レーザ装置
DE102012106687B4 (de) * 2012-07-24 2019-01-24 Osram Opto Semiconductors Gmbh Steglaser

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10229246A (ja) * 1997-02-18 1998-08-25 Mitsubishi Electric Corp リッジ型半導体レーザダイオードとその製造方法
JPH10256645A (ja) * 1997-03-12 1998-09-25 Matsushita Electric Ind Co Ltd 半導体発光素子およびその製造方法
JPH114041A (ja) * 1997-06-13 1999-01-06 Mitsubishi Electric Corp 半導体レーザの製造方法
JPH11214800A (ja) * 1998-01-28 1999-08-06 Sony Corp 半導体装置およびその製造方法

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JP2003243775A (ja) 2003-08-29

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