JP4825867B2 - Wire saw system - Google Patents

Wire saw system Download PDF

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JP4825867B2
JP4825867B2 JP2008331528A JP2008331528A JP4825867B2 JP 4825867 B2 JP4825867 B2 JP 4825867B2 JP 2008331528 A JP2008331528 A JP 2008331528A JP 2008331528 A JP2008331528 A JP 2008331528A JP 4825867 B2 JP4825867 B2 JP 4825867B2
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Prior art keywords
workpiece
wire saw
holding member
holding
held
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JP2010149248A (en
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茂雄 小林
仁 具志堅
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Komatsu NTC Ltd
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Komatsu NTC Ltd
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Priority to JP2008331528A priority Critical patent/JP4825867B2/en
Priority to TW098144157A priority patent/TWI481489B/en
Priority to KR1020090130467A priority patent/KR20100075761A/en
Priority to CN200910249572.2A priority patent/CN101774149B/en
Publication of JP2010149248A publication Critical patent/JP2010149248A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D61/00—Tools for sawing machines or sawing devices; Clamping devices for these tools
    • B23D61/18—Sawing tools of special type, e.g. wire saw strands, saw blades or saw wire equipped with diamonds or other abrasive particles in selected individual positions
    • B23D61/185—Saw wires; Saw cables; Twisted saw strips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/06—Grinders for cutting-off
    • B24B27/0683—Accessories therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Description

この発明は、例えば半導体材料、磁性材料、セラミック等の硬脆材料よりなるワークをワイヤにより切断するワイヤソーとワーク受け渡し装置とを備えたワイヤソーシステムに関するものである。 The present invention for example a semiconductor material, relates to a wire saw system comprising a Waiyaso over the workpiece delivery device for cutting the wire to the workpiece made of a hard and brittle materials such as ceramic.

従来、この種の技術としては、例えば特許文献１及び特許文献２に開示されるような構成が提案されている。
特許文献１に記載の従来構成では、加工用ローラ間のワーク切断用ワイヤの上方に、ワークをワイヤに向かって昇降可能に吊下状態で保持するための保持部材が配置されている。ワークの上面には被保持体が固定され、この被保持体が前記保持部材に対して加工用ローラの軸線方向へスライド可能に支持される。ワイヤソーに対応してワーク受け渡し装置が設けられ、そのワーク受け渡し装置にはワーク上の被保持体を支持して、ワイヤソー側の保持部材との間でワークの受け渡しをガイドするためのガイド部材が設けられている。 Conventionally, as this type of technology, for example, configurations as disclosed in Patent Literature 1 and Patent Literature 2 have been proposed.
In the conventional configuration described in Patent Document 1, a holding member for holding the workpiece in a suspended state so as to be movable up and down toward the wire is disposed above the workpiece cutting wire between the processing rollers. A to-be-held body is fixed to the upper surface of the workpiece, and this to-be-held body is supported so as to be slidable in the axial direction of the processing roller with respect to the holding member. A workpiece transfer device is provided corresponding to the wire saw, and the workpiece transfer device is provided with a guide member for supporting the object to be held on the workpiece and guiding the transfer of the workpiece with the holding member on the wire saw side. It has been.

また、特許文献２に記載の従来構成では、加工用ローラ間のワイヤの上方に、ワークをワイヤに向かって昇降可能に吊下状態で保持するための保持部材が配置されている。ワークの上面には被保持体が固定され、この被保持体が前記保持部材に対して加工用ローラの軸線方向と直交する方向へスライド可能に支持される。
特開２００８−２４６６４３号公報 特開平１０-２０２４９９号公報 Further, in the conventional configuration described in Patent Document 2, a holding member for holding the workpiece in a suspended state so as to be movable up and down toward the wire is disposed above the wire between the processing rollers. A to-be-held body is fixed to the upper surface of the workpiece, and this to-be-held body is supported by the holding member so as to be slidable in a direction perpendicular to the axial direction of the processing roller.
JP 2008-246643 A JP-A-10-202499

ところが、これらの従来構成においては、次のような問題があった。
特許文献１に記載の従来構成においては、ワーク上の被保持体をワイヤソーの保持部材に対して、加工用ローラの軸線方向へスライドさせることにより受け渡しするようになっている。このため、複数のワークを加工用ローラの軸線方向に沿って並設した状態で被保持体に固定したり、加工用ローラの軸線方向に長いワークを被保持体に固定したりした場合には、保持部材に対する被保持体のスライド距離が長くなる。そして、スライド距離が長くなると、保持部材のガイド方向と被保持体の移動方向とが一致しないと、前記スライドにおいてこじれが生じる。このため、スライド距離が長い場合は、被保持体の移動方向を保持部材のガイド方向に正確に合わせる必要があり、ワイヤソー側に被保持体の導入をガイドする構造が設けられているとしても、ワークの装着作業が面倒であった。 However, these conventional configurations have the following problems.
In the conventional configuration described in Patent Document 1, a workpiece to be held on a workpiece is delivered by sliding it in the axial direction of the processing roller with respect to the holding member of the wire saw. For this reason, when a plurality of workpieces are arranged in parallel along the axial direction of the processing roller and fixed to the held body, or a workpiece that is long in the axial direction of the processing roller is fixed to the held body. The sliding distance of the object to be held with respect to the holding member becomes longer. If the slide distance is increased, the slide will be twisted if the guide direction of the holding member does not match the moving direction of the object to be held. For this reason, when the slide distance is long, it is necessary to accurately match the moving direction of the held body with the guide direction of the holding member, and even if a structure for guiding the introduction of the held body is provided on the wire saw side, The work of attaching the work was troublesome.

また、特許文献２に記載の従来構成においては、ワーク上の被保持体をワイヤソー側の保持部材に対して装着する場合の導入をガイドする構造が設けられていない。このため、保持部材に対する被保持体の導入に手間がかかり、スライド方向が加工用ローラの軸線方向と直交する方向になっていても、ワークの受け渡し作業を容易に行うことができなかった。   Further, in the conventional configuration described in Patent Document 2, there is no structure for guiding the introduction when the object to be held on the work is attached to the holding member on the wire saw side. For this reason, it takes time to introduce the object to be held into the holding member, and even if the sliding direction is in a direction perpendicular to the axial direction of the processing roller, the work transfer operation cannot be easily performed.

この発明は、このような従来の技術に存在する問題点に着目してなされたものである。その目的は、ワイヤソーに対するワークの装着を容易に行うことができるワイヤソーシステムを提供することにある。 The present invention has been made paying attention to such problems existing in the prior art. Its purpose is to provide a Ruwa ear saw system can perform the mounting work easily for a wire saw.

上記の目的を達成するために、ワイヤソーシステムの発明は、複数本の加工用ローラを平行に配置するとともに、その加工用ローラと対向する位置においてワークを着脱可能に保持する保持手段を設け、その保持手段に保持されたワークを前記加工用ローラ間に張設されたワイヤにより切断するようにしたワイヤソーと、ワークを前記保持手段との間において受け渡し可能に支持する受け渡し位置と、そこから離間する位置との間を移動可能なワーク受け渡し装置とよりなるワイヤソーシステムにおいて、前記保持手段に対するワークの着脱方向を、前記加工用ローラの軸線と平行な上下方向の平面に対して直交する方向にするとともに、その保持手段には、ワークの上面に固定された被保持体をスライド可能に吊下してワークを被加工位置にガイドし、且つその被加工位置で保持する保持部材を有し、その保持部材の先端部にワークの装着位置への導入をガイドするための導入ガイド部を設け、前記保持手段には、前記被保持体の位置を規制するための規制面を形成するとともに、前記保持部材を前記規制面に対して接近離間可能にし、前記保持部材を前記接近方向に移動させて被保持体を前記規制面に対して規制状態で圧接させる駆動手段を設け、前記ワーク受け渡し装置は、ワークの上面に固定された被保持体をワイヤソーの前記保持部材の高さ位置に配置し、ワークの上面に固定された前記被保持体をスライド可能に吊下するとともに、ワークをワイヤソーの前記保持部材の先端にガイドするためのガイド部材を有し、ワイヤソーとワーク受け渡し装置との間に、ワーク受け渡し装置を前記保持部材に対して位置決めするための位置決め手段を設けたことを特徴とする。 In order to achieve the above object, the invention of the wire saw system includes a plurality of processing rollers arranged in parallel, and provided with holding means for detachably holding a workpiece at a position facing the processing rollers, A wire saw that cuts the workpiece held by the holding means with a wire stretched between the processing rollers , a delivery position that supports the workpiece so as to be delivered between the holding means, and a distance from the delivery position. In a wire saw system comprising a workpiece transfer device that can move between positions, a workpiece mounting / removal direction with respect to the holding means is set to a direction orthogonal to a vertical plane parallel to the axis of the processing roller. and its retaining means, the work position workpiece suspended from the held body fixed to the upper surface of the workpiece slidably Guide to, and has a holding member for holding at that the processing position, the introduction guide portion for guiding the introduction of the mounting position of the workpiece on the tip portion of the holding member is provided, said holding means, the object to be A restricting surface for restricting the position of the holding body is formed, the holding member can be moved closer to and away from the restricting surface, and the holding member is moved in the approaching direction so that the held body becomes the restricting surface. Drive means for pressure-contacting in a regulated state is provided, and the workpiece transfer device is configured such that a held body fixed to the upper surface of the workpiece is disposed at a height position of the holding member of the wire saw and fixed to the upper surface of the workpiece. A holding member is slidably suspended and has a guide member for guiding the workpiece to the tip of the holding member of the wire saw, and the workpiece receiving unit is interposed between the wire saw and the workpiece transfer device. The pass device is characterized in that a positioning means for positioning with respect to the holding member.

従って、複数のワークを加工用ローラの軸線方向に並設した状態であっても、また、ワークが加工用ローラの軸線方向に長いものであっても、ワークを保持手段に対して簡単に導入できるとともに、大きくスライドさせることなく装着することができる。よって、この発明においては、ワーク受け渡し装置を用いて、ワイヤソーに対するワークの装着作業をこじれが生じることなく容易に行うことができる。加えて、ワイヤソーに対するワークの装着において、保持部材，すなわちワーク装着位置に対するワークの位置決めが容易になるため、ワークをガイド部材とワイヤソーの保持部材との間で容易に受け渡すことができる。 Therefore, even when a plurality of workpieces are arranged side by side in the axial direction of the processing roller, or even if the workpiece is long in the axial direction of the processing roller, the workpiece can be easily introduced into the holding means. At the same time, it can be mounted without sliding greatly. Therefore, in the present invention, the work attaching operation to the wire saw can be easily performed without causing the use of the work delivery device . In addition, since the workpiece can be easily positioned with respect to the workpiece mounting position when the workpiece is mounted on the wire saw, the workpiece can be easily transferred between the guide member and the wire saw holding member.

また、保持部材がワークの保持機能及びスライドガイド機能を有するために、構成を簡素化できるとともに、導入ガイド部の作用により、保持部材へのワークのスライドをこじれることなく円滑に行うことができる。 Also, in order to hold member has a holding function and a sliding guide function of the workpiece, it is possible to simplify the configuration, by the action of the introduction guide section, be smoothly performed without gets worse the slide of the work of the holding member it can.

さらに、規制面が下方に向かって開放されるため、規制面の清掃を容易に行うことができる。 Furthermore, since the regulation surface is opened downward, it is possible to easily clean the regulating surface.

さらに、前記の構成において、前記ワーク受け渡し装置は、前記ガイド部材に吊下されたワークからの滴下スラリを受けるための受け皿を有することが望ましい。このようにすれば、ワイヤソーの周辺の床面等の汚染を防止できる。   Furthermore, in the above-described configuration, it is preferable that the workpiece transfer device includes a tray for receiving a dripping slurry from a workpiece suspended from the guide member. In this way, it is possible to prevent contamination of the floor surface around the wire saw.

加えて、前記ガイド部材を前記保持部材に接近する位置と保持部材から離間する位置との間で移動できるようにフレームに支持するとともに、少なくとも前記離間位置においてガイド部材を固定するための固定手段を設けることが好ましい。このようにすれば、ワークを着脱位置において安定させることができ、ワーク着脱が容易になる。   In addition, the guide member is supported by the frame so as to be movable between a position approaching the holding member and a position separating from the holding member, and fixing means for fixing the guide member at least in the separation position. It is preferable to provide it. If it does in this way, a workpiece | work can be stabilized in an attachment / detachment position, and workpiece | work attachment / detachment becomes easy.

以上のように、この発明によれば、ワイヤソーに対してワークの着脱作業を容易に行うことができるという効果を発揮する。   As described above, according to the present invention, there is an effect that the work can be easily attached to and detached from the wire saw.

以下に、この発明の一実施形態を、図面に基づいて説明する。
図１に示すように、この実施形態のワイヤソーシステムは、ワークＷを切断するワイヤソー２０と、そのワイヤソー２０に対して加工前のワークＷを装着したり、加工済みのワークＷを取り外したりするためのワーク受け渡し装置４１とを備えている。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
As shown in FIG. 1, the wire saw system of this embodiment is for cutting a workpiece W, attaching a workpiece W before processing to the wire saw 20, and removing a processed workpiece W. The workpiece transfer device 41 is provided.

図１〜図３に示すように、前記ワイヤソー２０においては、基台２１上のコラム２２に切断機構２３が装設されている。この切断機構２３は、相互間隔をおいて平行に延びる一対の加工用ローラ２４，２５を備え、それらの加工用ローラ２４，２５の外周には環状溝２４ａ，２５ａが所定ピッチで形成されている。加工用ローラ２４，２５の各環状溝２４ａ，２５ａには、１本の線材よりなるワイヤ２６が連続的に巻回されている。そして、図示しない走行用モータにて加工用ローラ２４，２５が回転されることにより、ワイヤ２６が加工用ローラ２４，２５間において走行される。この場合、ワイヤ２６の走行は、一定量前進及び一定量後退を繰り返して、全体として歩進的に前進し、または一方向に連続して前進するように行われる。前記加工用ローラは、少なくとも一対あればよく、相互間隔をおいて平行に配置される構成であれば、３本以上でもよい。   As shown in FIGS. 1 to 3, in the wire saw 20, a cutting mechanism 23 is mounted on a column 22 on a base 21. The cutting mechanism 23 includes a pair of processing rollers 24 and 25 extending in parallel with each other, and annular grooves 24a and 25a are formed on the outer circumferences of the processing rollers 24 and 25 at a predetermined pitch. . A wire 26 made of one wire is continuously wound around the annular grooves 24a and 25a of the processing rollers 24 and 25. Then, the processing rollers 24 and 25 are rotated by a travel motor (not shown), so that the wire 26 travels between the processing rollers 24 and 25. In this case, the traveling of the wire 26 is performed so that the wire 26 moves forward stepwise as a whole or continuously advances in one direction by repeating a certain amount of forward movement and a certain amount of backward movement. There may be at least a pair of the processing rollers, and three or more rollers may be used as long as they are arranged parallel to each other.

ワイヤソー２０のボディには、ワークＷを出し入れするために、加工用ローラ２４，２５の軸線方向と直交する方向に向かって開放する開口２０ａが形成されている。
前記切断機構２３の上方位置には、スラリ供給装置２７が配置されている。そして、このスラリ供給装置２７から加工用ローラ２４，２５間のワイヤ２６に、遊離砥粒を含むスラリが供給される。 In the body of the wire saw 20, an opening 20 a is formed that opens in a direction perpendicular to the axial direction of the processing rollers 24 and 25 in order to load and unload the workpiece W.
A slurry supply device 27 is disposed above the cutting mechanism 23. Then, slurry containing loose abrasive grains is supplied from the slurry supply device 27 to the wire 26 between the processing rollers 24 and 25.

切断機構２３の上方においてコラム２２には、ワークＷを支持するためのワーク支持装置２８が昇降可能に配置されている。ワークＷは、図２に示すように、加工用ローラ２４，２５の軸線方向に沿って並設された複数のもの、あるいは図示はしないが、加工用ローラ２４，２５の軸線方向に延びる長い単一のものが用いられる。そして、ワイヤソー２０の運転時には、ワイヤ２６が切断機構２３の加工用ローラ２４，２５間で走行されるとともに、そのワイヤ２６上にスラリ供給装置２７からスラリが供給されながら、ワーク支持装置２８によりワークＷが切断機構２３に向かって下降される。これによって、ワークＷがワイヤ２６に押し付けられて切断される。   Above the cutting mechanism 23, a work support device 28 for supporting the work W is disposed on the column 22 so as to be movable up and down. As shown in FIG. 2, the workpiece W includes a plurality of workpieces arranged side by side along the axial direction of the processing rollers 24 and 25, or a long single unit extending in the axial direction of the processing rollers 24 and 25, although not shown. One is used. During operation of the wire saw 20, the wire 26 travels between the processing rollers 24 and 25 of the cutting mechanism 23, and the workpiece is supported by the work support device 28 while slurry is supplied onto the wire 26 from the slurry supply device 27. W is lowered toward the cutting mechanism 23. Thereby, the workpiece W is pressed against the wire 26 and cut.

次に、前記ワークＷをワイヤソー２０に保持するための構成について詳細に説明する。
図４〜図６に示すように、前記ワークＷの上面には、ガラスプレート３１及び金属プレート３２が接着固定されている。金属プレート３２の上面には、金属製の被保持体３３が図示しない複数のボルトにより着脱可能に取り付けられている。被保持体３３の上面には複数の被保持片３４が突設され、各被保持片３４の頂壁上面には被規制面３４ａが形成されている。隣接する各一対の被保持片３４の内側には、ワイヤソー２０に対する装着状態で前記加工用ローラ２４，２５の軸線方向と直交する方向に延びる段差状の第１係合部３４ｂ及び第２係合部３４ｃが形成されている。 Next, a configuration for holding the workpiece W on the wire saw 20 will be described in detail.
As shown in FIGS. 4 to 6, a glass plate 31 and a metal plate 32 are bonded and fixed to the upper surface of the workpiece W. On the upper surface of the metal plate 32, a metal holder 33 is detachably attached by a plurality of bolts (not shown). A plurality of held pieces 34 project from the upper surface of the held body 33, and a regulated surface 34 a is formed on the upper surface of the top wall of each held piece 34. On the inner side of each pair of adjacent pieces 34 to be held, step-like first engagement portions 34b and second engagements extending in a direction perpendicular to the axial direction of the processing rollers 24 and 25 in a state of being attached to the wire saw 20. A portion 34c is formed.

図５〜図７に示すように、前記ワークＷを支持するための保持手段としてのワーク支持部材３５は、加工用ローラ２４，２５間に掛装されたワイヤ２６の上方においてワイヤソー２０に昇降可能に配置されている。ワーク支持部材３５の下面には、前記被保持体３３上の第１係合部３４ｂに係合可能な正面形ほぼ逆Ｔ字状をなす保持手段としての複数の保持部材３６が支持されている。ワーク支持部材３５の上面には駆動手段としての複数のシリンダ３７が配置され、それらのシリンダ３７のピストンロッド３７ａの下端に前記保持部材３６がボルト３８により固定されている。   As shown in FIGS. 5 to 7, the work support member 35 as a holding means for supporting the work W can be raised and lowered to the wire saw 20 above the wire 26 hung between the processing rollers 24 and 25. Is arranged. On the lower surface of the work support member 35, a plurality of holding members 36 are supported as holding means having a substantially inverted T shape that can be engaged with the first engaging portion 34 b on the held body 33. . A plurality of cylinders 37 as drive means are disposed on the upper surface of the work support member 35, and the holding member 36 is fixed to the lower ends of the piston rods 37 a of the cylinders 37 by bolts 38.

そして、前記シリンダ３７のピストンロッド３７ａが下方に突出動作されることにより、保持部材３６が上方位置から図６に実線及び図７に鎖線で示す下方位置に移動される。この状態で前記ワーク受け渡し装置４１上のワークＷの被保持体３３の第１係合部３４ｂが保持部材３６と係合する位置に移動される。そして、第１係合部３４ｂが保持部材３６上をその基端側に向かってスライドされる。その後に、シリンダ３７のピストンロッド３７ａが上方に没入動作されることにより、保持部材３６が図４及び図７に実線で示す上方位置に移動される。これによって、被保持体３３が第１係合部３４ｂを介して引き上げられて、その被保持体３３上の被規制面３４ａがワーク支持部材３５の下面の規制面３５ａに圧接される。その結果、ワークＷがワーク支持部材３５の規制面３５ａに吊り下げ状態で保持される。   When the piston rod 37a of the cylinder 37 projects downward, the holding member 36 is moved from the upper position to the lower position indicated by the solid line in FIG. 6 and the chain line in FIG. In this state, the first engagement portion 34 b of the workpiece 33 on the workpiece W on the workpiece transfer device 41 is moved to a position where it engages with the holding member 36. Then, the first engaging portion 34b is slid on the holding member 36 toward the proximal end side. Thereafter, when the piston rod 37a of the cylinder 37 is moved upward, the holding member 36 is moved to an upper position indicated by a solid line in FIGS. As a result, the held body 33 is pulled up via the first engaging portion 34 b, and the regulated surface 34 a on the held body 33 is pressed against the regulating surface 35 a on the lower surface of the work support member 35. As a result, the workpiece W is held in a suspended state on the regulation surface 35 a of the workpiece support member 35.

図３及び図７に示すように、前記保持部材３６の後方において、ワーク支持部材３５の下面には、位置決め部材３９が突設されている。そして、図３に示すように、ワークＷ上の被保持体３３が導入ガイド部３６ａに沿って保持部材３６の基端側にガイド移動されたとき、この位置決め部材３９に被保持体３３の後面が当接される。この当接により、被保持体３３がワーク支持部材３５に対して前後方向の所定位置に位置決めされる。   As shown in FIGS. 3 and 7, a positioning member 39 projects from the lower surface of the work support member 35 behind the holding member 36. As shown in FIG. 3, when the held member 33 on the workpiece W is guided and moved to the proximal end side of the holding member 36 along the introduction guide portion 36a, the rear surface of the held member 33 is moved to the positioning member 39. Is abutted. By this contact, the held body 33 is positioned at a predetermined position in the front-rear direction with respect to the work support member 35.

図４〜図７に示すように、前記各保持部材３６の先端部には、被保持体３３上の第１係合部３４ｂに係合可能な導入ガイド部３６ａが前方に向かって突出形成されている。この導入ガイド部３６ａは、傾斜面により前端縁に向かって先細状になるように形成されている。そして、図７に鎖線で示すように、保持部材３６が下方位置に配置された状態で、被保持体３３の第１係合部３４ｂが導入ガイド部３６ａの前端側から保持部材３６の基端側にガイド移動される。そして、被保持体３３のスライド方向が前記加工用ローラ２４，２５の軸線を上下方向に通る平面に対して直交する方向となるように、保持部材３６が配置されている。ただし、ワークＷの加工に問題がなければ、被保持体３３のスライド方向が前記加工用ローラ２４，２５の軸線を上下方向に通る平面と斜交する方向となるように、保持部材３６が配置されていてもよい。   As shown in FIG. 4 to FIG. 7, an introduction guide portion 36 a that can be engaged with the first engagement portion 34 b on the held body 33 is formed at the front end portion of each holding member 36 so as to protrude forward. ing. The introduction guide portion 36a is formed to be tapered toward the front end edge by the inclined surface. Then, as indicated by a chain line in FIG. 7, the first engagement portion 34b of the held body 33 is located at the base end of the holding member 36 from the front end side of the introduction guide portion 36a with the holding member 36 disposed at the lower position. Guided to the side. The holding member 36 is arranged so that the sliding direction of the held body 33 is perpendicular to a plane passing through the axes of the processing rollers 24 and 25 in the vertical direction. However, if there is no problem in processing the workpiece W, the holding member 36 is arranged so that the sliding direction of the held body 33 is oblique to a plane passing through the axis of the processing rollers 24 and 25 in the vertical direction. May be.

次に、前記ワーク受け渡し装置４１の構成及びその関連構成について詳細に説明する。
図１及び図８〜図１０に示すように、このワーク受け渡し装置４１のフレーム４２は、縦枠部４２ａと、その縦枠部４２ａの下端から側方に突設された一対のアーム部４２ｂとを備えている。フレーム４２の下面四隅には、車輪４３が取り付けられている。フレーム４２はワーク受け渡し装置４１を移動させるためのハンドル４４を備えている。フレーム４２のアーム部４２ｂ間には、複数のローラ４５が支持板４６を介して、アーム部４２ｂの延長方向に沿うとともに、アーム部４２ｂの延長方向と直交する方向へ間隔をおいた状態で配置されている。支持板４６の上面には、位置決め突起４７が設けられている。 Next, the configuration of the workpiece transfer device 41 and its related configuration will be described in detail.
As shown in FIGS. 1 and 8 to 10, the frame 42 of the workpiece transfer device 41 includes a vertical frame portion 42 a and a pair of arm portions 42 b that protrude from the lower end of the vertical frame portion 42 a to the side. It has. Wheels 43 are attached to the four corners of the lower surface of the frame 42. The frame 42 includes a handle 44 for moving the work transfer device 41. Between the arm portions 42b of the frame 42, a plurality of rollers 45 are arranged along the extending direction of the arm portions 42b through the support plate 46, and spaced apart in a direction perpendicular to the extending direction of the arm portions 42b. Has been. Positioning protrusions 47 are provided on the upper surface of the support plate 46.

前記ワイヤソー２０の基台２１の底面は、そのワイヤソー２０が設置される工場等の床面（図示しない）から浮き上がっている。図１及び図８に示すように、前記ワイヤソー２０の基台２１の底面には、ガイド部材としてのガイド板４８が加工用ローラ２４，２５の軸線方向と直交する方向へ延びるように配置されている。ガイド板４８の先端には、先細状の導入ガイド面４８ａが形成されている。そして、図１に矢印で示すように、ワーク受け渡し装置４１のフレーム４２がワイヤソー２０の基台２１に接近移動されたとき、ローラ４５がガイド板４８の導入ガイド面４８ａに沿ってガイドされ、ガイド板４８の両側面に係合される。この係合により、ワーク受け渡し装置４１がワイヤソー２０に対して、加工用ローラ２４，２５の軸線方向の所定位置に位置決めされる。また、位置決め突起４７がガイド板４８の先端に係合されることにより、ワーク受け渡し装置４１が加工用ローラ２４，２５の軸線方向と直交する方向の所定位置に位置決めされる。前記ローラ４５，位置決め突起４７及びガイド板４８により、ワーク受け渡し装置４１を前記ワーク支持部材３５に位置決めするための位置決め手段が構成されている。   The bottom surface of the base 21 of the wire saw 20 is raised from a floor surface (not shown) of a factory or the like where the wire saw 20 is installed. As shown in FIGS. 1 and 8, a guide plate 48 as a guide member is disposed on the bottom surface of the base 21 of the wire saw 20 so as to extend in a direction perpendicular to the axial direction of the processing rollers 24 and 25. Yes. A tapered introduction guide surface 48 a is formed at the tip of the guide plate 48. 1, when the frame 42 of the workpiece transfer device 41 is moved closer to the base 21 of the wire saw 20, the roller 45 is guided along the introduction guide surface 48a of the guide plate 48, and the guide Engaged on both sides of the plate 48. By this engagement, the workpiece transfer device 41 is positioned at a predetermined position in the axial direction of the processing rollers 24 and 25 with respect to the wire saw 20. Further, when the positioning projection 47 is engaged with the tip of the guide plate 48, the workpiece transfer device 41 is positioned at a predetermined position in a direction orthogonal to the axial direction of the processing rollers 24 and 25. The roller 45, the positioning projection 47, and the guide plate 48 constitute positioning means for positioning the workpiece transfer device 41 on the workpiece support member 35.

図１及び図８〜図１０に示すように、前記フレーム４２の縦枠部４２ａの内側面には、昇降体４９が昇降可能に支持されている。そして、昇降用ハンドル５０を回転させることにより、図示しないスプロケット及びチェーン等よりなる昇降機構を介して、昇降体４９が上昇または下降される。昇降体４９には、箱型の移動体５１が水平面内でフレーム４２のアーム部４２ｂの延長方向と直交する方向へ移動可能に支持されている。そして、移動用ハンドル５２を回転させることにより、図示しないボールスクリュー等よりなる移動機構を介して、移動体５１が前記の方向に移動される。   As shown in FIGS. 1 and 8 to 10, an elevating body 49 is supported on the inner side surface of the vertical frame portion 42 a of the frame 42 so as to be able to be raised and lowered. Then, by rotating the lifting handle 50, the lifting body 49 is raised or lowered via a lifting mechanism including a sprocket and a chain (not shown). A box-shaped moving body 51 is supported on the elevating body 49 so as to be movable in a direction perpendicular to the extending direction of the arm portion 42b of the frame 42 in a horizontal plane. Then, by rotating the moving handle 52, the moving body 51 is moved in the above direction via a moving mechanism such as a ball screw (not shown).

図８及び図１１〜図１２に示すように、前記移動体５１の両側内面には、ガイドレール５３が移動体５１の移動方向と直交する方向に延長配置されている。移動体５１内において両ガイドレール５３間には、支持体５４が複数のローラ５５を介して移動体５１の移動方向と直交する方向へ移動可能に支持されている。支持体５４には、この支持体５４を移動操作するためのハンドル５６が固定されている。   As shown in FIGS. 8 and 11 to 12, guide rails 53 are extended and arranged on the inner surfaces of both sides of the moving body 51 in a direction perpendicular to the moving direction of the moving body 51. A support 54 is supported between the guide rails 53 in the moving body 51 via a plurality of rollers 55 so as to be movable in a direction orthogonal to the moving direction of the moving body 51. A handle 56 for moving the support 54 is fixed to the support 54.

図８〜図１１及び図１３に示すように、前記移動体５１の一側上面には、位置決め孔５７ａを有する一対の位置決め板５７が支持体５４の移動方向に間隔をおいて配置されている。支持体５４の一側には、両位置決め板５７の位置決め孔５７ａに択一的に合致可能な挿通孔５８ａを有する固定板５８が取り付けられている。そして、支持体５４が図８〜図１０及び図１２に示す外側位置（ワイヤソー２０のワークＷに近接する位置）に移動された状態及び支持体５４が図１２に鎖線で示すように昇降体４９に接近する内側位置（ワイヤソー２０のワークＷから離間する位置）に移動された状態で、挿通孔５８ａから一方の位置決め孔５７ａに位置決めピン５９が挿通されることにより、支持体５４が外側位置または内側位置に位置決め固定される。前記位置決め板５７，固定板５８及び位置決めピン５９により固定手段が構成されている。   As shown in FIG. 8 to FIG. 11 and FIG. 13, a pair of positioning plates 57 having positioning holes 57 a are arranged on one side upper surface of the moving body 51 with an interval in the moving direction of the support body 54. . A fixing plate 58 having an insertion hole 58a that can selectively match the positioning holes 57a of both positioning plates 57 is attached to one side of the support 54. The state in which the support body 54 is moved to the outer position (position close to the workpiece W of the wire saw 20) shown in FIGS. 8 to 10 and 12 and the support body 54 as shown by the chain line in FIG. When the positioning pin 59 is inserted into the one positioning hole 57a from the insertion hole 58a in a state where it is moved to the inner position (position away from the workpiece W of the wire saw 20), the support 54 is moved to the outer position or Positioned and fixed at the inner position. The positioning plate 57, the fixing plate 58 and the positioning pin 59 constitute fixing means.

図１及び図８〜図１２に示すように、前記支持体５４の上面前縁には、ワークＷ上の被保持体３３の第２係合部３４ｃに係合可能な複数のガイド部材６０が突設されている。これらのガイド部材６０は、前端縁に向かって先細状になるように形成されている。そして、図８、図１０及び図１２に示すように、各ガイド部材６０に被保持体３３の第２係合部３４ｃが係合された状態で、支持体５４の前部にワークＷが吊り下げ状態で支持される。   As shown in FIGS. 1 and 8 to 12, a plurality of guide members 60 that can be engaged with the second engaging portion 34 c of the held body 33 on the work W are provided on the front upper edge of the support body 54. Projected. These guide members 60 are formed to be tapered toward the front end edge. As shown in FIGS. 8, 10, and 12, the workpiece W is suspended from the front portion of the support body 54 in a state where the second engagement portion 34 c of the held body 33 is engaged with each guide member 60. Supported in a lowered state.

図１０及び図１２に示すように、前記支持体５４の前面には、複数のゴムブッシュ６１が配置されている。そして、ガイド部材６０に被保持体３３の第２係合部３４ｃが挿入されたとき、これらのゴムブッシュ６１が被保持体３３に緩衝をともなって当接される。   As shown in FIGS. 10 and 12, a plurality of rubber bushes 61 are arranged on the front surface of the support body 54. When the second engaging portion 34 c of the held body 33 is inserted into the guide member 60, these rubber bushes 61 are brought into contact with the held body 33 with a buffer.

図８、図９、図１１及び図１２に示すように、前記移動体５１の底面の開口部６２には受け皿６３が取り付けられている。そして、ガイド部材６０に加工済みのワークＷが吊り下げられた状態で、支持体５４が昇降体４９側の内側位置に移動されたとき、ワークＷから滴下するスラリが受け皿６３により受け止められる。   As shown in FIGS. 8, 9, 11, and 12, a tray 63 is attached to the opening 62 on the bottom surface of the moving body 51. And when the support body 54 is moved to the inner position on the lifting body 49 side while the processed workpiece W is suspended from the guide member 60, the slurry dripped from the workpiece W is received by the receiving tray 63.

次に、前記のように構成されたワイヤソー２０に対してワークＷを着脱する際の動作を説明する。
さて、ワイヤソー２０のワーク支持装置２８にワークＷを装着する場合には、図１４に示すように、ワークＷがその上面にガラスプレート３１及び金属プレート３２を介して被保持体３３を固定した状態で、ワーク運搬用台車６６に搭載されて、ワーク受け渡し装置４１と対応する位置に搬送される。この場合、ワーク受け渡し装置４１の支持体５４は、図１２に鎖線で示す内側位置に移動配置されている。そして、昇降用ハンドル５０の操作により昇降体４９が昇降されるとともに、移動用ハンドル５２の操作により移動体５１が移動されることにより、支持体５４上のガイド部材６０がワークＷ上の被保持体３３の第２係合部３４ｃと対応する位置に配置される。 Next, the operation | movement at the time of attaching or detaching the workpiece | work W with respect to the wire saw 20 comprised as mentioned above is demonstrated.
When the work W is mounted on the work support device 28 of the wire saw 20, as shown in FIG. 14, the work W is fixed to the upper surface of the work W 33 via the glass plate 31 and the metal plate 32. Then, it is mounted on the workpiece transporting carriage 66 and conveyed to a position corresponding to the workpiece transfer device 41. In this case, the support 54 of the workpiece transfer device 41 is moved and arranged at an inner position indicated by a chain line in FIG. Then, the lifting body 49 is moved up and down by the operation of the lifting handle 50 and the moving body 51 is moved by the operation of the moving handle 52, so that the guide member 60 on the support 54 is held on the workpiece W. It arrange | positions in the position corresponding to the 2nd engaging part 34c of the body 33. FIG.

この状態で、操作ハンドル５６の操作により支持体５４が図１２に鎖線で示す内側位置から実線で示す外側位置に移動されると、ガイド部材６０がワークＷ上の被保持体３３の第２係合部３４ｃに挿入される。その後、昇降体４９が上昇されることにより、ワークＷが支持体５４の前部に吊り下げ状態で支持される。そして、支持体５４が外側位置から内側位置に移動されることにより、ワークＷが移動体５１内に搭載される。   In this state, when the support 54 is moved from the inner position indicated by the chain line to the outer position indicated by the solid line in FIG. 12 by the operation of the operation handle 56, the guide member 60 is engaged with the second engagement of the held body 33 on the workpiece W. It is inserted into the joint part 34c. Thereafter, the elevating body 49 is raised, so that the work W is supported in a suspended state on the front portion of the support body 54. And the workpiece | work W is mounted in the moving body 51 by moving the support body 54 from an outer position to an inner position.

一方、ワイヤソー２０のワーク支持装置２８においては、各シリンダ３７の突出動作により、図６に示すように、保持部材３６が下方位置に移動配置される。この状態で、図１に矢印で示すように、ワークＷを搭載したワーク受け渡し装置４１が前記保持部材３６と対応する位置に移動される。そして、ワーク受け渡し装置４１側のローラ４５及び位置決め突起４７がワイヤソー２０側のガイド板４８に係合することにより、ワーク受け渡し装置４１がワイヤソー２０に対して所定のワーク着脱位置に位置決めされる。   On the other hand, in the workpiece support device 28 of the wire saw 20, the holding member 36 is moved and arranged in the lower position as shown in FIG. In this state, as shown by an arrow in FIG. 1, the workpiece transfer device 41 on which the workpiece W is mounted is moved to a position corresponding to the holding member 36. Then, the workpiece transfer device 41 is positioned at a predetermined workpiece attaching / detaching position with respect to the wire saw 20 by engaging the roller 45 and the positioning projection 47 on the workpiece transfer device 41 side with the guide plate 48 on the wire saw 20 side.

その後、ワーク受け渡し装置４１の昇降体４９が必要に応じて昇降されるとともに、移動体５１が左右方向へ移動されることにより、ガイド部材６０に吊下されたワークＷ上の被保持体３３の第１係合部３４ｂが、ワイヤソー２０のワーク支持装置２８における保持部材３６の導入ガイド部３６ａと対応する位置に配置される。この状態で、ワーク受け渡し装置４１の支持体５４が内側位置から外側位置に移動される。このため、図７に鎖線で示すように、ワークＷ上の被保持体３３の第１係合部３４ｂが、ワーク支持部材３５の前方側から保持部材３６の導入ガイド部３６ａに沿って保持部材３６の基端側にスライドされる。   Thereafter, the lifting and lowering body 49 of the workpiece transfer device 41 is lifted and lowered as necessary, and the movable body 51 is moved in the left-right direction, so that the held body 33 on the workpiece W suspended from the guide member 60 is moved. The first engagement portion 34 b is disposed at a position corresponding to the introduction guide portion 36 a of the holding member 36 in the work support device 28 of the wire saw 20. In this state, the support 54 of the workpiece transfer device 41 is moved from the inner position to the outer position. For this reason, as shown by a chain line in FIG. 7, the first engagement portion 34 b of the held body 33 on the workpiece W is held along the introduction guide portion 36 a of the holding member 36 from the front side of the workpiece support member 35. 36 is slid to the proximal end side.

そして、図３に示すように、被保持体３３がワーク支持部材３５の下面に設けられた位置決め部材３９に当接することにより、前後方向の所定位置に位置決めされて、被保持体３３の第１係合部３４ｂが保持部材３６に対する係合位置に配置される。この状態で、ワーク受け渡し装置４１の支持体５４が外側位置から内側位置に移動されることにより、ワークＷがワーク受け渡し装置４１のガイド部材６０からワイヤソー２０の保持部材３６に受け渡される。   Then, as shown in FIG. 3, the held body 33 is positioned at a predetermined position in the front-rear direction by contacting a positioning member 39 provided on the lower surface of the work support member 35, and the first body 33 is held. The engaging portion 34 b is disposed at the engaging position with respect to the holding member 36. In this state, the workpiece 54 is transferred from the guide member 60 of the workpiece transfer device 41 to the holding member 36 of the wire saw 20 by moving the support 54 of the workpiece transfer device 41 from the outer position to the inner position.

この場合、前記ローラ４５とガイド板４８との係合により、被保持体３３のスライド方向が加工用ローラ２４，２５の軸線方向と交差する方向となるように、保持部材３６が配置されている。このため、図２及び図４に示すように、複数のワークＷを加工用ローラ２４，２５の軸線方向に並設した状態で被保持体３３に固定した場合でも、ワークＷが加工用ローラ２４，２５の軸線方向に長いものであっても、ワークＷ上の被保持体３３を保持部材３６に対してこじれることなく円滑に受け渡すことができる。   In this case, the holding member 36 is disposed so that the sliding direction of the held body 33 is in a direction intersecting the axial direction of the processing rollers 24 and 25 by the engagement between the roller 45 and the guide plate 48. . For this reason, as shown in FIGS. 2 and 4, even when a plurality of workpieces W are arranged in parallel in the axial direction of the processing rollers 24 and 25 and fixed to the held body 33, the workpieces W are processed by the processing rollers 24. , 25 can be smoothly delivered without being twisted with respect to the holding member 36 even if it is long in the axial direction.

その後、ワイヤソー２０のワーク支持装置２８における各シリンダ３７が没入動作されると、図４に示すように、保持部材３６が上方位置に移動されて、被保持体３３の第１係合部３４ｂに係合し、その被保持体３３がワーク支持部材３５の規制面３５ａに向かって引き上げられる。この引き上げにより、その被保持体３３上の被規制面３４ａがワーク支持部材３５の規制面３５ａに圧接されて、ワークＷがワーク支持部材３５の規制面３５ａに吊り下げ状態で保持され、被加工位置にセットされる。   Thereafter, when each cylinder 37 in the workpiece support device 28 of the wire saw 20 is immersed, as shown in FIG. 4, the holding member 36 is moved to the upper position and is moved to the first engagement portion 34 b of the held body 33. The held object 33 is pulled up toward the regulating surface 35 a of the work support member 35. By this pulling up, the regulated surface 34a on the to-be-held body 33 is pressed against the regulating surface 35a of the workpiece support member 35, and the workpiece W is held in a suspended state on the regulating surface 35a of the workpiece support member 35. Set to position.

また、ワイヤソー２０において、ワイヤ２６によりワークＷの加工が終了した後、加工済みのワークＷをワーク支持装置２８から取り外す場合には、ワーク受け渡し装置４１を用いて、前記ワークＷの装着時と逆順に操作すればよい。   Further, in the wire saw 20, when the processed workpiece W is removed from the workpiece support device 28 after the processing of the workpiece W with the wire 26 is completed, the workpiece delivery device 41 is used to reverse the order of the workpiece W mounting. You just have to operate.

そして、この実施形態の構成は以下の効果がある。
（１） 前記ワーク支持部材３５の保持部材３６に対するワークＷの着脱方向が、加工用ローラ２４の軸線と平行な上下方向の平面と直交する方向になっている。そして、前記保持部材３６の先端には、ワークＷの装着位置への導入をガイドするための導入ガイド部３６ａが形成されている。このため、複数のワークＷを加工用ローラ２４の軸線方向に並設した状態であっても、また、ワークＷが加工用ローラ２４の軸線方向に長いものであっても、ワークＷを保持部材３６に対して簡単に導入できるとともに、大きくスライドさせることなく装着することができる。よって、ワークＷの装着作業をこじれが生じることなく容易に行うことができる。 The configuration of this embodiment has the following effects.
(1) The attaching / detaching direction of the workpiece W with respect to the holding member 36 of the workpiece supporting member 35 is a direction perpendicular to the vertical plane parallel to the axis of the processing roller 24. An introduction guide portion 36 a for guiding introduction of the workpiece W to the mounting position is formed at the tip of the holding member 36. Therefore, even when a plurality of workpieces W are arranged side by side in the axial direction of the processing roller 24, or even if the workpiece W is long in the axial direction of the processing roller 24, the workpiece W is held by the holding member 36. In addition to being easy to introduce, it can be mounted without sliding greatly. Therefore, the work for mounting the workpiece W can be easily performed without causing a twist.

（２） 前記ワーク支持部材３５が、ワークＷの上面に固定された被保持体３３をスライド可能に吊下してワークＷを被加工位置にガイドするとともに、その被加工位置で保持する保持部材３６を有し、その保持部材３６の先端部に前記導入ガイド部３６ａが形成されている。従って、前記保持部材３６がワークＷの保持機能及びスライドガイド機能を有するために、部品点数が少なくなって、構成を簡素化できる。また、前記導入ガイド部３６ａの作用により、保持部材３６へのワークＷの導入をこじれることなく円滑に行うことができる。   (2) The workpiece support member 35 slidably holds the held body 33 fixed on the upper surface of the workpiece W, guides the workpiece W to the machining position, and holds the workpiece W at the machining position. 36, and the introduction guide portion 36 a is formed at the tip of the holding member 36. Accordingly, since the holding member 36 has a function of holding the workpiece W and a slide guide function, the number of parts is reduced, and the configuration can be simplified. Further, the introduction of the work W to the holding member 36 can be smoothly performed by the action of the introduction guide portion 36a without being disturbed.

（３） 前記ワーク支持部材３５に、ワークＷの被保持体３３の被規制面３４ａの位置を規制するための規制面３５ａが形成されている。また、保持部材３６がシリンダ３７により引き上げられて、前記被規制面３４ａが前記規制面３５ａに対して規制状態で圧接される。このため、ワークＷが所定位置で位置決めされるため、高精度加工を実現できる。また、保持部材３６の両側の規制面３５ａが下方に向かって開放されるため、その規制面３５ａの清掃を容易に行うことができる。規制面３５ａにスラリが付着した状態でワークＷをワーク支持部材３５に支持すると、ワークＷの位置が狂ってしまい、高精度加工を行う得ないおそれがあるが、この実施形態はこのようなおそれが生じる事態を簡単に解消できる。これに対し、例えば前記特許文献２においては、この実施形態の規制面３５ａに相当する規制面がＬ形状の支持部の上面、すなわち上向きの面に形成されているため、その規制面の清掃が困難である。   (3) A restriction surface 35 a for restricting the position of the regulated surface 34 a of the held body 33 of the workpiece W is formed on the workpiece support member 35. Further, the holding member 36 is pulled up by the cylinder 37, and the regulated surface 34a is pressed against the regulating surface 35a in a regulated state. For this reason, since the workpiece | work W is positioned in a predetermined position, a highly accurate process is realizable. Moreover, since the regulation surfaces 35a on both sides of the holding member 36 are opened downward, the regulation surfaces 35a can be easily cleaned. If the workpiece W is supported by the workpiece support member 35 with the slurry adhered to the regulating surface 35a, the position of the workpiece W may be out of order, and high-precision machining may not be performed. Easily eliminate the situation that occurs. On the other hand, in Patent Document 2, for example, the restriction surface corresponding to the restriction surface 35a of this embodiment is formed on the upper surface of the L-shaped support portion, that is, the upward surface. Have difficulty.

（４） 被保持体３３を保持部材３６の高さ位置に配置し、ワークＷを前記保持部材との間において受け渡し可能に支持する受け渡し位置と、そこから離間する位置との間を移動可能なワーク受け渡し装置４１が設けられているため、ワイヤソー２０に対するワークＷの着脱作業を容易に行うことができる。   (4) The to-be-held body 33 is arrange | positioned in the height position of the holding member 36, and it can move between the delivery position which supports the workpiece | work W so that delivery is possible between the said holding members, and the position away from it. Since the workpiece transfer device 41 is provided, the workpiece W can be easily attached to and detached from the wire saw 20.

（５） ワイヤソー２０とワーク受け渡し装置４１との間に、ワーク受け渡し装置４１を保持部材３６に対して位置決めするためのローラ４５やガイド板４８等よりなる位置決め手段が設けられている。このため、ワイヤソー２０に対するワークＷの装着において、保持部材３６に対するワークの位置決めが容易になり、ワークＷの装着作業がさらに容易になる。   (5) Positioning means including a roller 45 and a guide plate 48 for positioning the workpiece transfer device 41 with respect to the holding member 36 is provided between the wire saw 20 and the workpiece transfer device 41. For this reason, in the mounting of the workpiece W on the wire saw 20, the positioning of the workpiece with respect to the holding member 36 is facilitated, and the mounting operation of the workpiece W is further facilitated.

（６） 前記ワーク受け渡し装置４１には、ガイド部材６０に吊下されたワークＷからの滴下スラリを受けるための受け皿６３が設けられている。従って、ワイヤソー２０の周辺の床面や作業者の衣服等に対するスラリによる汚染を防止できる。   (6) The workpiece transfer device 41 is provided with a receiving tray 63 for receiving a dropping slurry from the workpiece W suspended from the guide member 60. Therefore, it is possible to prevent contamination of the floor surface around the wire saw 20 and the clothes of the worker by slurry.

（７） ガイド部材６０がを保持部材３６に接近する位置及び保持部材３６から離間した位置の両位置において、ガイド部材６０を支持した支持体５４を固定するための位置決め板５７，固定板５８，位置決めピン５９が設けられている。従って、ワークＷをワーク支持部材３５に対する着脱位置及び待機位置において安定させることができ、ワークＷの着脱作業がいっそう容易になる。   (7) A positioning plate 57, a fixing plate 58, and a fixing plate 58 for fixing the support member 54 that supports the guide member 60 at both the position where the guide member 60 approaches the holding member 36 and the position away from the holding member 36. Positioning pins 59 are provided. Therefore, the workpiece W can be stabilized at the attachment / detachment position and the standby position with respect to the workpiece support member 35, and the attachment / detachment work of the workpiece W is further facilitated.

（変更例）
なお、この実施形態は、次のように変更して具体化することも可能である。
・ ワーク受け渡し装置４１の昇降体４９や移動体５１を、電気モータ等よりなる駆動機構により昇降または移動させるように構成すること。
・ ワーク受け渡し装置４１の支持体５４を、電気モータ等よりなる駆動機構により内側位置と外側位置とに移動させるように構成すること。 (Example of change)
In addition, this embodiment can also be changed and embodied as follows.
The lifting and lowering body 49 and the moving body 51 of the workpiece transfer device 41 are configured to be moved up and down or moved by a drive mechanism such as an electric motor.
-The support 54 of the workpiece transfer device 41 is configured to be moved between the inner position and the outer position by a drive mechanism such as an electric motor.

・ 前記実施形態においては、加工用ローラ２４に対してワークＷを昇降させてワークＷの加工が行われるようにしたが、これとは逆に、加工用ローラ２４が昇降されてワークＷの加工が行われるように構成すること。   In the embodiment, the workpiece W is moved up and down with respect to the processing roller 24, but the workpiece W is processed. On the contrary, the processing roller 24 is moved up and down to process the workpiece W. To be done.

・ ワーク受け渡し装置４１の移動体５１上の位置決め板５７を支持体５４の前進位置側のみに設けること。すなわち、ガイド部材６０がワイヤソー２０のワーク支持部材３５に接近した位置において支持体５４が固定されるように構成すること。   A positioning plate 57 on the moving body 51 of the workpiece transfer device 41 is provided only on the advance position side of the support body 54. In other words, the support member 54 is fixed at a position where the guide member 60 approaches the work support member 35 of the wire saw 20.

（他の技術的思想）
前記実施形態から把握されるが、請求項に記載されていない技術的思想を以下に記す。
（Ａ） ワークの上面に固定された被保持体をスライド可能に吊下してワークを被加工位置にガイドするとともに、その被加工位置で保持する保持部材を設け、その保持部材の先端部にワークを同保持部材に導入するための導入ガイド部を設けたことを特徴とするワイヤソー。 (Other technical ideas)
Technical ideas that can be grasped from the embodiment but are not described in the claims will be described below.
(A) A holding member fixed to the upper surface of the workpiece is slidably suspended to guide the workpiece to a processing position, and a holding member for holding the workpiece at the processing position is provided, and a tip of the holding member is provided. A wire saw comprising an introduction guide for introducing a workpiece into the holding member.

（Ｂ） 前記保持部材の上方位置には、前記被保持体の位置を規制するための規制面を形成するとともに、前記保持部材を前記規制面に対して接近離間可能にし、前記保持部材を前記接近方向に移動させることにより被保持体を前記規制面に対して規制状態で圧接させる駆動手段を設けたことを特徴とする前記技術的思想（Ａ）項に記載のワイヤソー。   (B) A restricting surface for restricting the position of the object to be held is formed at an upper position of the holding member, and the holding member can be moved toward and away from the restricting surface. The wire saw according to item (A), wherein driving means is provided to press the held body against the regulating surface in a regulated state by moving in the approaching direction.

（Ｃ） 走行可能なフレーム（４２）に支持され、ワーク（Ｗ）をワイヤソー（２０）に装着される装着部（３３）の高さ位置に保持するワーク保持部（６０）を設けて、ワイヤソー（２０）との間においてワーク（Ｗ）を受け渡すようにしたワーク受け渡し装置において、
前記保持部（６０）に保持されたワーク（Ｗ）からの滴下スラリを受けるための受け皿（６３）を設けたことを特徴とするワイヤソーシステム。 (C) A work holding part (60) supported by the travelable frame (42) and holding the work (W) at the height position of the mounting part (33) attached to the wire saw (20) is provided. (20) In a workpiece transfer device that transfers workpiece (W) to / from,
A wire saw system comprising a receiving tray (63) for receiving dripping slurry from a work (W) held by the holding section (60).

一実施形態のワイヤソーシステムを示す要部斜視図。The principal part perspective view which shows the wire saw system of one Embodiment. 図１のワイヤソーシステムにおけるワイヤソーの要部拡大正面図。The principal part enlarged front view of the wire saw in the wire saw system of FIG. 同ワイヤソーの要部側面図。The principal part side view of the wire saw. 同ワイヤソーのワーク支持装置を拡大して示す正面図。The front view which expands and shows the workpiece | work support apparatus of the wire saw. 同じくワーク支持装置の要部斜視図。The principal part perspective view of a workpiece | work support apparatus similarly. 図４のワーク支持装置に対するワークの着脱時の状態を示す正面図。The front view which shows the state at the time of the attachment or detachment of the workpiece | work with respect to the workpiece support apparatus of FIG. 図４の７−７線における拡大断面図。FIG. 7 is an enlarged cross-sectional view taken along line 7-7 in FIG. 図１のワイヤソーシステムにおけるワーク受け渡し装置を拡大して示す斜視図。The perspective view which expands and shows the workpiece | work delivery apparatus in the wire saw system of FIG. 同ワーク受け渡し装置の側面図。The side view of the workpiece delivery apparatus. 同ワーク受け渡し装置の拡大平面図。The enlarged plan view of the work delivery device. 図９の１１-１１線における拡大断面図。The expanded sectional view in the 11-11 line of FIG. 図１０の１２-１２線における拡大断面図。FIG. 12 is an enlarged sectional view taken along line 12-12 in FIG. 10; ワーク受け渡し装置の移動体に対する支持体の位置決め構成を拡大して示す要部斜視図。The principal part perspective view which expands and shows the positioning structure of the support body with respect to the moving body of a workpiece | work delivery apparatus. 図９のワーク受け渡し装置に対するワークの搭載時の状態を示す側面図。The side view which shows the state at the time of mounting of the workpiece | work with respect to the workpiece transfer apparatus of FIG.

符号の説明Explanation of symbols

２０…ワイヤソー、２３…切断機構、２４，２５…加工用ローラ、２６…ワイヤ、２８…ワーク支持装置、３３…被保持体、３４…被保持片、３４ａ…被規制面、３４ｂ…第１係合部、３４c…第２係合部、３５…ワーク支持部材、３５ａ…規制面、３６…保持部材、３６ａ…導入ガイド部、３７…シリンダ、４１…ワーク受け渡し装置、４２…フレーム、４９…昇降体、５１…移動体、５４…支持体、６０…ガイド部材、６３…受け皿、Ｗ…ワーク。   DESCRIPTION OF SYMBOLS 20 ... Wire saw, 23 ... Cutting mechanism, 24, 25 ... Processing roller, 26 ... Wire, 28 ... Work support apparatus, 33 ... Supported body, 34 ... Supported piece, 34a ... Restricted surface, 34b ... First engagement Joint part, 34c ... second engagement part, 35 ... work support member, 35a ... regulating surface, 36 ... holding member, 36a ... introduction guide part, 37 ... cylinder, 41 ... work transfer device, 42 ... frame, 49 ... lifting Body 51... Moving body 54. Support body 60. Guide member 63.

Claims (3)

複数本の加工用ローラを平行に配置するとともに、その加工用ローラと対向する位置においてワークを着脱可能に保持する保持手段を設け、その保持手段に保持されたワークを前記加工用ローラ間に張設されたワイヤにより切断するようにしたワイヤソーと、ワークを前記保持手段との間において受け渡し可能に支持する受け渡し位置と、そこから離間する位置との間を移動可能なワーク受け渡し装置とよりなるワイヤソーシステムにおいて、
前記保持手段に対するワークの着脱方向を、前記加工用ローラの軸線と平行な上下方向の平面に対して直交する方向にするとともに、その保持手段には、ワークの上面に固定された被保持体をスライド可能に吊下してワークを被加工位置にガイドし、且つその被加工位置で保持する保持部材を有し、その保持部材の先端部にワークの装着位置への導入をガイドするための導入ガイド部を設け、
前記保持手段には、前記被保持体の位置を規制するための規制面を形成するとともに、前記保持部材を前記規制面に対して接近離間可能にし、前記保持部材を前記接近方向に移動させて被保持体を前記規制面に対して規制状態で圧接させる駆動手段を設け、
前記ワーク受け渡し装置は、ワークの上面に固定された被保持体をワイヤソーの前記保持部材の高さ位置に配置し、ワークの上面に固定された前記被保持体をスライド可能に吊下するとともに、ワークをワイヤソーの前記保持部材の先端にガイドするためのガイド部材を有し、
ワイヤソーとワーク受け渡し装置との間に、ワーク受け渡し装置を前記保持部材に対して位置決めするための位置決め手段を設けたことを特徴とするワイヤソーシステム。 A plurality of processing rollers are arranged in parallel, and holding means for detachably holding the workpiece at a position facing the processing roller is provided, and the workpiece held by the holding means is stretched between the processing rollers. A wire saw comprising: a wire saw that is cut by a provided wire ; a workpiece delivery device that supports the workpiece so as to be delivered between the holding means; and a workpiece delivery device that is movable between a delivery position and a position separated from the delivery position. In the system ,
The work attachment / detachment direction with respect to the holding means is set to a direction orthogonal to a vertical plane parallel to the axis of the processing roller, and a holding body fixed to the upper surface of the work is attached to the holding means. A holding member that suspendably slides to guide the workpiece to the processing position and holds the workpiece at the processing position, and introduces the leading end of the holding member to guide the introduction of the workpiece to the mounting position. Provide a guide part ,
The holding means is formed with a regulating surface for regulating the position of the object to be held, the holding member can be moved toward and away from the regulating surface, and the holding member is moved in the approaching direction. A drive means is provided for pressing the held body against the restriction surface in a restricted state,
The workpiece transfer device is arranged such that a held body fixed to the upper surface of the workpiece is disposed at a height position of the holding member of the wire saw, and the held body fixed to the upper surface of the workpiece is suspended so as to be slidable, A guide member for guiding the workpiece to the tip of the holding member of the wire saw;
A wire saw system comprising a positioning means for positioning the workpiece transfer device relative to the holding member between the wire saw and the workpiece transfer device. 前記ワーク受け渡し装置は、前記ガイド部材に吊下されたワークからの滴下スラリを受けるための受け皿を有することを特徴とする請求項１に記載のワイヤソーシステム。The wire saw system according to claim 1, wherein the workpiece transfer device has a receiving tray for receiving a dripping slurry from a workpiece suspended from the guide member. 前記ガイド部材を前記保持部材に接近する位置と保持部材から離間する位置との間で移動できるようにフレームに支持するとともに、少なくとも前記離間位置においてガイド部材を固定するための固定手段を設けたことを特徴とする請求項１または２に記載のワイヤソーシステム。The guide member is supported by the frame so as to be movable between a position approaching the holding member and a position separating from the holding member, and a fixing means is provided for fixing the guide member at least in the separation position. The wire saw system according to claim 1 or 2.
JP2008331528A 2008-12-25 2008-12-25 Wire saw system Expired - Fee Related JP4825867B2 (en)

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KR1020090130467A KR20100075761A (en) 2008-12-25 2009-12-24 Wire saw, and system for wire saw
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