JP5730297B2 - Integrated cleaner and dryer system - Google Patents

Description

  This application claims priority from US Provisional Application No. 61 / 21,067. The title of the invention is “Integrated cleaner and drier system”, which is incorporated herein by reference.

  The present invention relates to an apparatus and method for cleaning workpieces or workpiece containers such as wafer carriers used in the semiconductor manufacturing industry.

BACKGROUND The manufacture of semiconductor components requires cleanliness such as control of particles, impurities, or foreign matter. The presence of these particles can affect the yield of good devices on the processed wafer. That is, these wafers are generally transferred in a special transfer container. This special transport container includes, for example, a cassette, a carrier, or a tray, and a container or box that can be closed or sealed. Interface) pod or box. A FOUP generally has comb-like guides on two opposite long sides to support the wafer and can be closed by a removable cover. When the cover is removed, the FOUP is a hollow container and has a pot-like foundation with a rectangular surface area.

  In order to maintain the cleanliness standards required when processing semiconductor wafers, it is necessary to clean the FOUP from time to time. The cleaning process can be performed in special cleaning and drying equipment. Due to the increasing demand for cleanliness, the number of cleaning cycles in modern semiconductor factories is increasing. For example, it may be desirable to clean each time a FOUP is used to avoid propagation contamination from one wafer to the next.

  In other words, it is desirable to reduce the time required for complete cleaning of the FOUP. It is also desirable to keep cleaning consumables as small as possible, especially considering the increased number of cleaning cycles. In contrast, cleaning must be extremely thorough to meet the cleanliness requirements of modern semiconductor factories.

SUMMARY The present invention discloses a method and apparatus for integrated cleaning of objects such as semiconductor workpiece containers. In one embodiment, the present invention discloses a series of wet cleaning and vacuum drying in the same process chamber. This integrated cleaning process can eliminate component movement and increase system reliability. This vacuum drying process can eliminate drying gas and reduce operating consumables. Other components can be included. This component includes an IR heating mechanism to assist the drying process and prevent liquid freezing, and a humidity sensor to initiate the drying process and endpoint.

  In one embodiment, the present invention discloses an integrated cleaning process and system that provides effective object cleaning with minimal residual liquid. The cleaning process can include cleaning chemicals and deionized water supplied by ultrasound, aerosol or high pressure to remove impurities such as metal contaminants and contaminant particles. The drying process can include vacuum drying with a heater, such as an IR lamp heater, which dries the cleaned object without the use of moving parts. In one embodiment, the wet cleaning and vacuum drying processes are performed sequentially in the same cleaning chamber. Vacuum pumping can also be performed during the wet cleaning process to remove liquid vapor during the cleaning process.

  In one aspect, the cleaning of the present invention provides minimal residual liquid to assist in vacuum drying. For example, predetermined amounts of cleaning liquid and rinsing liquid can be dispensed, for example, spraying fine droplets and aerosol bubbles. The carrier gas can be mixed with the liquid delivery. Hot gases and hot liquids can be used. A rapidly evaporating liquid can be used, for example an alcohol with a low boiling point and a high vapor pressure. Liquid can be removed by good drainage without liquid retention and liquid dead spots. For example, by maintaining the vacuum pressure in the cleaning chamber during a liquid cleaning cycle, liquid vapor can be removed by evacuation and low chamber pressure. Periodic cleaning processes can be performed for effective cleaning. A hot gas purge can be provided to reduce residual liquid in the object, which facilitates the subsequent drying process. Simulations are performed to optimize the cleaning process, for example to optimize the position and flow of the cleaning nozzle. For example, the cleaning solvent can be concentrated near the cleaning surface and can be placed at the corner of the object to be cleaned. Different cleaning processes can be used on the inside and outside of the container. For example, the focus of inner cleaning can be on metal decontamination and volatile organic component degassing. Furthermore, the inner cleaning can be performed more thoroughly than the outer cleaning, thereby reducing the consumption of the liquid cleaner.

  In one embodiment, the present invention discloses an effective vacuum drying process with high throughput. Since the vacuum drying of the present invention does not provide for movement of the components, this can increase system reliability along with a vacuum ambient environment to assist in rapid evaporation of residual liquid after cleaning. The cleaning chamber can be designed to provide a configuration with effective pumping and high pumping conductance. There are minimal obstructions in the pumping path to reduce vapor condensation. The vacuum drying of the present invention can further include a heater such as an IR heater to assist in evaporation of residual liquid and prevent liquid freezing. The distribution of the IR heater can be arranged to provide uniform thermal energy to the object to be cleaned, allowing liquid evaporation and uniformity of evaporation rate. For example, a chamber wall heater can be provided to minimize condensation.

  In one embodiment, the cleaning process and system can include vacuum decontamination and / or degassing. The decontamination process can be performed in an integrated cleaner / dryer chamber or in a separate vacuum chamber. The decontamination process can additionally be performed after the cleaning and drying processes, or can be performed separately without cleaning. For example, the decontamination process can provide plastic aging, such as venting for new containers.

  In one embodiment, the present invention discloses an apparatus and method for delivering a substrate container in a container processing system, such as a container cleaner. In one embodiment, the present invention combines the movement of various containers with an integrated movement handled by a robot. For example, integrated robot movement picks a closed container from an input load port or from an intermediate station in the cleaner system, moves the lid and body together, and then removes the body and lid from the appropriate in the cleaner being cleaned. In a separate location. Integrated movement may also include unlocking the lid and / or separating the lid from the body during delivery from the load port to the cleaning position. Integrated movement can also include other actions, such as rotating the closed container to unlock or separate the lid.

  In one embodiment, the present invention includes an integrated delivery movement of the substrate container, which involves delivering the container lid and body together and placing them separately in a suitable cleaning station. The mechanism can also be reversed, picking the lid and body separately after cleaning and assembling them and locking them in place during delivery to the output load port. The robot can pick up the closed container from the load port and transport the closed container to the load port, thereby eliminating additional separation or assembly stations. In one embodiment, the integrated delivery movement has a field unlocking and / or locking mechanism for unlocking the lid from the body of the container during container movement or locking the lid to the body of the container. . The unlocking / locking mechanism can be a robot or can be positioned near the robot. Integrated delivery movement can also include additional movement to accommodate the unlocking and locking mechanism. For example, an integrated delivery movement can rotate or tilt the container to have a lid on the bottom prior to unlocking, thereby providing stability of the unlocked container during movement.

  In one embodiment, the present invention includes an integrated delivery robot for a substrate container, one or more grippers for holding the container lid and body, and a lid from the body. And an optional unlocking and locking mechanism for unlocking or locking the lid to the body. An integrated robot can be used in a container cleaner, such as an integrated cleaner with cleaning and drying capabilities in the same chamber.

1A and 1B show an exemplary configuration of an article to be cleaned, positioned so that liquid can fall by gravity, with a gas nozzle to help remove residual liquid. . 2A and 2B are diagrams illustrating an exemplary configuration of a liquid nozzle facing the surface of an article to be cleaned. FIG. 3 is a diagram illustrating a typical configuration of a liquid nozzle facing multiple surfaces of an article to be cleaned. It is a figure which shows the typical structure of the liquid nozzle which surrounds FOUP. It is a figure which shows the typical structure of the internal nozzle in the articles | goods to be cleaned. 6A and 6B are diagrams illustrating selected configurations of internal nozzles for supplying a liquid flow to the interior of a basic pair according to an embodiment of the present invention. 7A and 7B are diagrams illustrating selected configurations of outer nozzles that supply liquid flow to the outer surfaces of the container body and lid. 8A and 8B are diagrams illustrating selected configurations of an internal IR heater that supplies container body thermal energy to the interior of the container body, in accordance with an embodiment of the present invention. 9A and 9B are diagrams showing the configuration of an outer IR heater that supplies thermal energy to the outer surfaces of the container body and the lid. FIG. 6 shows a flowchart for integrated cleaning according to an embodiment of the present invention. FIG. 5 shows another flow chart for integrated cleaning according to an embodiment of the present invention. It is a figure which shows the cleaner system by a prior art. FIG. 13B illustrates a typical closed container holding multiple substrates, and FIGS. 13B (A)-(C) illustrate the same container as the container illustrated in FIG. 13A without a substrate. FIG. 14B is a view showing a typical closed container holding a plurality of substrates, and FIGS. 14B (A) to 14 (C) are views showing the same container as the container shown in FIG. . FIG. 2 shows an exemplary cleaning device according to an embodiment of the present invention with a series of container arrangements. It is a figure which shows the cleaning apparatus shown by FIG. 15 with a series of container extraction. FIG. 6 illustrates a series of exemplary robot movements according to an embodiment of the present invention. FIG. 6 illustrates an exemplary sequence of exemplary integrated movements according to embodiments of the present invention. FIG. 6 illustrates an exemplary sequence of exemplary integrated movements according to an embodiment of the present invention. FIG. 6 illustrates another exemplary sequence of exemplary integrated movements according to embodiments of the present invention. FIG. 6 shows an exemplary flowchart for delivery of containers from a load port to a cleaning station. FIG. 5 is a flowchart for delivering a container from a load port to a cleaning station according to an embodiment of the present invention. FIG. 6 is a flowchart for delivering a container from a cleaning station to a load port according to an embodiment of the present invention.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS The present invention relates to cleaning articles, particularly semiconductor articles such as cassettes, FOUPs, holders, and the like. In one embodiment, the present invention provides a cleaning process for an object having multiple assembled parts, such as a container (eg, FOUP or FOSB) having a separate body and a separate lid. The body and lid are assembled, eg, locked together, during semiconductor substrate transport and storage, and disassembled, eg, separated into separate parts, during cleaning. The container is typically provided to the cleaner in a locked state, unlocked by the cleaner, cleaned, and locked again. In one configuration, the lid is positioned vertically in the cleaning chamber to help drain the cleaning liquid. The container body is positioned so that the opening faces the bottom of the cleaning chamber where the pumping port of the vacuum pump is located. Although the operation of the cleaning chamber can be manually operated, it is preferably operated automatically by an electronic controller or computer.

  In one embodiment, the improved cleaning process of the present invention includes an integrated series of liquid cleaning and vacuum drying in the same process chamber. The liquid cleaning of the present invention can save water and cleaning liquids and chemicals with shorter cleaning times, cleanliness and particle removal by a combination of cleaning liquid, surfactant, heat, stirred or aerosol liquid flow To improve. The vacuum drying of the present invention can eliminate the movement of members and improve system reliability.

  The cleaning method includes a method for removing particles and / or contaminants such as organic metal, inorganic metal, natural oxide and particulate matter, and a method for removing dew stains (water spots). Cleaning is an essential requirement for semiconductor articles such as cassettes, FOUPs, FOSBs and holders. In critical cleaning, the removal of particles in the micron to submicron level range and the reduction of trace contaminants (metals or ions) are part of the semiconductor cleaning industry's concerns.

  In one embodiment, the present invention discloses an integrated cleaning process and system that provides effective object cleaning with minimal residual liquid. In one embodiment, the minimum residual liquid can assist in subsequent drying processes, such as vacuum drying. In one aspect, the article to be cleaned is positioned with minimal liquid capture, for example in a horizontal plane. In addition, gas nozzles can be arranged to blow off any trapped liquid at potential trap locations to help minimize residual liquid and assist the drying process. The gas nozzle preferably provides nitrogen or filtered air, but can also provide liquid or aerated liquid. In one aspect, the gas nozzle can perform a cleaning action and the liquid nozzle can remove the trapped liquid.

  FIG. 1A shows an exemplary configuration of an article 10 to be cleaned, positioned so that liquid 11 can fall by gravity. A bottom gas nozzle 12 that provides nitrogen, filtered air, liquid, or aerated liquid can be directed to the bottom of the article to help remove residual liquid trapped by surface tension.

  FIG. 1B illustrates another exemplary configuration of the article 10 to be cleaned, with a plurality of gas nozzles directed at the article 10 to assist in removing any residual liquid. For example, the bottom gas nozzle 12 can be directed to the bottom of the article to help remove residual liquid trapped by surface tension. In addition, the upper gas nozzle 13 can be directed to the top surface to help remove residual liquid trapped in a horizontal plane, and another gas nozzle 14 can be in an irregular shape of the article that can trap residual liquid. Can be directed.

  In order to clean the article, a plurality of liquid nozzles can be directed at the article surface. The liquid nozzle supplies a mixture of cleaning liquid, rinse liquid (eg DI water), and other chemical liquids designed to clean and decontaminate articles, such as surfactants or metal removers. Can do. The amount of liquid can be carefully controlled, for example, by spraying fine droplets and aerosol gas with a carrier gas (eg, nitrogen, air, or inert gas). The liquid nozzle can also be configured to supply a gas, such as nitrogen or filtered air, or a gas / liquid mixture. Rapidly evaporating liquids such as alcohols with low boiling points and high vapor pressures can be used. For example, hot carrier gas and hot liquid can be utilized to assist in rapid drying by evaporation. In addition, chamber and article positioning can be designed so that liquid can be removed with good drainage without liquid retention and liquid dead spots. Furthermore, liquid vapor can be removed by rapid exhaust and low chamber pressure, for example by purging dry gas and / or by maintaining vacuum pressure in the cleaning chamber during the liquid cleaning cycle.

  In one embodiment, the cleaning nozzle (gas or liquid) can be placed near the cleaning surface, in particular at the corner. Also, the cleaning process can be concentrated on the inside rather than the outside of the container, thereby reducing outside liquid cleaning. The number of nozzles and nozzle positions are designed to simplify system configuration and maximize effective cleaning with minimal residual liquid. Generally, the nozzle is arranged at a high position so as to spray downward. The nozzle is also directed to the corner of the article for effective cleaning. A high flow rate is preferred, which keeps the number of nozzles small. If there are no corners, for example facing the FOUP door, the nozzles are tightly distributed to provide a more uniform flow.

  FIG. 2A shows a typical configuration of the liquid nozzle 21 facing the surface 20 of the article 10. In this configuration, the plurality of nozzles 21 are connected by a manifold 22. The manifold 22 can be positioned at various angles, but is preferably positioned vertically to minimize residual liquid that is deposited on the manifold by gravity. The nozzle is designed to overlap the surface 22 and provides a complete coverage of the surface to ensure complete cleaning. The nozzle can provide a small angle flow, for example to have sufficient cleaning power. The impact angle can be perpendicular to the surface to obtain greater force, but can also be along the surface to cover the surface more widely. In one embodiment, the article to be cleaned is a semiconductor container. Thereby, the contamination tends to be small particles or metal contamination, but the present invention discloses a cleaning nozzle with a small impact angle for medium pressure and larger coverage area. FIG. 2B shows another exemplary configuration of two liquid nozzles 24 disposed at the end of the article 10. The nozzles are arranged at the corners of the article 10 and are configured to cover the entire surface.

  FIG. 3A shows an exemplary configuration of the liquid nozzles 31 facing a plurality of surfaces of the article 30 connected by a manifold 32. The corner nozzle 31 </ b> A is configured to cover the upper surface together with a part of the side surface. Other nozzles are designed to cover multiple side sections. FIG. 3B illustrates another exemplary configuration of a liquid nozzle 34 that is positioned at a corner of the article 30 and configured to cover the entire surface of the article.

  FIG. 4 shows a typical configuration of the liquid nozzle 41 surrounding the FOUP 40. The nozzles are arranged at the corners and are configured to cover the entire surface of the FOUP. This configuration can be when viewed in plan or side view. In the configuration viewed in plan or side view, each nozzle 41 can be embedded in a vertical or horizontal manifold (not shown), each manifold having a plurality of nozzles. The nozzle 41 generally has a small covering angle. This is because the nozzle 41 is positioned outside the article and is designed to clean the outer surface.

  For internal cleaning, the nozzle is preferably positioned in the cavity of the article, thereby providing a spherical range (4π solid angle). In a preferred embodiment, the opening in the article is oriented down to minimize trapped liquid. The nozzle preferably faces upwards towards the interior of the article. The internal nozzle manifold is arranged vertically, and the spherical nozzle at the top enters the opening.

  FIG. 5 illustrates a typical configuration of internal nozzles within the article 50. A central nozzle 51, preferably a spherical nozzle, is positioned near the top of the inner surface and sprays liquid on the upper and peripheral surfaces. The liquid can flow down from the top surface, and after cleaning the top surface, the surrounding surface is further cleaned. A plurality of corner nozzles 52, also preferably spherical nozzles, are directed to the inner corners of the inner surface to concentrate on the corners of the surface.

  In a typical cleaning process, a cleaning liquid such as a cleaning solvent is sprayed onto articles such as FOUP containers and doors. Additives such as surfactants, detergents, or contaminant / metal removal agents may be added to water or other liquids, for example, by suction or pumping. The contaminant / metal removal agent can be a metal removal agent such as a chelating agent. Instead of surfactants, highly alkaline detergents may be used. For example, UV light can be added to help remove contaminants. After cleaning and / or contaminant removal is complete, the article is rinsed by spraying with a rinse liquid such as DI water. A periodic cleaning / rinsing process can be performed for effective cleaning. The cleaning liquid can be collected for recycling.

  In one embodiment, the cleaning process is concentrated on the surface of the article to be cleaned, thereby minimizing the amount of liquid impinging on the chamber surface. The nozzle is preferably oriented at the surface of the article so as to have a spray angle that is carefully controlled to cover the surface to be cleaned and the minimum liquid that escapes to the chamber surface. Minimizing the amount of liquid at the chamber surface can improve subsequent drying processes.

  In one embodiment, the cleaning process provides small droplets to aid in the subsequent drying process. In addition, a purged gas or liquid spray can be provided to divide the droplets into even smaller droplets. A gas or liquid spray can be provided to break up the large combined liquid into small droplets, for example by blowing off the liquid, for example in the area where the liquid combines at the bottom of the surface.

  In one embodiment, the cleaning environment is dry air, inert gas, or non-reactive gas. For example, after the article is loaded, the air in the process chamber can be evacuated and replaced with an inert gas (eg, argon) or a non-reactive gas (eg, nitrogen). In one embodiment, the chamber is purged during liquid cleaning. In another aspect, the chamber is sealed and maintained at a pressure below atmospheric pressure, for example, to help remove liquid vapor in the process chamber to the environment. The reduced pressure can range from tens of torr, torr, or millitorr. In one embodiment, the liquid can be heated to increase volatility, which increases the ease of removal of residual liquid. To reduce energy costs, the heated liquid can be recycled. In addition, the article and process chamber can be heated, for example, by IR lamps or UV lamps.

  After cleaning, the container can be rinsed. A selective gas purge, such as a hot air stream, can be utilized to further reduce the amount of liquid remaining on the vessel surface. The nozzle may also be configured to provide a liquid for cleaning, a liquid for rinsing, and a gas for flushing the liquid from the container surface.

  In one embodiment, the present invention includes cleaning a container lid that is separate from the container body and positioned in the cleaning chamber near the container body, and includes cleaning the inside and outside of the container body. An optimal configuration for container cleaning is disclosed.

  6A to 6B and FIGS. 7A to 7B show a side view and a plan view of a cleaning chamber according to an embodiment of the present invention. The container has a main body 61 disposed in the cleaning chamber 60 and a container lid 62. The main body 61 and the lid 62 are separated from each other and are positioned at different positions in the cleaning chamber 60. Furthermore, the body and the lid are positioned to prevent excess residual liquid from remaining on the surface of the container body and the lid. In one embodiment, the lid is positioned vertically so that liquid flows by gravity to a drain (not shown) located at the bottom of the cleaning chamber 60. Similarly, the main body is also positioned vertically and the opening is located at the bottom so that the internal liquid nozzles 63, 64 supply a cleaner liquid.

  In one embodiment, liquid nozzles are positioned on the inside (63 and 64) and outside (71, 72, 73 and 74) of the body cavity to clean the inside and outside of the container, respectively. Various nozzle configurations were tested to optimize liquid velocity, coating, liquid residence time on the container surface, and stress distribution in the container.

  FIGS. 6A and 6B show selected configurations of internal nozzles 63 and 64 that supply a liquid stream 65, 66 or 67. In one configuration, the nozzle 63 is located in the center of the body cavity and supplies the liquid stream 65 straight toward the top of the container body. In another configuration, the nozzles 64 are located at the corners of the body cavity and supply a liquid stream toward the corners of the container body. As shown, the nozzle 64 is disposed approximately in the middle between the central nozzle 63 and the corner. The nozzle 64 can supply a liquid stream at an elevated position 66 or an intermediate position 67. In addition, high flows and flows are also simulated.

  In general, flow behavior does not vary significantly with flow rate, and residence time increases significantly at lower flow rates. At higher flow rates, the flow rate distribution is more uniform. The central stream 65 does not provide an efficient coating of the container surface. Further, the intermediate position stream 67 provides better flow uniformity than the higher position stream 66. That is, the simulation results show that the optimal configuration for cleaning the inner container includes four nozzles positioned at intermediate heights with the largest possible flow rate facing the corner of the container.

  7A and 7B show selected configurations of external nozzles 71, 72 and 73 that supply a liquid flow to the outer surface of the container body and lid. In one configuration, the nozzles 71 are located at the four corners of the container and supply a liquid flow towards the outer corners. In another configuration, the nozzles 72 and 73 are located in the center of the outer surface of the container and supply a liquid flow toward the center of the container body and container lid. A common supply tube can supply flow toward the body and lid surfaces, for example, by front and back nozzles. In another configuration, the nozzles 73 and 75 are distributed towards each side of the container, for example two nozzles for each surface are distributed. Further, the nozzle can supply liquid at a high position 76 or a low position 77. In addition, high flows and flows are also simulated.

  The corners are not flushed by the central nozzle 72. Due to the contribution of the internal cleaning flow, higher uniformity can be achieved by higher position flow. The distributed stream 72 provides higher uniformity, but has lower efficiency due to the higher liquid consumption. In other words, the simulation results show that the optimum configuration for cleaning the outer container is four corner nozzles 71 arranged at a high position directed to the corner of the container and two nozzles 75 respectively directed to the surface of the lid. Is included at a flow rate as high as possible.

  In one embodiment, the present invention discloses a chamber for cleaning containers with an optimal configuration of nozzle positions for best surface cleaning. In addition, this configuration provides minimal residual liquid and aids in the subsequent vacuum drying process.

  In one embodiment, the present invention discloses effective vacuum drying for an article cleaning process. This vacuum drying does not provide component movement and improves system reliability. This vacuum drying can be further improved by minimal residual liquid resulting from the cleaning process, along with purging during the liquid cleaning phase or a vacuum ambient environment to help remove liquid vapor during liquid cleaning. This drying process can also be improved by a cleaning process that uses less liquid and by a cleaning arrangement that produces minimal liquid on the chamber surface.

  The cleaning chamber can be designed to provide a configuration with effective pumping and high pumping conductance. There are minimal obstructions in the pumping path to reduce vapor condensation. There is minimal dead space in the pumping path to reduce liquid vapor capture. For example, the pumping port is located at the bottom of the chamber. This is because the opening of the article faces the bottom of the chamber in order to facilitate the discharge of liquid. A dry gas nozzle can be provided in the condensation or liquid coupling region to avoid large droplets or to reduce droplet surface tension.

  This vacuum drying can further have a heating mechanism such as an IR heater to help evaporate residual liquid and avoid liquid freezing. For example, one or more chamber wall heaters may be provided to minimize condensation and help remove residual liquid. IR heaters can be positioned on the outside and inside of the article so as to face the surface of the article to be cleaned. The IR heater is preferably distributed in the center of the article to provide uniform heating. The heating mechanism can provide a constant temperature to the chamber or article. Heating can be set at a minimum to provide sufficient thermal energy, for example for evaporation, and maintain room temperature. For example, heating can be added to increase the evaporation process below 100 ° C or below 60 ° C. Because of the high temperature, insulation can be provided for safety purposes. In addition, the pumping manifold and vacuum pump can be heated to avoid condensation and assist the drying process.

  In one embodiment, the IR heater provides uniform thermal energy to the container surface. For containers made of plastic material, a uniform temperature distribution is desirable to avoid hot spots (which can lead to container damage) and cold spots (which can lead to inefficient drying) . That is, in one embodiment, the system discloses an IR heater configuration that provides heating uniformity on the inner and outer surfaces of the container.

  8A-8B and 9A-9B show side and top views of a cleaning chamber with internal and external IR heaters according to embodiments of the present invention. In one embodiment, IR heaters are positioned inside (47, 48 and 49) and outside (56, 57, 58 and 59) of the body cavity to heat the inner and outer surfaces of the container, respectively. Various heater configurations were tested to optimize thermal energy distribution, temperature uniformity, and efficiency of the heating process.

  8A and 8B show selected configurations of internal heaters 47, 48, and 49. FIG. In one configuration, the heater 49 is located in the center of the body cavity and heats all inner surfaces of the container body. In another configuration, the heater 48 is placed facing the surface of the body cavity. In yet another configuration, the heater 47 is positioned near the corner of the body cavity. The selected IR heater is a double lamp and provides a wider surface energy. In addition, the orientation of double lamps has been studied.

  The simulation results show that the optimal configuration for inner vessel heating provides better thermal uniformity with two or four heaters 48 with fewer cold spots or hot spots.

  FIGS. 9A and 9B show selected configurations of the external heaters 56, 57, 58 and 59, supplying thermal energy to the outer surface of the container body and lid. Each heater 58 faces one container surface. Since the heater 57 faces two surfaces, one surface of the container body and one surface of the lid, higher energy (about 10-40% higher than the heater 58) for better energy supply. ) Is required. The heater 56 is positioned at the top of the container and can use the same power as the heater 58. The heater 59 is positioned at the top of the body surface and uses less energy (about 10-40% less than the heater 58).

  In one embodiment, the present invention discloses a chamber for a cleaning container with an optimal configuration of nozzle positions for best surface cleaning. In addition, this configuration provides minimal residual liquid and aids in the subsequent vacuum drying process.

  In one embodiment, one or more humidity sensors can be provided to measure the humidity level in the cleaning chamber, and these humidity sensors then monitor the drying process and the end point of the drying process. Can be used to detect.

  In one embodiment, the present invention discloses integrated wet cleaning and vacuum drying performed sequentially in the same cleaning chamber. In addition, vacuum pumping can be performed during the wet cleaning process to remove liquid vapor during the cleaning process. In addition to cleaning the articles, the cleaning process and chamber can condition new articles, such as degassing and / or aging new plastic containers.

  In one embodiment, cleaning and vacuum drying can be performed in the same cleaning chamber, and throughput can be increased by minimizing movement of the articles to be cleaned. Vacuum drying and liquid cleaning are compatible processes, so both can be performed in the same process chamber without interference. In addition, a vacuum can be provided during the cleaning process to enhance liquid vapor removal, further reducing drying time. Heat can also be applied during the cleaning process to help increase the volatility of the cleaning or rinsing liquid, further reducing the drying time.

  In one embodiment, the present invention discloses a heated vacuum decontamination and degassing process and chamber. To accelerate the evaporation of volatile organic components and other contaminant particles from the article, a heater, such as an IR heater, can be provided to the article in vacuum. In one embodiment, the decontamination chamber can be integrated into the drying chamber and utilizes the drying chamber heater and vacuum components. In another embodiment, the decontamination chamber has a separate heated vacuum chamber, for example to increase processing throughput.

  In one embodiment, the system includes a controller for controlling the cleaning process. The controller can receive input from an operator or host and informs which cleaning is to be done for which article. For example, some containers are cleaned and dried and then subjected to heated vacuum decontamination for degassing. In some cases, some containers are sent directly to a heated vacuum for degassing without cleaning or drying.

  In one embodiment, the system has an inspection station for inspecting incoming and outgoing items. For example, the container can be inspected before the cleaning and vacuum process. In some cases, only selected containers are inspected prior to cleaning and / or decontamination. In some cases, only some containers are inspected without cleaning or decontamination. In some cases, some containers are only inspected and decontaminated.

  In one embodiment, the system has a manual load port for operator access or an automatic load port such as an overhead transport (OHT). A loader buffer can also be provided.

  In one embodiment, the present invention discloses a chamber for cleaning and drying an article, the chamber including a liquid supply system for supplying a cleaning mixture to the article, and the chamber at atmospheric pressure. A vacuum system for supplying low pressure and a heater system for supplying thermal energy to the article, the article is cleaned and dried in the same chamber, the article is liquid cleaned with a cleaning mixture, The article is vacuum dried using thermal energy to avoid liquid freezing. In one embodiment, the cleaning mixture includes a mixture of a liquid cleaner and a gas carrier gas. The liquid supply system can further supply a rinse mixture to the article after supplying the cleaning mixture, or supply a purge gas to the article after supplying the cleaning mixture. The chamber can further include degassing and decontaminating the article in a heated vacuum environment. The vacuum pump system can evacuate liquid and gaseous materials.

  In one embodiment, the present invention discloses a cleaner system for cleaning and drying a container, the cleaner system supplying a load port for containing the container and a cleaning mixture on the surface of the container. A vacuum sealed cleaning chamber having a plurality of nozzles for performing, a plurality of IR heaters for supplying thermal energy to the surface of the container, and a pumping for supplying a pressure below atmospheric pressure to the cleaning chamber And a robotic operating system for delivering containers between the load port and the cleaning chamber, the containers are cleaned and dried in the same chamber, the containers are liquid cleaned using the cleaning mixture, and the containers Use thermal energy to avoid liquid freezing Is empty dry. In one embodiment, the plurality of nozzles further provides a rinse mixture to the container after supplying the cleaning mixture. The plurality of nozzles can further supply a purge gas to the container after supplying the cleaning mixture. The container can have multiple portions that are dispensed and separately positioned in the cleaning chamber. The vacuum pump can discharge liquid material and gaseous material. Cleaning is performed at a pressure lower than atmospheric pressure. In one embodiment, the system has a separate chamber for degassing and decontaminating the container.

  In one embodiment, the present invention discloses a method of cleaning a semiconductor article, the method comprising an integrated cleaning nozzle for supplying a cleaning solvent, a heater for vacuum drying, and a vacuum system. Use a clean chamber. FIG. 10 shows a flowchart for integrated cleaning according to an embodiment of the present invention. Operation 80 provides a cleaning process for the article. Operation 82 provides a vacuum drying process for the article in the same process chamber and without moving the member. Operation 84 provides a selective heated / vacuum decontamination process in the same process chamber or in different process chambers. For example, the cleaning process may include providing a cleaning solvent (or cleaning mixture) for cleaning, followed by providing a rinse gas and then a purge gas to remove residual liquid. . The vacuum drying process can include sealing the process chamber and pumping the process chamber to a pressure below atmospheric pressure, such as 10 Torr, Torr, or a range below Torr. The time for performing a typical cleaning and drying process can be several minutes, eg, less than 10 minutes. The heated vacuum decontamination process can be performed at a higher temperature and lower pressure, or at the same temperature and pressure as the drying process. The time for performing a typical decontamination process can be less than one hour.

  In one embodiment, the present invention discloses a method of cleaning an article, the method cleaning the article with a liquid cleaning mixture in a process chamber, vacuum drying the article in the same process chamber, and at least a vacuum Providing thermal energy to the article during only a portion of the drying time. The method further includes rinsing the article with a rinse mixture in the same process chamber, purging the article with a purge gas in the same process chamber, and decontaminating the article around a heated vacuum in the same process chamber, or different. Degassing and decontaminating the article around a heated vacuum in the process chamber. In one embodiment, the article includes a plurality of portions that are disassembled and positioned separately in the cleaning chamber.

  FIG. 11 shows another flowchart for integrated cleaning according to one embodiment of the present invention. Operation 90 delivers the article to be cleaned from the input load port to the process chamber. If the article has multiple parts, the article is disassembled into separate parts and each part is delivered to the appropriate location in the process chamber. For example, the FOUP can be opened (eg, by a stand-alone release station or by a robot effector during robot delivery), and then the body and lid are placed in the basket of the process chamber. The basket is then lowered. After providing the article, the process chamber is closed. Operation 92 activates the cleaning nozzle to provide a liquid flow toward the article. In one embodiment, the liquid is heated. The liquid can be a solvent mixture, such as a mixture of liquid and delivery gas. In one embodiment, the chamber is sealed and pumped to a pressure below atmospheric pressure. The discharge system can discharge the cleaning liquid. Further, the pumping process can extrude gas, vapor, liquid, or any combination thereof, removing gas and liquid from the process chamber. In one embodiment, a heater is activated to heat the article and / or process chamber wall. After cleaning, a rinsing solvent or mixture can be provided to the article by a nozzle for rinsing. A selective gas purge can later be provided to reduce droplets remaining on the article surface. To facilitate vapor removal, the solvent mixture and gas can be heated.

  Operation 94 stops the nozzle supply system for vacuum drying the article. A heater can be activated to heat the article to reduce droplet freezing on the article surface. If the vacuum pump is activated during the cleaning process, it can be maintained or the pumping rate can be increased to further reduce the chamber pressure for faster liquid evaporation. When the cleaning process is performed at atmospheric pressure or at a pressure higher than atmospheric pressure, a vacuum pump is activated to reduce the chamber pressure for vacuum evaporation of residual liquid. If the heater is activated during the cleaning process, it can be maintained, or its temperature can be increased to further increase the article surface temperature for faster liquid evaporation. If the cleaning process is performed without heating the article, the heater can be activated to avoid liquid freezing.

  For integrated decontamination, for example, if decontamination is incorporated into the process chamber, operation 96 may further include a heated vacuum decontamination process for removal of volatile organic components, or other decontamination operations. I do. The heater temperature and chamber pressure can be the same as or different from the drying process. Generally, decontamination is longer than the drying time.

  In the case of a separate decontamination chamber, the articles, such as the container body and the container lid, are delivered together from the cleaning chamber to the decontamination chamber. A decontamination process takes place in the decontamination chamber.

  After decontamination, operation 98 delivers the article to the output load port. In the case of a multi-part article, such as a container having a body and a lid, the multiple parts are assembled and locked together to reach the load port. For example, the process chamber is opened and the basket is raised. The body and lid are removed from the basket (in the decontamination chamber or cleaning chamber) and the lid is assembled and locked to the body (manual loading platform or automatic overhead transport) before being provided to the load port. The input load port and the output load port can be the same load port. Alternatively, the input load port and the output load port can be different load ports, for example, to avoid contaminating the cleaned container or to increase cleaning throughput.

  In one embodiment, the present invention discloses improved robot delivery for faster throughput, especially for multi-part articles such as a semiconductor container including a container body and a container lid.

  In conventional conventional cleaning devices for cleaning substrate containers, the FOUP is picked up from the input load port and placed at the FOUP opener station where the lid is opened and separated from the body. The robot then picks up the body and lid separately and delivers each to a cleaning station where the lid and body are cleaned. After cleaning, the cleaned body and lid are delivered to the assembly station for assembly with each other before being sent to the output station. Many robot movements can occur before the cleaning process can begin, affecting the throughput of the cleaning process.

  FIG. 12 shows a conventional container cleaner system 100 that includes an input load port 102, an output station 104, an opener station 106, an assembly station 108, a lid cleaning station 110, a body cleaning station 112, And a main body dryer station 114. During operation, an empty FOUP 101 including the main body 101A and the lid 101B is placed in the input load port 102 by an operator or by automatic conveyance. The FOUP 101 is generally closed, that is, the main body 101A and the lid 101B are engaged with each other and delivered as a unit. The first robot movement 120 delivers the closed FOUP 101 to the opener station 106. In the opener station 106, the robot opener mechanism opens the FOUP 101 and separates the lid 101B from the main body 101A. After separation, the second robot movement 122 delivers the lid 101B to the lid cleaning station 110. After cleaning, the third robot movement 124 delivers the cleaned lid 101B to the assembly station 108 for assembly with the cleaned body. After the lid 101B is delivered from the separation station 106, the fourth robot movement 126 delivers the main body 101A to the main body cleaning station 112, and the fifth robot movement 128 delivers the cleaned main body to the dryer station 114. The sixth robot movement 130 then delivers the cleaned and dried body to the assembly station for assembly with the cleaned lid. After assembly, the closed FOUP is delivered to the output station 104 by the seventh movement 132. That is, many robot movements may occur in the container cleaner system.

  In one embodiment, the present invention provides a method and automated apparatus for cleaning a multi-part article or semiconductor substrate container with integrated robot movement. The present invention also delivers the container body and lid together from the input port to a separate location to be cleaned or from a separate cleaning location to the output port. In one embodiment, the present invention automatically unlocks (eg, disengages) and / or locks (eg, rejoins) the container body and lid from each other. The advantages of the present invention include simplifying the number of movements in the cleaner system, simplifying cleaner components, providing a smaller footprint and leading to better process efficiency. This automated apparatus has a semiconductor system such as a delivery robot for the semiconductor system and a cleaner system using the robot.

  Hereinafter, a container having a main body and a lid will be described. However, the present invention is not limited thereto and can be applied to any article having a plurality of parts that can be assembled or disassembled for cleaning, for example.

  A container according to an embodiment of the present invention has a separate container body and lid, and the container body and lid can be joined and locked to form a closed container. In addition, the container can have a support component for holding the substrate, an operating component that is operated or transported by an operator or automatic transport, and a locking component that is coupled or disengaged manually or automatically. For example, the engagement member can secure the lid and the body together, and the lid can be separated from the body when the engagement member is released. A gripper provided on the top surface of the container allows the robot or operator to transport the container between positions in the manufacturing facility.

  FIG. 13A shows a typical closed container 201 holding a plurality of substrates 207. In typical operating conditions, the substrate 207 is positioned horizontally to facilitate operation and storage, i.e., the container 201 is generally positioned as shown, with the lid and body Are arranged next to each other. In order to release the lid from the body, a side opening mechanism such as an operator or an automatic operating device can be engaged with the lid. The lid opening mechanism generally moves upward or downward to expose the interior of the container for separation operation for separating the lid from the main body and access to the substrate 207 disposed inside the container main body. Including.

  FIG. 13B shows the same container 201 but without the substrate. The container includes a container main body 201A configured to hold a plurality of substrates 207, a container lid 201B, and a locking mechanism 205. FIG. 13B (A) shows an empty closed container with one or more locking mechanisms 205 engaged (205A) to lock lid 201B and body 201A together. One locking mechanism 205 is shown schematically and simplified. FIG. 13B (B) shows an empty container with the locking mechanism 205 released (205B) to unlock or disengage the lid and body. FIG. 13B (C) shows the empty container (210) with the locking mechanism released and the lid and body separated.

  FIG. 14A shows another exemplary closed container 301 that holds a plurality of substrates. Under typical operating conditions, the container 301 is generally positioned as shown, with the lid and body positioned one above the other. In order to lower the lid from the body and release the lid cover to access the substrate 307, a bottom opening mechanism such as an operator or an automated operating device can be engaged with the lid. The lid release mechanism generally includes a downward movement of the lid to separate the lid from the body while the substrate 307 is placed on the lid, thereby exposing the substrate for robotic access.

  FIG. 14B shows the same container 301 but without the substrate. The container includes a container body 301A configured to hold a plurality of substrates 307, a container lid 301B, and one or more locking mechanisms 305. Two locking mechanisms are illustrated. FIG. 14B (A) shows an empty closed container with a locking mechanism 305 engaged (305A) to lock the lid 301B and body 301A together. FIG. 14B (B) shows an empty container with the locking mechanism 305 released (305B) to unlock or disengage the lid and body. FIG. 14B shows the empty container with the locking mechanism released and the lid and body separated (310).

  In one embodiment, the present invention discloses a method and apparatus for delivering containers that incorporates various container movements into a robot integrated movement. A typical integrated movement involves handing over all parts (eg, container lid and body) together and placing these parts separately at different locations for cleaning. Another exemplary integrated movement includes unlocking / locking the lid and body during delivery of the container.

  FIG. 15 illustrates an exemplary cleaning device 400 according to an embodiment of the present invention, including a load port 402 coupled to a housing 430 having a cleaning station 432, and a robot 404 for manipulating containers to be cleaned. have. The cleaning device 400 also includes other components (not shown) such as a computer control device, an exhaust fan and duct, a cleaner supply unit, and a discharge unit. The cleaning device 400 can also have multiple cleaning stations, separate decontamination / degassing stations (such as a heated vacuum decontamination chamber), and an inspection station.

  As shown in FIG. 15A, the container 201 is loaded on the load port 402 to be cleaned by the cleaning device 400. The container 201 is normally empty and occupies a closed and locked position, which means that the container body 201A and the lid 201B are coupled together and the locking mechanism 205 is engaged. . The container 201 can be placed in the load port 402 manually, for example, by an operator, or in an automated fashion, for example by automated transport such as overhead hoist transport (OHT). The load port 402 can be an input / output load port or an intermediate load port connected to the input / output load port. Although one load port 402 is shown, multiple load ports can be connected to the housing 430. Load port 402 is also shown as an input / output load port, which means that the same load port is used for input and output, but dedicated input and output to cleaning device 400. A load port can also be provided. As shown, the container 201 occupies a locked position, but other configurations such as an unlocked position or a position that is unlocked and separated into the body and lid may be utilized. .

  In one embodiment, the load port 402 can have an input door connected to the external environment. After the input door is opened, the container 201 is placed on a support member (not shown) manually or using automation, and the input door is closed. The environment in the load port 402 is cleaned, for example, by a blowing fan from the top and an exhaust duct at the bottom to generate a clean air laminar flow. After the load port is cleaned, the output door that connects the load port 402 to the housing 430 is opened, allowing the robot 404 to access the container 201. Alternatively, the cleaning device 400 does not have an input or output door, but simply has a cleaning environment at the load port 402 and housing 430. In that case, the container 201 located at the load port 402 can be immediately accessed by the robot 404.

  The robot 404 picks up the entire container 201 from the load port 402 in a locked configuration, and delivers the container 201 to the housing 430 (FIG. 15B). During delivery, the container is unlocked (405A) by a mechanism disposed on the robot 404 or housing 430. For example, additional movement by the robot 404 can be added by moving, rotating or rotating the robot arm so that the lid or body is pointing down. In this position, since the lid and the main body are supported by gravity, the lid and the main body are not separated after unlocking. For example, the robot 404 has a robot arm that grips the lid of the container. In the locked configuration, the body is coupled to the lid by a locking mechanism so that the container is transported as a whole. After the robot arm is rotated so that the lid is placed at the bottom of the container, the locking mechanism is released. The body is still connected to the lid by weight and is pressed against the lid.

  Next, the robot 404 delivers the unlocked container to the cleaning station 432, and sequentially arranges the container body and the lid (FIGS. 15C and 15D). In one embodiment, the cleaning station 432 may have a basket that moves up or down to facilitate positioning of the body and lid. The cleaning station 432 may have a door for isolating the cleaning station from the housing 430 environment. For example, the cleaning station 432 can be cleaner than the housing 430, or the cleaning station 432 can be a vacuum station, but the housing 430 is at atmospheric pressure. The robot 404 can have separate grippers to grab the lid and body separately, thereby releasing the lid and body in the proper position. The robot can have a lid or a gripper that grips the body, and the body is coupled to the upper part by weight so as to be unlocked. The robot arm then places the body in the cleaning position, for example by several support members in the cleaning position. Thereafter, the robot arm moves to the lid cleaning position and releases the gripper to place the lid in the cleaning position.

  After placing the separate parts of the container (eg lid and body) in the proper cleaning position, the cleaning action of the cleaning station 432 is initiated to clean the lid and body. The cleaning action can include liquid or gas cleaning, a drying action to dry the container member, or a combination of cleaning and drying. In one embodiment, the cleaning action utilizes integrated cleaning with vacuum drying along with vacuum decontamination as described above.

  In one exemplary embodiment, the cleaning station 432 has an integrated cleaning and dryer system. The integrated cleaning system provides a series of wet cleaning and vacuum drying in the same process chamber along with selective IR heating and humidity sensor monitoring. The cleaning process can include cleaning chemicals and deionized water provided by ultrasound, aerosol, or high pressure spray to remove impurities such as metal contaminants and contaminant particles. The cleaning process includes, for example, a minimum amount of residual liquid to help vacuum drying, and no liquid retention and liquid dead spots, such as delivering a predetermined amount of cleaning and rinsing liquid along with hot gas, hot liquid, and quick evaporating liquid cleaner Can also provide good drainage. Periodic cleaning processes can be performed for effective cleaning.

  FIG. 16 shows the same cleaning device in a series of container recovery steps. After cleaning, the robot collects the lid (FIG. 16A), moves to the main body, and collects the main body (FIG. 16B). If the cleaning station has an isolated door, the cleaning station environment can first be made equal to the outer housing before the door is opened. For example, if the cleaning station is under vacuum, a purge gas is introduced to bring the cleaning station to atmospheric pressure before opening the isolated door.

  After collecting the main body and the lid, the robot delivers the main body and the lid to the load port. During delivery, the lid and body are joined, the locking mechanism is engaged (505A) to lock the lid and body together (FIG. 16C), and the robot moves the locked container to the load port. (FIG. 16D). The same mechanism can be used to unlock the container to lock the lid and the body. The robot, for example, picks up the body and lid in the proper orientation to ensure that the body is supported on the lid by weight. Further, after locking the container, it can be positioned in the proper orientation before reaching the load port. The same load port for input can be used for output, but another output port can be used.

  In one embodiment, the integrated movement includes an orienting action to position the container in the proper orientation. For example, the directing action includes rotating the robot arm to position the container body on the lid (or the lid on the body) and rotating the container to fit the output load port. .

  FIG. 17 illustrates a series of exemplary robot movements according to an embodiment of the present invention. FIG. 17A shows a container 201 having a main body 201A and a lid 201B together with an engaged locking mechanism 205. FIG. FIG. 17B shows a robot that picks up the container 201 with a lid. Alternatively, the robot can pick up the container at another position, such as the container body. The robot can pick up the container at a plurality of positions such as the container body and the lid. After picking up the container, the robot moves the container to an appropriate position, such as a cleaning station. During movement, additional actions can be performed, such as rotating the robot arm (601) to orient the container to align it with gravity 602, for example. In FIG. 17C, the container is oriented so that the body is located on the lid. This is because the robot grabs the container with the lid. In this orientation, after the locking mechanism is released, the body is supported on the lid by gravity. In FIG. 17D, the locking mechanism is released (605B). Even if only the lid is gripped by the robot arm in the proper orientation, the lid and body are still manipulated by the robot.

  When the container reaches the position of the main body, the main body is arranged at that position (FIG. 17E). The robot continues to deliver and moves to the lid position. When the position of the lid is reached, the robot places the lid and returns to the standby position (FIG. 17F). Alternatively, the main body and the lid can be placed in an appropriate position in parallel, for example, almost simultaneously.

  In one embodiment, the present invention provides an integrated delivery movement that includes delivering the container lid and body as a whole with selective locking or unlocking and selective orientation during delivery. A robot system for performing is disclosed. The robot can have one or more grippers for manipulating the lid and body of the container, as well as an optional mechanism for locking or unlocking the container.

  FIG. 18 illustrates a typical series of typical integrated movements with a robot according to an embodiment of the present invention. The robot 700 has a first gripper 702 for operating the container body, a second gripper 704 for operating the container lid, and a locking / unlocking member 706 for locking or unlocking the container. . The robot 700 can also perform other operations such as rotation and movement to grab and place the container member. The grippers 702 and 704 are coupled to a common arm to allow synchronized movement. The robot 700 shows a typical configuration, but other configurations, such as a common arm coupled to two or more gripper arms, each gripper arm operating a container member. Are also included within the scope of the present invention.

  FIG. 18A shows a robot 700 that grips the container 201 and includes an arm 702 that grips the container main body 201A and an arm 704 that grips the container lid 201B. By providing a plurality of arms for gripping a plurality of members of the container 201, the orientation of the container is not important, and for example, the container can be positioned in any orientation. The container 201 is shown in a locked configuration 205 and the robot locking / unlocking member 706 is in a standby position, eg, retracted. This figure can show a container that has just been received by a robot after it has been placed in a load port with the container normally empty and closed (eg, locked). The robot 700 can be extended to a load port and has an arm 702 or 704 that approaches and grips the main body 201A or the lid 201B.

  After receiving the container, the robot 700 delivers the container to an appropriate position, such as a position at the cleaning station. During delivery, additional operations such as container locking or unlocking and assembly or separation can be performed. FIG. 18B shows a typical configuration of the unlocking operation, in which the container is extended to the engaged state (706A) to unlock, for example, the lock that locks the lid to the body is released. A member 706 is provided. After the unlocking operation is completed, the member 706 returns to the standby position, for example withdrawn. FIG. 18C shows a typical configuration of the separation operation, which includes an arm 702 that moves (702A) to separate the main body from the lid. Alternatively, other movements can be performed, such as moving arm 704 to separate the lid from the body, or moving arms 702 and 704 together. When the body and lid are placed in the cleaning position, the separation operation can be combined with the movement of the arms 702 and 704, respectively.

  After the lid is unlocked from the main body, the main body and the lid can be sequentially (or sequentially) placed in an appropriate position. For example, FIG. 18D includes an arm 702 that moves (702B) to the cleaning position of the main body. Upon reaching the cleaning position, the arm 702 can place the body in the proper orientation and position and return to the standby position. Sequentially or simultaneously, arm 704 can deliver the lid in the proper orientation and position.

  Alternatively, the main body and the lid can be placed in an appropriate position in parallel, for example, almost simultaneously. For example, the arms 702 and 704 are moved to the appropriate positions of the main body and the lid almost simultaneously, and the main body and the lid are arranged in parallel at this position.

  To retrieve the container after cleaning, a series of operations can be performed in reverse order, for example, the lid and body are picked up sequentially, assembled and locked during delivery to the load port.

  FIG. 19 illustrates another exemplary series of exemplary integrated movements with another robot according to an embodiment of the present invention. The robot 800 includes a first gripper 802 for operating the container main body and a second gripper 804 for operating the container lid. The robot 800 can also perform other operations such as rotation and movement to grab and place the container member.

  FIG. 19A shows a robot 80 that grips the container 201 and includes an arm 802 that grips the container body 201A and an arm 804 that grips the container lid 201B. After receiving the container, the robot 800 delivers the container to an appropriate position, such as a position at the cleaning station. During delivery, additional operations such as container locking or unlocking and assembly or separation can be performed. FIG. 19B shows a typical configuration of the unlocking operation, in which the robot 800 unlocks the container, for example, a locking or unlocking member that releases a lock that locks the lid to the main body. Passing through 806. The robot can stop at the locking or unlocking member 806 long enough for the member 806 to unlock the lock, or the robot can pass through the member 806 while the passing action unlocks the lock. it can. After performing the separating operation for unlocking the lock and separating the lid from the main body (FIG. 19C), the robot sequentially or in parallel to an appropriate position for arranging the lid and the main body. It moves (FIG. 19D).

  To retrieve the container after cleaning, a series of operations can be performed in reverse order, for example, the lid and body are picked up sequentially, assembled and locked during delivery to the load port.

  FIG. 20 illustrates another exemplary series of exemplary integrated movements with another robot according to an embodiment of the present invention. The robot 900 includes a gripper 904 for operating the container, and a locking or unlocking member 906 for locking or unlocking the container lock. The robot 900 can also perform other operations, such as rotation and movement, to grab and place the container member. The robot 900 shows a typical configuration of an arm 900 that handles the lid 201B, but through other configurations, such as an arm that handles the body of the container or other member, or a locking mechanism or additional actuation, One arm designed to manipulate multiple members of the container is within the scope of the present invention.

  FIG. 20A shows an arm 904 that grips the lid 201B from, for example, a load port and then delivers the entire container to a cleaning station where the container members are positioned in place. The arm 904 grips only the lid, but since the main body and the lid are coupled by the locking mechanism 205, the entire container also moves. During the container receiving operation, the locking or unlocking member 906 is retracted to the standby position.

  During delivery of the container to the cleaning station, additional movements such as directing, locking or unlocking, assembling or separating are performed. FIG. 20B shows an orientation operation 903 in which the robot arm directs the container so that the main body is positioned on the lid. In this orientation, even if the locking mechanism 205 between the lid and the body is released, the body is supported by the lid by weight. This orientation is configured so that arm 904 can support all members of the container even if arm 904 grips only one member of the container.

  After the container is oriented in the proper orientation, the locking or unlocking member 906 is engaged (906A) (FIG. 20C) to unlock the lock 205, and after the lock is released, It is dissociated (906B) (FIG. 20D). Alternatively, the locking or unlocking member can be positioned on the cleaner so that the robot can pass to unlock the lock 205. During delivery of the container from the load port to the cleaning station, orientation and unlocking operations occur.

  The robot continues to move to deliver the container and reaches the position for placing the body. With the lock released, the robot keeps the container properly oriented to avoid separating the container members. Next, for example, the main body is disposed at the position by the support member 912 disposed in the cleaning station (FIG. 20E). Alternatively, the robot has an actuator (not shown) for moving the main body to that position. The robot continues to move to the lid cleaning position to place the lid (FIG. 20F). The arrangement of the main body and the lid can alternatively be performed in parallel. The collection and transfer of the containers can be performed in the reverse order.

  In one embodiment, the present invention discloses a system having a robot for integrated movement, such as a cleaner system for cleaning containers. In another embodiment, the present invention provides for integrated container delivery, including delivering all the members of the container simultaneously and unlocking or locking and assembling or separating the members of the container during the entire container delivery. A method for movement is disclosed.

  In one embodiment, an apparatus of the present invention for delivering a multi-part article has a delivery mechanism for holding the article and delivering the article from a first station to a second station. The delivery mechanism receives articles from the first station or provides articles to the first station; parts for delivering respective parts of the article to or from separate locations of the second station A delivery mechanism, wherein the apparatus dissociates parts during delivery from the first station to the second station or a plurality of parts during delivery from the second station to the first station. Combine the parts. The device can further include an access mechanism for locking or unlocking portions of the article.

  In one embodiment, the present invention discloses a cleaner system for cleaning containers, each container including at least a container body and a container lid. The system includes one or more load ports for holding the container; a cleaning chamber for cleaning the container in a separate configuration, the container body and the lid are dissociated, and the cleaning is performed Having a delivery mechanism for delivering a container between one of the one or more load ports and the cleaning chamber, the delivery mechanism comprising: In the port, the container is picked up or delivered in a state where the main body and the lid are assembled, and in the cleaning chamber, the container is delivered in a state where the main body and the lid are disassembled and separated. Assemble or disassemble the lid. The delivery mechanism can include a partial delivery mechanism for providing the body and lid sequentially or in parallel to different positions in the cleaning chamber. The delivery mechanism can include a partial delivery mechanism for receiving the body and lid sequentially or in parallel from separate locations in the cleaning chamber.

  FIG. 21 shows an exemplary flow chart for loading an article having a plurality of parts, such as a container having a body and a lid, from a load port to a cleaning station. In operation 2000, the robot receives a container from the load port. The container can be locked with the lid engaged with the body. Alternatively, the container can be assembled without locking, or the container can have a separate body and lid. In an embodiment, the robot receives the container so that it can support multiple portions of the container. For example, if the body and lid are locked together, the container can be supported by holding every part of the container. This is because the main body and the lid are coupled to each other. If the body and lid are assembled unlocked, care should be taken to ensure that both parts are retained. For example, a robot gripper can press both parts together to hold the container. If the two parts are positioned one above the other, both parts can be supported by holding the lower part. If the body and lid are separate, the body and lid can be assembled together before being manipulated by the robot. Alternatively, the robot may receive a separate part before delivery.

  After receiving the container, operation 2001 delivers the container to a process station such as a cleaning station. During delivery, operation 2002 selectively directs the container to an appropriate position for disassembly, eg, unlocking and separating the lid from the body. For example, the container is oriented such that gravity helps the body and lid be positioned one above the other so that the upper part is supported by the lower part. This orientation is optional, but is necessary if the container is received in such a way that unlocking the portions affects the overall stability of the container.

  Also, during delivery, the portions are unlocked and separated during operation 2003. Various operations can be performed depending on the state of the container received. For example, if the container is already unlocked when received by the robot, an unlocking mechanism is not required. If the container is already unlocked and separated, the entire operation is not necessary.

  After unlocking and separation during delivery, in operation 2004, portions of the container are provided to the appropriate location at the cleaning station. Timing can be calculated so that orientation, unlocking and separation of multiple parts is completed during delivery, so that when multiple parts reach the target position, multiple parts are delivered immediately .

  The removal operation from the cleaning station to the load port is performed in the reverse order, and the parts are received sequentially, assembled and locked during transport to the output load port.

  FIG. 22 shows a flow chart for delivering the container from the load port to the cleaning station. In operation 1002, the robot receives a closed container from a load port. For cleaning operations, the container is empty and a locking mechanism is engaged to lock the lid and body together. The container can be placed in the load port manually or automatically, for example from automatic transport. In operation 1004, the robot delivers the entire container to a target location, eg, a cleaning station. Due to the separate cleaning positions for the multiple members of the container, the robot can be moved sequentially from one position to another. For example, the robot can first move to the main body cleaning position, and then move the main body to the main body cleaning position and then move to the lid cleaning position. In operation 1006, the robot directs the container to a position suitable for unlocking the locking mechanism during delivery. This is an optional operation, allowing the container member to be supported by a single gripper arm that grips a single member of the container. The unlocking member can be an integral part of the robot, allowing the unlocking operation to be performed while the robot is moving. After unlocking, the container members are held together by weight, and further robot movement is designed to hold the container members together. In operation 1010, after reaching a first cleaning position, eg, a cleaning position for the body, the robot places the body (or lid) in an appropriate cleaning position. In operation 1012, after releasing the main body (or lid) in the cleaning position, the robot moves to the second cleaning position. In operation 1014, the robot places the remaining portion of the container, eg, the lid, in the second cleaning position.

  FIG. 23 shows a flowchart for delivering the container from the cleaning station to the load port. In operation 1102, the robot picks up one member of the container, such as the lid of the body, from the first cleaning position. In operation 1104, the robot moves to the second cleaning position. In operation 1106, the robot picks up the remaining members of the container, such as the body or lid, in the second cleaning position. In operation 1106, the robot delivers the lid and body to the load port. In operation 1110, during delivery, the lid and body are engaged and locked together, for example by a locking member located on the robot. In operation 1112, during delivery, the robot positions the locked container in an orientation suitable for load port placement.

  In one embodiment, the present invention discloses a method for delivering a semiconductor article using an integrated delivery mechanism. The present invention delivers a multi-part article in an assembled configuration between a first station and a delivery mechanism, and moves the article between the first station and the second station by the delivery mechanism; Disclosed is a method for delivering a multi-part article, wherein a plurality of parts of the article are delivered between a first station and a delivery mechanism, the plurality of parts being arranged at different locations in a second station. In one embodiment, the article is a container that includes a body portion and a lid portion. Delivering a multi-part article in an assembled configuration between the first station and the delivery mechanism includes receiving an article having a plurality of parts locked together from the first station to the delivery mechanism. be able to. Delivering a multi-part article in the assembled configuration between the first station and the delivery mechanism may include providing the first station with an article having a plurality of parts locked together. it can. Delivering multiple portions of the article between the second station and the delivery mechanism may include sequentially providing the multiple portions from the delivery mechanism to the appropriate location at the second station. Delivering multiple portions of the article between the second station and the delivery mechanism can include providing the multiple portions from the delivery mechanism in parallel to the appropriate location at the second station. Delivering multiple portions of the article between the second station and the delivery mechanism may include sequentially receiving the multiple portions from an appropriate location at the second station to the delivery mechanism. Delivering multiple portions of the article to the second station and the delivery mechanism can include receiving the multiple portions in parallel from the appropriate location at the second station to the delivery mechanism. In one embodiment, the method further unlocks the plurality of portions while moving the article; locks the plurality of portions while moving the article; and disassembles the plurality of portions while moving the article. Assembling the parts while moving the article; cleaning the parts at the second station; sequentially cleaning and vacuum drying the parts at the second station.

  The present invention may be embodied in other specific forms without departing from the spirit and essential characteristics of the invention, and thus this embodiment is illustrative in all respects and not restrictive. It is desirable that the scope of the invention be considered, and reference should be made to the appended claims rather than the foregoing description.

Claims (19)

In a chamber for cleaning and drying the workpiece container ,
A liquid supply system for providing a cleaning mixture to the workpiece container ;
A vacuum system that provides the chamber with a pressure below atmospheric pressure;
A heater system for providing thermal energy to the workpiece container ;
The liquid supply system has an inner nozzle and an outer nozzle, and the workpiece container has an inner corner and an outer corner;
The inner nozzle is configured to be disposed inside the workpiece container such that a gas flow from the nozzle reaches the inner corner, and the inner nozzle is disposed at the inner corner of the workpiece container. Configured to face each other,
The outer nozzle is configured to be disposed outside the workpiece container such that a gas flow from the nozzle reaches the outer corner, and the outer nozzle is disposed at the outer corner of the workpiece container. Configured to face each other,
The workpiece container is cleaned and dried in the same chamber;
The workpiece container is liquid cleaned using a cleaning mixture;
Be one that the workpiece container in order to avoid liquid freezing is vacuum dried using heat energy, said workpiece container consists so as not to move during the cleaning and drying process, during the cleaning process Arranged to have a minimal liquid residue in the workpiece container on a parallel surface of the workpiece container ,
It said workpiece container has a bottom and a top, the chamber has the workpiece the constructed gas nozzle to be directed to the bottom of the vessel to remove residual liquid trapped by the surface tension,
It said chamber is characterized by having a gas nozzle configured to be directed to the parallel surfaces of the upper portion of the processing container to remove trapped residual liquid, cleaning and drying the workpiece container Chamber to do.   The chamber of claim 1, wherein the cleaning mixture comprises a mixture of a liquid cleaner and a gaseous carrier gas. The chamber of claim 1, wherein the liquid supply system further provides a rinse mixture to the workpiece container after providing a cleaning mixture. The chamber of claim 1, wherein the liquid supply system further provides a purge gas to the workpiece container after providing a cleaning mixture. The chamber of claim 1, comprising degassing and decontaminating the workpiece container in a heated vacuum environment.   The chamber of claim 1, wherein the vacuum pump system discharges liquid and gaseous materials. In a cleaner system for cleaning and drying containers,
A load port for receiving the container;
A vacuum sealed cleaning chamber, wherein the cleaning chamber provides a plurality of nozzles for providing a cleaning mixture to the surface of the container and a plurality of IR heaters for providing thermal energy to the surface of the container And a pumping system for providing the cleaning chamber with a pressure lower than atmospheric pressure,
The plurality of nozzles have an inner nozzle and an outer nozzle, the container has an inner corner and an outer corner, and the inner nozzle has a gas flow from the nozzle reaching the inner corner. Configured to be disposed inside the container , and the inner nozzle is configured to face the inner corner of the container ;
The outer nozzle is configured to be disposed outside the container , and the outer nozzle is configured to face the outer corner of the container so that a gas flow from the nozzle reaches the outer corner. ,
Robotic handling system for delivering the container between the load port and the cleaning chamber is provided,
The container is cleaned and dried in the same chamber,
The container is a liquid cleaning with a cleaning mixture,
Be one that is a container in order to avoid liquid freezing is vacuum dried using heat energy, said container consists so as not to move during the cleaning and drying process, the container is parallel during the cleaning process Placed on a smooth surface in a position with minimal liquid residue in the container ,
The container has a bottom and a top, said cleaner system has a configured gas nozzle that is directed to the bottom of the vessel to remove residual liquid trapped by the surface tension,
The cleaner system, captured, characterized in that in order to remove the residual liquid having the configured gas nozzle to be directed to the parallel surfaces of the upper portion of the container, cleaner for cleaning a container and drying system.   The system of claim 7, wherein the plurality of nozzles further provides a rinse mixture to the container after providing the cleaning mixture.   The system of claim 7, wherein the plurality of nozzles further provides purge gas to the container after providing the cleaning mixture.   The system of claim 7, wherein a separate chamber is provided for degassing and decontaminating the container.   The system of claim 7, wherein the container has a plurality of portions that are disassembled and positioned separately in the cleaning chamber.   The system of claim 7, wherein the vacuum pump system discharges liquid and gaseous materials.   The system according to claim 7, wherein the cleaning is performed at a pressure lower than atmospheric pressure. In the method of cleaning the workpiece container ,
Said workpiece container and an inner corner and outer corner, facing the plurality of nozzles into the inside of the corner and the outer corner of the workpiece container,
Cleaning the workpiece container with a liquid cleaning mixture in a process chamber;
It said workpiece container has a bottom and a top, flowing gas into the bottom portion of the processing container to remove residual liquid trapped by the surface tension,
To the captured the top of the parallel surfaces of the workpiece container remaining liquid to remove flowing gas,
Vacuum drying the workpiece container in the same process chamber;
Providing thermal energy to the workpiece container for at least a portion of a vacuum drying time, the cleaning mixture comprising a mixture of a liquid cleaner and a gas carrier gas, and a parallel surface during the cleaning process is configured to be located in a position with minimal liquid remaining above, wherein said processing container is characterized in that consists not to move during the cleaning and drying process, to clean the workpiece container . The method of claim 14, wherein the workpiece container is rinsed with a rinse mixture in the same process chamber. The method of claim 14, wherein the workpiece container is purged with a purge gas in the same process chamber. The method of claim 14, wherein the workpiece container is degassed and decontaminated in a heated vacuum environment in the same process chamber. 15. The method of claim 14, wherein the workpiece container is degassed and decontaminated in a heated vacuum environment in a different process chamber. The method of claim 14, wherein the workpiece container has a plurality of portions that are disassembled and positioned separately in a cleaning chamber.

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