JP4811022B2 - 微細孔が形成された延伸ポリテトラフルオロエチレン多孔質体及びその製造方法 - Google Patents
微細孔が形成された延伸ポリテトラフルオロエチレン多孔質体及びその製造方法 Download PDFInfo
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
- H05K3/0026—Etching of the substrate by chemical or physical means by laser ablation
- H05K3/0032—Etching of the substrate by chemical or physical means by laser ablation of organic insulating material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
- B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
- B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2101/00—Articles made by soldering, welding or cutting
- B23K2101/36—Electric or electronic devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
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- B23K2103/30—Organic material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
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- H—ELECTRICITY
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description
延伸PTFE多孔質体の気孔率は、ASTM D−792に従って測定した。
膜厚60μmの延伸PTFE多孔質膜(気孔率60%、平均孔径0.1μm)に、波長800nm、パルス幅130fs、エネルギー200μJ、周波数10Hzの条件で、Ti/Sapphireレーザーを20ショット照射して貫通孔を形成した。図1に示すように、貫通孔の断面形状は、裾引きが小さく良好である。平均孔径は、約80μmである。また、図2に示すように、貫通孔の壁面の微細多孔質構造(フィブリルとノード)が破壊されることなく、実質的に保持されていた。
実施例1で用いたのと同じ延伸PTFE多孔質膜に、波長192nm、パルス幅9ns、エネルギー50mJ、周波数5HzのArFレーザーを45ショット照射して貫通孔(平均孔径280μm)を形成した。貫通孔の壁面は、PTFEフィブリルが溶融しており、微細多孔質構造が損なわれて無孔質となっていることが確認された。
膜厚60μmの延伸PTFE多孔質膜(気孔率60%、平均孔径0.1μm)を石英基板上に載置して支持した状態で、該延伸PTFE多孔質膜に、波長800nm、パルス幅170fs、エネルギー200μJ、周波数10Hzの条件で、Ti/Sapphireレーザーを50ショット照射して貫通孔を形成した。石英基板には、延伸PTFE多孔質膜の貫通孔を形成する目標領域に対応する領域に、予め貫通孔より大き目の穴を形成したものを使用した。
支持体として、穴を設けていない石英基板を用いたこと以外は、実施例2と同様にしてアブレーション加工を行った。図6(SEM写真)に示されているように、延伸PTFE多孔質膜の支持体に接触している側(上方)の貫通孔の開口部は、支持体のアブレーションによる飛散粒子の影響と推測される影響を受けて大きく変形しており、貫通孔の壁面も不均一な状態であることが分かる。
Claims (13)
- 20%以上の気孔率と、10μm以下の平均孔径とを有するものである、フィブリルと該フィブリルによって互いに連結されたノードとからなる微細多孔質構造を有する延伸ポリテトラフルオロエチレン多孔質体に、10ピコ秒以下のパルス幅を有するパルス・レーザービームの照射により、該延伸ポリテトラフルオロエチレン多孔質体の平均孔径より大きな孔径であって、かつ、孔径が0.1μmから1000μmの間である微細孔が形成されており、かつ、該微細孔の壁面が、パルス・レーザービームの照射により形成された開口部の直径をAとしたとき、0.5×A以上の深さを持つ亀裂、凹凸、空洞(クラック)を有しない円滑な形状を示すことにより、微細多孔質構造が破壊されることなく保持されていることを特徴とする微細孔が形成された延伸ポリテトラフルオロエチレン多孔質体。
- 延伸ポリテトラフルオロエチレン多孔質体が、5μmから3mmの間の厚みを有する延伸ポリテトラフルオロエチレン多孔質シートまたはフィルムである請求項1記載の微細孔が形成された延伸ポリテトラフルオロエチレン多孔質体。
- 微細孔の開口部が凹凸のない所定形状の輪郭線を描き、かつ、開口縁部に高さ30μm以上のバリ状の盛り上がりがない請求項1記載の微細孔が形成された延伸ポリテトラフルオロエチレン多孔質体。
- 20%以上の気孔率と、10μm以下の平均孔径とを有するものである、フィブリルと該フィブリルによって互いに連結されたノードとからなる微細多孔質構造を有する延伸ポリテトラフルオロエチレン多孔質体に、10ピコ秒以下のパルス幅を有するパルス・レーザービームを照射して、該延伸ポリテトラフルオロエチレン多孔質体の平均孔径より大きな孔径であり、かつ、孔径が0.1μmから1000μmの間である微細孔であって、該微細孔の壁面が、パルス・レーザービームの照射により形成された開口部の直径をAとしたとき、0.5×A以上の深さを持つ亀裂、凹凸、空洞(クラック)を有しない円滑な形状を示すことにより、微細多孔質構造が破壊されることなく保持されている微細孔を形成することを特徴とする微細孔が形成された延伸ポリテトラフルオロエチレン多孔質体の製造方法。
- 延伸ポリテトラフルオロエチレン多孔質体を支持体上に支持させた状態で、該延伸ポリテトラフルオロエチレン多孔質体にパルス・レーザービームを照射し、その際、支持体として、該延伸ポリテトラフルオロエチレン多孔質体の微細孔を形成する目標領域に対応する領域に該延伸ポリテトラフルオロエチレン多孔質体が接触しない部位を設けた支持体を使用する請求項4記載の製造方法。
- 延伸ポリテトラフルオロエチレン多孔質体が接触しない部位を設けた支持体が、該延伸ポリテトラフルオロエチレン多孔質体の微細孔を形成する目標領域に対応する領域に、該部位として穴を設けた支持体である請求項5記載の製造方法。
- 照射するパルス・レーザービームのパルス幅が10フェムト秒から10ピコ秒の間である請求項4記載の製造方法。
- 照射するパルス・レーザービームのフルエンスが0.1J/cm2以上である請求項4記載の製造方法。
- 照射するパルス・レーザービームのフルエンスが0.1〜20J/cm2である請求項4記載の製造方法。
- 照射するパルス・レーザービームの波長が200nmから1μmの間である請求項4記載の製造方法。
- 微細孔の孔径が0.1μmから1000μmの間である請求項4記載の製造方法。
- 延伸ポリテトラフルオロエチレン多孔質体が、20%以上の気孔率と、10μm以下の平均孔径とを有するものである請求項4記載の製造方法。
- 延伸ポリテトラフルオロエチレン多孔質体が、5μmから3mmの間の厚みを有する延伸ポリテトラフルオロエチレン多孔質シートまたはフィルムである請求項4記載の製造方法。
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JP2005517319A JP4811022B2 (ja) | 2004-01-23 | 2005-01-20 | 微細孔が形成された延伸ポリテトラフルオロエチレン多孔質体及びその製造方法 |
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PCT/JP2005/001051 WO2005070611A1 (ja) | 2004-01-23 | 2005-01-20 | 微細孔が形成された延伸ポリテトラフルオロエチレン多孔質体及びその製造方法並びにアブレーション加工方法 |
JP2005517319A JP4811022B2 (ja) | 2004-01-23 | 2005-01-20 | 微細孔が形成された延伸ポリテトラフルオロエチレン多孔質体及びその製造方法 |
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US (1) | US20080044637A1 (ja) |
EP (1) | EP1707299A4 (ja) |
JP (1) | JP4811022B2 (ja) |
KR (1) | KR20060114710A (ja) |
CN (1) | CN1898058A (ja) |
CA (1) | CA2546094A1 (ja) |
TW (1) | TW200536069A (ja) |
WO (1) | WO2005070611A1 (ja) |
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EP1983020B1 (en) * | 2006-02-10 | 2014-05-07 | LEF Technology Inc. | Method for modification of liquid crystal polymer |
KR100762291B1 (ko) | 2006-05-18 | 2007-10-01 | 한국표준과학연구원 | 고분자막 미세 가공 방법 |
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- 2005-01-20 WO PCT/JP2005/001051 patent/WO2005070611A1/ja active Application Filing
- 2005-01-20 EP EP05704160A patent/EP1707299A4/en not_active Withdrawn
- 2005-01-20 US US10/586,876 patent/US20080044637A1/en not_active Abandoned
- 2005-01-20 KR KR1020067012912A patent/KR20060114710A/ko not_active Application Discontinuation
- 2005-01-20 JP JP2005517319A patent/JP4811022B2/ja not_active Expired - Fee Related
- 2005-01-20 CN CNA2005800012826A patent/CN1898058A/zh active Pending
- 2005-01-20 CA CA002546094A patent/CA2546094A1/en not_active Abandoned
- 2005-01-21 TW TW94101754A patent/TW200536069A/zh unknown
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JPH11243277A (ja) * | 1998-02-26 | 1999-09-07 | Ibiden Co Ltd | フィルドビア構造を有する多層プリント配線板 |
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US20080044637A1 (en) | 2008-02-21 |
CN1898058A (zh) | 2007-01-17 |
TW200536069A (en) | 2005-11-01 |
WO2005070611A1 (ja) | 2005-08-04 |
KR20060114710A (ko) | 2006-11-07 |
CA2546094A1 (en) | 2005-08-04 |
JPWO2005070611A1 (ja) | 2007-09-06 |
EP1707299A1 (en) | 2006-10-04 |
EP1707299A4 (en) | 2009-03-18 |
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