JP4817293B2 - Workpiece cleaning method and workpiece cleaning system - Google Patents

Workpiece cleaning method and workpiece cleaning system Download PDF

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JP4817293B2
JP4817293B2 JP2005311325A JP2005311325A JP4817293B2 JP 4817293 B2 JP4817293 B2 JP 4817293B2 JP 2005311325 A JP2005311325 A JP 2005311325A JP 2005311325 A JP2005311325 A JP 2005311325A JP 4817293 B2 JP4817293 B2 JP 4817293B2
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浩之 山本
卓也 樋口
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Asahi Sunac Corp
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本発明は、粉末状のドライアイスによりワークを洗浄する洗浄手段を備えたワーク洗浄方法及びワーク洗浄システムに関する。   The present invention relates to a workpiece cleaning method and a workpiece cleaning system provided with a cleaning means for cleaning a workpiece with powdered dry ice.

半導体や液晶パネルなどを製造する分野においては、近年、液体二酸化炭素（液化炭酸ガス）を噴射ノズルから霧状に噴射させることで粉末状のドライアイスとし、この粉末状のドライアイスをワークにぶつけることにより洗浄する方法が提案されている（例えば、特許文献１，２参照）。
特開２００４−３５６１５８号公報 特開２００５−２３８０５９号公報 In the field of manufacturing semiconductors and liquid crystal panels, in recent years, liquid carbon dioxide (liquefied carbon dioxide) is sprayed from a spray nozzle in the form of a mist to form powdered dry ice, and the powdered dry ice is hit against a workpiece. A cleaning method has been proposed (see, for example, Patent Documents 1 and 2).
JP 2004-356158 A JP 2005-238059 A

ところで、上記したように粉末状のドライアイスで洗浄する場合、ドライアイスの温度が低いため（−６０〜−７０℃）、結露の発生や結露水の凍結が問題となる場合がある。なお、ドライアイスは、洗浄後は昇華して炭酸ガスとなる。
そこで、ドライアイスにより洗浄する際に、結露の発生を防止するために、次のような方法が考えられる。すなわち、洗浄室（チャンバー）内にワークを投入した後、洗浄室内に水分を含まない不活性ガス（例えば窒素ガス）またはドライエア（乾燥空気）を注入することにより低露点化を図り（露点が−４０℃以下となるようにする）、この雰囲気中で、ドライアイスによる洗浄を行なう方法、あるいは、洗浄室内にワークを投入した後、まず洗浄室内を真空ポンプにより真空引きして水分を含む空気をできるだけ取り除き、この後、水分を含まない不活性ガスまたはドライエアを注入することにより低露点化を図り、この雰囲気中で、ドライアイスによる洗浄を行なう方法である。 By the way, when washing | cleaning with powdery dry ice as mentioned above, since the temperature of dry ice is low (-60-70 degreeC), generation | occurrence | production of dew condensation or freezing of dew condensation water may become a problem. The dry ice is sublimated to carbon dioxide after washing.
Therefore, in order to prevent the occurrence of condensation when washing with dry ice, the following method can be considered. That is, after putting a workpiece into the cleaning chamber (chamber), an inert gas (for example, nitrogen gas) or dry air (dry air) that does not contain moisture is injected into the cleaning chamber to reduce the dew point (dew point is − 40 ° C. or less), a method of cleaning with dry ice in this atmosphere, or after putting a work into the cleaning chamber, the cleaning chamber is first evacuated by a vacuum pump to remove moisture-containing air. This is a method in which the dew point is lowered by injecting an inert gas or dry air that does not contain moisture, and then cleaning with dry ice is performed in this atmosphere.

この場合、−４０℃以下の低露点化を図るには、不活性ガスまたはドライエアの注入のみの方法であると、目標の露点の到達までに多くの時間がかかる。これに対して、真空引き後、不活性ガスを注入する方法の場合には、比較的短時間で低露点化を図ることが可能となり、有効である。   In this case, in order to achieve a low dew point of −40 ° C. or lower, if only a method of injecting an inert gas or dry air is used, it takes a long time to reach the target dew point. On the other hand, in the method of injecting an inert gas after evacuation, the dew point can be lowered in a relatively short time, which is effective.

しかし、製造ラインの洗浄工程において、ワークの投入、洗浄室の真空引き（減圧）、ガスの注入（ガスパージ）、洗浄、ワークの搬出を一つの洗浄室で順に行なうシステムでは、ワークを洗浄室から排出する際に洗浄室内の環境が大気と同じ状態に戻ってしまうため、ワークを洗浄するごとに、ワークの投入、洗浄室の真空引き、ガスの注入、洗浄、搬出を順に行なう必要がある。このため、ワークの洗浄を連続的に行なうことができず、洗浄効率が悪いという問題がある。また、ドライアイスによる洗浄により冷えたワークが、そのまま洗浄室外の大気中に搬出されると、洗浄室外で結露が発生する原因となるという問題もある。   However, in the cleaning process of the production line, in a system in which a workpiece is put in, a cleaning chamber is evacuated (depressurized), a gas is injected (gas purge), cleaned, and a workpiece is unloaded in one cleaning chamber in order, the workpiece is When discharging, the environment in the cleaning chamber returns to the same state as the atmosphere. Therefore, each time the workpiece is cleaned, it is necessary to sequentially input the workpiece, evacuate the cleaning chamber, inject gas, clean, and carry out. For this reason, there is a problem that the workpiece cannot be continuously washed and the washing efficiency is poor. In addition, when a workpiece cooled by dry ice cleaning is carried out into the atmosphere outside the cleaning chamber as it is, there is a problem that condensation occurs outside the cleaning chamber.

本発明は上記した事情に鑑みてなされたものであり、その目的は、ドライアイスによりワークを洗浄するものにおいて、ワークの洗浄を効率よく行なうことができると共に、ワークに結露が発生することを防止することができるワーク洗浄方法及びワーク洗浄システムを提供することにある。   The present invention has been made in view of the above-described circumstances, and an object of the present invention is to clean a workpiece with dry ice, so that the workpiece can be efficiently cleaned and condensation is prevented from occurring on the workpiece. An object of the present invention is to provide a workpiece cleaning method and a workpiece cleaning system that can be used.

上記の目的を達成するために、本発明のワーク洗浄方法は、開閉可能なワーク投入口を有すると共に、室内の空気を水分の少ないガスと置換するガス置換手段を有する前室と、開閉可能な第１の接続口を介して前記前室と接続され、室内の空気を水分の少ないガスと置換するガス置換手段を有すると共に、粉末状のドライアイスによりワークを洗浄する洗浄手段を有する洗浄室と、開閉可能な第２の接続口を介して前記洗浄室と接続されると共に、開閉可能なワーク搬出口を介して大気中の外部に接続され、室内の空気を水分の少ないガスと置換するガス置換手段、及びワークを加温する加温手段を有する後室とを備え、
前記ワーク投入口から前記前室内にワークを投入し、前記ワーク投入口及び前記第１の接続口を閉鎖した状態で前記前室内を前記ガス置換手段により水分の少ないガスに置換する洗浄前工程と、
予め室内を前記ガス置換手段により水分の少ないガスに置換した前記洗浄室内に、前記前室のワークを前記第１の接続口を通して移動させ、前記第１の接続口及び第２の接続口を閉鎖した状態で前記洗浄室内において前記洗浄手段により前記ワークを洗浄する洗浄工程と、
予め室内を前記ガス置換手段により水分の少ないガスに置換して大気圧と同じ圧力まで高くなった前記後室内に、前記洗浄室の洗浄後のワークを前記第２の接続口を通して移動させ、前記第２の接続口及び前記ワーク搬出口を閉鎖した状態で前記後室内において前記加温手段により前記ワークを所定温度まで加温した後、前記ワーク搬出口から外部の大気中へ搬出し、前記ワーク搬出口及び前記第２の接続口を閉鎖した状態で前記後室内を前記ガス置換手段により水分の少ないガスに置換する洗浄後工程とを順に実行するようにし、
前記洗浄室にて前記洗浄行程を実行している間に、前記前室においては次のワークに対する前記洗浄前工程を実行し、前記後室にて前記洗浄後工程を実行している間に、前記洗浄室においては次のワークに対する前記洗浄行程を実行するようにしたことを特徴とする。 In order to achieve the above object, a workpiece cleaning method of the present invention has a workpiece input port that can be opened and closed, and a front chamber that has gas replacement means for replacing room air with a gas having a low moisture content, and can be opened and closed. A cleaning chamber connected to the front chamber via a first connection port, having a gas replacement means for replacing the air in the room with a gas having a low moisture content, and having a cleaning means for cleaning the workpiece with powdered dry ice; A gas that is connected to the cleaning chamber via a second connection port that can be opened and closed, and is connected to the outside in the atmosphere via a work outlet that can be opened and closed, and replaces the indoor air with a gas having low moisture. A rear chamber having a replacement means and a heating means for heating the workpiece,
A pre-cleaning step in which a workpiece is introduced into the front chamber from the workpiece inlet, and the front chamber is replaced with a gas having a low moisture content by the gas replacement means in a state where the workpiece inlet and the first connection port are closed; ,
The work in the front chamber is moved through the first connection port into the cleaning chamber in which the chamber is previously replaced with a gas having a low water content by the gas replacement means, and the first connection port and the second connection port are closed. A cleaning step of cleaning the workpiece by the cleaning means in the cleaning chamber in a state where
Move the workpiece after cleaning in the cleaning chamber through the second connection port into the rear chamber that has been preliminarily replaced with a gas with less moisture by the gas replacement means and increased to the same pressure as the atmospheric pressure , The work is heated to a predetermined temperature by the heating means in the rear chamber with the second connection port and the work carry-out opening closed, and then the work is carried out from the work carry-out opening to the outside atmosphere. The post-cleaning step of replacing the rear chamber with a gas with less moisture by the gas replacement means in a state where the carry-out port and the second connection port are closed,
While performing the cleaning process in the cleaning chamber, performing the pre-cleaning process for the next workpiece in the front chamber, while performing the post-cleaning process in the rear chamber, In the cleaning chamber, the cleaning process for the next workpiece is performed.

また、同様な目的を達成するために、本発明のワーク洗浄システムは、開閉可能なワーク投入口を有すると共に、室内の空気を水分の少ないガスと置換するガス置換手段を有する前室と、開閉可能な第１の接続口を介して前記前室と接続され、室内の空気を水分の少ないガスと置換するガス置換手段を有すると共に、粉末状のドライアイスによりワークを洗浄する洗浄手段を有する洗浄室と、開閉可能な第２の接続口を介して前記洗浄室と接続されると共に、開閉可能なワーク搬出口を介して大気中の外部に接続され、室内の空気を水分の少ないガスと置換するガス置換手段、及びワークを加温する加温手段を有する後室とを備え、
前記前室においては、前記ワーク投入口からワークを投入し、前記ワーク投入口及び第１の接続口を閉鎖した状態で室内を前記ガス置換手段により水分の少ないガスに置換する洗浄前工程を行い、
前記洗浄室においては、予め室内を前記ガス置換手段により水分の少ないガスに置換した状態で、前記前室のワークを前記第１の接続口を通して移動させ、前記第１の接続口及び前記第２の接続口を閉鎖した状態で前記洗浄手段により前記ワークを洗浄する洗浄工程を行ない、
前記後室においては、予め室内を前記ガス置換手段により水分の少ないガスに置換して大気圧と同じ圧力まで高くなった状態で、前記洗浄室の洗浄後のワークを前記第２の接続口を通して移動させ、前記第２の接続口及び前記ワーク搬出口を閉鎖した状態で前記加温手段により前記ワークを所定温度まで加温した後、前記ワーク搬出口から外部の大気中へ搬出し、前記ワーク搬出口及び前記第２の接続口を閉鎖した状態で室内を前記ガス置換手段により水分の少ないガスに置換する洗浄後工程を行なう構成とし、
前記洗浄室にて前記洗浄行程を実行している間に、前記前室においては次のワークに対する前記洗浄前工程を実行し、前記後室にて前記洗浄後工程を実行している間に、前記洗浄室においては次のワークに対する前記洗浄行程を実行する構成としたことを特徴とする。
In order to achieve the same object, a workpiece cleaning system according to the present invention has a workpiece input port that can be opened and closed, and a front chamber that has gas replacement means for replacing room air with a gas having a low moisture content, and an open / close chamber. Cleaning having gas replacement means connected to the front chamber through a possible first connection port and replacing the air in the room with a gas with low moisture, and cleaning means for cleaning the workpiece with powdered dry ice The chamber is connected to the cleaning chamber via the openable / closable second connection port, and is connected to the outside of the atmosphere via the openable / closable work outlet to replace the air in the chamber with a gas having low moisture. And a rear chamber having a heating means for heating the workpiece,
In the front chamber, a pre-cleaning step is performed in which a workpiece is introduced from the workpiece inlet, and the interior of the chamber is replaced with a gas with less moisture by the gas replacement means in a state where the workpiece inlet and the first connection port are closed. ,
In the cleaning chamber, the work in the front chamber is moved through the first connection port in a state where the chamber is previously replaced with a gas having a low water content by the gas replacement means, and the first connection port and the second connection port are moved. A cleaning step of cleaning the workpiece by the cleaning means in a state where the connection port is closed,
In the rear chamber, the workpiece after cleaning in the cleaning chamber is passed through the second connection port in a state in which the chamber is preliminarily replaced with a gas having a low water content by the gas replacement means and increased to the same pressure as the atmospheric pressure. The workpiece is moved to a predetermined temperature by the heating means in a state where the second connection port and the workpiece outlet are closed, and then the workpiece is carried out from the workpiece outlet to the outside atmosphere. With a configuration in which a post-cleaning process is performed in which the interior of the room is replaced with a gas with less moisture by the gas replacement means in a state where the carry-out port and the second connection port are closed
While performing the cleaning process in the cleaning chamber, performing the pre-cleaning process for the next workpiece in the front chamber, while performing the post-cleaning process in the rear chamber, The cleaning chamber is configured to execute the cleaning process for the next workpiece.

上記したワーク洗浄方法及びワーク洗浄システムにおいては、前室と、洗浄室と、後室とを備え、洗浄室においてワークをドライアイスにより洗浄している間に、前室においては次のワークに対する洗浄前工程を行なっておくことができ、また、後室において洗浄後のワークに対して洗浄後工程を行なっている間に、洗浄室においては次のワークに対する洗浄行程を行なっておくことができる。このため、洗浄室においては、結露が発生し難い雰囲気で連続的にワークをドライアイスにより洗浄することが可能となり、ワークの洗浄を効率よく行なうことができる。   The workpiece cleaning method and workpiece cleaning system described above include a front chamber, a cleaning chamber, and a rear chamber. While the workpiece is being cleaned with dry ice in the cleaning chamber, the next chamber is cleaned with respect to the next workpiece. The pre-process can be performed, and the cleaning process for the next workpiece can be performed in the cleaning chamber while the post-cleaning step is performed on the cleaned workpiece in the rear chamber. For this reason, in the cleaning chamber, the workpiece can be continuously cleaned with dry ice in an atmosphere in which condensation is unlikely to occur, and the workpiece can be efficiently cleaned.

また、前室、洗浄室及び後室は、それぞれのガス置換手段により個別に室内の空気を水分の少ないガスと置換することができるため、ワークをドライアイスにより洗浄するものにおいても、結露の発生を防止することができる。しかも、後室においては、洗浄後のワークを加温手段により所定の温度まで加温して、ワークを外部の温度とほぼ同じ温度となるようにすることで、ワークを大気中に搬出しても、そこで結露が発生することを防止できるようになる。   In addition, the front chamber, the cleaning chamber, and the rear chamber can individually replace the air in the chamber with a gas having a low moisture content by the respective gas replacement means, so that condensation occurs even when the workpiece is cleaned with dry ice. Can be prevented. In addition, in the rear chamber, the workpiece after being cleaned is heated to a predetermined temperature by the heating means so that the workpiece becomes almost the same temperature as the outside temperature. However, it becomes possible to prevent the occurrence of condensation there.

以下、本発明の一実施形態について図面を参照して説明する。
図１には、ワーク洗浄システム（ワーク洗浄装置）の概略的な構成が示されている。この図１において、中央部に洗浄室１が配置され、この洗浄室１の左隣に前室２が配置され、そして洗浄室１の右隣に後室３が配置されている。この場合、洗浄室１は、前室２及び後室３よりも大きく形成されている。前室２の左側にはワーク投入口４が形成されていると共に、このワーク投入口４を開閉する投入口用扉５が設けられている。前室２と洗浄室１との間には、これらを接続する第１の接続口６が形成されていると共に、この第１の接続口６を開閉する第１の接続口用扉７が設けられている。洗浄室１と後室３との間には、これらを接続する第２の接続口８が形成されていると共に、この第２の接続口８を開閉する第２の接続口用扉９が設けられている。後室３の右側にはワーク搬出口１０が形成されていると共に、このワーク搬出口１０を開閉する搬出口用扉１１が設けられている。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 shows a schematic configuration of a workpiece cleaning system (a workpiece cleaning apparatus). In FIG. 1, a cleaning chamber 1 is disposed at the center, a front chamber 2 is disposed on the left side of the cleaning chamber 1, and a rear chamber 3 is disposed on the right side of the cleaning chamber 1. In this case, the cleaning chamber 1 is formed larger than the front chamber 2 and the rear chamber 3. On the left side of the front chamber 2, a workpiece insertion port 4 is formed, and an insertion port door 5 for opening and closing the workpiece insertion port 4 is provided. A first connection port 6 is formed between the front chamber 2 and the cleaning chamber 1, and a first connection port door 7 that opens and closes the first connection port 6 is provided. It has been. Between the cleaning chamber 1 and the rear chamber 3, a second connection port 8 that connects them is formed, and a second connection port door 9 that opens and closes the second connection port 8 is provided. It has been. A work exit 10 is formed on the right side of the rear chamber 3, and an exit door 11 for opening and closing the work exit 10 is provided.

上記洗浄室１、前室２及び後室３には、それぞれ対応する室内の空気を吸引して真空引きするための真空ポンプ１２（真空引き手段）と、対応する室内に不活性ガスこの場合炭酸ガス（ＣＯ2）を注入するための炭酸ガス注入装置１３（ガス注入手段）と、圧抜き弁１４とが設けられている。圧抜き弁１４は、炭酸ガス注入装置１３によるガスの注入により室内の圧力が高くなりすぎた際に、その室内の圧力を抜くためのものである。ここで、真空ポンプ１２と炭酸ガス注入装置１３とにより、各室内の空気を水分の少ないガスに置換するためのガス置換手段を構成している。 The cleaning chamber 1, the front chamber 2, and the rear chamber 3 are each provided with a vacuum pump 12 (evacuation means) for sucking and evacuating the air in the corresponding chamber, and an inert gas in this case, carbonic acid in this case. A carbon dioxide injection device 13 (gas injection means) for injecting gas (CO 2 ) and a pressure relief valve 14 are provided. The pressure release valve 14 is for releasing the pressure in the room when the pressure in the room becomes too high due to gas injection by the carbon dioxide gas injection device 13. Here, the vacuum pump 12 and the carbon dioxide gas injection device 13 constitute gas replacement means for replacing the air in each room with a gas having less moisture.

洗浄室１には、さらに、洗浄ノズル１６と、この洗浄ノズル１６にホース１７を介して液化二酸化炭素を供給する二酸化炭素供給装置１８と、洗浄室１内のガスを排出する排気装置１９とが設けられている。ここで、二酸化炭素供給装置１８から供給された液化二酸化炭素を洗浄ノズル１６において霧状に噴出させると、液化二酸化炭素は粉末状のドライアイスに変化し、この粉末状のドライアイスがワーク２０にぶつけられることにより、ワーク２０が洗浄される。洗浄ノズル１６と二酸化炭素供給装置１８とにより、洗浄装置２１（洗浄手段に相当）を構成している。   The cleaning chamber 1 further includes a cleaning nozzle 16, a carbon dioxide supply device 18 that supplies liquefied carbon dioxide to the cleaning nozzle 16 via a hose 17, and an exhaust device 19 that discharges the gas in the cleaning chamber 1. Is provided. Here, when the liquefied carbon dioxide supplied from the carbon dioxide supply device 18 is ejected in the form of a mist at the cleaning nozzle 16, the liquefied carbon dioxide changes to powdery dry ice, and this powdery dry ice is applied to the workpiece 20. The workpiece 20 is cleaned by being struck. The cleaning nozzle 16 and the carbon dioxide supply device 18 constitute a cleaning device 21 (corresponding to a cleaning means).

また、後室３には、加温手段を構成するヒータ２２が設けられている。なお、図示はしないが、前室２内のワーク２０を洗浄室１へ移動させる移送手段と、洗浄室１内のワーク２０を後室３内へ移動させる移送手段とが設けられている。   Further, the rear chamber 3 is provided with a heater 22 constituting a heating means. Although not shown, there are provided transfer means for moving the workpiece 20 in the front chamber 2 to the cleaning chamber 1 and transfer means for moving the workpiece 20 in the cleaning chamber 1 into the rear chamber 3.

次に、ワークを洗浄する際の処理ステップ（工程）を説明する。
［ステップ１］（運転準備工程）
ステップ１では、運転準備として、まず洗浄室１及び後室３を低露点環境にする。具体的には、第１及び第２の接続口６，８、並びにワーク搬出口１０をそれぞれ閉鎖した状態で、洗浄室１及び後室３内の空気を、対応する真空ポンプ１２により吸引して真空引きし（約１０Ｐａまで減圧する）、その後、対応する炭酸ガス注入装置１３によりそれら洗浄室１及び後室３内に炭酸ガスを注入することによって、洗浄室１及び後室３内の空気を水分の少ないガスに置換する。これにより、洗浄室１及び後室３は露点が−４０℃以下となる低露点環境となる。この後、この状態を保持しておく。各室１，３内は炭酸ガスの注入により、大気圧とほぼ同じ圧力まで高くなる。 Next, processing steps (processes) for cleaning the workpiece will be described.
[Step 1] (Operation preparation process)
In Step 1, as a preparation for operation, first, the cleaning chamber 1 and the rear chamber 3 are set to a low dew point environment. Specifically, the air in the cleaning chamber 1 and the rear chamber 3 is sucked by the corresponding vacuum pump 12 with the first and second connection ports 6 and 8 and the work outlet 10 closed. The air in the cleaning chamber 1 and the rear chamber 3 is evacuated (depressurized to about 10 Pa) and then the carbon dioxide gas is injected into the cleaning chamber 1 and the rear chamber 3 by the corresponding carbon dioxide injection device 13. Replace with gas with low moisture. Accordingly, the cleaning chamber 1 and the rear chamber 3 are in a low dew point environment in which the dew point is −40 ° C. or lower. Thereafter, this state is maintained. The inside of each chamber 1 and 3 is increased to almost the same pressure as the atmospheric pressure by the injection of carbon dioxide.

［ステップ２］（洗浄前工程）
ステップ２では、まず前室２のワーク投入口４を開放し、そこから前室２内に洗浄対象のワーク２０を投入する。ワーク２０は、例えば液晶パネルである。そして、ワーク投入口４を閉鎖した状態で、前室２内の空気を真空ポンプ１２により吸引して真空引きし、その後、対応する炭酸ガス注入装置１３により前室２内に炭酸ガスを注入し、前室２内を水分の少ないガスに置換する。これにより、前室２は、洗浄室１及び後室３と同じように、露点が−４０℃以下となる低露点環境となる。この後、この状態を保持しておく。このステップ２が、本発明における洗浄前工程に相当する。 [Step 2] (Pre-cleaning process)
In step 2, first, the workpiece insertion port 4 in the front chamber 2 is opened, and the workpiece 20 to be cleaned is introduced into the front chamber 2 from there. The workpiece 20 is, for example, a liquid crystal panel. Then, with the work inlet 4 closed, the air in the front chamber 2 is sucked by the vacuum pump 12 to be evacuated, and then carbon dioxide is injected into the front chamber 2 by the corresponding carbon dioxide injection device 13. Then, the inside of the front chamber 2 is replaced with a gas with less moisture. Thereby, the front chamber 2 becomes a low dew point environment in which the dew point is −40 ° C. or lower, like the cleaning chamber 1 and the rear chamber 3. Thereafter, this state is maintained. This step 2 corresponds to the pre-cleaning process in the present invention.

［ステップ３］（洗浄工程）
ステップ３では、前室２と洗浄室１との間の第１の接続口６を開放し、前室２内のワーク２０を移送手段（図示せず）により洗浄室１内へ移動させ、第１の接続口６及び第２の接続口８を閉鎖した状態で、洗浄ノズル１６を用いてドライアイスによりワーク２０の洗浄を行なう。このとき、ワーク２０を前室２から洗浄室１へ移動させるために第１の接続口６を開放しても、前室２と洗浄室１とはほぼ同じ低露点環境であるため、洗浄室１は低露点環境のままである。このため、ワーク２０を洗浄室１へ移動後、第１の接続口６を閉鎖することで、直ぐに洗浄ノズル１６によりワーク２０の洗浄を行なうことができる。このステップ３が、本発明における洗浄工程に相当する。 [Step 3] (Washing process)
In step 3, the first connection port 6 between the front chamber 2 and the cleaning chamber 1 is opened, the work 20 in the front chamber 2 is moved into the cleaning chamber 1 by a transfer means (not shown), With the first connection port 6 and the second connection port 8 closed, the workpiece 20 is cleaned with dry ice using the cleaning nozzle 16. At this time, even if the first connection port 6 is opened in order to move the workpiece 20 from the front chamber 2 to the cleaning chamber 1, the front chamber 2 and the cleaning chamber 1 have substantially the same low dew point environment. 1 remains in a low dew point environment. For this reason, after moving the workpiece 20 to the cleaning chamber 1, the workpiece 20 can be cleaned immediately by the cleaning nozzle 16 by closing the first connection port 6. This step 3 corresponds to the cleaning process in the present invention.

洗浄室１にてこの洗浄工程を行っている間に、前室２においては、次のワーク２０に対する洗浄前工程（ステップ２）を行うようにする。
［ステップ４］（洗浄後工程）
洗浄室１でのワーク２０に対する洗浄が終了したら、洗浄室１と後室３との間の第２の接続口８を開放し、洗浄室１内のワーク２０を移送手段（図示せず）により後室３内へ移動させる。このときも、ワーク２０を洗浄室１から後室３へ移動させるために第２の接続口８を開放しても、洗浄室１と後室３とはほぼ同じ低露点環境であるため、後室３は低露点環境のままである。そして、後室３において、第２の接続口８及びワーク搬出口１０を閉鎖した状態で、ヒータ２２によりワーク２０を所定の温度（後室３の外部の温度とほぼ同じ温度）になるまで加温し、この後、ワーク搬出口１０を開放して後室３内のワーク２０を外部へ搬出する。このとき、洗浄室１でのドライアイスの洗浄に伴いワーク２０が低温度になっていても、そのワーク２０を後室３において外部の温度とほぼ同じ温度まで加温した後、外部へ搬出することで、後室３の外部においてワーク２０に結露が発生することを防止できる。 While this cleaning process is being performed in the cleaning chamber 1, the pre-cleaning process (step 2) for the next workpiece 20 is performed in the front chamber 2.
[Step 4] (Post-cleaning process)
When the cleaning of the workpiece 20 in the cleaning chamber 1 is completed, the second connection port 8 between the cleaning chamber 1 and the rear chamber 3 is opened, and the workpiece 20 in the cleaning chamber 1 is transferred by a transfer means (not shown). Move into the rear chamber 3. Even at this time, even if the second connection port 8 is opened in order to move the workpiece 20 from the cleaning chamber 1 to the rear chamber 3, the cleaning chamber 1 and the rear chamber 3 have substantially the same low dew point environment. Chamber 3 remains in a low dew point environment. Then, in the rear chamber 3, with the second connection port 8 and the workpiece carry-out port 10 closed, the workpiece 20 is heated by the heater 22 until the temperature reaches a predetermined temperature (substantially the same temperature as the temperature outside the rear chamber 3). After that, the workpiece outlet 10 is opened and the workpiece 20 in the rear chamber 3 is carried out to the outside. At this time, even if the workpiece 20 is at a low temperature as the dry ice is cleaned in the cleaning chamber 1, the workpiece 20 is heated to the same temperature as the outside temperature in the rear chamber 3 and then transferred to the outside. Thus, it is possible to prevent dew condensation on the work 20 outside the rear chamber 3.

ワーク２０を搬出するためにワーク搬出口１０を開放すると、後室３内に外部の水分を含む空気が入ってしまうことになる。このため、ワーク２０を搬出した後は、ワーク搬出口１０及び第２の接続口８を閉鎖した状態で、後室３内の空気を真空ポンプ１２により吸引して真空引きし、その後、対応する炭酸ガス注入装置１３により後室３内に炭酸ガスを注入し、後室３内を水分の少ないガスに置換する。これにより、後室３を、再度、低露点環境とする。この後、この状態を保持しておく。このステップ４が、本発明における洗浄後工程に相当する。   When the work outlet 10 is opened to carry out the work 20, air containing moisture from outside enters the rear chamber 3. For this reason, after unloading the workpiece 20, the workpiece discharge port 10 and the second connection port 8 are closed, and the air in the rear chamber 3 is sucked and evacuated by the vacuum pump 12, and then corresponds. Carbon dioxide gas is injected into the rear chamber 3 by the carbon dioxide injection device 13, and the interior of the rear chamber 3 is replaced with a gas with less moisture. As a result, the rear chamber 3 is again set to the low dew point environment. Thereafter, this state is maintained. This step 4 corresponds to the post-cleaning process in the present invention.

後室３にてこの洗浄後工程を行っている間に、洗浄室１においては、次のワーク２０に対する洗浄工程（ステップ３）を行っておく。
これ以降は、ステップ２〜４を繰り返し行なう。 While the post-cleaning process is performed in the rear chamber 3, the cleaning process (step 3) for the next workpiece 20 is performed in the cleaning chamber 1.
Thereafter, steps 2 to 4 are repeated.

上記した実施形態によれば、次のような効果を得ることができる。洗浄室１においてワーク２０をドライアイスにより洗浄している間に、前室２においては次のワーク２０に対する洗浄前工程を行なっておくことができ、また、後室３において洗浄後のワーク２０に対して洗浄後工程を行なっている間に、洗浄室１においては次のワーク２０に対する洗浄行程を行なっておくことができる。このため、洗浄室１においては、結露が発生し難い雰囲気で連続的にワーク２０をドライアイスにより洗浄することが可能となり、ワーク２０の洗浄を効率よく行なうことができる。   According to the above-described embodiment, the following effects can be obtained. While the workpiece 20 is being cleaned with dry ice in the cleaning chamber 1, a pre-cleaning process for the next workpiece 20 can be performed in the front chamber 2, and the workpiece 20 after cleaning is added to the rear chamber 3. On the other hand, while performing the post-cleaning process, the cleaning process for the next workpiece 20 can be performed in the cleaning chamber 1. For this reason, in the cleaning chamber 1, the workpiece 20 can be continuously cleaned with dry ice in an atmosphere in which condensation is unlikely to occur, and the workpiece 20 can be efficiently cleaned.

また、前室２、洗浄室１及び後室３は、それぞれのガス置換手段（真空ポンプ１２及び炭酸ガス注入装置１３）により個別に室内の空気を水分の少ないガスと置換することができるため、ワーク２０をドライアイスにより洗浄するものにおいても、結露の発生を防止することができる。しかも、後室３においては、洗浄後のワーク２０をヒータ２２により外部の温度とほぼ同じ温度となるように加温することで、ワーク２０を大気中に搬出しても、そこで結露が発生することを防止できるようになる。   In addition, since the front chamber 2, the cleaning chamber 1 and the rear chamber 3 can individually replace the indoor air with a gas with less moisture by the respective gas replacement means (the vacuum pump 12 and the carbon dioxide injection device 13), Even when the workpiece 20 is washed with dry ice, it is possible to prevent the occurrence of condensation. Moreover, in the rear chamber 3, the heated workpiece 20 is heated by the heater 22 so that the temperature is almost the same as the external temperature, so that dew condensation occurs even when the workpiece 20 is carried out to the atmosphere. Can be prevented.

さらに、前室２、洗浄室１、後室３の各室内の空気を水分の少ないガスと置換するガス置換手段として、真空ポンプ１２と炭酸ガス注入装置１３を用いることにより、各室内の空気を比較的短時間で水分の少ないガスと置換することができ、一層効率の向上を図ることができる。   Further, by using a vacuum pump 12 and a carbon dioxide gas injection device 13 as gas replacement means for replacing the air in each chamber of the front chamber 2, the cleaning chamber 1, and the rear chamber 3 with a gas having low moisture, the air in each chamber is changed. The gas can be replaced with a little moisture in a relatively short time, and the efficiency can be further improved.

本発明は、上記した実施形態にのみ限定されるものではなく、次のように変形または拡張できる。
前室２、洗浄室１、後室３の各室内の空気を水分の少ないガスと置換するガス置換手段としては、真空ポンプ１２を用いずに、炭酸ガス注入装置１３のみを用いるようにすることも可能である。また、注入するガスとしては、炭酸ガス以外の不活性ガス、例えば窒素ガスでも良く、また、乾燥空気でも良い。 The present invention is not limited to the above-described embodiment, and can be modified or expanded as follows.
As a gas replacement means for replacing the air in each of the front chamber 2, the cleaning chamber 1, and the rear chamber 3 with a gas having a low water content, only the carbon dioxide injection device 13 is used without using the vacuum pump 12. Is also possible. The gas to be injected may be an inert gas other than carbon dioxide, for example, nitrogen gas, or dry air.

本発明の一実施形態を示すワーク洗浄システムの概略構成図1 is a schematic configuration diagram of a workpiece cleaning system showing an embodiment of the present invention.

符号の説明Explanation of symbols

図面中、１は洗浄室、２は前室、３は後室、４はワーク投入口、６は第１の接続口、８は第２の接続口、１０はワーク搬出口、１２は真空ポンプ（ガス置換手段）、１３は炭酸ガス注入手段（ガス置換手段）、１６は洗浄ノズル、１８は二酸化炭素供給装置、２０はワーク、２１は洗浄装置（洗浄手段）、２２はヒータ（加温手段）を示す。   In the drawings, 1 is a cleaning chamber, 2 is a front chamber, 3 is a rear chamber, 4 is a work inlet, 6 is a first connection port, 8 is a second connection port, 10 is a work carry-out port, and 12 is a vacuum pump. (Gas replacement means), 13 is a carbon dioxide injection means (gas replacement means), 16 is a cleaning nozzle, 18 is a carbon dioxide supply device, 20 is a workpiece, 21 is a cleaning device (cleaning means), 22 is a heater (heating means) ).

Claims (3)

開閉可能なワーク投入口を有すると共に、室内の空気を水分の少ないガスと置換するガス置換手段を有する前室と、
開閉可能な第１の接続口を介して前記前室と接続され、室内の空気を水分の少ないガスと置換するガス置換手段を有すると共に、粉末状のドライアイスによりワークを洗浄する洗浄手段を有する洗浄室と、
開閉可能な第２の接続口を介して前記洗浄室と接続されると共に、開閉可能なワーク搬出口を介して大気中の外部に接続され、室内の空気を水分の少ないガスと置換するガス置換手段、及びワークを加温する加温手段を有する後室とを備え、
前記ワーク投入口から前記前室内にワークを投入し、前記ワーク投入口及び前記第１の接続口を閉鎖した状態で前記前室内を前記ガス置換手段により水分の少ないガスに置換する洗浄前工程と、
予め室内を前記ガス置換手段により水分の少ないガスに置換した前記洗浄室内に、前記前室のワークを前記第１の接続口を通して移動させ、前記第１の接続口及び前記第２の接続口を閉鎖した状態で前記洗浄室内において前記洗浄手段により前記ワークを洗浄する洗浄工程と、
予め室内を前記ガス置換手段により水分の少ないガスに置換して大気圧と同じ圧力まで高くなった前記後室内に、前記洗浄室の洗浄後のワークを前記第２の接続口を通して移動させ、前記第２の接続口及び前記ワーク搬出口を閉鎖した状態で前記後室内において前記加温手段により前記ワークを所定温度まで加温した後、前記ワーク搬出口から外部の大気中へ搬出し、前記ワーク搬出口及び前記第２の接続口を閉鎖した状態で前記後室内を前記ガス置換手段により水分の少ないガスに置換する洗浄後工程とを順に実行するようにし、
前記洗浄室にて前記洗浄行程を実行している間に、前記前室においては次のワークに対する前記洗浄前工程を実行し、前記後室にて前記洗浄後工程を実行している間に、前記洗浄室においては次のワークに対する前記洗浄行程を実行するようにしたことを特徴とするワーク洗浄方法。 A front chamber having a work inlet that can be opened and closed, and having a gas replacement means for replacing the air in the room with a gas having a low water content;
Connected to the front chamber through a first connection port that can be opened and closed, and has a gas replacement unit that replaces the air in the chamber with a gas with low moisture, and a cleaning unit that cleans the workpiece with powdered dry ice. A cleaning room;
Gas replacement that is connected to the cleaning chamber through a second connection port that can be opened and closed, and is connected to the outside in the atmosphere through a work outlet that can be opened and closed, and replaces the room air with a gas having low moisture. And a rear chamber having a heating means for heating the workpiece,
A pre-cleaning step in which a workpiece is introduced into the front chamber from the workpiece inlet, and the front chamber is replaced with a gas having a low moisture content by the gas replacement means in a state where the workpiece inlet and the first connection port are closed; ,
The work in the front chamber is moved through the first connection port into the cleaning chamber in which the chamber is previously replaced with a gas with less moisture by the gas replacement means, and the first connection port and the second connection port are moved. A cleaning step of cleaning the workpiece by the cleaning means in the cleaning chamber in a closed state;
Move the workpiece after cleaning in the cleaning chamber through the second connection port into the rear chamber that has been preliminarily replaced with a gas with less moisture by the gas replacement means and increased to the same pressure as the atmospheric pressure , The work is heated to a predetermined temperature by the heating means in the rear chamber with the second connection port and the work carry-out opening closed, and then the work is carried out from the work carry-out opening to the outside atmosphere. The post-cleaning step of replacing the rear chamber with a gas with less moisture by the gas replacement means in a state where the carry-out port and the second connection port are closed,
While performing the cleaning process in the cleaning chamber, performing the pre-cleaning process for the next workpiece in the front chamber, while performing the post-cleaning process in the rear chamber, The workpiece cleaning method, wherein the cleaning process is performed on the next workpiece in the cleaning chamber. 開閉可能なワーク投入口を有すると共に、室内の空気を水分の少ないガスと置換するガス置換手段を有する前室と、
開閉可能な第１の接続口を介して前記前室と接続され、室内の空気を水分の少ないガスと置換するガス置換手段を有すると共に、粉末状のドライアイスによりワークを洗浄する洗浄手段を有する洗浄室と、
開閉可能な第２の接続口を介して前記洗浄室と接続されると共に、開閉可能なワーク搬出口を介して大気中の外部に接続され、室内の空気を水分の少ないガスと置換するガス置換手段、及びワークを加温する加温手段を有する後室とを備え、
前記前室においては、前記ワーク投入口からワークを投入し、前記ワーク投入口及び前記第１の接続口を閉鎖した状態で室内を前記ガス置換手段により水分の少ないガスに置換する洗浄前工程を行い、
前記洗浄室においては、予め室内を前記ガス置換手段により水分の少ないガスに置換した状態で、前記前室のワークを前記第１の接続口を通して移動させ、前記第１の接続口及び前記第２の接続口を閉鎖した状態で前記洗浄手段により前記ワークを洗浄する洗浄工程を行ない、
前記後室においては、予め室内を前記ガス置換手段により水分の少ないガスに置換して大気圧と同じ圧力まで高くなった状態で、前記洗浄室の洗浄後のワークを前記第２の接続口を通して移動させ、前記第２の接続口及び前記ワーク搬出口を閉鎖した状態で前記加温手段により前記ワークを所定温度まで加温した後、前記ワーク搬出口から外部の大気中へ搬出し、前記ワーク搬出口及び前記第２の接続口を閉鎖した状態で室内を前記ガス置換手段により水分の少ないガスに置換する洗浄後工程を行なう構成とし、
前記洗浄室にて前記洗浄行程を実行している間に、前記前室においては次のワークに対する前記洗浄前工程を実行し、前記後室にて前記洗浄後工程を実行している間に、前記洗浄室においては次のワークに対する前記洗浄行程を実行する構成としたことを特徴とするワーク洗浄システム。 A front chamber having a work inlet that can be opened and closed, and having a gas replacement means for replacing the air in the room with a gas having a low water content;
Connected to the front chamber through a first connection port that can be opened and closed, and has a gas replacement unit that replaces the air in the chamber with a gas with low moisture, and a cleaning unit that cleans the workpiece with powdered dry ice. A cleaning room;
Gas replacement that is connected to the cleaning chamber through a second connection port that can be opened and closed, and is connected to the outside in the atmosphere through a work outlet that can be opened and closed, and replaces the room air with a gas having low moisture. And a rear chamber having a heating means for heating the workpiece,
In the front chamber, a pre-cleaning step is performed in which a workpiece is introduced from the workpiece inlet, and the interior of the chamber is replaced with a gas with less moisture by the gas replacement means in a state where the workpiece inlet and the first connection port are closed. Done
In the cleaning chamber, the work in the front chamber is moved through the first connection port in a state where the chamber is previously replaced with a gas having a low water content by the gas replacement means, and the first connection port and the second connection port are moved. A cleaning step of cleaning the workpiece by the cleaning means in a state where the connection port is closed,
In the rear chamber, the workpiece after cleaning in the cleaning chamber is passed through the second connection port in a state in which the chamber is preliminarily replaced with a gas having a low water content by the gas replacement means and increased to the same pressure as the atmospheric pressure. The workpiece is moved to a predetermined temperature by the heating means in a state where the second connection port and the workpiece outlet are closed, and then the workpiece is carried out from the workpiece outlet to the outside atmosphere. With a configuration in which a post-cleaning process is performed in which the interior of the room is replaced with a gas with less moisture by the gas replacement means in a state where the carry-out port and the second connection port are closed,
While performing the cleaning process in the cleaning chamber, performing the pre-cleaning process for the next workpiece in the front chamber, while performing the post-cleaning process in the rear chamber, In the cleaning chamber, the workpiece cleaning system is configured to execute the cleaning process for the next workpiece. 前記前室、洗浄室、及び後室の各ガス置換手段は、対応する室内の空気を引いて真空引きする真空引き手段と、真空引きした室内に水分の少ないガスを注入するガス注入手段とを備えていることを特徴とする請求項２記載のワーク洗浄システム。   Each of the gas replacement means in the front chamber, the cleaning chamber, and the rear chamber includes a vacuum suction means for drawing a vacuum by pulling air in a corresponding room, and a gas injection means for injecting a gas having a low water content into the vacuumed room. The workpiece cleaning system according to claim 2, further comprising:
JP2005311325A 2005-10-26 2005-10-26 Workpiece cleaning method and workpiece cleaning system Active JP4817293B2 (en)

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KR101460865B1 (en) * 2012-12-20 2014-11-17 한양대학교 에리카산학협력단 Partial cold chamber using dry ice and low temperature test system using thereof

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