JP4808809B2 - Data display device, data display method, and program - Google Patents

Description

  The present invention relates to a data display device and the like for displaying a plurality of process-related data, which are time-series data related to the processing state of a semiconductor process.

  Conventionally, data sent from a measuring instrument as a measurement data processing method in a group management system including a plurality of manufacturing apparatuses that perform a predetermined process on a substrate to be processed and a server device connected to the plurality of manufacturing apparatuses. There has been known a method of automatically and accurately processing the above (for example, see Patent Document 1). In this measurement data processing method, a calculation formula for processing measurement data is registered in advance, and when measurement data is received, this measurement data is stored in the measurement data reception buffer and based on the recipe name of the measurement data. Selecting at least one calculation formula having the same recipe name suitable for processing the measurement data from among the registered calculation formulas, storing the calculation formula in the calculation formula storage buffer, and storing the stored measurement data in the selected formula The calculation is applied to the calculation formula, and the calculation result is stored in the processed data storage buffer.

In addition, a group management system including a conventional semiconductor manufacturing apparatus has a function of displaying time-series information (hereinafter referred to as a chart) measured by the semiconductor manufacturing apparatus. In this chart, information on a plurality of semiconductor manufacturing apparatuses managed by the group management system was displayed. The conventional group management system has a function called FDC (fault detection and classification) that performs abnormality detection using a chart and then performs abnormality classification.
Japanese Patent Laid-Open No. 11-354395 (first page, FIG. 1 etc.)

  However, the conventional group management system or the like has a problem that time series data such as data measured in a semiconductor process cannot be displayed appropriately.

  For example, when performing analysis or the like for a plurality of time-series data, it is possible to compare data by displaying a plurality of time-series data displayed in a graph or the like side by side.

  However, conventionally, when a plurality of time-series data are displayed side by side in this way, when a period to be displayed for one time-series data is changed or a period to be displayed is moved, another time series is displayed. Unless the period for which data is to be displayed is also changed individually, the period displayed for each graph differs, making it difficult to compare the data.

  In addition, if you change the range of the displayed period by enlarging or reducing a part of the time-series data displayed in the graph etc., the current display range will be It was impossible to instantly grasp which position it was, and it was not possible to instantly specify another display period.

  Particularly in recent years, measurement data can be acquired at a high sampling rate of about 1 MHz from a semiconductor manufacturing apparatus or the like in order to accurately control a semiconductor process, and the amount of data acquired has increased. Yes. For this reason, it is possible to analyze a finer part by enlarging and displaying a part of the measurement data. However, when only the details are magnified, there is a problem that the trend of the entire measurement data cannot be grasped, and the positional relationship of the enlarged portion of the entire measurement data cannot be determined, and appropriate analysis cannot be performed. It was.

A data display device according to the present invention includes a storage unit that can store a plurality of process-related data, which is time-series data related to the state of a semiconductor process, and a data acquisition unit that acquires one or more process-related data from the storage A first display unit that displays one or more process-related data acquired by the data acquisition unit in a first display width in association with a time axis, and one of the process-related data acquired by the data acquisition unit A detection unit that detects a singular point from the first display unit, and a designation of a display target range that is a partial range in the process-related data displayed by the first display unit , and a singular point detected by the detection unit information indicating a period that occurs, a range specification receiving section that receives as information for specifying the display target range, from each of the plurality of process-related data, the display pairs A display data acquisition unit that acquires process related data in a display period that is a period corresponding to a range, and a plurality of process related data in the display period acquired by the display data acquisition unit are associated with a time axis, A second display unit that displays a second display width wider than the display target range, wherein the first display unit includes information indicating the display target range received by the range designation receiving unit, The data display device further displays the data in association with the one or more process-related data displayed by the first display unit.

With this configuration, the details of the time-series data relating to the semiconductor process are displayed in a graph so that a finer analysis can be performed, and the period of the data that the second display unit 1310 displays enlarged is the first and second. It is possible to instantly visually grasp which part of the entire measurement data is in the period. This makes it possible to appropriately display time-series data regarding the semiconductor process. In addition, information indicating the display target range can be automatically acquired. Thereby, the user's labor for designating the display target range can be reduced. In addition, it is possible to eliminate detection omission of a portion to be displayed with the second display width.

In addition, the data display device of the present invention acquires the one process related data from the storage unit that can store one process related data that is time-series data relating to the state of the semiconductor process, and the storage unit. A data acquisition unit; a first display unit that displays one process-related data acquired by the data acquisition unit in association with a time axis; and a first display width; a process-related data acquired by the data acquisition unit; The detection unit that detects a singular point from one and the designation of a plurality of display target ranges that are a plurality of ranges for one process related data displayed by the first display unit , and the detection unit detects the information indicating an occurrence time period of singularities, a range specification accepting section that accepts as information for specifying the display target range, from the one of the process-related data, the plurality A display data acquisition unit that acquires a plurality of process-related data in a plurality of display periods, each of which corresponds to a display target range, and a plurality of process-related data acquired by the display data acquisition unit are associated with a time axis And a second display unit that displays a second display width wider than the display target range, wherein the first display unit includes a plurality of display target ranges received by the range designation receiving unit. The data display device further displays the information to be displayed in association with the one process-related data displayed by the first display unit.

With this configuration, data acquired from a plurality of areas of one process-related data can be displayed in the second display width, data comparison within one process-related data can be easily performed, abnormality detection, etc. Can be performed efficiently. In addition, information indicating the display target range can be automatically acquired. Thereby, the user's labor for designating the display target range can be reduced. In addition, it is possible to eliminate detection omission of a portion to be displayed with the second display width.

  In the data display device of the present invention, in the data display device, the first display unit includes a plurality of process-related data acquired by the data acquisition unit in association with a time axis with a first display width. And the range designation accepting unit accepts designation of a display target range for each of the one process related data displayed by the first display unit, and the display data acquisition unit receives the one process related data. From the data, a plurality of process related data corresponding to a plurality of display target ranges received by the range specification receiving unit are acquired, and the second display unit is a plurality of process related data acquired by the display data acquiring unit. Are displayed in a second display width wider than the width of the display target range in association with the time axis, and the first display unit includes a plurality of ranges received by the range designation receiving unit. Information indicating indicates target range in association with a plurality of the one process-related data, wherein said first display unit, each accepted designation is displayed, a data display device further displays.

  With this configuration, data acquired from multiple areas of one process-related data can be displayed in the second display width, making it easy to compare data within one process-related data, and to detect anomalies Etc. can be performed efficiently.

  In the data display device of the present invention, in the data display device, an analysis unit that performs a predetermined analysis on a plurality of data acquired by the display data acquisition unit, and a third display unit that displays an analysis result of the analysis unit And a data display device.

  With this configuration, analysis results for multiple areas in one process-related data are displayed side by side with one process-related data or multiple areas in one process-related data. Comparison can be facilitated, and data abnormalities can be easily recognized.

  The data display device of the present invention may further include a data processing unit that performs predetermined arithmetic processing on one or more of the process related data acquired by the display data acquisition unit in the data display device, The display unit associates the process-related data acquired by the display data acquisition unit and the process-related data calculated by the data processing unit with a time axis, and has a second width wider than the width of the display target range. This is a data display device that displays a display width.

  With this configuration, the data processing unit processes only the display target range of the measurement data, so that the data processing amount of the data processing unit can be reduced. In addition, since data processing is performed at the time of display, process related data processed in real time can be displayed.

  In the data display device of the present invention, in the data display device, the range designation receiving unit may designate the display target range by an operation using an instruction device for process related data displayed by the first display unit. It is a data display device to accept.

  With this configuration, it is possible to specify a display target range using process-related data displayed by the first display unit, and it is possible to perform a sensory operation and improve operability.

  Further, in the data display device according to the present invention, in the data display device, the first display unit displays information indicating the display target range so as to overlap with the process related data displayed by the first display unit, The range designation accepting unit is a data display device that accepts designation of the display target range according to an operation of moving and changing a width using an instruction device for information indicating the display target range displayed by the first display unit. is there.

  With this configuration, it is possible to change the display target range by a sensuous operation, and operability can be improved.

  According to the data display device and the like according to the present invention, time series data relating to a semiconductor process can be appropriately displayed.

  Hereinafter, embodiments of a data display device and the like will be described with reference to the drawings. In addition, since the component which attached | subjected the same code | symbol in embodiment performs the same operation | movement, description may be abbreviate | omitted again.

(Embodiment 1)
FIG. 1 is a conceptual diagram of a group management system in the present embodiment. The group management system is a system that manages manufacturing apparatuses such as semiconductor manufacturing apparatuses and liquid crystal panel manufacturing apparatuses. The group management system includes one or more manufacturing apparatuses 11 (manufacturing apparatuses 11a to 11n (where n is an arbitrary number)), a server apparatus 12, and a data display apparatus 13.

  The manufacturing apparatus 11 and the server apparatus 12, and the data display apparatus 13 and the server apparatus 12 can transmit and receive information via a communication line or the like, respectively. For example, the devices may be connected via a network such as the Internet or a wireless or wired LAN, or may be connected by short-range wireless communication such as Bluetooth (registered trademark). Further, they may be connected by a bus such as USB or IEEE1394. However, the connection method between each apparatus is not ask | required. The information transmission / reception means may be a communication means or a broadcasting means.

  FIG. 2 is a block diagram showing the configuration of the group management system in the present embodiment. Here, for convenience of explanation, the case where there is one manufacturing apparatus 11 is shown as an example.

  The manufacturing apparatus 11 is an apparatus that performs a predetermined semiconductor process on a substrate to be processed, such as a semiconductor wafer or a liquid crystal panel substrate. The manufacturing apparatus 11 performs various processes on the substrate to be processed such as a film forming process, an etching process, and a thermal oxidation process. The manufacturing apparatus 11 is, for example, a semiconductor manufacturing apparatus such as a semiconductor wafer manufacturing apparatus, a liquid crystal panel manufacturing apparatus, a plasma display panel manufacturing apparatus, or the like.

  FIG. 3 is a diagram showing a semiconductor wafer manufacturing apparatus which is an example of the manufacturing apparatus 11. The semiconductor wafer manufacturing apparatus of FIG. 3 has a plurality of, for example, three process chambers 1, 2, and 3 for performing various processes on the semiconductor wafer, for example, a film forming process, an etching process, and a thermal oxidation process For example, cassette chambers 4 and 5 that accommodate cassettes C1 and C2 that can accommodate 50 wafers W, and a transfer chamber that transfers wafers W between process chambers 1, 2, and 3 and cassette chambers 4 and 5 6. The chambers are connected via a gate valve G so as to be freely opened and closed. In the transfer chamber 6, for example, an articulated transfer arm 7 capable of bending and extending and rotating is provided, and the transfer arm 7 transfers the wafer W between the chambers. When the cassettes C1 and C2 are taken into the cassette chambers 4 and 5, the cassettes C1 and C2 are inverted by 90 degrees, and the wafer insertion / removal ports of the cassettes C1 and C2 are rotated so as to face the center in the transfer chamber 6, so Is installed in a posture in which the wafer W can be taken in and out.

  The manufacturing apparatus 11 stores, for example, a recipe that is information regarding a predetermined process for a wafer, and controls the manufacturing process using the recipe. A recipe is usually a set of process condition values and the like.

  In addition, the manufacturing apparatus 11 acquires one or more pieces of situation data that is time-series data (hereinafter referred to as time-series data) regarding the situation of the own apparatus, and transmits the situation data to the server apparatus 12. Each time series data described here is, for example, data composed of one or more data corresponding to time. Specifically, the time-series data related to the situation is data related to the usage status of the manufacturing apparatus acquired along the time series or data related to the operation status. The data related to the usage status is, for example, data indicating what kind of processing or control the manufacturing apparatus has started or is in execution, data indicating fluctuations in control values when controlling the manufacturing apparatus, etc. is there. The data related to the operating status of the manufacturing apparatus includes, for example, measured data measured during the operation of the manufacturing apparatus such as the temperature and pressure in the manufacturing apparatus, the amount of power supplied to the manufacturing apparatus, the flow rate of the material gas, etc. It is. This measurement data is acquired using one or more temperature sensors, one or more vibration sensors, one or more flow sensors, and the like. The manufacturing apparatus 11 normally includes time data, which is information indicating the time at which the situation data is configured, the measurement information constituting the situation data, the time at which data indicating the usage status is acquired, and the like. The measurement data and data indicating the usage status are added in association with the data and output. However, the time data corresponding to the time when the server device 12 that received the situation data receives the situation data may be added in association with the situation data. Further, information indicating the type of measurement data such as “temperature” and “pressure” may be added to the situation data and output. Normally, one manufacturing apparatus 11 transmits a plurality of different types of situation data. However, a plurality of manufacturing apparatuses 11 may transmit one or more status data. In addition, when there are a plurality of manufacturing apparatuses 11, identification information for identifying each manufacturing apparatus 11 may be added to the situation data and transmitted so that the situation data output from each manufacturing apparatus 11 can be identified. .

  The configuration in which the manufacturing apparatus 11 performs processing related to a predetermined semiconductor process on a substrate to be processed such as a wafer, the configuration in which status data is acquired and transmitted, and the like are well-known techniques, and thus detailed description thereof is omitted. To do.

  The server device 12 is a server device that constitutes a group management system. The server device 12 receives a plurality of status data that is time-series data transmitted from one or more manufacturing apparatuses 11 and accumulates it in a storage unit (not shown). Then, the situation data corresponding to the request information, which is the information requesting transmission of the situation data, transmitted from the data display device 13 is read from the storage unit and transmitted to the data display device 13. Information requesting transmission of status data transmitted from the data display device 13 may include, for example, device identification information of a desired manufacturing device for designating transmission of status data regarding the desired manufacturing device. Further, it may include information specifying a start time and an end time, and a start time and a required time for specifying a range of status data requesting transmission, in other words, a period. In such a case, the server apparatus 12 reads out the status information of the manufacturing apparatus specified by the request information within the period specified by the request information from the storage unit, and transmits it to the data display apparatus 13 that is the transmission source of the request information. To do. However, the server device 12 may read and transmit the situation data to the data display device 13 specified in advance at a predetermined or indefinite predetermined timing specified regardless of the request information. Further, the server device 12 may process the stored situation data to form new situation data. The configuration in which the server device 12 in the group management system of semiconductor manufacturing apparatuses receives and accumulates status data, the configuration in which stored status information is read and transmitted, and the like are well-known techniques. Omitted.

  The data display device 13 includes an instruction reception unit 1301, a request information transmission unit 1302, a data reception unit 1303, a storage unit 1304, a data processing unit 1305, a data acquisition unit 1306, a first display unit 1307, a range designation reception unit 1308, display data. An acquisition unit 1309 and a second display unit 1310 are provided.

  The instruction receiving unit 1301 receives an instruction to transmit request information that is information for requesting transmission of status data that is a plurality of process-related data stored in the server device 12. Process related data will be described later. The instruction received by the instruction receiving unit 1301 specifies information specifying the type of status data, the range of the status data, in other words, the start time and end time for specifying the period, and the start time and the required time. Information may be included. In addition, information specifying the manufacturing apparatus 11 such as identification information for requesting status data about the desired manufacturing apparatus 11 may be included. The reception described here is, for example, reception from an input unit, reception of an input signal transmitted from another device, or the like. The instruction input unit accepted by the instruction receiving unit 1301 may be anything such as a numeric keypad, a keyboard, a mouse, or a menu screen. The instruction receiving unit 1301 can be realized by a device driver of an input unit such as a numeric keypad or a keyboard, menu screen control software, or the like.

  The request information transmitting unit 1302 configures request information corresponding to the instruction received by the instruction receiving unit 1301 and transmits the request information to the server device 12. Specifically, the request information corresponding to the instruction received by the instruction receiving unit 1301 specifies information specifying the type of situation data, information specifying the range of the situation data, that is, the period, and the manufacturing apparatus 11. Information requesting transmission of status information corresponding to information or the like. The request information transmission unit 1302 is realized by a wired or wireless communication unit or the like.

  When status data or the like is transmitted from the server device 12 regardless of the request information, the instruction receiving unit 1301 and the request information transmitting unit 1302 may be omitted.

  The data receiving unit 1303 receives status data that is process-related data transmitted from the server device 12. The data receiving unit 1303 is realized by a wired or wireless communication unit or the like.

  The storage unit 1304 can store a plurality of process related data that is time-series data related to the state of the semiconductor process. Specifically, the process-related data is the situation data received by the data receiving unit 1303 described above, or the data processing unit 1305 described later performs predetermined processing on the situation data received by the data receiving unit 1303. It is the obtained time series data. For example, measurement data and the like measured repeatedly at a predetermined time interval for the manufacturing apparatus 11 are stored. The process-related data stored in the storage unit 1304 is usually appended with time information indicating the time when each data was acquired. For example, the storage unit 1304 includes a plurality of different processes that are time-series data related to the state at the time of processing of a semiconductor process, which is read from a recording medium or the like by status data received by the data receiving unit 1303 or a reading unit (not shown). Related data, process related data processed by a data processing unit 1305 to be described later, and the like are accumulated. The storage described here is a concept including temporary storage. The storage unit 1304 may be a non-volatile recording medium or a volatile recording medium.

  The data processing unit 1305 performs predetermined processing on the situation data that is the process related data received by the data receiving unit 1303 to form new process related data. The configured process related data is accumulated in the storage unit 1304. The predetermined processing may be any processing, for example, wavelet transformation, data standardization / normalization processing, or the like. Further, what kind of processing is to be performed may be determined in advance, or may be designated according to an instruction received from a reception unit (not shown) or the like. The data processing unit 1305 may directly process the status data received by the data receiving unit 1303, or may once read the status data stored in the storage unit 1304 and perform processing. The data processing unit 1305 can be usually realized by an MPU, a memory, or the like. The processing procedure of the data processing unit 1305 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  Note that the data processing unit 1305 may be omitted when new process-related data configured by performing predetermined processing on the situation data is unnecessary.

  The data acquisition unit 1306 acquires one or more process related data from the storage unit 1304. The data acquisition unit 1306 may acquire data for all periods of the process-related data stored in the storage unit 1304, or may acquire data for some periods. The designation of this period may be determined in advance, or based on information specifying a start time and an end time, a start time and a required time, etc. received from the instruction receiving unit 1301 or a receiving unit (not shown). , May be determined. In addition, when no period is specified, process related data for all periods of the process related data stored in the storage unit 1304 may be acquired. The one or more process-related data acquired by the data acquisition unit 1306 may be all of the plurality of process-related data accumulated in the storage unit 1304 or a part thereof. It does not matter how part of the process related data to be acquired is specified. For example, it may be designated by the user using the type of data, device identification information, or the like via a reception unit (not shown) or may be set in advance. It should be noted that information indicating that there is no process related data, that is, “0” may be obtained for a portion in which no process related data exists within a specified predetermined period. The data acquisition unit 1306 can be usually realized by an MPU, a memory, or the like. The processing procedure of the data acquisition unit 1306 is usually realized by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The first display unit 1307 displays the one or more process-related data acquired by the data acquisition unit 1306 in a first display width in association with the time axis. Specifically, the display in association with the time axis is to display each process related data using a graph with the time axis as the horizontal axis or the vertical axis. The display with the first display width is one or more processes such that the disclosure time and end time of one or more process-related data acquired by the data acquisition unit 1306 are located at both ends of the first display width. It is to display related data. The width described here is the length in the time axis direction. The first display width may be fixed, or may be changeable according to an instruction received by a receiving unit (not shown). In addition, the first display unit 1307 thins out process-related data that is substantially unnecessary for display according to the first display width, or performs interpolation so that process-related data can be displayed smoothly. You may do it. Further, the one or more process related data displayed by the first display unit 1307 may be determined in any manner. When displaying a plurality of process related data, the plurality of process related data may be displayed in an overlapped manner.

  In addition, the first display unit 1307 includes information indicating a display target range received by a range designation receiving unit 1308, which will be described later, and one or more process-related data displayed by the first display unit 1307 with a first display width. Display in association. The display in association is to display the range to be displayed so that the range of the process related data displayed on the first display unit 1307 can be uniquely understood. That is, the display target range is displayed so that it can be distinguished from other regions which range of the process related data displayed on the first display unit 1307 is displayed. Specifically, an image indicating the range indicated by the display target range is displayed so as to be superimposed on the process related data or displayed along the time axis of the process related data. The information indicating the display target range is, for example, information that can be displayed so that the range corresponding to the display target range of one or more process-related data displayed by the first display unit 1307 can be distinguished from other ranges, For example, it may be an object image. For example, it is information for coloring and displaying a range corresponding to the display target range by overlay or the like, and information for enclosing or dividing with a dotted line or a boundary line. Moreover, the information etc. which reversed-displayed the color of the time series information of the display object range, etc. may be sufficient. The range described here is specifically a period. A technique for displaying a range corresponding to the display target range is known as a technique for displaying an area designated by an instruction device or the like, for example, information indicating a selection range, and a detailed description thereof will be omitted. The display described here is a concept including display on a display or the like. The first display unit 1307 may be considered as including or not including a display device such as a display. The first display unit 1307 can be realized by display device driver software or display device driver software and a display device.

  The range designation accepting unit 1308 accepts designation of a display target range that is a partial range in the process related data displayed by the first display unit 1307. The display target range may be information indicating a range in which at least the start point and the end point along the time axis can be specified. The display target range is a range on the process related data displayed by the first display unit 1307. The range designation receiving unit 1308 is preferable in that it can be operated intuitively, for example, by receiving the designation of the display target range by an operation using an instruction device such as a mouse for the process related data displayed by the first display unit 1307. . Specifically, by dragging the range to be displayed on one or more process-related data displayed on the first display unit 1307 by operating the pointing device or the like, clicking a button or the like. The range specification may be accepted. Further, when the information indicating the display target range is already displayed on the process related data displayed on the first display unit 1307 or in the vicinity of the process related data, the information indicating the displayed display target range is displayed. In response to the movement of the pointing device and the operation of changing the width, designation of the display target range may be accepted. For example, when a rectangular object image indicating the display target range is displayed transparently on the process related data displayed on the first display unit 1307, the center of the object image is dragged using the pointing device. Thus, the movement of the display target range may be accepted. In addition, a change in the range indicated by the display target range may be received by dragging the end of the rectangular object image in the time axis direction using the pointing device. However, it does not matter how the range designation receiving unit 1308 receives the designation of the display target range. For example, the designation or change of the display target range may be received by receiving values such as time indicating the start point and end point of the display target range. The reception described here is, for example, reception from an input unit, reception of an input signal transmitted from another device, or the like. The input means may be anything such as a numeric keypad, keyboard, mouse or menu screen. The range designation receiving unit 1308 can be realized by a device driver of an input unit such as a numeric keypad or a keyboard, menu screen control software, or the like.

  The display data acquisition unit 1309 acquires process related data within a display period, which is a period corresponding to the display target range received by the range designation receiving unit 1308, from each of the plurality of process related data stored in the storage unit 1304. To do. As a specific example, the display data acquisition unit 1309 acquires the start time and end time of the display period corresponding to the display target range received by the range designation reception unit 1308, and the period between the start time and end time A plurality of process related data are read out from the storage unit 1304 and acquired. The plurality of process-related data may be determined in any way, may be designated via a not-shown accepting unit or the like, or may be designated in advance. The start time and end time of the display period corresponding to the display target range received by the range specification receiving unit 1308 are, for example, the time axis direction of the display target range on the process-related data displayed by the first display unit 1307 Can be calculated using a ratio or the like from the positions at which both ends are displayed and the times at both ends of the process-related data displayed by the first display unit 1307 with the first display width. Further, the relationship between the distance on the image displayed by the first display unit 1307 and the time is calculated in advance from the first display width and the period of the process related data displayed by the first display unit 1307. Using this relationship, the start time and the end time, which are times corresponding to both ends of the display target range, are determined from the distance between the both ends of the display target range and the both ends of the time-series information displayed on the first display unit 1307. And may be calculated. If there is no process related data in a part or all of the display target range, the process related data during the non-existing period may not be acquired, or a preset value such as “0” may be used. May be acquired as the value of this period. The display data acquisition unit 1309 can be usually realized by an MPU, a memory, or the like. The processing procedure of the display data acquisition unit 1309 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The second display unit 1310 displays a plurality of process-related data within the display period acquired by the display data acquisition unit 1309 in association with the time axis with a second display width wider than the width of the display target range. Usually, the second display width is preferably about the same width as the first display width, but may be a different width. When the second display width is narrower than the first display width, the maximum width of the display target range is set so that the second display width is wider than the display target range width. It may be set to be narrower than the display width. The second display width may be fixed, or may be changeable according to an instruction received by a receiving unit (not shown) or the like. Further, the second display unit 1310 thins out process-related data that is substantially unnecessary for display according to the first display width, or performs interpolation so that process-related data can be displayed smoothly. You may do it. Further, the one or more process related data displayed by the second display unit 1310 may be determined in any manner. When displaying a plurality of process-related data, each process-related data is usually displayed with a second display width wider than the width of the display target range in association with the time axis. However, some of the process related data may be displayed in a superimposed manner. Further, when the display target range is not designated, the second display unit 1310 may display, for example, the entire plurality of process related data with the second display width for each process related data. The display described here is a concept including display on a display or the like. The second display unit 1310 may be considered as including or not including a display device such as a display. The second display unit 1310 can be realized by display device driver software or display device driver software and a display device.

  Note that the display data acquisition unit 1309 acquires process related data within a display period corresponding to the display target range received by the range designation receiving unit 1308, and the second display unit 1310 displays the acquired process related data. The process can be triggered by the range designation receiving unit 1308 accepting the display target range, and the display of the second display unit 1310 can be updated in real time according to the designation of the display target range. Therefore, it is preferable.

  Next, the operation of the data display device will be described with reference to the flowchart of FIG. Here, the instruction receiving unit 1301 receives information specifying a period and a type of the situation data for acquiring one or more situation data (process related data) within a desired period from the server device 12. Shall.

  (Step S400) The instruction receiving unit 1301 determines whether an instruction for transmitting request information has been received. If accepted, the process proceeds to step S401. If not accepted, the process returns to step S400.

  (Step S401) The request information transmission unit 1302 configures request information according to the instruction received by the instruction reception unit 1301, and transmits the request information to the server device 12. Here, as an example, in response to an instruction received by the instruction receiving unit 1301, request information requesting transmission of desired status data, that is, process-related data within a desired period is transmitted to the server device 12.

  (Step S <b> 402) The data receiving unit 1303 receives status data that is process-related data transmitted from the server device 12.

  (Step S403) The data receiving unit 1303 accumulates the process related data received in step S402 in the storage unit 1304.

  (Step S404) The data processing unit 1305 performs predetermined processing on the process related data received by the data receiving unit 1303, and forms new process related data. The configured process related data is stored in the storage unit 1304. The data processing unit 1305 may perform predetermined processing on the process related data received by the data receiving unit 1303, or reads out the process related data received in step S402 stored in the storage unit 1304 and performs predetermined processing. Processing may be performed. Here, as an example, it is assumed that process-related data to be processed by the data processing unit 1305 is designated in advance, and processing to be performed on the process-related data is also determined in advance.

  (Step S405) The data acquisition unit 1306 acquires one or more process-related data from the storage unit 1304. Here, it is assumed that the data acquisition unit 1306 acquires data for the entire period of the situation data received in step S402, for example.

  (Step S406) The first display unit 1307 displays the process related data acquired by the data acquisition unit 1306 in the first display width.

  (Step S407) The range designation receiving unit 1308 determines whether or not designation of a display target range that is a partial range in the process-related data displayed by the first display unit 1307 has been received. If accepted, the process proceeds to step S408, and if not accepted, the process returns to step S407.

  (Step S408) The first display unit 1307 displays, for example, displays the information indicating the display target range received in step S407 in association with the time-series information displayed in step S406.

  (Step S409) The display data acquisition unit 1309 acquires information indicating a display period which is an actual period corresponding to the display target range received in step S407. Specifically, the start time and end time of the time series information displayed by the first display unit 1307 with the first display width, and when the first display unit 1307 displays with the first display width. From the time axis coordinate where the end of the time axis direction of the series information is located, the coordinate of the time axis direction where the end of the time axis direction of the display target range received by the range designation receiving unit 1308, and the like are displayed. The start time and end time are calculated.

  (Step S410) The display data acquisition unit 1309 reads out and acquires process-related data within the display period calculated in step S409 among the plurality of process-related data stored in the storage unit 1304. Here, it is assumed that the types of the process-related data are specified in advance.

  (Step S411) The second display unit 1310 displays the process-related data acquired in step S410 in a second display width in association with the time axis. This second display width is specified in advance.

  (Step S412) The range designation receiving unit 1308 determines whether or not a change in the display target range has been received. If accepted, the process proceeds to step S408, and if not accepted, the process returns to step S412.

  In the flowchart of FIG. 4, the process ends when the power is turned off or the process ends.

  In addition, since operation | movement of the manufacturing apparatus 11 and the server apparatus 12 is well-known, description is abbreviate | omitted here.

  Hereinafter, a specific operation of the group management system including the data display device according to the present embodiment will be described. A conceptual diagram of the group management system is shown in FIG.

  Here, first, measurement data (situation data) on temperature, vibration, gas flow rate, etc. during operation of the manufacturing apparatus 11 is repeatedly measured at a sampling rate of 1 MHz, for example, and time data with a measurement start time set to 0 Assume that the information is transmitted from the manufacturing apparatus 11 to the server apparatus 12 in association with each other.

  The transmitted measurement data is assumed to be stored in the server device 12 in association with the time data.

Next, the instruction receiving unit 1301 of the data display device 13 receives 3000 × 10 ⁻⁶ seconds of the first measurement data and the second measurement data from the measurement data stored in the server device 12 from the user. Then, it is assumed that an instruction to acquire data for a period of up to 7000 × 10 ⁻⁶ seconds is received via an input unit such as a keyboard. The first and second measurement data may be any measurement data. Here, for convenience of explanation, it is assumed that the units of the measurement values of the first and second measurement data are the same unit.

The request information transmission unit 1302 transmits data in the period from 3000 × 10 ⁻⁶ seconds to 7000 × 10 ⁻⁶ seconds among the first and second data in accordance with the instruction received by the instruction reception unit 1301. Is transmitted to the server device 12.

The server device 12 reads out data of a period from 3000 × 10 ⁻⁶ seconds to 7000 × 10 ⁻⁶ seconds of the first and second data corresponding to the request signal transmitted from the data display device 13, and Transmit to the display device 13.

  The data receiving unit 1303 of the data display device 13 receives the first and second measurement data transmitted from the server device 12 and stores them in the storage unit 1304.

  Here, it is assumed that the data obtained by wavelet transforming the first and second measurement data is displayed in advance together with the first and second measurement data, and the data processing unit 1305 The first measurement data and the second measurement data stored in the storage unit 1304 are read out and wavelet transformed. Then, the process related data obtained by the wavelet transform is accumulated in the storage unit 1304. Since the wavelet transform process is a known technique, a description thereof will be omitted.

  Next, the data acquisition unit 1306 acquires process-related data for the first display unit 1307 to display from the storage unit 1304. Here, it is assumed that the first display unit 1307 displays in advance all the measurement data received by the data receiving unit 1303, and the data acquisition unit 1306 receives the first and second data received by the data receiving unit 1303. Data of all periods of the second measurement data is read out.

The first display unit 1307 forms a first display width graph in which the first measurement data read by the data acquisition unit 1306 and the second measurement data are superimposed along the time axis, and is not illustrated. Display using a display or the like. Here, the first display width is set in advance and is assumed to be 400 pixels, for example. Also, assume that the height of the graph is 160 pixels. Here, the unit of the horizontal axis is 10 ⁻⁶ seconds. In addition, here, the first and second measurement data are very large relative to the first display width, and all data cannot be displayed with a limited number of pixels in the graph. You may make it comprise a graph using the data which thinned out the measurement data.

  FIG. 5 is a display example of a graph configured by the first display unit 1307. Here, the graphs of the first and second measurement values are displayed in an overlapping manner. Note that only the graph 51 is a graph displayed by the first display unit 1307. Here, the x-axis is time and the y-axis is the value of measurement data. Graphs 52 to 55 are graphs displayed by the second display unit 1310. Here, it is assumed that no graph is displayed in the initial state. Here, it is assumed that the first display unit 1307 and the second display unit 1310 display images on the same display.

  Next, when the user operates the mouse or the like to move a pointer or the like displayed on the display to select a part of the range on the graph 51 displayed on the first display unit 1307, the range designation is accepted. The unit 1308 accepts designation of a display target range that is a partial range in the process-related data displayed by the first display unit 1307. Specifically, the range designation receiving unit 1308 receives the x-coordinate value of the range selected by the mouse operation or the like. Here, in order to simplify the description, it is assumed that the x coordinate on the left side of the graph displayed by the first display unit 1307 is “0” and the x coordinate on the right side is “400”. Assuming that the x coordinate on the left side of the received display target range is “160” and the x coordinate on the right side is “280”, the range specification receiving unit 1308 includes “x = 160” which is information for specifying the display target range and The value “x = 280” is accepted.

  The first display unit 1307 acquires the values of “x = 160” and “x = 280”, which are coordinate information specifying the display target range received by the range specification receiving unit 1308, as shown in FIG. The background color within the range sandwiched between the coordinates of the graph 51 is changed to a color different from that of the other areas and displayed again.

The display data acquisition unit 1309 acquires information on a period corresponding to the display target range from the values “x = 160” and “x = 280” that are information specifying the display target range received by the range specification receiving unit 1308. To do. Specifically, the range of the time axis of the graph displayed on the first display unit 1307 is a period from 3000 × 10 ⁻⁶ seconds to 7000 × 10 ⁻⁶ seconds, and this period is 400 pixels. Since it is displayed with the first display width, the display data acquisition unit 1309 calculates (7000−3000) × 10 ⁻⁶ seconds ÷ 400 pixels, and one pixel on the graph 51 is 10 × 10 ⁻ Calculate that it is ⁶ seconds. Then, using the time corresponding to this one pixel, the display data acquisition unit 1309 calculates the left end time and the right end time of the display target range. The time at the left end of the display target range calculated by the display data acquisition unit 1309 is (3000 + 160 × 10) × 10 ⁻⁶ seconds, and the time at the right end is (3000 + 280 × 10) × 10 ⁻⁶ seconds. Therefore, the period corresponding to the display target range is a period from 4600 × 10 ⁻⁶ seconds to 5800 × 10 ⁻⁶ seconds, and the display data acquisition unit 1309 includes the first and second measurement data in this period, Process-related data obtained by wavelet transforming these data is read from the storage unit 1304. Then, similarly to the first display unit 1307, a graph of a preset second display width along the time axis is configured using each of the read data. Here, it is assumed that the second display width is set in advance and is approximately the same size as the first display width, for example, 410 pixels. Then, the constructed graph is displayed on a display or the like. The display data acquisition unit 1309 may form a graph using data obtained by thinning out the process measurement data obtained by the first and second measurement data, wavelet transform, and the like as appropriate.

  FIG. 6 is a diagram illustrating a display example of a graph configured by the first display unit 1307 and the second display unit 1310. Similarly to FIG. 5, the graph 51 is a graph displayed by the first display unit 1307, and the graphs 52 to 55 are graphs displayed by the second display unit 1310. A graph 52 is a graph of first measurement data, a graph 53 is a graph of data obtained by wavelet transforming the first measurement data, a graph 54 is a graph of second measurement data, and a graph 55 is second measurement data. Is a graph of data obtained by wavelet transform.

  As shown in FIG. 6, in the graph displayed by the first display unit 1307, the data of the entire period is displayed among the first and second measurement data stored in the storage unit 1304. In addition, the range received by the range specification receiving unit 1308 is displayed as a region 61 having a background color different from that of the other regions. Further, in the graph displayed by the second display unit 1310, the data in the period corresponding to the region 61 in the graph displayed by the first display unit 1307 is larger than the width of the region 61. Display width, here, it is displayed with the same width as the first display width.

  By displaying in this way, the measurement data in the period corresponding to the range specified by the user on the graph displayed on the display or the like by the first display unit 1307 and the information obtained by wavelet transform in this period are expanded. Can be displayed. As a result, the details of the data are displayed in a graph and a finer analysis becomes possible. In addition, the entire first and second measurement data remains displayed on the first display unit 1307, and the range displayed on the second display unit 1310 is enlarged and displayed on the first display unit. Since 1307 is displayed in association with the first and second measurement data, the period of the data displayed in an enlarged manner by the second display unit 1310 is the total of the first and second measurement data. It is possible to visually grasp which part of the period it is. In particular, in recent years, values related to the state of a semiconductor process can be acquired at a higher frequency, so that details such as measurement data can be enlarged and displayed. Therefore, according to the present embodiment, while displaying the entire measurement data or the like on the first display unit 1307, the portion of the measurement data or the like for which details are desired to be viewed is efficiently and sensibly specified and enlarged. It becomes possible. Thereby, the whole and details, such as measurement data, can be displayed efficiently.

  In addition, since process related data such as a plurality of measurement data in a period corresponding to the display target range received by the range designation receiving unit 1308 is displayed by the second display unit 1310, a plurality of processes displayed by the second display unit 1310 are displayed. Periods of related data to be displayed can be made uniform, and a plurality of process related data can be easily compared.

  In addition, since a display target range can be designated on the graph of the first display unit 1307, it is easy to determine a portion to be enlarged and the operability is good.

  Next, an operation of dragging an end portion in the time axis direction of the region 51 indicating the display target range displayed on the first display unit 1307 with a mouse or the like displayed on the screen is performed as shown in FIG. When the pointer 71 is moved, the range designation receiving unit 1308 receives information on the display target range whose width has been changed. Along with this, the width of the region 51 indicating the display target range displayed on the first display unit 1307 is changed, and the period of measurement data and the like acquired by the display data acquisition unit 1309 is also changed. The unit 1310 displays measurement data corresponding to the area 51 whose width has been changed by dragging or the like.

  Further, in FIG. 6, when the pointer 71 is moved by performing an operation of dragging the central portion of the region 51 indicating the display target range displayed on the first display unit 1307 with a mouse or the like as shown in FIG. The range designation receiving unit 1308 receives information on the display target range whose position has been changed in the time axis direction. Along with this, the position in the time axis direction of the area 51 indicating the display target range displayed on the first display unit 1307 is changed, and the period of measurement data and the like acquired by the display data acquisition unit 1309 is also changed. The second display unit 1310 displays measurement data or the like corresponding to the region 51 whose position in the time axis direction has been changed by dragging or the like.

  As described above, the second display unit 1310 displays the second display width by operating the mouse with the width and position of the display target range displayed on the first display unit 1307. Since the period of data and the like can be changed, sensory operation is possible and operability is improved.

  As described above, according to the present embodiment, one or more time-series data related to the manufacturing apparatus 11 is displayed using the first display unit 1307, and a plurality of process-related data for a part of the period is displayed in the second display. Since the part 1310 is enlarged and displayed, the details of the time-series data regarding the semiconductor process are displayed in a graph, and a finer analysis is possible. In addition, since the first display unit 1307 displays the range displayed in an enlarged manner by the second display unit 1310 in association with the first and second measurement data, the second display unit 1310 displays the range. It is possible to visually grasp instantly which part of the entire first and second measurement data the period of the enlarged data is displayed. Thereby, the time series data regarding the semiconductor process can be appropriately displayed.

  In addition, since the plurality of process related data in the period corresponding to the display target range received by the range designation receiving unit 1308 is displayed by the second display unit 1310, the display target period is aligned, Process-related data can be displayed, and a plurality of process-related data can be easily compared.

  In the above-described embodiment, there is no limitation on the timing, trigger, or the like at which the data processing unit 1305 processes process-related data such as status data to form new process-related data. For example, when the range specification receiving unit 1308 receives the specification of the display target range, the process related data such as one or more status data within the display period corresponding to the display target range stored in the storage unit 1304 Then, a predetermined process such as wavelet transform may be performed to configure new process related data, and the configured process related data may be output to the display data acquisition unit 1309 or the like.

  Further, in the above embodiment, a data processing unit similar to the data processing unit 1305 is provided in the server device 12, and data processing in the server device 12 is performed on the situation data stored in the server device 12. The unit or the like performs a predetermined process to form new process related data, accumulates it in the storage unit (not shown) in the server device 12 together with the status data, and reads out the accumulated process related data to obtain a data display device. 13 may be transmitted.

  In addition, in the said embodiment, it does not ask | require about the display form of a display object range, etc. For example, as shown in FIG. 9, markers 91 and 92 are placed at time axis positions corresponding to the start time and end time of the display target range 61 in the graph 51 displayed by the first display unit 1307. By displaying, the first display unit 1307 may display the display target range.

(Embodiment 2)
In this embodiment, in the data display device described in the above embodiment, the data processing unit performs a predetermined process on the process related data acquired by the display data acquisition unit, and the process obtained by this process Related data is displayed.

  FIG. 10 is a block diagram illustrating a configuration of a group management system including the data display device according to the present embodiment. In the figure, the same reference numerals as those in FIG. 2 denote the same or corresponding parts.

  The data display device 23 includes an instruction reception unit 1301, a request information transmission unit 1302, a data reception unit 1303, a storage unit 1304, a data processing unit 2305, a data acquisition unit 1306, a first display unit 1307, a range designation reception unit 1308, display data. An acquisition unit 1309 and a second display unit 2310 are provided.

  Since the configuration of the data display device 23 other than the data processing unit 2305 and the second display unit 2310 is the same as that of the data display device of the above-described embodiment, detailed description thereof is omitted.

  The data processing unit 2305 performs predetermined arithmetic processing on one or more of the process related data acquired by the display data acquisition unit 1309. Then, the process related data acquired by the arithmetic processing is output to the second display unit 1310. The predetermined processing may be any processing, such as wavelet transformation or data standardization processing. Data standardization is a process for reducing the influence of data units and types. Further, what kind of processing is to be performed may be determined in advance, or may be designated according to an instruction received from a reception unit (not shown) or the like. Further, it does not matter which process related data among the process related data acquired by the display data acquisition unit 1309 is processed. The process-related data to be processed may be specified in any way, for example, the specification may be received from a user or the like via a reception unit (not shown). It may be set by default. Further, all process related data acquired by the display data acquisition unit 1309 may be processed. The data processing unit 2305 can be usually realized by an MPU, a memory, or the like. The processing procedure of the data processing unit 1305 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The second display unit 2310 associates the process-related data acquired by the display data acquisition unit 1309 and the process-related data obtained by the arithmetic processing by the data processing unit 2305 with the time axis, based on the width of the display target range. Is also displayed with a wide second display width. The second display unit 2310 displays the process related data acquired by the display data acquisition unit 1309 and the process related data calculated by the data processing unit 2305 as different graphs in different areas, for example, in windows. Alternatively, they may be displayed in a superimposed manner. Other configurations such as how to display the process-related data by the second display width are the same as those of the second display unit of the above embodiment, and thus description thereof is omitted.

  Next, the operation of the data display device 23 will be described using the flowchart of FIG. In the flowchart of FIG. 11, the same reference numerals as those in FIG. 4 indicate the same or corresponding processing steps, and description thereof is omitted here.

  (Step S1101) The data processing unit 2305 performs a predetermined process on one or more of the process related data acquired in step S410.

  (Step S1102) The second display unit 2310 associates the process-related data acquired in Step S410 and the process-related data obtained by performing the predetermined processing in Step S1101 with the second display width in association with the time axis. indicate.

  Hereinafter, a specific operation of the group management system including the data display device according to the present embodiment will be described. The conceptual diagram of the group management system is the same as FIG.

  Here, similarly to the specific example described in the first embodiment, the data receiving unit 1303 receives the first and second data as the process related data, and the first display unit 1307 receives the first measurement data. And the second measurement data are configured as a first display width graph 51 superimposed on the time axis and displayed as shown in FIG.

  When the user operates a mouse or the like to move a pointer or the like displayed on the display to select a part of the range on the graph 51 displayed on the first display unit 1307, the range designation receiving unit 1308 is displayed. The designation of a display target range that is a partial range in the process related data displayed by the first display unit 1307 is accepted.

  The display data acquisition unit 1309 acquires information on the display period corresponding to the display target range received by the range designation reception unit 1308, and reads the first measurement data and the second measurement data in this display period.

  Here, the data processing unit 2305 performs wavelet transform, which is a predetermined process, on the first measurement data and the second measurement data acquired by the display data acquisition unit 1309, respectively.

  Then, the data obtained by the wavelet transform by the data processing unit 2305, the first measurement data and the second measurement data acquired by the display data acquisition unit 1309, the second display unit 2310, here, A different graph is displayed with the same size as the first display width. The graph displayed in this way is the same as the specific example of the first embodiment as shown in FIG. For example, the first measurement data and the second measurement data acquired by the display data acquisition unit 1309 are the graph 52 and the graph 54, the graph obtained by wavelet transform of the first measurement data is the graph 53, and the second measurement data is A graph obtained by wavelet transform is a graph 55.

  In addition, since the process of changing the display in synchronization with the change of the display target range is the same as the specific example of the first embodiment, the description thereof is omitted.

  As described above, according to the present embodiment, the same effect as in the first embodiment can be obtained, and the data processing unit only needs to process the display target range of the measurement data. Can be reduced. In addition, by performing data processing at the time of display, it is possible to display process related data that has been processed in real time.

(Embodiment 3)
The data display device according to the present embodiment enables a plurality of display target ranges to be specified for one process related data, and a display period corresponding to each display target range of one process related data. Are displayed with the second display width.

  FIG. 12 is a block diagram illustrating a configuration of a group management system including the data display device according to the present embodiment. In the figure, the same reference numerals as those in FIG. 2 denote the same or corresponding parts.

  The data display device 33 includes an instruction reception unit 1301, a request information transmission unit 1302, a data reception unit 1303, a storage unit 3304, a data processing unit 1305, a data acquisition unit 3306, a first display unit 1307, a range designation reception unit 3308, display data. An acquisition unit 3309, a second display unit 3310, an analysis unit 3311, and a third display unit 3312 are provided.

  Since the configuration of the instruction receiving unit 1301, the request information transmitting unit 1302, the data receiving unit 1303, and the data processing unit 1305 of the data display device 33 is the same as that of the data display device of the first embodiment, a detailed description will be given. Omitted.

  The storage unit 3304 can store one process-related data that is time-series data related to the state of the semiconductor process. Except for the point that one process-related data can be stored, the configuration of the storage unit 3304 is the same as the configuration of the storage unit of the first embodiment, and a description thereof will be omitted.

  The data acquisition unit 3306 acquires one process related data from the storage unit 3304. Except for acquiring one process-related data, the configuration of the data acquisition unit 3306 is the same as that of the data acquisition unit of the first embodiment, and a description thereof will be omitted.

  The first display unit 3307 displays the one process-related data acquired by the data acquisition unit 3306 in a first display width in association with the time axis. In addition, the first display unit 3307 further displays information indicating a plurality of display target ranges received by a range designation receiving unit 3308 described later in association with one process related data displayed by the first display unit 3307. To do. Since the information indicating the display target range, the configuration for the display, and the like are the same as those of the first display unit of the first embodiment, description thereof is omitted here.

  Here, in the present embodiment, in particular, when the first display unit 3307 displays a plurality of process-related data with the first display width, for example, it is displayed in a plurality of graphs or a plurality of windows. The case where it is what is to be described will be described. To display a plurality is to display, for example, on a plurality of graphs or a plurality of windows. For example, a plurality of the same graphs showing one process related data are displayed. However, the widths of the plurality of graphs are not necessarily the same. For example, the first display unit 3307 displays one process-related data in n (n is an integer of 2 or more) graphs arranged at the same display time. At this time, the first display unit 3307 further displays information indicating a plurality of display target ranges received by the range designation receiving unit 3308, and a plurality of one process related items displayed by the first display unit 3307 each receiving a designation. The data may be displayed in association with each other. Specifically, the range designation receiving unit 3308 displays the graph displayed in the k (1 ≦ k ≦ n) th graph among the process related data displayed by the first display unit 3307. When the designation of the range is received, the first display unit 3307 displays information indicating the display target range in association with the kth graph.

  However, the first display unit 3307 may display one process-related data using only one graph or window. In this case, information indicating a plurality of display target ranges may be displayed in one graph or window. Since the configuration and the like of the first display unit 3307 other than those described above are the same as the configuration and the like of the first display unit of the first embodiment, description thereof will be omitted.

  The range designation accepting unit 3308 accepts designation of a plurality of display target ranges, which are a plurality of ranges, for one process related data displayed by the first display unit 3307. Specifically, when the first display unit 3307 displays a plurality of process-related data by a plurality of graphs or the like, the range designation receiving unit 3308 displays the one displayed by the first display unit 3307. The specification of the display target range is accepted for each process related data. For example, when one process-related data is displayed in n graphs, designation of a display target range is accepted for each graph. Note that it is preferable that the display target ranges that accept the designation are not the same range. In addition, when the first display unit 3307 displays only one process-related data by one graph or the like, the range designation receiving unit 3308 displays only one of the first display unit 3307. A plurality of different display target ranges may be received for the process related data. As a result of the range designation as described above, designation of a plurality of display target ranges is accepted for one process related data. Since the configuration other than the above is the same as that of the range designation receiving unit 1308 of the first embodiment, description thereof is omitted.

  The display data acquisition unit 3309 uses a plurality of display periods within a plurality of display periods, which are periods respectively corresponding to a plurality of display target ranges received by the range designation receiving unit 3308, from one process related data stored in the storage unit 3304. Get each process related data. One process related data is process related data displayed on the first display unit 3307. Except for the configuration for acquiring a plurality of process-related data, the display data acquisition unit 3309 is the same as the display data acquisition unit 1309 of the first embodiment, and a description thereof will be omitted.

  The second display unit 3310 displays the plurality of process related data acquired by the display data acquisition unit 3309 in association with the time axis with a second display width wider than the width of the display target range. For example, the second display unit 3310 individually displays a plurality of process related data using a plurality of graphs, windows, and the like. Alternatively, a plurality of these process related data may be displayed superimposed. Except for displaying a plurality of process-related data, the second display unit 3310 is the same as the second display unit 1310 of the first embodiment, and a description thereof will be omitted.

  The analysis unit 3311 performs a predetermined analysis on the plurality of data acquired by the display data acquisition unit 3309. The predetermined processing may be any processing, may be chaos time series analysis such as Wayland test, or may be other analysis processing such as multivariate analysis. For the Wayland test, see the literature “Richard Wayland et al.,“ Recognizing Determinism in Time Series ”, PHYSICAL REVIEW LETTERS, 1993. February 1, VOLUME 70, NUMBER 5, p. 580-582 ", which is a known technique and will not be described. What processing the analysis unit 3311 performs may be determined in advance, or may be specified according to an instruction received from a reception unit (not shown) or the like. Data obtained by analysis is temporarily stored in a storage medium (not shown), for example. The analysis unit 3311 can usually be realized by an MPU, a memory, or the like. The processing procedure of the analysis unit 3311 is usually realized by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The third display unit 3312 displays the analysis result of the analysis unit 3311. The analysis result is specifically data indicating a result obtained by analysis, a determination result, or the like. The third display unit 3312 may use the analysis result of the analysis unit 3311 to configure data for displaying the analysis result, such as a graph, and display data for displaying the analysis result. The display described here is a concept including display on a display or the like. The first display unit 1307 may be considered as including or not including a display device such as a display. The first display unit 1307 can be realized by display device driver software or display device driver software and a display device.

  Next, the operation of the data display device 33 will be described using the flowchart of FIG. In the flowchart of FIG. 13, the same reference numerals as those in FIG. 4 indicate the same or corresponding processing steps, and description thereof is omitted here. Here, a case will be described in which, when the designation of one display target range is received, the process related data in the display period corresponding to the display target range is displayed with the second display width.

  (Step S1301) The data acquisition unit 3306 acquires one process-related data from the storage unit 3304.

  (Step S1302) The first display unit 3307 displays a plurality of process-related data acquired by the data acquisition unit 3306 with a first display width.

  (Step S1303) The range designation receiving unit 3308 determines whether or not designation of a display target range, which is a partial range, has been received for one of the process related data displayed by the first display unit 3307. To do. If accepted, the process proceeds to step S1304. If not accepted, the process returns to step S1303.

  (Step S1304) The first display unit 3307 receives the designation of the display target range in Step S1303 from the process related data in which a plurality of pieces of information indicating the display target range received in Step S1303 are displayed in Step S1303. It is displayed in association with related data, for example, superimposed.

  (Step S1305) The display data acquisition unit 3309 acquires information indicating a display period which is an actual period corresponding to the display target range received in step S1304.

  (Step S1306) The display data acquisition unit 3309 reads out and acquires process-related data within the display period calculated in step S1305 from one process-related data stored in the storage unit 3304. The acquired process related data is stored in a storage medium (not shown) or the like in association with, for example, one display of process related data for which designation of a display target range has been accepted.

  (Step S1307) The second display unit 3310 displays the process-related data acquired in Step S1306 in a second display width in association with the time axis.

  (Step S1308) The analysis unit 3311 determines whether the range specification receiving unit 3308 has received specification of a plurality of display target ranges for one process related data. If accepted, the analysis becomes possible, so the process proceeds to step S1309. If not accepted, the process proceeds to step S1312.

  (Step S1309) The analysis unit 3311 determines whether to perform a predetermined analysis. The analysis unit 3311 may determine whether or not to perform the predetermined analysis. For example, when an reception unit (not illustrated) receives an instruction to perform analysis, the analysis unit 3311 may determine to perform analysis. Good. In step S1308, when a plurality of display target ranges are specified, it may be determined to perform analysis. If it is determined that analysis is to be performed, the process proceeds to step S1310. If it is determined that analysis is not to be performed, the process proceeds to step S1312.

  (Step S1310) The analysis unit 3311 performs a predetermined analysis on a plurality of process related data acquired by the display data acquisition unit 3309 from one process related data.

  (Step S1311) The third display unit 3312 displays the analysis result of step S1310.

  (Step S1312) The range designation receiving unit 3308 determines whether a change or addition of the display target range has been received. If accepted, the process returns to step S1304. If not accepted, the process returns to step S1309.

  Hereinafter, a specific operation of the group management system including the data display device according to the present embodiment will be described. The conceptual diagram of the group management system is the same as FIG. Here, in order to simplify the description, the case where the processing by the data processing unit 1305 is not performed will be described as an example.

  Here, similarly to the specific example of the first embodiment, it is assumed that the data receiving unit 1303 receives process-related data and accumulates it in the storage unit 3304. However, here, it is assumed that only the first measurement data that is one process-related data is received and accumulated.

  The data acquisition unit 3306 reads first measurement data that is one process related data accumulated in the storage unit 3304.

  The first display unit 3307 comprises a plurality of graphs of the first display width representing the first measurement data with the time axis as the horizontal axis, here five examples, and a monitor screen as shown in FIG. To display. In FIG. 14, graphs 331 to 335 are five graphs of the first measurement data. The five graphs 331 to 335 are the same graph.

  Next, when the user operates the mouse or the like to move a pointer or the like displayed on the display and selects a part of the range on the graph 331 displayed by the first display unit 3307, the range designation is accepted. The unit 3308 accepts designation of a display target range that is a partial range in the process related data displayed by the first display unit 3307. When the specification of the display target range is received for the graph 331, the first display unit 3307 displays the region 331a of the period 331a corresponding to the display target range on the graph 331 for which the range specification receiving unit 1308 has received the display target range. Change the background color to a different color from other areas and redisplay. Then, the display data acquisition unit 3309 reads and temporarily stores the first measurement data within the display period corresponding to this display target range. The second display unit 3310 displays the first measurement data read by the display data acquisition unit 3309 as a graph with the second display width. Here, it is preferable that the graph displayed by the data read from the display target information is displayed adjacently, for example, so that the correspondence relationship with the graph for which designation of the display target range is accepted can be understood. Note that the processing for receiving the display target range, the processing for displaying the graph of the second display width, and the like are the same as in the above specific example.

  By repeating the above processing, for all the graphs 331 to 335 displayed by the first display unit 3307, the range specification receiving unit 3308 receives the specification of the display target range, and the display data acquisition unit 3309 It is assumed that data within the display target range specified for the graphs 331 to 335 is acquired, and the second display unit 3310 displays the graphs 331b to 335b having the second display width. A display example in this case is shown in FIG. The areas 331a to 335a are areas indicating display target ranges respectively designated in the graphs 331 to 335. Graphs 331b to 335b are graphs of data within the ranges indicated by the regions 331a to 335a in the graphs 331 to 335, respectively.

  By making it possible to display in this way, it becomes easy to evaluate and compare data in different areas in one process related data which is a single time series data. Thereby, it is possible to easily recognize an abnormal portion in a single process-related data.

  At this time, the display data acquisition unit 3309 acquires a plurality of process-related data from a plurality of display target ranges specified in the first measurement data, and temporarily stores them in a storage medium (not shown). .

  Next, it is assumed that the user gives an instruction to perform a predetermined analysis on a plurality of data acquired from a plurality of display target ranges specified in the first measurement data by operating a menu screen or the like (not shown). . Here, it is assumed that the predetermined analysis is a Wayland test. The analysis unit 3311 reads a plurality of first measurement data acquired and accumulated from the first measurement data according to a plurality of display designation ranges by the display data acquisition unit 3309 from a storage unit (not shown), and executes a wayland test. To do. The third display unit 3312 displays the result of the Wayland test as a graph.

  FIG. 16 is a diagram illustrating the results of the Wayland test. FIG. 16 is a display example in which a graph 16 indicating the result of the Wayland test is added to the display example shown in FIG.

  In this way, by performing the Wayland test on a plurality of data acquired from a plurality of display designation ranges in one process-related data, data indicating the relationship between the embedding dimension and the translation error estimated value can be acquired. it can. In addition, when the display specification range is changed, the analysis is performed again using the process-related data acquired from the changed display specification range, and the analysis result is updated as needed, so that the embedding dimension and translation error can be updated. Data indicating the relationship with the estimated value can be displayed in real time.

  In addition, analysis results of data in multiple areas of one process-related data can be displayed side by side with the data of multiple areas in one process-related data or one process-related data, so that comparisons between data can be made. It is easy, and it is possible to easily recognize abnormalities in data.

  Note that the process of changing the display in synchronization with the change of the display target range is the same as the specific example of the first embodiment, and thus the description thereof is omitted.

  As described above, according to the present embodiment, the same effect as in the first embodiment can be obtained, and data acquired from a plurality of areas of one process-related data can be displayed with the second display width. Comparison of data within one process-related data is facilitated, and abnormality detection or the like can be performed efficiently.

  Further, by displaying the analysis results for data acquired from a plurality of areas of one process-related data, it is possible to detect an abnormality from a combination of the analysis results and time-series data.

  In addition, about the structure of this Embodiment, it can apply also about the structure of the said Embodiment 2, and there exists an effect similar to the above also in such a case.

(Embodiment 4)
The data display device according to the present embodiment detects a singular point from one of the process related data, and accepts information indicating a period during which the singular point is detected as information indicating a display target range. .

  FIG. 17 is a block diagram illustrating a configuration of a group management system including a data display device according to the present embodiment. In the figure, the same reference numerals as those in FIG. 2 denote the same or corresponding parts.

  The data display device 43 includes an instruction reception unit 1301, a request information transmission unit 1302, a data reception unit 1303, a storage unit 1304, a data processing unit 1305, a data acquisition unit 1306, a first display unit 1307, a range designation reception unit 4308, display data. An acquisition unit 1309, a second display unit 1310, a detection unit 4311, and a pattern storage unit 4312 are provided.

  Since the configuration of the data display device 43 other than the range designation reception unit 4308, the detection unit 4311, and the pattern storage unit 4312 is the same as that of the data display device of the first embodiment, detailed description thereof is omitted.

  The detection unit 4311 detects a singular point from one of the process related data acquired by the data acquisition unit 1306. A singular point in process-related data is a point that exhibits different characteristics from others. The singular point is, for example, a portion where an abnormality has occurred. The process-related data that is a target for detecting a singular point is usually data that is designated in advance, and it is preferable that the singular point is easily detected. The detection unit 4311 may detect any singular point from one process-related data. As an algorithm for detecting a singular point from one process related data, for example, an abnormal waveform or the like manually searched by a user in advance is registered, and the correlation between the registered waveform and the process related data is taken, There are some that determine that the part with high correlation is a singular point. Such a highly correlated part can be detected by using, for example, a cross-correlation function. Since the cross-correlation function is a known technique, a description thereof will be omitted. In addition, when the process-related data is determined to be normal if the value falls within a certain range, the value of the process-related data is compared with the threshold value, and the value is outside the range specified by the threshold value. When the value of is detected, it may be determined as a singular point. The detection unit 4311 may detect a singular point from one process-related data stored in the storage unit 1304, or may detect a singular point from one of the process-related data acquired by the data acquisition unit 1306. good. Then, the detection unit 4311 acquires information indicating a period in which a singular point has occurred, and outputs the information to the range designation reception unit 4308. The period in which the singular point is generated may be a period in which the singular point is detected, or may be a predetermined period including before and after the time at which the singular point is detected or the period. For example, as described above, when a singular point is detected by correlation with a waveform pattern, if a portion having a correlation with the waveform pattern is detected in the process-related data, the period in which this singular point is detected is set. The indicated information may be received as information indicating a period in which a singular point has occurred. In addition, when the time at which a singular point occurs is detected, information indicating a period obtained by adding a predetermined or indefinite predetermined period before and after the detected time (for example, a time stamp) You may accept as information to show. The information indicating the period may be a combination of information indicating the time of the start point and end point of the period, or information specifying the time of the start point and intermediate point of the period and the length of the period, as long as the period can be indicated. good. Here, as an example, a case where a singular point is detected by correlation with a waveform registered in advance will be described. It is assumed that the waveform registered in advance is stored in a pattern storage unit 4312 described later. The detection unit 4311 can be usually realized by an MPU, a memory, or the like. The processing procedure of the detection unit 4311 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The pattern storage unit 4312 stores a waveform pattern indicating a singular point that is read when the detection unit 4311 detects a singular point. There may be a plurality of waveform patterns. The pattern storage unit 4312 may be a non-volatile recording medium or a volatile recording medium.

  The range designation receiving unit 4308 receives information indicating the period of occurrence of the singular point detected by the detection unit 4311 as information for specifying the display target range. It should be noted that the range designation receiving unit 4308 is the range designation receiving unit 4308 of the first embodiment, except that the information indicating the period of occurrence of the singular point output by the detection unit 4311 is received as information specifying the display target range. Since it is the same as that, description is abbreviate | omitted.

  Next, the operation of the data display device 43 will be described using the flowchart of FIG. In the flowchart of FIG. 11, the same reference numerals as those in FIG. 4 indicate the same or corresponding processing steps, and description thereof is omitted here.

  (Step S1801) The detection unit 4311 reads waveform pattern data stored in the pattern storage unit 4312.

  (Step S1802) The detection unit 4311 acquires one process-related data designated in advance among the process-related data stored in the storage unit 3304.

  (Step S1803) The detection unit 4311 obtains a correlation between the process-related data acquired in Step S1802 and the waveform data acquired in Step S1801. For example, the correlation can be calculated using a cross-correlation function or the like.

  (Step S1804) The detection unit 4311 determines whether or not data having a high correlation with the waveform data is detected in step S1803. For example, it is determined whether or not the value indicating the correlation calculated in step S1803 is equal to or greater than a threshold. If the value is equal to or greater than the threshold, it is determined that the correlation is high. If highly correlated data is detected, the process proceeds to step S1805. If not detected, the process ends. When highly correlated data is detected, this detected portion is a singular point.

  (Step S1805) The detection unit 4311 acquires and outputs information indicating a period in which a singular point has occurred. The information indicating the period in which the singular point occurs may be information indicating the period including the singular point, and may be information indicating the time or period in which the singular point is detected, and includes this time or period. It may be a period before and after. For example, it may be information indicating a period in which the comparison with the waveform data is performed in step S1804, or may be a period in which a predetermined period is added before or after the period in which the comparison is performed. For example, the detection unit 4311 uses information indicating a period of a predetermined length centered on a range determined to have a correlation with a waveform pattern in the process-related data as information indicating a period in which a singular point has occurred. Get as. Also, the time at the center of the range determined to have a correlation with the waveform pattern in the process-related data is acquired as the time at which the singular point is generated, and a period of a predetermined length centered on this time is obtained. The information shown may be received as information specifying the display target range.

  (Step S1806) The range designation receiving unit 4308 receives information indicating the period of occurrence of the singular point detected by the detection unit 4311 as information for specifying the display target range. Then, the process proceeds to step S405.

  (Step S1807) The first display unit 4307 displays, for example, displays the information indicating the display target range received in Step S1806 in association with the time series information displayed in Step S406. Then, the process proceeds to step S409.

  In this flowchart, the operation is finished after the process of step S411. However, after the process of step S411, the data after detecting the singular point is also processed after step S1803 in accordance with an instruction from the user or the like. You may make it perform the process of. Thereby, for example, an abnormality that has occurred thereafter can also be detected.

  Hereinafter, a specific operation of the group management system including the data display device according to the present embodiment will be described. The conceptual diagram of the group management system is the same as FIG.

  Here, it is assumed that the data receiving unit 1303 receives the first and second measurement data as process-related data and accumulates the received data in the storage unit 1304 as in the first embodiment. . In addition to this, it is assumed that the data receiving unit 1303 receives third measurement data which is one of the process related data and accumulates it in the storage unit 1304. Note that the third measurement data is data of another system measured at the same time as the first and second measurement data.

  The data processing unit 1305 reads out the first measurement data and the second measurement data stored in the storage unit 1304, performs wavelet transform, and stores process-related data obtained by the wavelet transform. It is assumed that it has accumulated in.

  FIG. 19 is a diagram showing an example of a waveform pattern stored in the pattern storage unit 4312 and used for singularity detection. This waveform pattern is data for a predetermined period before and after the point where an abnormality in the semiconductor manufacturing process or the like is detected in the same measurement data as the above-mentioned third measurement data measured in the past. Is obtained and represented by a waveform. Here, an example will be described in which the detection unit 4311 performs processing for detecting, as a singular point, a location where an abnormality in the third measurement data is considered to occur using this waveform pattern.

  First, the detection unit 4311 reads the waveform pattern stored in the pattern storage unit 4312.

  Next, the detection unit 4311 reads the third measurement data from the storage unit 1304 and temporarily stores it in a memory, a buffer, or the like.

  The detection unit 4311 correlates the third measurement data temporarily stored in a memory or the like and the waveform pattern read from the pattern storage unit 4312. Since the correlation calculation method is a known technique, a description thereof is omitted here.

  FIG. 20 is a graph illustrating an example of third measurement data. Assume that the detection unit 4311 determines that the location of the region 20 is highly correlated based on the comparison with the waveform pattern shown in FIG. 19 read from the pattern storage unit 4312.

  When a portion having a high correlation with the waveform pattern read from the pattern storage unit 4312 is detected in the third measurement data, this indicates a period in which a waveform determined to have a high correlation exists in the third measurement data. Information is acquired from the time stamp of the third measurement data. And using the information which shows the acquired period, the information of the start time and end time of the predetermined period centering on this period, here a period of 60 ms, is acquired. Then, information indicating the acquired period is transmitted to the range designation receiving unit 4308. For example, it is assumed that the start time acquired by the detection unit 4311 is “1 second 270 milliseconds” and the end time is “1 second 330 milliseconds”.

  The range designation receiving unit 4308, as information for designating the display target range, “1 second 270 milliseconds”, which is the start time information acquired by the detection unit 4311, and “1 second 330 milliseconds”, which is the end time information. Accept.

  Next, the data acquisition unit 1306 reads the first measurement data and the second measurement data from the storage unit 1304 as in the specific example of the first embodiment. And the 1st display part 1307 comprises the graph of the 1st display width which overlap | superposed the 1st measurement data which the data acquisition part 1306 read, and the 2nd measurement data along the time axis. Output. At this time, in this graph, the background color of the period indicating the display target range acquired by the display data acquisition unit 4308 is displayed in a different color from other regions.

  In addition, the display data acquisition unit 1309 is configured so that the range designation receiving unit 4308 uses each of the first measurement data, the second measurement data, and the data obtained by wavelet transforming these data stored in the storage unit 1304. The information within the period indicated by the received period information indicating the display target range is acquired. That is, information of a period in which the start time is “1 second 270 milliseconds” and the end time is “1 second 330 milliseconds” is acquired from each data. Then, the second display unit 1310 displays each data acquired by the display data acquisition unit 1309 as an individual graph.

  FIG. 21 is a diagram illustrating a display example of a graph displayed on the monitor or the like by the first display unit 1307 and the second display unit 1310. The graph 21a is data obtained by superimposing the first measurement data and the second measurement data displayed by the first display unit 1307, and the region 211 indicates a period corresponding to the display target range. Graphs 21b to 21e are data displayed by the second display unit 1310. The graph 21b is a graph within a period corresponding to the display target range of the first measurement data. The graph 21c is a graph within a period corresponding to the display target range of data obtained by wavelet transforming the first measurement data. The graph 21d is a graph within a period corresponding to the display target range of the second measurement data. The graph 21e is a graph within a period corresponding to the display target range of data obtained by wavelet transforming the second measurement data.

  As described above, in this specific example, the period in which the abnormality that is a singular point has occurred is automatically detected from the third data, and the first and second measurement data, etc. within the detected period are expanded. Can be displayed. Therefore, it is not necessary for the user to search for a location where an abnormality has occurred and to specify this location as a display target range. For this reason, a user's work can be reduced. Further, it is possible to eliminate leakage due to a user's mistake when searching for a location where an abnormality has occurred, and to improve reliability when analyzing data.

  As described above, according to the present embodiment, the same effect as in the first embodiment is obtained, a singular point is detected from one of the process-related data, and information indicating the period in which the singular point is generated is displayed. By using it as a range, information indicating the display target range can be automatically acquired. This eliminates the need for the user to specify the display target range, thereby reducing the user's labor. In addition, the ability to automatically detect singular points that are considered appropriate to be displayed in the second display width eliminates the detection omissions that occur when humans detect singular points. Can improve the reliability.

  In addition, about the structure of this Embodiment, it can apply also to the structure of the said Embodiment 2 and Embodiment 3, and there exists an effect similar to the above also in such a case.

  In each of the above embodiments, each process (each function) may be realized by centralized processing by a single device (system), or by distributed processing by a plurality of devices. May be.

  In each of the above embodiments, each component may be configured by dedicated hardware, or a component that can be realized by software may be realized by executing a program. For example, each component can be realized by a program execution unit such as a CPU reading and executing a software program recorded on a recording medium such as a hard disk or a semiconductor memory.

  The software that realizes the data display device in each of the above embodiments is a program as described below. That is, the program includes a data acquisition unit that acquires one or more process-related data from a storage unit that can store a plurality of process-related data that is time-series data related to a state during processing of a semiconductor process, and the data A first display unit that displays one or more process-related data acquired by the acquisition unit in a first display width in association with a time axis; and one of the process-related data displayed by the first display unit Display data for acquiring process-related data within a display period that is a period corresponding to the display target range from each of the plurality of process-related data, and a range specification receiving unit that receives specification of a display target range that is a part range A plurality of process-related data within the display period acquired by the acquisition unit and the display data acquisition unit in association with a time axis, the display The first display unit displays information indicating the display target range received by the range designation receiving unit, the first display unit displaying information with the second display width wider than the width of the elephant range. A program for further displaying in association with the one or more process-related data displayed by the section.

  The program also includes a data acquisition unit that acquires the one process-related data from a storage unit that can store one process-related data that is time-series data related to a state at the time of processing a semiconductor process; One process related data acquired by the data acquisition unit is displayed with a first display width in association with a time axis, and about one process related data displayed by the first display unit, A range designation accepting unit that accepts designation of a plurality of display target ranges that are a plurality of ranges, and a plurality of processes in a plurality of display periods that are periods respectively corresponding to the plurality of display target ranges from the one process-related data A display data acquisition unit for acquiring related data, and a plurality of process related data acquired by the display data acquisition unit in association with a time axis, And a second display unit that displays a second display width wider than the width of the display target range, wherein the first display unit includes a plurality of programs received by the range designation receiving unit. The program further displays information indicating the display target range in association with the one process-related data displayed by the first display unit.

  In the program, the functions realized by the program do not include functions that can be realized only by hardware. For example, a function that can be realized only by hardware such as a modem or an interface card in an acquisition unit that acquires information or an output unit that outputs information is not included in the function realized by the program.

  The program may be executed by being downloaded from a server or the like, and a program recorded on a predetermined recording medium (for example, an optical disk such as a CD-ROM, a magnetic disk, a semiconductor memory, or the like) is read out. May be executed by

  Further, the computer that executes this program may be singular or plural. That is, centralized processing may be performed, or distributed processing may be performed.

  FIG. 22 is a schematic diagram showing an example of the external appearance of a computer that executes the program and realizes the data display device according to the embodiment. The above-described embodiment is realized by computer hardware and a computer program executed on the computer hardware.

  In FIG. 22, a computer system 100 includes a computer 101 including a CD-ROM (Compact Disk Read Only Memory) drive 105, an FD (Flexible Disk) drive 106, a keyboard 102, a mouse 103, and a monitor 104.

  FIG. 23 is a diagram illustrating a computer system. 23, in addition to the CD-ROM drive 105 and the FD drive 106, a computer 101 includes a CPU (Central Processing Unit) 111, a ROM (Read Only Memory) 112 for storing a program such as a bootup program, A CPU (Random Access Memory) 113 that is connected to the CPU 111 and temporarily stores application program instructions and provides a temporary storage space, a hard disk 114 that stores application programs, system programs, and data, a CPU 111 and a ROM 112. Etc. to each other. The computer 101 may include a network card (not shown) that provides connection to the LAN.

  A program for causing the computer system 100 to execute the function of the data display device according to the above embodiment is stored in the CD-ROM 121 or FD 122, inserted into the CD-ROM drive 105 or FD drive 106, and transferred to the hard disk 114. May be. Instead, the program may be transmitted to the computer 101 via a network (not shown) and stored in the hard disk 114. The program is loaded into the RAM 113 at the time of execution. The program may be loaded directly from the CD-ROM 121, the FD 122, or the network.

  The program does not necessarily include an operating system (OS) or a third-party program that causes the computer 101 to execute the functions of the data display device according to the above-described embodiment. The program may include only a part of an instruction that calls an appropriate function (module) in a controlled manner and obtains a desired result. How the computer system 100 operates is well known and will not be described in detail.

  Further, in each of the above embodiments, it goes without saying that two or more communication means (request information transmission unit, data reception unit, etc.) existing in one device may be physically realized by one medium. .

  The present invention is not limited to the above-described embodiments, and various modifications are possible, and it goes without saying that these are also included in the scope of the present invention.

  As described above, the data display device according to the present invention is suitable as a device for displaying a plurality of process-related data that are time series related to the state of processing of a semiconductor process. It is useful as an apparatus that displays the images side by side.

The figure which shows the conceptual diagram of the group management system in Embodiment 1 of this invention. Block diagram of the group management system Diagram showing an example of the same manufacturing equipment Flow chart for explaining the operation of the data display device Figure showing the display example Figure showing the display example The figure for demonstrating operation with respect to the data display apparatus The figure for demonstrating operation with respect to the data display apparatus Figure showing the display example Block diagram of a group management system in Embodiment 2 of the present invention Flow chart for explaining the operation of the data display device Block diagram of group management system in Embodiment 3 of the present invention Flow chart for explaining the operation of the data display device Figure showing the display example Figure showing the display example Figure showing the display example Block diagram of group management system in Embodiment 4 of the present invention Flow chart for explaining the operation of the data display device The figure which shows an example of the waveform pattern stored in the pattern storage part of the data display device The figure which shows an example of the 3rd data which the same data display apparatus stores Figure showing the display example Schematic diagram showing an example of the appearance of the computer system in the embodiment The figure which shows an example of a structure of the computer system in the embodiment

Claims (14)

A storage unit capable of storing a plurality of process-related data, which are time-series data related to the state at the time of processing of a semiconductor process;
A data acquisition unit for acquiring one or more process-related data from the storage unit;
A first display unit that displays one or more process-related data acquired by the data acquisition unit with a first display width in association with a time axis;
A detection unit for detecting a singular point from one of the process-related data acquired by the data acquisition unit;
The display unit receives a designation of a display target range that is a partial range in the process-related data displayed by the first display unit, and displays information indicating a period of occurrence of a singular point detected by the detection unit. A range designation accepting unit that accepts information for designating a target range ;
A display data acquisition unit that acquires process related data within a display period that is a period corresponding to the display target range, from each of the plurality of process related data;
A plurality of process-related data in the display period acquired by the display data acquisition unit, a second display unit that displays a second display width wider than the width of the display target range in association with a time axis; Comprising
The first display unit is
A data display device for further displaying information indicating the display target range received by the range specification receiving unit in association with the one or more process related data displayed by the first display unit. A storage unit capable of storing one process-related data, which is time-series data related to a state at the time of processing of a semiconductor process;
A data acquisition unit for acquiring the one process-related data from the storage unit;
A first display unit that displays one process-related data acquired by the data acquisition unit in a first display width in association with a time axis;
A detection unit for detecting a singular point from one of the process-related data acquired by the data acquisition unit;
For one process related data displayed by the first display unit, while receiving designation of a plurality of display target ranges that are a plurality of ranges, information indicating a period of occurrence of singular points detected by the detection unit, A range designation accepting unit that accepts information for designating the display target range ;
A display data acquisition unit that acquires a plurality of process related data in a plurality of display periods that are periods respectively corresponding to the plurality of display target ranges from the one process related data;
A plurality of process-related data acquired by the display data acquisition unit, a second display unit that displays a second display width wider than the width of the display target range in association with a time axis;
The first display unit is
A data display device for further displaying information indicating a plurality of display target ranges received by the range specification receiving unit in association with the one process related data displayed by the first display unit. The first display unit displays a plurality of process-related data acquired by the data acquisition unit with a first display width in association with a time axis,
The range designation accepting unit accepts designation of a display target range for each of the one process-related data displayed by the first display unit.
The display data acquisition unit acquires, from the one process related data, a plurality of process related data corresponding to a plurality of display target ranges received by the range specification receiving unit,
The second display unit displays a plurality of process-related data acquired by the display data acquisition unit in a second display width wider than the width of the display target range in association with a time axis,
The first display unit corresponds to information indicating the plurality of display target ranges received by the range specification receiving unit, respectively, corresponding to the plurality of the one process related data displayed by the first display unit that receives the specification. The data display device according to claim 2, further displaying. An analysis unit that performs a predetermined analysis on the plurality of data acquired by the display data acquisition unit;
The data display device according to claim 3, further comprising a third display unit that displays an analysis result of the analysis unit. A data processing unit that performs predetermined arithmetic processing on one or more of the process related data acquired by the display data acquisition unit;
The second display unit is
The process-related data acquired by the display data acquisition unit and the process-related data obtained by calculation processing by the data processing unit are associated with a time axis, and a second display wider than the width of the display target range 2. The data display device according to claim 1, wherein the data display device displays the width.   The data display device according to claim 1, wherein the range specification receiving unit receives the specification of the display target range by an operation using an instruction device for process related data displayed by the first display unit. The first display unit displays information indicating the display target range so as to overlap the process related data displayed by the first display unit,
The range designation receiving unit
The data display device according to claim 1, wherein the display target range is specified according to an operation of moving and changing a width using an instruction device with respect to information indicating the display target range displayed by the first display unit. The data display device according to claim 1, wherein the singular point detected by the detection unit is displayed with the second display width. A storage unit capable of storing a plurality of process-related data, which is time-series data related to a state at the time of processing of a semiconductor process, a data acquisition unit, a first display unit, a range designation reception unit, a display data acquisition unit, and a second A data display method processed by a display unit and a detection unit ,
A data acquisition step in which the data acquisition unit acquires one or more process related data from the storage unit;
Said first display unit, one or more process-related data acquired by the data acquisition step, a first display step of displaying in a first display width in association with a time axis,
The detecting unit detecting a singular point from one of the process related data acquired by the data acquiring unit;
The range designation accepting unit accepts designation of a display target range that is a partial range in the process-related data displayed in the first display step, and a period in which a singular point detected by the detecting unit is generated A range designation accepting step for accepting information indicating the display target range as information ,
The display data acquiring unit acquires, from each of the plurality of process related data, process related data within a display period that is a period corresponding to the display target range;
The second display unit displays a plurality of process related data in the display period acquired in the display data acquisition step in a second display width wider than the display target range in association with a time axis. A second display step,
The first display unit displays information indicating the display target range received in the range designation receiving step in association with at least one of the one or more process-related data displayed by the first display unit. A data display method further comprising: A storage unit that can store one process-related data that is time-series data related to the processing state of the semiconductor process, a data acquisition unit, a first display unit, a range designation reception unit, a display data acquisition unit, A data display method processed by the two display unit and the detection unit ,
A data acquisition step in which the data acquisition unit acquires the one process-related data from the storage unit;
A first display step in which the first display unit displays the one process-related data acquired in the data acquisition step in a first display width in association with a time axis;
The detecting unit detecting a singular point from one of the process related data acquired by the data acquiring unit;
The range designation accepting unit accepts designation of a plurality of display target ranges that are a plurality of ranges for the one process related data displayed in the first display step, and generation of a singular point detected by the detecting unit A range designation accepting step for accepting information indicating the selected period as information for designating the display target range ;
The display data acquisition unit acquires, from the one process related data, a plurality of process related data in a plurality of display periods that are periods respectively corresponding to the plurality of display target ranges;
Second display step in which the second display unit displays the plurality of process related data acquired in the display data acquisition step in a second display width wider than the width of the display target range in association with the time axis. And comprising
The first display unit further includes a step of displaying information indicating a plurality of display target ranges received in the range designation receiving step in association with the one process related data displayed by the first display unit. Data display method. The data display method according to claim 9 or 10, wherein a singular point detected by the detection unit is displayed in the second display width. Computer
A data acquisition unit that acquires one or more process-related data from a storage unit that can store a plurality of process-related data that is time-series data related to the state of the semiconductor process;
A first display unit that displays one or more process-related data acquired by the data acquisition unit with a first display width in association with a time axis;
A detection unit for detecting a singular point from one of the process-related data acquired by the data acquisition unit;
The display unit receives a designation of a display target range that is a partial range in the process-related data displayed by the first display unit, and displays information indicating a period of occurrence of a singular point detected by the detection unit. A range designation accepting unit that accepts information for designating a target range ;
A display data acquisition unit that acquires process related data within a display period that is a period corresponding to the display target range, from each of the plurality of process related data;
Functions as a second display unit that displays a plurality of process-related data in the display period acquired by the display data acquisition unit with a second display width wider than the width of the display target range in association with a time axis A program for
The first display unit is
A program for further displaying information indicating the display target range received by the range specification receiving unit in association with at least one of the one or more process related data displayed by the first display unit. Computer
A data acquisition unit for acquiring the one process-related data from a storage unit in which the one process-related data that is time-series data relating to a state at the time of processing of the semiconductor process can be stored;
A first display unit that displays one process-related data acquired by the data acquisition unit in a first display width in association with a time axis;
A detection unit for detecting a singular point from one of the process-related data acquired by the data acquisition unit;
For one process related data displayed by the first display unit, while receiving designation of a plurality of display target ranges that are a plurality of ranges, information indicating a period of occurrence of singular points detected by the detection unit, A range designation accepting unit that accepts information for designating the display target range ;
A display data acquisition unit that acquires a plurality of process related data in a plurality of display periods that are periods respectively corresponding to the plurality of display target ranges from the one process related data;
To function as a second display unit that displays a plurality of process-related data acquired by the display data acquisition unit with a second display width wider than the display target range in association with a time axis. The program of
The first display unit is
A program for further displaying information indicating a plurality of display target ranges received by the range designation receiving unit in association with the one process related data displayed by the first display unit. The program according to claim 12 or 13, wherein the singular point detected by the detection unit is displayed in the second display width.