JP3976556B2 - Wire saw - Google Patents

Wire saw Download PDF

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Publication number
JP3976556B2
JP3976556B2 JP2001366517A JP2001366517A JP3976556B2 JP 3976556 B2 JP3976556 B2 JP 3976556B2 JP 2001366517 A JP2001366517 A JP 2001366517A JP 2001366517 A JP2001366517 A JP 2001366517A JP 3976556 B2 JP3976556 B2 JP 3976556B2
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Japan
Prior art keywords
container
wire
abrasive liquid
side surfaces
workpiece
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JP2001366517A
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Japanese (ja)
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JP2003165046A (en
Inventor
潔 山田
信男 大竹
宏文 竹井
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Dowa Holdings Co Ltd
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Dowa Holdings Co Ltd
Dowa Mining Co Ltd
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Priority to JP2001366517A priority Critical patent/JP3976556B2/en
Priority to CN 02154727 priority patent/CN1219628C/en
Publication of JP2003165046A publication Critical patent/JP2003165046A/en
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Publication of JP3976556B2 publication Critical patent/JP3976556B2/en
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Description

【0001】
【発明の属する技術分野】
本発明は,砥液を付着させたワイヤをワークに押し付けながら移動させて切断するワイヤソーに関する。
【0002】
【従来の技術】
磁性材料,半導体材料,セラミック材料などといった種々の棒形状のワークを切断するための装置として,ワイヤソーが用いられている。このワイヤソーでは,一対のメインロール間に進退を繰り返しながら移動していくワイヤを等間隔で何周にも巻回させると共に,等間隔で並んでいるワイヤの表面に向かって砥液を供給して砥液中に分散している砥粒をワイヤに付着させ,この砥粒を付着させたワイヤをワークに押し付けながらワイヤを移動させることにより,ワークを一度に多数枚の板形状に切断する構成になっている。
【0003】
従来のワイヤソーでは,ワークの長手方向の全長に渡って開口する供給ノズルをワークに入る直前のワイヤ列上に設置し,供給ノズルからワイヤ上に砥液を流下させることで,ワークの切削位置に砥粒を供給している。この場合,高い加工能率と高い切断精度を得るには,多数本のワイヤ表面に砥粒を十分付着させておく必要がある。そこで,砥粒を比較的粘度の高い油等からなる液体媒体に混合して砥液とし,ワイヤ表面に付着しやすいようにする工夫がなされている。また,砥液をワイヤ全長に渡って均一に供給するために,砥液の取り入れ口から下流に向かって径が広がる単管によって構成した供給ノズルや,直径の異なる管を二重に組み合わせた供給ノズルを用いることで,供給ノズルの全幅に渡って砥液を均一に供給できるように工夫されている。
【0004】
そして,ワークを切断したことによりワイヤ表面に付着した切粉は,砥液によって連続的に洗い流すようにしている。また,ワイヤ表面から洗い流した切粉は,砥液と共に下方に流れ落ち,受け容器に回収されるようになっている。
【0005】
【発明が解決しようとする課題】
しかしながら,従来のワイヤソーでは,切断によって発生した微粉,研削くず(切り粉,スラッジ)のために供給ノズルが短時間で閉塞を起こし,ワイヤ上に付着する砥粒の量がワーク全長にわたって均一でなくなり,ワークの厚さが変化したり,ワークの切断面の面粗度が粗くなるという問題があった。また,供給ノズルが閉塞すると,ワイヤ上に砥液が供給されなってワイヤ切れが生じるため,長時間にわたる切断加工が実施できないという問題があった。
【0006】
また,供給ノズルからワイヤ直上に砥液を流下させる従来の方法では,砥粒は砥液の表面張力のみによってワイヤに付着するだけで,大部分の砥粒はワイヤから脱落してしまうことになり,その付着度合いは,砥液の粘度や供給ノズルからの供給量に応じて大きく変化する。そして,長時間切断加工に使用した砥液は,切粉混入量の増加に伴う流動性の劣化により,ワイヤソーの運転が停止されたときに,水平配管部分等で滞留し,配管中で砥粒が固まって詰まりやすくなる。更に,固まった砥粒は供給ノズルの開口部を閉塞させ,ワイヤ切れをより多く発生させる要因となる。
【0007】
従って本発明の目的は,長時間に渡って良好にワークを切断することができるワイヤソーを提供することにある。
【0008】
【課題を解決する手段】
この目的を達成するために,本発明にあっては,ワークにワイヤを押し付け,砥粒を分散煤に分散させてなる砥液をワークとワイヤとの間に介在させつつ,ワイヤをその軸方向に移動させてワークを切断するワイヤソーであって,前記砥液の流れが形成され,前記ワイヤが,該流れが形成された砥液の液面下にて移動するように構成されていることを特徴としている。
【0009】
このワイヤソーは,前記砥液を容器に供給し続けることにより,該容器の上面開口部から砥液を連続的に溢れさせ,前記ワイヤが,この溢れている砥液の液面下にて移動するように構成されている。この場合,前記容器の側面上端に高所と低所を設け,前記砥液が低所にて溢れるように構成する。また,前記容器の上面開口部において前記ワイヤを水平に移動させるようにガイドする一対のメインロールが,前記容器の両側に配置され,前記低所が,これらメインロール間で移動するワイヤの下方となる位置に形成され,これらメインロールの周面上端は,前記低所よりも高く,前記高所よりも低い位置に設定されている。なお,前記容器は上面が開口し,四方側面及び底面が塞がれた形状であり,前記容器の前後側面の上端と左右側面の上端はいずれも水平であるが,前後側面の上端が左右側面の上端よりも高くなるように形成され,前記メインロールは,前記容器の左右側面の外側において,互いに並行となるように前記容器を挟んで配置され前記容器内に連続的に供給された砥液は,容器の上面開口部において,左右側面の上端を乗り越えて,容器の左右外側に連続的に流れ落ちる。また前後側面には,砥液の供給口が形成されており,この供給口から容器内に連続的に供給された砥液が,容器の上面開口部から連続的に溢れ出る。
【0010】
なお,ワークにワイヤを押し付け,砥粒を分散煤に分散させてなる砥液をワークとワイヤとの間に介在させつつ,ワイヤをその軸方向に移動させてワークを切断する方法であって,前記砥液の流れを形成し,前記ワイヤを該流れが形成された砥液の液面下にて移動させつつワークに押し付けることを特徴としている。
【0011】
【発明の実施の形態】
以下,本発明の好ましい実施の形態を,図面を参照にして説明する。図1は,本発明の実施の形態にかかるワイヤソー1の要部の正面図であり,図2は,図1におけるA−A断面矢視図である。
【0012】
このワイヤソー1は,砥液aが供給される容器10の左右両側に一対のメインロール11,12が配置されており,容器10の下方に駆動ロール13が配置されている。これらメインロール11,12及び駆動ロール13に一本のワイヤ15が数周に渡って巻き掛けられており,これらメインロール11,12及び駆動ロール13の回転に従って,ワイヤ15が進退を繰り返しながら移動するようになっている。なお,ワイヤ15としては,例えば線径0.06〜1.2mmの金属線を使用することができる。実際のワイヤ15の例としては,スチール線,ピアノ線,ステンレス鋼線等を使用することができ,これらにブラスメッキや銅メッキ等の表面処理を施したものも使用できる。また,これらメインロール11,12及び駆動ロール13の外側には,図示しない繰り出しリールと巻き取りリールが配置してあり,繰り出しリールから繰り出されたワイヤ15が,メインロール11,12及び駆動ロール13に数周に渡って巻き掛けられつつ進退移動し,巻き取りリールに巻き取られていくようになっている。
【0013】
ワイヤ15は,メインロール11,12及び駆動ロール13に数周に渡って巻き掛けられており,図2によって理解されるように,容器10の前後幅は,メインロール11,12に巻きつけられたワイヤ15の巻き掛け幅よりも長くなっている。これにより,メインロール11とメインロール12の間では,多数本のワイヤ15が所定の等間隔で平行な状態を保ちながら,移動するようになっている。なお図示はしないが,メインロール11,12の周面には,このようなワイヤ15の平行状態を保つために,ガイド溝等が適宜形成されている。
【0014】
図3に示すように,容器10は,上面が開口し,四方側面20,21,22,23及び底面24が塞がれた形状である。前後側面20,22には,砥液aの供給口25が形成されており,この供給口25から容器10内に連続的に供給された砥液aが,容器10の上面開口部から連続的に溢れ出るようになっている。この場合,砥液aとしては,オイル中に炭化ケイ素,アルミナ,ダイヤモンドの一種または二種以上の砥粒を分散させたものなどが利用される。砥液aの粘度は例えば10〜1000mPa・sである。
【0015】
図示の例では,容器10の前後側面20,22の上端20’,22’と,容器10の左右側面21,23の上端21’,23’はいずれも水平であるが,前後側面20,22の上端20’,22’が左右側面21,23の上端21’,23’よりも高くなるように形成されている。即ち,容器10の前後側面20,22の上端20’,22’は高所に形成され,容器10の左右側面21,23の上端21’,23’は低所に形成されている。
【0016】
そして,このように容器10の前後側面20,22の上端20’,22’が高所,左右側面21,23の上端21’,23’が低所となっていることにより,前述のように,供給口25から容器10内に連続的に供給された砥液aは,図4に示すように,容器10の上面開口部において,左右側面21,23の上端21’,23’を乗り越え,容器10の左右外側に連続的に流れ落ちることとなる。またこの場合,容器10の上面開口部における砥液aの液面a’は,容器10の左右側面21,23の上端21’,23’よりも高い位置となっている。
【0017】
前述のメインロール11,12はいずれも水平であり,かつ,メインロール11,12は,容器10の左右側面21,23の外側において,互いに並行となるように容器10を挟んで配置されている。これらメインロール11,12の周面上端部は,左右側面21,23の上端21’,23’(低所)よりは高く,容器10の前後側面20,22の上端20’,22’(高所)よりは低い位置に設定されている。これにより,前述のようにメインロール11,12間において所定の等間隔状態で平行移動するワイヤ15は,容器10の上面開口部において,左右側面21,23の上端21’,23’(低所)よりは高く,容器10の前後側面20,22の上端20’,22’(高所)よりは低い位置で,水平移動させられるようになっている。またこの場合,平行移動するワイヤ15が,図4に示すように,容器10の上面開口部に形成される砥液aの液面a’よりも低い位置にあり,ワイヤ15は,砥液aの液面a’下にて移動するように構成されている(即ち,左右側面21,23の上端21’,23’(低所)より高く,前後側面20,22の上端20’,22’(高所)より低い位置にあるワイヤ15が,砥液aの液面a’下となるように,供給口25から容器10内に連続的に供給する砥液aの供給量を調整している)。
【0018】
容器10の上方には,昇降機構30によってワークWが支持されている。ワークWは,例えば直方体形状の磁性材料などが例示される。そして,この昇降機構30の稼働によってワークWが下降し,ワークWの下面側が,メインロール11,12の間において互いに平行で等間隔に張り渡されたワイヤ15に上から押し付けられるようになっている。
【0019】
さて,以上のように構成されたワイヤソー1において,供給口25から容器10内に連続的に砥液aを供給し,容器10の上面開口部において,左右側面21,23の上端21’,23’を乗り越えて容器10の左右外側に砥液aが連続的に溢れ出る状態にする。そして,メインロール11,12間にて所定の等間隔状態で平行に巻きかけられたワイヤ15を,容器10の上面開口部に形成される砥液aの液面a’よりも低い位置にさせた状態で(即ち,ワイヤ15が砥液aの液面a’下となるように,供給口25から容器10内に連続的に供給する砥液aの供給量を調整した状態で),ワイヤ15を進退移動させる。そして,昇降機構30の稼働によってワークWを下降させ,ワークWの下面側を,メインロール11,12の間において等間隔で平行移動しているワイヤ15に上から押し付ける。これにより,ワークWを多数の薄板に切断することができる。
【0020】
従って,この実施の形態のワイヤソー1によれば,砥液aの液面a’下にて移動しているワイヤ15にワークWを押し付けることとなるので,砥液a中で切断を行うことが可能となる。このため,長時間にわたって十分な量の砥液aをワークWの切断箇所とワイヤ15の間に介在させることが可能となり,砥液a切れによるワイヤ15の断線が無くなり,良好な切断表面を持つ薄片を得ることができる。
【0021】
以上,本発明の好ましい実施の形態の一例を説明したが,本発明はここに示した形態に限定されない。例えば,容器10から溢れ出させた砥液aは,ドレインパンなどによって回収し,適当な循環回路によって再び容器10に供給してもよい。この場合,再び容器10に供給する前に,マグネット式フィルタなどを用いて切粉を除去するようにすれば,より長期的な切断作業ができるようになる。なお,マグネット式フィルタなどは,定期的に掃除を行うと良い。
【0022】
本発明のワイヤーソーは,例えば焼結希土類磁石合金の切断に用いると効果的である。焼結希土類磁石合金は,硬さがHv500〜1000と非常に硬質であり,しかも,硬質の磁性結晶粒が粒界層中に分散した状態の組織を有しているため,磁性結晶粒が切り欠けやすく,いわゆる硬脆な性質を有している。このような焼結希土類磁石合金からなるワークを切断する場合,例えば外周刃を用いて硬質の磁性結晶粒を切断するには刃先の損耗は避けられず,また結晶粒の剥がれ落ちも発生するので,亀裂の発生を誘発しやすい。一方,本発明によれば,砥液の流れが形成された砥液内でワークにワイヤを押し付けて切断することで,安定して砥粒を含む砥液をワークとワイヤの間に介在させることが可能となり,上記のような硬脆な性質を有する焼結希土類磁石合金をワークとした場合でも,切断面の非常に滑らかな切断片を得ることができる。
【0023】
【実施例】
磁石合金からなる長さ30mm×外形8mmの板状焼結体からなるワークを,線形0.18mmのスチール線(表面にブラスめっきが施されている)と炭化ケイ素系の砥粒を鉱物油に分散させた砥液を用いてスライス厚み:1.0mmの条件で切断試験をおこなった。切断時間をほぼ3時間に設定し,切断中,容器内の砥液の温度を25℃から30℃の間で維持するよう冷却しながら切断を実施した結果,得られた切断片の切断面は非常に滑らかであり,ソーマークも切欠けも見られなかった。
【0024】
一方,比較例については,砥液の供給を二重管構造のノズルを用いて行った以外は上記実施例と同様に実施した。その結果,切断途中でワイヤが破断した。また,破断する前の切断片の表面にはワイヤ走行方向に平行なソーマークが見られ,その発生は供給ノズルから距離の離れた所に位置するワークに多くみられた。
【0025】
【発明の効果】
本発明によれば,ワークの切断を砥液中で行うことによって,ワークとワイヤ間に十分な量の砥粒を長時間にわたって供給することができる。これにより,ワイヤ切れの防止による連続操業時間の長期化,及び,ワーク切断片の表面状態を均一かつ良好な状態に保つことができるため,ワイヤソー切断の生産性の向上に大きく貢献することができる。
【図面の簡単な説明】
【図1】本発明の実施の形態にかかるワイヤソーの要部の正面図である。
【図2】図1におけるA−A断面矢視図である。
【図3】容器の斜視図である。
【図4】容器の上面開口部に形成される砥液の液面下にてワイヤが移動する状態の説明図である。
【符号の説明】
a 砥液
1 ワイヤソー
10 容器
11,12 メインロール
13 駆動ロール
15 ワイヤ
20,21,22,23 側面
20’,21’,22’,23’ 上端
24 底面
25 供給口
30 昇降機構
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a wire saw that moves and cuts a wire to which an abrasive solution is attached while pressing the wire against a workpiece.
[0002]
[Prior art]
Wire saws are used as devices for cutting various bar-shaped workpieces such as magnetic materials, semiconductor materials, and ceramic materials. In this wire saw, a wire that moves while repeating advancing and retreating between a pair of main rolls is wound many times at equal intervals, and the abrasive liquid is supplied toward the surface of the wires arranged at equal intervals. Abrasive grains dispersed in the abrasive fluid are attached to the wire, and the wire is moved while pressing the wire to which the abrasive grains are attached to the workpiece, thereby cutting the workpiece into a number of plates at once. It has become.
[0003]
In a conventional wire saw, a supply nozzle that opens over the entire length of the workpiece is installed on the wire row immediately before entering the workpiece, and the abrasive fluid flows down from the supply nozzle onto the wire, so that the workpiece can be cut into the cutting position. Abrasive grains are supplied. In this case, in order to obtain high processing efficiency and high cutting accuracy, it is necessary to sufficiently attach abrasive grains to the surface of a large number of wires. Therefore, a device has been devised in which the abrasive grains are mixed with a liquid medium made of oil having a relatively high viscosity to form an abrasive liquid and easily adhere to the wire surface. In addition, in order to supply the abrasive liquid uniformly over the entire length of the wire, supply nozzles composed of a single pipe whose diameter increases downstream from the inlet of the abrasive liquid, and a combination of pipes with different diameters are combined. By using the nozzle, it is devised so that the abrasive liquid can be supplied uniformly over the entire width of the supply nozzle.
[0004]
The chips adhering to the wire surface by cutting the workpiece are continuously washed away with the abrasive liquid. Further, the chips washed away from the wire surface flow down together with the abrasive liquid and are collected in a receiving container.
[0005]
[Problems to be solved by the invention]
However, in the conventional wire saw, the supply nozzle is blocked in a short time due to fine powder generated by cutting and grinding waste (swarf and sludge), and the amount of abrasive grains adhering to the wire is not uniform over the entire length of the workpiece. There are problems that the thickness of the workpiece changes and the roughness of the cut surface of the workpiece becomes rough. In addition, when the supply nozzle is blocked, the abrasive liquid is supplied onto the wire and the wire is cut, so that there is a problem in that cutting cannot be performed for a long time.
[0006]
Further, in the conventional method in which the abrasive liquid flows down from the supply nozzle directly above the wire, the abrasive grains adhere only to the wire only by the surface tension of the abrasive liquid, and most of the abrasive grains fall off the wire. The degree of adhesion varies greatly depending on the viscosity of the abrasive liquid and the amount supplied from the supply nozzle. And the abrasive fluid used for long-time cutting processing stays in the horizontal piping part etc. when the wire saw operation is stopped due to the deterioration of the fluidity due to the increase of the amount of chips, and the abrasive grains in the piping Will harden and become clogged. Furthermore, the hardened abrasive grains block the opening of the supply nozzle, causing more wire breakage.
[0007]
Accordingly, an object of the present invention is to provide a wire saw that can cut a workpiece satisfactorily for a long time.
[0008]
[Means for solving the problems]
In order to achieve this object, in the present invention, the wire is pressed in the axial direction while pressing the wire against the workpiece and interposing an abrasive liquid in which the abrasive grains are dispersed in the dispersion basket between the workpiece and the wire. A wire saw that cuts a workpiece by moving the polishing fluid, wherein the flow of the abrasive liquid is formed, and the wire is configured to move below the surface of the abrasive liquid in which the flow is formed. It is a feature.
[0009]
The wire saw continuously overflows the abrasive liquid from the upper surface opening of the container by continuously supplying the abrasive liquid to the container, and the wire moves below the surface of the overflowed abrasive liquid. It is configured as follows. In this case, a high place and a low place are provided at the upper end of the side surface of the container so that the abrasive liquid overflows in the low place. In addition, a pair of main rolls for guiding the wire to move horizontally in the upper surface opening of the container are disposed on both sides of the container, and the low portion is below the wire moving between the main rolls. The upper end of the peripheral surface of these main rolls is set at a position higher than the low place and lower than the high place. The container has a shape in which the upper surface is open and the four sides and the bottom are closed, and the upper ends of the front and rear sides and the upper ends of the left and right sides of the container are both horizontal, but the upper ends of the front and rear sides are left and right. is formed to be higher than the upper end of the side surface, said main roll, outside the left and right sides of the container, is arranged across the container so as to parallel to each other, are continuously fed into the container The abrasive liquid continuously flows down to the left and right outer sides of the container over the upper ends of the left and right side surfaces at the upper opening of the container. In addition , an abrasive liquid supply port is formed on the front and rear side surfaces, and the abrasive liquid continuously supplied into the container from the supply port continuously overflows from the upper surface opening of the container.
[0010]
Note that pressing the wire to the workpiece, while interposing a polishing liquid obtained by dispersing abrasive grains dispersed soot between the workpiece and the wire, by moving the wire in the axial direction A method for cutting a workpiece, A flow of the abrasive liquid is formed, and the wire is pressed against the workpiece while moving under the liquid surface of the abrasive liquid in which the flow is formed.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a front view of a main part of a wire saw 1 according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along line AA in FIG.
[0012]
In the wire saw 1, a pair of main rolls 11 and 12 are disposed on the left and right sides of the container 10 to which the abrasive liquid a is supplied, and a drive roll 13 is disposed below the container 10. A single wire 15 is wound around the main rolls 11 and 12 and the drive roll 13 over several turns, and the wire 15 moves while repeating the forward and backward movements as the main rolls 11 and 12 and the drive roll 13 rotate. It is supposed to be. For example, a metal wire having a wire diameter of 0.06 to 1.2 mm can be used as the wire 15. As an example of the actual wire 15, a steel wire, a piano wire, a stainless steel wire, or the like can be used, and those subjected to surface treatment such as brass plating or copper plating can also be used. Further, outside the main rolls 11 and 12 and the drive roll 13, a supply reel and a take-up reel (not shown) are arranged, and the wire 15 fed out from the supply reel is connected to the main rolls 11 and 12 and the drive roll 13. It moves forward and backward while being wound over several laps, and is wound on a take-up reel.
[0013]
The wire 15 is wound around the main rolls 11 and 12 and the drive roll 13 over several turns. As can be understood from FIG. 2, the front-rear width of the container 10 is wound around the main rolls 11 and 12. The winding width of the wire 15 is longer. Thereby, between the main roll 11 and the main roll 12, many wires 15 move, maintaining a parallel state at predetermined equal intervals. Although not shown, guide grooves and the like are appropriately formed on the peripheral surfaces of the main rolls 11 and 12 in order to keep the wire 15 in a parallel state.
[0014]
As shown in FIG. 3, the container 10 has a shape in which the top surface is opened and the four side surfaces 20, 21, 22, 23 and the bottom surface 24 are closed. A supply port 25 for the abrasive liquid a is formed in the front and rear side surfaces 20 and 22, and the abrasive liquid a continuously supplied from the supply port 25 into the container 10 is continuously supplied from the upper surface opening of the container 10. It has come to overflow. In this case, as the abrasive liquid a, one obtained by dispersing one or more kinds of abrasive grains of silicon carbide, alumina, diamond in oil is used. The viscosity of the abrasive fluid a is, for example, 10 to 1000 mPa · s.
[0015]
In the illustrated example, the upper ends 20 ′ and 22 ′ of the front and rear side surfaces 20 and 22 of the container 10 and the upper ends 21 ′ and 23 ′ of the left and right side surfaces 21 and 23 of the container 10 are both horizontal. The upper ends 20 ′ and 22 ′ of the left and right side surfaces 21 and 23 are formed to be higher than the upper ends 21 ′ and 23 ′. That is, the upper ends 20 ′ and 22 ′ of the front and rear side surfaces 20 and 22 of the container 10 are formed at high places, and the upper ends 21 ′ and 23 ′ of the left and right side faces 21 and 23 of the container 10 are formed at low places.
[0016]
As described above, the upper ends 20 'and 22' of the front and rear side surfaces 20 and 22 of the container 10 are high and the upper ends 21 'and 23' of the left and right side surfaces 21 and 23 are low as described above. As shown in FIG. 4, the abrasive fluid a continuously supplied from the supply port 25 into the container 10 passes over the upper ends 21 ′ and 23 ′ of the left and right side surfaces 21 and 23 at the upper surface opening of the container 10, It will flow continuously to the left and right outside of the container 10. In this case, the liquid level a ′ of the abrasive liquid a at the upper surface opening of the container 10 is higher than the upper ends 21 ′ and 23 ′ of the left and right side surfaces 21 and 23 of the container 10.
[0017]
The above-mentioned main rolls 11 and 12 are both horizontal, and the main rolls 11 and 12 are arranged outside the left and right side surfaces 21 and 23 of the container 10 so as to be parallel to each other. . The upper end portions of the peripheral surfaces of the main rolls 11 and 12 are higher than the upper ends 21 ′ and 23 ′ (low places) of the left and right side surfaces 21 and 23, and the upper ends 20 ′ and 22 ′ (high positions) of the front and rear side surfaces 20 and 22 of the container 10. Is set at a lower position than Thus, as described above, the wire 15 that translates between the main rolls 11 and 12 at a predetermined equidistant state has the upper ends 21 ′ and 23 ′ of the left and right side surfaces 21 and 23 at the upper surface opening of the container 10. ) At a position lower than the upper ends 20 ′, 22 ′ (high place) of the front and rear side surfaces 20, 22 of the container 10. Further, in this case, as shown in FIG. 4, the wire 15 that moves in parallel is located at a position lower than the liquid surface a ′ of the abrasive liquid a formed at the upper surface opening of the container 10. (That is, higher than the upper ends 21 ′ and 23 ′ (lower part) of the left and right side surfaces 21 and 23, and the upper ends 20 ′ and 22 ′ of the front and rear side surfaces 20 and 22). Adjust the supply amount of the abrasive liquid a that is continuously supplied from the supply port 25 into the container 10 so that the wire 15 located at a lower position is below the liquid level a ′ of the abrasive liquid a. )
[0018]
A workpiece W is supported above the container 10 by an elevating mechanism 30. Examples of the workpiece W include a rectangular parallelepiped magnetic material. Then, the work W is lowered by the operation of the elevating mechanism 30, and the lower surface side of the work W is pressed from above onto the wire 15 stretched in parallel between the main rolls 11 and 12 at equal intervals. Yes.
[0019]
Now, in the wire saw 1 configured as described above, the abrasive fluid a is continuously supplied from the supply port 25 into the container 10, and the upper ends 21 ′ and 23 of the left and right side surfaces 21 and 23 at the upper surface opening of the container 10. Overcoming ', the abrasive liquid a continuously overflows from the left and right outer sides of the container 10. Then, the wire 15 wound in parallel between the main rolls 11 and 12 at a predetermined equal interval is placed at a position lower than the liquid level a ′ of the abrasive liquid a formed in the upper surface opening of the container 10. In a state in which the wire 15 is supplied (that is, in a state where the supply amount of the abrasive liquid a continuously supplied from the supply port 25 into the container 10 is adjusted so that the wire 15 is below the liquid level a ′ of the abrasive liquid a) Move 15 back and forth. Then, the work W is lowered by the operation of the lifting mechanism 30, and the lower surface side of the work W is pressed from above onto the wire 15 that is parallelly moved between the main rolls 11 and 12 at equal intervals. Thereby, the workpiece | work W can be cut | disconnected to many thin plates.
[0020]
Therefore, according to the wire saw 1 of this embodiment, since the workpiece W is pressed against the wire 15 moving under the liquid surface a ′ of the abrasive liquid a, cutting can be performed in the abrasive liquid a. It becomes possible. Therefore, a long time over it is possible to interpose the polishing solution a sufficient amount during the cutting portion and the wire 15 of the workpiece W, there is no disconnection of the wire 15 by the abrasive liquid a breakage, having good cutting surfaces Flakes can be obtained.
[0021]
As mentioned above, although an example of preferable embodiment of this invention was demonstrated, this invention is not limited to the form shown here. For example, the abrasive liquid a overflowing from the container 10 may be collected by a drain pan or the like and supplied to the container 10 again by an appropriate circulation circuit. In this case, if the chips are removed using a magnetic filter or the like before being supplied to the container 10 again, a longer-term cutting operation can be performed. In addition, it is recommended to clean the magnet filter regularly.
[0022]
The wire saw of the present invention is effective when used, for example, for cutting sintered rare earth magnet alloys. Sintered rare earth magnet alloys are very hard with a hardness of Hv 500 to 1000 and have a structure in which hard magnetic crystal grains are dispersed in the grain boundary layer. It is easy to chip and has so-called hard and brittle properties. When cutting a workpiece made of such a sintered rare earth magnet alloy, for example, when cutting hard magnetic crystal grains using an outer peripheral blade, wear of the cutting edge is unavoidable, and the crystal grains also fall off. , It is easy to induce cracking. On the other hand, according to the present invention, the abrasive fluid containing abrasive grains is stably interposed between the workpiece and the wire by pressing the wire against the workpiece in the abrasive fluid in which the abrasive fluid flow is formed and cutting the workpiece. Even when a sintered rare earth magnet alloy having the above hard and brittle properties is used as a workpiece, a cut piece with a very smooth cut surface can be obtained.
[0023]
【Example】
A workpiece made of a plate-shaped sintered body of 30 mm long x 8 mm outer diameter made of a magnetic alloy, and a linear 0.18 mm steel wire (with brass plating on the surface) and silicon carbide-based abrasive grains in mineral oil A cutting test was performed under the condition of slice thickness: 1.0 mm using the dispersed abrasive liquid. The cutting time was set to approximately 3 hours, and the cutting surface of the obtained cut piece was obtained as a result of cutting while cooling so that the temperature of the abrasive liquid in the container was maintained between 25 ° C. and 30 ° C. during cutting. It was very smooth and saw marks and notches were not seen.
[0024]
On the other hand, about the comparative example, it implemented similarly to the said Example except having supplied the abrasive liquid using the nozzle of the double tube structure. As a result, the wire broke during cutting. In addition, saw marks parallel to the wire traveling direction were found on the surface of the cut piece before breaking, and the occurrence was often observed in workpieces located at a distance from the supply nozzle.
[0025]
【The invention's effect】
According to the present invention, by cutting the workpiece in the abrasive liquid, a sufficient amount of abrasive grains can be supplied between the workpiece and the wire for a long time. As a result, the continuous operation time can be prolonged by preventing wire breakage, and the surface state of the workpiece cutting piece can be maintained in a uniform and good state, which can greatly contribute to the improvement of wire saw cutting productivity. .
[Brief description of the drawings]
FIG. 1 is a front view of a main part of a wire saw according to an embodiment of the present invention.
2 is a cross-sectional view taken along the line AA in FIG.
FIG. 3 is a perspective view of a container.
FIG. 4 is an explanatory view showing a state in which the wire moves below the surface of the abrasive liquid formed in the upper surface opening of the container.
[Explanation of symbols]
a abrasive liquid 1 wire saw 10 container 11, 12 main roll 13 drive roll 15 wire 20, 21, 22, 23 side 20 ', 21', 22 ', 23' upper end 24 bottom 25 supply port 30 elevating mechanism

Claims (2)

ワークにワイヤを押し付け,砥粒を分散煤に分散させてなる砥液をワークとワイヤとの間に介在させつつ,ワイヤをその軸方向に移動させてワークを切断するワイヤソーであって,
前記砥液の流れが形成され,前記ワイヤが,該流れが形成された砥液の液面下にて移動するように構成され,
前記砥液を容器に供給し続けることにより,該容器の上面開口部から砥液を連続的に溢れさせ,前記ワイヤが,この溢れている砥液の液面下にて移動するように構成され,
前記容器の側面上端に高所と低所を設け,前記砥液が低所にて溢れるように構成し,
前記容器の上面開口部において前記ワイヤを水平に移動させるようにガイドする一対のメインロールが,前記容器の両側に配置され,前記低所が,これらメインロール間で移動するワイヤの下方となる位置に形成され,これらメインロールの周面上端は,前記低所よりも高く,前記高所よりも低い位置に設定され
前記容器は,上面が開口し,四方側面及び底面が塞がれた形状であり,
前記容器の前後側面の上端と左右側面の上端はいずれも水平であるが,前後側面の上端が左右側面の上端よりも高くなるように形成され,
前記メインロールは,前記容器の左右側面の外側において,互いに並行となるように前記容器を挟んで配置され,
前記容器内に連続的に供給された砥液は,容器の上面開口部において,左右側面の上端を乗り越えて,容器の左右外側に連続的に流れ落ち,
前後側面には,砥液の供給口が形成されており,この供給口から容器内に連続的に供給された砥液が,容器の上面開口部から連続的に溢れ出ることを特徴とする,ワイヤソー。
A wire saw that cuts a workpiece by moving the wire in the axial direction while pressing the wire against the workpiece and interposing an abrasive liquid in which the abrasive grains are dispersed in a dispersion basket between the workpiece and the wire.
A flow of the abrasive liquid is formed, and the wire is configured to move below the surface of the abrasive liquid in which the flow is formed;
By continuing to supply the abrasive liquid to the container, the abrasive liquid continuously overflows from the opening on the upper surface of the container, and the wire moves below the surface of the overflowed abrasive liquid. ,
Provide a high place and a low place on the upper side of the side of the container, so that the abrasive liquid overflows in the low place,
A pair of main rolls for guiding the wire to move horizontally in the upper surface opening of the container are disposed on both sides of the container, and the low position is below the wire moving between the main rolls. The upper end of the peripheral surface of these main rolls is set at a position higher than the low place and lower than the high place ,
The container has a shape in which the top surface is open and the four sides and the bottom are closed.
The upper end of the front and rear side surfaces and the upper end of the left and right side surfaces of the container are both horizontal, but the upper end of the front and rear side surfaces is formed to be higher than the upper end of the left and right side surfaces,
The main roll is arranged outside the left and right side surfaces of the container so as to be parallel to each other,
The abrasive liquid continuously supplied into the container passes over the upper ends of the left and right side surfaces at the upper surface opening of the container and continuously flows down to the left and right outer sides of the container.
The front and rear side surfaces are provided with an abrasive liquid supply port, and the abrasive liquid continuously supplied into the container from the supply port continuously overflows from the upper surface opening of the container. Wire saw.
前記ワークが焼結希土類磁石合金であることを特徴とする,請求項1に記載のワイヤソー。The wire saw according to claim 1, wherein the workpiece is a sintered rare earth magnet alloy.
JP2001366517A 2001-11-30 2001-11-30 Wire saw Expired - Fee Related JP3976556B2 (en)

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JP4236540B2 (en) * 2003-09-02 2009-03-11 株式会社ノリタケスーパーアブレーシブ Wire saw
JP2008213111A (en) * 2007-03-06 2008-09-18 Sharp Corp Multi-wire saw and slurry supply method
JP4684323B2 (en) * 2008-09-11 2011-05-18 コマツNtc株式会社 Wire saw and workpiece machining method
JP4825867B2 (en) * 2008-12-25 2011-11-30 コマツNtc株式会社 Wire saw system
JP5016122B1 (en) * 2011-03-07 2012-09-05 コマツNtc株式会社 Measuring jig, wire saw, and workpiece mounting method
KR101249860B1 (en) * 2011-09-06 2013-04-03 주식회사 엘지실트론 Slurry Bath and Wire Sawing Device including the same
CN105538529A (en) * 2015-12-01 2016-05-04 安徽天思朴超精密模具股份有限公司 Cooling device for wire cutting machine
CN106363826B (en) * 2016-09-07 2017-12-15 江西赛维Ldk太阳能高科技有限公司 Cut the device and method of silicon ingot
CN111267238A (en) * 2020-03-19 2020-06-12 刘延斌 Ruby processing cutting equipment
CN111922815A (en) * 2020-06-10 2020-11-13 南通宝得利机械制造有限公司 Low-dust efficient metal plate polishing device
CN114589601B (en) * 2022-03-18 2023-09-05 浙江晶盛机电股份有限公司 Abrasive particle energized wire cutting device and method

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