KR20100075761A - Wire saw, and system for wire saw - Google Patents

Abstract

PURPOSE: A wire saw and a wire saw system are provided to prevent wire saw from being polluted by installing a tray in a workpiece transfer device to receive slurry falling from a workpiece. CONSTITUTION: A wire saw comprises a holding unit. In the holding unit, processing rollers(24,25) are disposed to be parallel. The holding unit detachably holds a workpiece(W) to face the processing roller. The workpiece cuts wire located between the processing rollers. The holding unit comprises an introduction guide unit(36a).

Description

WIRE SAW, AND SYSTEM FOR WIRE SAW

This invention is equipped with the wire saw which cuts the to-be-processed object which consists of hard materials, such as a semiconductor material, a magnetic material, and a ceramic, for example with a wire, its wire saw, and a workpiece | work delivery apparatus. One wire saw system.

Conventionally, as this kind of technique, the structure as disclosed by patent document 1 and patent document 2 is proposed, for example.

In the conventional structure of patent document 1, the holding member for holding the to-be-processed object in the state which hung up and down to the wire is arrange | positioned above the wire for the to-be-processed workpiece between the process rollers. The held body is fixed to the upper surface of the workpiece, and the held body is slidably supported in the axial direction of the processing roller with respect to the holding member. A workpiece transfer device is provided corresponding to the wire saw, and the workpiece transfer device supports a workpiece on the workpiece and guides the workpiece to be exchanged between the workpiece and the holding member on the wire saw side. Is provided.

Moreover, in the conventional structure of patent document 2, the holding member for holding | maintaining the to-be-worked object in the state which hung up / down toward the wire is arrange | positioned above the wire between the process rollers. The held body is fixed to the upper surface of the workpiece, and the held body is slidably supported in the direction orthogonal to the axial direction of the processing roller with respect to the holding member.

[Patent Document 1] Japanese Patent Application Laid-Open No. 2008-246643

[Patent Document 2] Japanese Patent Application Laid-Open No. 10-202499

By the way, in these conventional structures, there existed the following problems.

In the conventional structure of patent document 1, the to-be-held body on a to-be-processed object is made to slide by sliding to the axial direction of the roller for a process with respect to the holding member of a wire saw. For this reason, when a plurality of workpieces are fixed to the held body in a state in which the workpieces are arranged in parallel along the axial direction of the processing roller, or the workpiece that is long in the axial direction of the processing roller is fixed to the held body, the holding member The sliding distance of the retained body with respect to it becomes long. And when a sliding distance becomes long, distortion will arise in the said sliding, if the guide direction of a holding member and the moving direction of a to-be-maintained body do not correspond. For this reason, when a sliding distance is long, even if it is necessary to match the moving direction of a to-be-held body exactly to the guide direction of a holding member, even if the structure which guides introduction of a to-be-held body is provided in the wire small side, Installation was cumbersome.

In addition, in the conventional structure of patent document 2, the structure which guides introduction when attaching the to-be-held body on a to-be-processed object with respect to the holding member by the side of a wire is not provided. For this reason, the introduction of the to-be-retained member to a holding member takes a long time, and even if the sliding direction became a direction orthogonal to the axial direction of the processing roller, the transfer work of the workpiece could not be facilitated.

SUMMARY OF THE INVENTION The present invention has been made in view of the problems existing in the prior art, and an object thereof is to provide a wire saw and a wire saw system that can facilitate mounting of a workpiece to a wire saw.

In order to achieve the above object, the invention of the wire saw arranges a plurality of processing rollers in parallel, provides a holding means for detachably holding the workpiece in a position facing the processing roller, and the holding means. In the wire saw which cut | disconnected the to-be-processed object hold | maintained by the wire provided between the said process rollers, WHEREIN: The removal direction of the to-be-processed object with respect to the said holding means is made to the plane of the up-down direction parallel to the axis line of the said processing roller. The holding means is provided with an introduction guide portion for guiding the introduction of the workpiece to the mounting position.

Therefore, not only the state in which a plurality of workpieces are provided in parallel in the axial direction of the processing roller, but also the workpieces are long in the axial direction of the processing roller, the workpieces can be easily introduced to the holding means, and the workpieces are not easily slid. Can be installed without. Therefore, in the mounting operation of the workpiece, it can proceed easily without distortion.

In the above configuration, it is preferable that the desorption direction of the workpiece to the holding means is a direction orthogonal to the plane in the vertical direction parallel to the axis line of the processing roller.

Moreover, in the said structure, the said holding means walks so that the to-be-fixed body fixed to the upper surface of a to-be-worked body can guide a to-be-processed object to a to-be-processed position, and is hold | maintained at the to-be-processed position It is preferable to provide the introduction guide portion to the front end of the holding member. In this configuration, since the holding member has a holding function and a sliding guide function of the workpiece, the structure can be simplified and the sliding of the workpiece with respect to the holding member can be smoothly performed without distortion by the action of the introduction guide portion. Can be.

Further, in the above configuration, the holding means is provided with a restricting surface for regulating the position of the retained body, and the holding member is accessible / separated from the restricting surface, and the holding member is provided with the holding member. What is necessary is just to provide the drive means which moves to an access direction and presses the said to-be-held body to a restrained state with respect to the said regulating surface. If comprised in this way, since a regulation surface opens toward downward, cleaning of a regulation surface can be performed easily.

Moreover, in invention of the wire saw system, Wire saw of Claim 3 or 4; The workpiece holding device is disposed at a height position of the holding member, and is movable between a transfer position for supporting the workpiece to be exchanged with the holding member and a position spaced apart therefrom. ; It is characterized in that the configuration. Therefore, in this invention, the desorption operation | work of a to-be-processed object with respect to a wire saw can be easily progressed using the to-be-processed workpiece delivery apparatus.

In the above configuration, a positioning means for positioning the workpiece delivery device with respect to the holding member may be provided between the wire saw and the workpiece delivery device. In this way, in the mounting of the workpiece to the wire saw, positioning of the workpiece with respect to the holding member, that is, the workpiece mounting position becomes easy.

Moreover, in the said structure, the said workpiece delivery apparatus hangs the to-be-held body fixed to the upper surface of a to-be-worked object, and guides the guide member for guiding a to-be-worked object to the front end of the holding member of a wire saw. It is preferable to provide. With such a configuration, the workpiece can be easily exchanged between the guide member and the holding member of the wire saw.

Moreover, in the said structure, it is preferable that the said workpiece delivery apparatus is equipped with the receiving board for receiving the dripping slurry from the to-be-processed object caught by the said guide member. By doing in this way, contamination of the bottom surface etc. around a wire saw can be prevented.

Further, the guide member is supported by a frame so as to be movable between a position approaching the holding member and a position away from the holding member, and fixing means for fixing the guide member at least in the spaced position is provided. It is desirable to. By doing in this way, a to-be-processed object can be stabilized at a desorption position, and the to-be-processed object detachment becomes easy.

As described above, according to the present invention, the desorption operation of the workpiece can be easily performed with respect to the wire saw.

EMBODIMENT OF THE INVENTION Hereinafter, one Embodiment of this invention is described with reference to drawings.

As shown in FIG. 1, the wire saw system of this embodiment attaches the wire saw 20 which cuts the to-be-processed object W, and the to-be-processed workpiece W with respect to the said wire saw 20, The workpiece delivery device 41 for carrying out the workpiece W after processing is provided.

As shown in FIGS. 1-3, in the said wire saw 20, the cutting mechanism 23 is attached to the column 22 on the base 21. As shown in FIG. This cutting mechanism 23 is provided with a pair of processing rollers 24 and 25 arranged in parallel at mutually spaced intervals, and ring-shaped grooves 24a and 25a are formed on the outer circumference of the processing rollers 24 and 25. It is formed at predetermined intervals. In the ring-shaped grooves 24a and 25a of the processing rollers 24 and 25, a wire 26 made of one strand of wire is wound continuously. The wires 26 travel between the processing rollers 24 and 25 by rotating the processing rollers 24 and 25 by a traveling motor (not shown). In this case, the run of the wire 26 is repeated such that the fixed amount advances and the fixed amount retreats, and gradually advances as a whole, or moves continuously in one direction. The processing rollers may be at least one pair, and three or more rollers may be used as long as they are arranged in parallel with each other.

In the body of the wire saw 20, the opening 20a which opens toward the direction orthogonal to the axial direction of the processing roll paths 24 and 25 is formed in order to let the workpiece W go in and out.

The slurry supply apparatus 27 is arrange | positioned in the position above the said cutting mechanism 23. As shown in FIG. And the slurry containing glass abrasive grains is supplied from the slurry supply apparatus 27 to the wire 26 between the rollers 24 and 25 for a process.

In the column 22 above the cutting mechanism 23, a workpiece support device 28 for supporting the workpiece W is provided to be liftable. As shown in FIG. 2, the to-be-processed object W is the several to-be-processed object provided in parallel along the axial direction of the processing roller 24, 25, or although not shown in the axial direction of the processing roller 24, 25. Long single workpieces are used that extend. At the time of operation of the wire saw 20, the wire 26 runs between the processing rollers 24 and 25 of the cutting mechanism 23, and from the slurry supply device 27 on the wire 26. As the slurry is supplied, the workpiece W is lowered toward the cutting mechanism 23 by the workpiece support device 28. As a result, the workpiece W is pressed against the wire 26 and cut.

Next, the structure for holding the to-be-processed object W in the wire saw 20 is demonstrated in detail.

As shown in FIGS. 4-6, the glass plate 31 and the metal plate 32 are adhesively fixed to the upper surface of the said to-be-processed object W. FIG. On the upper surface of the metal plate 32, a metal to-be-retained body 33 is detachably mounted by a plurality of bolts (not shown). A plurality of held pieces 34 protrude from the upper surface of the held body 33, and a regulated surface 34a is formed on the upper surface of the top wall of each held piece 34. Inside of each pair of adjacent to-be-holded pieces 34, the stair-shaped 1st extending in the direction orthogonal to the axial direction of the said processing rollers 24 and 25 in the attachment state with respect to the wire saw 20. As shown in FIG. The engagement portion 34b and the second engagement portion 34c are formed.

As shown in FIGS. 5-7, the to-be-processed member support member 35 as a holding means for supporting the to-be-processed object W is provided above the wire 26 provided tautly between the rollers 24 and 25 for a process. WHEREIN: It arrange | positions so that lifting and lowering with respect to the wire saw 20 is possible. On the lower surface of the workpiece support member 35, a plurality of retaining members serving as retaining means having a shape of a front cross section, which can be engaged with the first engaging portion 34b on the to-be-retained body 33, have an almost " T " shape. 36 is supported. A plurality of cylinders 37 as drive means are arranged on the upper surface of the workpiece support member 35, and the holding member 36 is bolted to the lower end of the piston rod 37a of those cylinders 37 by a bolt 38. It is fixed.

And the piston rod 37a of the said cylinder 37 protrudes downward, and the holding member 36 moves to the downward position shown by the solid line in FIG. 6 and the broken line in FIG. In this state, the first engagement portion 34b of the workpiece 33 of the workpiece W on the workpiece delivery device 41 is moved to the position engaged with the holding member 36. Then, the first engagement portion 34b slides on the holding member 36 toward the base side. After that, the piston rod 37a of the cylinder 37 is immersed upward, and the holding member 36 is moved to the upward position shown by solid lines in FIGS. 4 and 7. Thereby, the to-be-supported body 33 is pulled up through the 1st engaging part 34b, and the to-be-regulated surface 34a on the to-be-supported body 33 is restrict | limited of the lower surface of the to-be-processed member 35. It presses against the surface 35a and contacts. As a result, the workpiece W is hung on the restricting surface 35a of the workpiece support member 35. Stays in the state.

As shown in FIG.3 and FIG.7, behind the said holding member 36, the positioning member 39 is provided in the lower surface of the to-be-processed member support member 35 so that it may protrude. And, as shown in FIG. 3, when the to-be-retained body 33 on the to-be-processed object W is guided and moved to the base side of the holding member 36 along the introduction guide part 36a, this positioning member 39 The back of the to-be-retained body 33 touches. By this contact, the to-be-maintained body 33 is positioned in the predetermined position of the front-back direction with respect to the to-be-processed member support member 35. FIG.

As shown in FIGS. 4-7, the introduction guide part 36a which can engage with the 1st engagement part 34b on the to-be-retained body 33 protrudes toward the front part in the front-end | tip part of each said holding member 36. FIG. It is. This introduction guide part 36a is formed in the inclined surface which becomes thinner toward the front end. And as shown by the dashed line in FIG. 7, the 1st engagement part 34b of the to-be-retained body 33 is hold | maintained from the front-end | tip part of introduction guide part 36a, with the holding member 36 arrange | positioned in a downward position. Guided to the base side of the member 36 is moved. And the holding member 36 is arrange | positioned so that the sliding direction of the to-be-maintained body 33 may become a direction orthogonal to the plane which passes the axis line of the said processing roller 24, 25 in an up-down direction. However, if there is no problem in the processing of the workpiece W, the sliding direction of the holding body 33 is a direction that obliquely intersects the plane passing through the axis lines of the processing rollers 24 and 25 in the vertical direction, The holding member 36 may be arrange | positioned.

Next, the structure of the said workpiece | work workpiece delivery apparatus 41 and its related structure is demonstrated in detail.

As shown in FIGS. 1 and 8 to 10, the frame 42 of the workpiece delivery device 41 is provided with a vertical frame portion 42a and a pair provided to protrude laterally from the lower end of the vertical frame portion 42a. An arm portion 42b is provided. Wheels 43 are attached to four corners of the lower surface of the frame 42. The frame 42 has a handle 44 for moving the workpiece delivery device 41. Between the arm part 42b of the frame 42, the some roller 45 intersects the longitudinal direction of the arm part 42b via the support plate 46, and is orthogonal to the longitudinal direction of the arm part 42b. It is arranged at regular intervals in the direction to. The positioning projection 47 is provided on the upper surface of the support plate 46.

The bottom surface of the base 21 of the wire saw 20 floats on the bottom surface (not shown) of a factory or the like where the wire saw 20 is installed. As shown to FIG. 1 and FIG. 8, the guide plate 48 as a guide member extends in the direction orthogonal to the axial direction of the processing rollers 24 and 25 on the bottom surface of the base 21 of the said wire saw 20. As shown in FIG. It is arranged. At the tip of the guide plate 48, an introduction guide surface 48a having a tapered end is formed. And as shown by the arrow in FIG. 1, when the frame 42 of the to-be-processed object transmission apparatus 41 moves closer to the base 21 of the wire saw 20, the roller 45 moves to the guide board 48. FIG. Is guided along the introduction guide surface 48a and engaged to both sides of the guide plate 48. By this engagement, the workpiece delivery device 41 is positioned with respect to the wire saw 20 at a predetermined position in the axial direction of the rollers 24 and 25 for processing. In addition, when the positioning projection 47 is engaged with the tip of the guide plate 48, the workpiece transmission device 41 is positioned at a predetermined position in a direction orthogonal to the axial direction of the processing rollers 24 and 25. Is determined. By the said roller 45, the positioning projection 47, and the guide plate 48, the positioning means for positioning the workpiece | work workpiece delivery apparatus 41 to the to-be-processed workpiece support member 35 is comprised.

As shown in FIG. 1 and FIGS. 8-10, the lifting body 49 is supported by the inner side of the vertical frame part 42a of the said frame 42 so that lifting / lowering is possible. And the lifting body 49 raises or lowers through the lifting mechanism which consists of a sprocket, a chain, etc. which are not shown in figure, by rotating the lifting handle 50. The lifting body 49 is supported by the box-shaped moving body 51 so as to be movable in the direction orthogonal to the extending direction of the arm part 42b of the frame 42 in the horizontal plane. And the rotating body 52 is rotated, and the moving body 51 is moved in the said direction through the moving mechanism which consists of a ball screw etc. which are not shown in figure.

As shown to FIG. 8 and FIG. 11-12, the guide rail 53 is extended in the direction orthogonal to the moving direction of the moving body 51 on the both inner surface of the said moving body 51. As shown in FIG. The support body 54 is supported between the guide rails 53 in the moving body 51 so that a movement to the direction orthogonal to the moving direction of the moving body 51 via the some roller 55 is possible. A handle 56 for moving the support 54 is fixed to the support 54.

As shown in FIGS. 8-11 and 13, the pair of positioning plates 57 provided with the positioning hole 57a is spaced in the moving direction of the support body 54 on one side upper surface of the said movable body 51. FIG. Are placed. On one side of the support body 54, a fixing plate 58 is provided with an insertion hole 58a which can be coupled to the positioning holes 57a of both positioning plates 57 in an alternative manner. And the support body 54 was moved to the outer position shown in FIGS. 8-10 and 12 (position close to the to-be-processed object W of the wire saw 20), and the support body 54 is shown in FIG. As indicated by the dashed line, in the state moved to the inner position approaching the lifting body 49 (the position spaced apart from the workpiece W of the wire saw 20), one of the positioning holes from the insertion hole 58a. The positioning pin 59 is inserted into the 57a, so that the support 54 is positioned and fixed at an outer position or an inner position. A fixing means is constituted by the positioning plate 57, the fixing plate 58, and the positioning pin 59.

As shown in FIG. 1 and FIGS. 8-12, the some guide member which can engage with the 2nd engagement part 34c of the to-be-supported body 33 on the to-be-processed object W at the front-end | tip of the said support body 54 is carried out. 60 is provided to protrude. These guide members 60 are formed so that the ends become thinner toward the tip. 8, 10, and 12, in the state in which the second engagement portion 34c of the retained body 33 is engaged with each guide member 60, the front portion of the support body 54 is provided. Workpiece (W) is hanging It is supported in a state.

As shown to FIG. 10 and FIG. 12, the some rubber bush 61 is arrange | positioned at the front surface of the said support body 54. As shown in FIG. And when the 2nd engaging part 34c of the to-be-supported body 33 is inserted in the guide member 60, these rubber bush 61 touches the to-be-supported body 33 with buffer.

As shown to FIG. 8, FIG. 9, FIG. 11, and FIG. 12, the receiving plate 63 is attached to the opening part 62 of the bottom surface of the said movable body 51. FIG. And when the support body 54 is moved to the inner side of the lifting body 49 side in the state in which the to-be-processed object W was caught by the guide member 60, the slurry dripped from the to-be-processed object W is carried out. Can be collected by the receiving plate (63).

Next, the operation | movement at the time of detaching and removing the to-be-processed object W with respect to the wire saw 20 comprised as mentioned above is demonstrated.

First, in the case of attaching the workpiece W to the workpiece support device 28 of the wire saw 20, as shown in FIG. 14, the workpiece W has a glass plate 31 and a metal on its upper surface. In the state which fixed the to-be-held body 33 through the plate 32, it is mounted in the workpiece conveyance cart 66 and conveyed to the position corresponding to the to-be-processed object delivery apparatus 41. FIG. In this case, the support body 54 of the workpiece delivery apparatus 41 is moved and arrange | positioned in the inner position shown by the broken line in FIG. Then, the lifting body 49 is moved up by the operation of the lifting handle 50, and the moving body 51 is moved by the operation of the moving handle 52, so that the guide member 60 on the support body 54 is moved. ) Is disposed at a position corresponding to the second engagement portion 34c of the workpiece 33 on the workpiece W. FIG.

In this state, when the support body 54 is moved from the inner position shown by the dashed line in FIG. 12 to the outer position shown by the solid line by the operation of the operation handle 56, the guide member 60 will be held on the workpiece W. FIG. It is inserted into the second engaging portion 34c of the sieve 33. Thereafter, the lifting body 49 rises, and the workpiece W is caught by the front portion of the support body 54. It is supported in a state. And the support body 54 is moved from an outer position to an inner position, and the to-be-processed object W is mounted in the moving body 51. FIG.

On the other hand, in the workpiece support apparatus 28 of the wire saw 20, as shown in FIG. 6, the holding member 36 is moved to the downward position and arrange | positioned by the protruding operation | movement of each cylinder 37. FIG. In this state, as shown by the arrow in FIG. 1, the workpiece delivery device 41 on which the workpiece W is mounted is moved to a position corresponding to the holding member 36. The workpiece delivery device 41 is wire-seated by engaging the roller 45 and the positioning projection 47 on the workpiece delivery device 41 side with the guide plate 48 on the wire saw 20 side. The workpiece 20 is positioned at a predetermined workpiece removal position.

Thereafter, the lifting body 49 of the workpiece delivery device 41 rises as needed, and the movable body 51 is moved in the left and right directions so that the workpiece W caught on the guide member 60. The first engagement portion 34b of the upper body to be retained 33 is positioned at a position corresponding to the introduction guide portion 36a of the holding member 36 in the workpiece support device 28 of the wire saw 20. Is placed. In this state, the support body 54 of the workpiece delivery device 41 is moved from an inner position to an outer position. For this reason, as shown by the dashed line in FIG. 7, the 1st engagement part 34b of the to-be-retained body 33 on the to-be-processed object W of the holding member 36 is carried out from the front side of the to-be-processed member support member 35. FIG. It slides to the base side of the holding member 36 along the introduction guide portion 36a.

And, as shown in FIG. 3, the to-be-retained body 33 contacts the positioning member 39 provided in the lower surface of the to-be-processed member 35, is positioned at the predetermined position of the front-back direction, and is to-be-retained. The first engagement portion 34b of 33 is disposed in the engaged position with respect to the holding member 36. In this state, the support body 54 of the workpiece delivery device 41 is moved from the outer position to the inner position, whereby the workpiece W is moved from the guide member 60 of the workpiece delivery device 41 to the wire saw ( 20 to the holding member 36.

In this case, by the engagement of the said roller 45 and the guide plate 48, the holding member 36 so that the sliding direction of the to-be-supported body 33 may become a direction which cross | intersects the axial direction of the rollers 24 and 25 for a process. Is arranged. For this reason, as shown in FIG.2 and FIG.4, not only the case where the several to-be-processed object W is fixed to the to-be-supported body 33 in the state provided in parallel in the axial direction of the processing roller 24, 25, but also a to-be-processed object Even if (W) is long in the axial direction of the rollers 24 and 25 for processing, the to-be-supported body 33 on the to-be-processed object W can be smoothly transmitted with respect to the holding member 36, without twisting.

Then, when each cylinder 37 in the workpiece | work workpiece support apparatus 28 of the wire saw 20 is immersed, as shown in FIG. 4, the holding member 36 moves to an upward position, and is hold | maintained It engages with the 1st engagement part 34b of the sieve 33, and the said to-be- retained body 33 is pulled up toward the control surface 35a of the to-be-processed member support member 35. As shown in FIG. By this pulling up, the to-be-regulated surface 34a on the to-be-retained body 33 presses and contacts the restraining surface 35a of the workpiece support member 35, so that the workpiece W is to be workpiece-supported. Over the control surface 35a of 35 It is kept in a state and is set in a to-be-processed position.

In addition, in the wire saw 20, after the process of the to-be-processed object W is completed by the wire 26, when the to-be-processed object W is extracted from the to-be-processed workpiece support apparatus 28, What is necessary is just to operate in the reverse order as when the said workpiece | work W is mounted, using the to-be-processed workpiece 41.

And the structure of this embodiment has the following effects.

<1> The desorption direction of the workpiece W with respect to the holding member 36 of the workpiece support member 35 is a direction orthogonal to the plane in the vertical direction parallel to the axis line of the processing roller 24. At the tip of the holding member 36, an introduction guide portion 36a is formed to guide the introduction of the workpiece W to the mounting position. For this reason, the workpiece W is not only a state in which a plurality of workpieces W are provided in parallel in the axial direction of the roller 24 for processing, but also the workpiece W is long in the axial direction of the roller 24 for processing. Can be easily introduced into the holding member 36 and can be mounted without large sliding. Therefore, the mounting work of the workpiece W can be easily proceeded without distortion.

<2> The workpiece support member 35 slidably engages the workpiece 33 fixed to the upper surface of the workpiece W and guides the workpiece W to the workpiece position. The holding member 36 hold | maintains in a to-be-processed position, The said introduction guide part 36a is formed in the front-end | tip of the said holding member 36. As shown in FIG. Therefore, since the holding member 36 has a holding function and a sliding guide function of the workpiece W, the number of parts can be reduced and the configuration can be simplified. In addition, by the action of the introduction guide portion 36a, the introduction of the workpiece W into the holding member 36 can proceed smoothly without distortion.

<3> The workpiece supporting member 35 is provided with a restricting surface 35a for regulating the position of the regulated surface 34a of the retained body 33 of the workpiece W. FIG. In addition, the holding member 36 is pulled up by the cylinder 37 so that the to-be-regulated surface 34a is pressed against the regulating surface 35a in a regulated state. For this reason, since the to-be-processed object W is positioned in a predetermined position, high precision processing can be implement | achieved. In addition, since the regulating surface 35a on both sides of the holding member 36 is opened downward, cleaning of the regulating surface 35a can be easily performed. If the workpiece W is supported by the workpiece support member 35 in a state where the slurry is attached to the restricting surface 35a, the position of the workpiece W may be distorted, and high precision machining may not be possible. In this embodiment, this situation can be easily solved. On the other hand, for example, in the said patent document 2, since the restricting surface corresponded to the restricting surface 35a of this embodiment is formed in the upper surface of the "L" shaped support part, ie, the surface is upward, the said Cleaning of regulatory surface is difficult.

A transfer position for arranging the held body 33 at a height position of the holding member 36 so as to support the workpiece W so as to be exchangeable with the holding member; Since the workpiece delivery apparatus 41 which can move between is provided, the desorption operation | work of the workpiece | work W with respect to the wire saw 20 can be advanced easily.

<5> between the wire saw 20 and the workpiece delivery device 41, the rollers 45, the guide plate 48, etc. for positioning the workpiece delivery device 41 with respect to the holding member 36. The positioning means which consists of is provided. For this reason, in mounting the workpiece W to the wire saw 20, positioning of the workpiece with respect to the holding member 36 becomes easy, and the attachment work of the workpiece W becomes easier.

<6> The workpiece delivery device 41 is provided with a receiving plate 63 for receiving a dropping slurry from the workpiece W caught by the guide member 60. Therefore, contamination by the slurry with respect to the bottom surface of the wire saw 20, clothing of an operator, etc. can be prevented.

In the two positions of the guide member 60 approaching the holding member 36 and spaced apart from the holding member 36, the support member 54 for holding the guide member 60 is fixed. The positioning plate 57, the fixing plate 58, and the positioning pin 59 are provided. Therefore, the workpiece W can be stabilized at the detachable position and the standby position with respect to the workpiece support member 35, and the detachable work of the workpiece W becomes easier.

<Change example>

In addition, this embodiment can also be changed and implemented as follows.

The lifting body 49 and the moving body 51 of the workpiece delivery device 41 can be lifted or moved by a drive mechanism made of an electric motor or the like.

The support body 54 of the workpiece delivery device 41 can be configured to move between the inner position and the outer position by a drive mechanism made of an electric motor or the like.

In the above embodiment, the workpiece W is lifted relative to the processing roller 24 so that the processing of the workpiece W proceeds. On the contrary, the processing roller 24 is raised to raise the workpiece W. ) Can be configured to proceed.

The positioning plate 57 on the moving body 51 of the workpiece delivery device 41 can be provided only at the forward position of the support body 54. That is, it can be comprised so that the support body 54 may be fixed in the position which the guide member 60 approached to the to-be-processed member 35 of the wire saw 20.

<Other technical ideas>

As can be understood from the above embodiment, the technical idea not described in the claims is described below.

<A> The holding member fixed to the upper surface of the workpiece is slidable to guide the workpiece to the workpiece position, and a holding member for holding at the workpiece position is provided. A wire saw having a guide portion for introducing a workpiece into the holding member.

<B> In the technical idea A, the upper surface of the holding member is provided with a restricting surface for regulating the position of the retained member, and the retaining member is accessible / spaced from the restricting surface. And driving means for pressing the holding member in a regulated state with respect to the regulating surface by moving the holding member in the approaching direction.

<C> Provides the workpiece holding part 60 which is supported by the frame 42 which can run, and maintains the workpiece W in the height position of the mounting part 33 mounted to the wire saw 20, and the wire In the workpiece delivery device for exchanging the workpiece (W) with the cow 20,

And a receiving plate (63) for receiving a dropping slurry from the workpiece (W) held in the holding portion (60).

BRIEF DESCRIPTION OF THE DRAWINGS The perspective view of the principal part which shows the wire saw system of one Embodiment.

FIG. 2 is an enlarged front view of the main part of the wire saw in the wire saw system of FIG. 1. FIG.

3 is a side view of a main part of the wire saw;

4 is an enlarged front view of the workpiece supporting device for the wire saw.

5 is a perspective view of an essential part of the workpiece support device;

FIG. 6 is a front view showing a state in which a workpiece is detached from the workpiece support device of FIG. 4; FIG.

FIG. 7 is an enlarged sectional view taken along line 7-7 of FIG. 4; FIG.

FIG. 8 is an enlarged perspective view of the workpiece delivery device in the wire saw system of FIG. 1. FIG.

9 is a side view of the workpiece delivery device.

10 is an enlarged plan view of the workpiece delivery device.

FIG. 11 is an enlarged sectional view taken along line 11-11 of FIG. 9; FIG.

12 is an enlarged sectional view taken along a line 12-12 of FIG. 10;

The perspective view of the principal part which expands and shows the positioning structure of the support body with respect to the moving body of a workpiece | work delivery apparatus.

It is a side view which shows the state at the time of loading of the to-be-processed object with respect to the to-be-processed workpiece delivery apparatus of FIG.

<Description of the code>

20 wire saw

23 Cutting Apparatus

24, 25 processing roller

26 wire

28 Workpiece Support Device

33 Blood Retainer

34 Blood Maintenance

34a blood regulatory surface

34b first engagement

34c second engagement

35 Workpiece Support Member

35a regulatory surface

36 retaining member

36a introduction guide

37 cylinders

41 Workpiece Delivery Device

42 frames

49 lifting body

51 mobile

54 support

60 guide member

63 stars

W workpiece

Claims (9)

In addition to arranging a plurality of processing rollers in parallel, a holding means for detachably holding the workpiece to be detachable at a position facing the processing roller is provided, and the workpiece to be held by the holding means is provided between the processing rollers. In the wire saw which was cut by the wire, In addition to making the desorption direction of the workpiece with respect to the holding means crosswise with respect to a plane in the vertical direction parallel to the axis line of the processing roller, the holding means is introduced to guide the introduction of the workpiece to the mounting position. The wire saw which provided the guide part. The method of claim 1, A wire saw having a direction in which the workpiece is attached or detached from the holding means is a direction orthogonal to a plane in the vertical direction parallel to the axis line of the processing roller. The method of claim 1, The holding means includes a holding member for holding the workpiece to be fixed to the workpiece by being slidable to guide the workpiece to the workpiece position, and holding the workpiece at the workpiece position. A wire saw, wherein said introduction guide section is provided. The method of claim 3, wherein The holding means is provided with a restricting surface for regulating the position of the held body, the holding member is accessible / separated from the restricting surface, and the holding member is moved in the approach direction to hold the blood. And a driving means for pressing the sieve against the regulating surface in a regulated state so as to contact the sieve. A wire saw according to claim 3 or 4; And The holding body is disposed at a height position of the holding member, and can move between a transfer position for supporting the workpiece to be exchangeable with the holding member and a position spaced apart from the transfer position. The workpiece processing apparatus; wire saw system, characterized in that consisting of. The method of claim 5, And a positioning means for positioning the workpiece delivery device with respect to the holding member between the wire saw and the workpiece delivery device. The method of claim 5, The workpiece delivery device includes a guide member for guiding the workpiece to the front end of the holding member of the wire saw while the workpiece to be fixed to the upper surface of the workpiece is slidable. The method of claim 7, wherein The workpiece transfer device includes a receiving plate for receiving a dripping slurry from the workpiece to be caught by the guide member. The method according to claim 7 or 8, Supporting the guide member with a frame so as to be movable between a position approaching the holding member and a position spaced apart from the holding member, and providing a fixing means for fixing the guide member at least in the spaced position. Wire saw system.

Images