JP4771855B2 - Server apparatus and program - Google Patents

Description

  The present invention relates to, for example, a group management system, a server device, and the like including two or more manufacturing apparatuses that perform a predetermined process on a substrate to be processed and a server device connected to the two or more manufacturing apparatuses.

  In a conventional group management system, a measurement data processing method in a group management system of a semiconductor manufacturing apparatus capable of automatically and accurately processing data sent from a measuring instrument is realized (for example, see Patent Document 1). In this measurement data processing method, various measurement data transmitted from the measuring device to the measuring device communication unit of the group management unit of the group management system are received. In this measurement data processing method, a calculation formula for processing the measurement data is registered in advance, and when the measurement data is received, the measurement data is stored in a measurement data reception buffer, and the recipe name that the measurement data has The calculation formula having at least one same recipe name suitable for processing the measurement data is selected from the registered calculation formulas and stored in the calculation formula storage buffer, and the stored measurement data Is applied to the selected calculation formula, and the calculation result is stored in the processed data storage buffer.

  In addition, the conventional group management system for semiconductor manufacturing apparatuses has a function of displaying time-series information (hereinafter referred to as a chart) measured by the semiconductor manufacturing apparatus. In this chart, information on a plurality of semiconductor manufacturing apparatuses managed by the group management system was displayed. The conventional group management system has a function called FDC (fault detection and classification) that performs abnormality detection using a chart and then performs abnormality classification.

That is, in the conventional group management system, after an abnormality is detected in the inspection target group (period, device group, recipe group, and / or parameter group) set by the user, all inspection data of the inspection target group is captured, and the user is abnormal I was analyzing. Further, as an abnormality analysis technique when an abnormality occurs, there are analysis techniques using an SPC (univariate abnormality detection) chart, a correlation (bivariate abnormality detection) chart, and an MD (multivariate abnormality detection) chart.
Japanese Patent Laid-Open No. 11-354395 (first page, FIG. 1 etc.)

  However, in the conventional group management system, in the abnormality analysis after detecting the abnormality, since all the inspection data of the inspection target group was displayed, which manufacturing apparatus became abnormal in what process, Or, it was impossible to immediately analyze and know which recipe is involved in the abnormality. In particular, when several tens to several hundreds of manufacturing apparatuses are connected to the server apparatus, the above abnormality analysis is very difficult.

  The server device according to the first aspect of the present invention includes a plurality of manufacturing apparatuses that perform a predetermined process on a substrate to be processed and a server device connected to the plurality of manufacturing apparatuses, and performs an abnormality analysis after detecting an abnormality. And a time series information about information measured by the plurality of manufacturing apparatuses, information having a device identifier for identifying the manufacturing apparatus and time information indicating time Measurement information storage unit that can store a plurality of measurement information, an instruction reception unit that receives an output instruction of a chart including one or more device identifiers, and when the instruction reception unit receives an output instruction, the output instruction is A plurality of pieces of measurement information having any one of one or more device identifiers included, is read from the measurement information storage unit, and measurement for each device identifier is performed from the read measurement information. Information is a server device including a chart structure portion constituting the chart aspects that can be visually distinguished, the output unit for outputting the chart the chart component is constructed.

  With this configuration, when analyzing the collected time-series information when an abnormality occurs, measurement information for each device such as a semiconductor manufacturing device can be extracted and a chart can be output.

  The server device of the second invention includes a plurality of manufacturing apparatuses that perform a predetermined process on the substrate to be processed and a server device connected to the plurality of manufacturing apparatuses, and performs abnormality analysis after detecting the abnormality. A server device constituting a group management system having a function to perform, which is time-series information about information measured by the plurality of manufacturing devices, and includes information including a recipe identifier for identifying a recipe and time information indicating time Measurement information storage unit that can store a plurality of measurement information, an instruction reception unit that receives an output instruction of a chart including one or more recipe identifiers, and when the instruction reception unit receives an output instruction, the output instruction is A plurality of measurement information having any one of one or more recipe identifiers included is read from the measurement information storage unit, and the recipe identifier is read from the read measurement information. Measurement information and is a server device including a chart structure portion constituting the chart aspects that can be visually distinguished, the output unit for outputting the chart the chart component is constructed.

  With such a configuration, when analyzing time-series information collected when an abnormality occurs, measurement information for each recipe such as a semiconductor manufacturing apparatus can be taken out and a chart can be output.

  Moreover, the server apparatus of this 3rd invention is the original information which receives the original information which is the information which becomes the origin of these measurement information with respect to either 1st or 2nd invention from these manufacturing apparatuses A reception unit, a measurement information acquisition unit that performs a predetermined calculation on a plurality of pieces of original information received by the source information reception unit, and acquires a plurality of measurement information, and a plurality of measurement information acquired by the measurement information acquisition unit Is a server device further comprising a measurement information storage unit for storing the information in the measurement information storage unit.

  With this configuration, since the server apparatus receives the original information from the manufacturing apparatus, the time-series original information can be reliably collected.

  In the server device according to the fourth aspect of the present invention, in relation to any of the first to third aspects, the output instruction includes attribute information of points or / and lines constituting the chart. An output instruction accumulating unit that accumulates an output instruction having line attribute information and the device identifier, or the point or / and line attribute information and the recipe identifier, wherein the instruction receiving unit includes the output instruction accumulating unit; Also receives a storage output instruction that is a chart output instruction corresponding to the stored output instruction, and the chart configuration unit outputs a chart corresponding to the storage output instruction when the instruction reception unit receives the storage output instruction. An instruction is read out, a chart is configured according to the output instruction, and the output unit is a server device that outputs a chart configured by the chart configuration unit.

  With this configuration, an output instruction, which is an instruction set by the user and is an instruction for outputting the chart, can be stored and reused.

  The server device according to the fifth aspect of the present invention provides the server according to any one of the first, third, and fourth aspects, wherein when the instruction receiving unit receives an output instruction, the output instruction is output when the instruction receiving unit receives the output instruction. It is a chart of an aspect in which a plurality of measurement information having any one of one or more device identifiers including, can be read from the measurement information storage unit, and the measurement information for each device identifier can be visually distinguished from the read measurement information The server device constitutes an SPC chart that is a chart in which the plurality of read-out measurement information is plotted in the order of time indicated by time information included in one type of measurement information.

  With such a configuration, the chart of each manufacturing apparatus can be distinguished from the charts of other manufacturing apparatuses, and the charts of a plurality of designated manufacturing apparatuses can be viewed at a time. As a result, it is particularly effective when an abnormality occurs in a plurality of devices. Or only the chart of one manufacturing apparatus can be seen. As a result, it is possible to easily analyze the change with time and variation of a specific manufacturing apparatus, which is very effective for abnormality analysis.

  The server device according to the sixth aspect of the present invention provides the server according to any one of the first, third and fourth aspects, wherein when the instruction receiving unit receives an output instruction, the output instruction is output when the instruction receiving unit receives the output instruction. It is a chart of an aspect in which a plurality of measurement information having any one of one or more device identifiers including, can be read from the measurement information storage unit, and the measurement information for each device identifier can be visually distinguished from the read measurement information The server device constituting a correlation chart, which is a chart showing the correlation between two types of measurement information.

  With this configuration, after detecting an abnormality, the bivariate correlation can be analyzed for each manufacturing apparatus, and the abnormality analysis can be performed effectively.

  Further, in the server device according to the seventh aspect of the present invention, in relation to any one of the first, third, and fourth aspects, when the instruction receiving unit receives an output instruction, the chart configuration unit outputs the output instruction. It is a chart of an aspect in which a plurality of measurement information having any one of one or more device identifiers including, can be read from the measurement information storage unit, and the measurement information for each device identifier can be visually distinguished from the read measurement information The server device that constitutes an MD chart that is a chart showing the correlation of three or more types of measurement information.

  With this configuration, after detecting an abnormality, the multivariate correlation can be analyzed for each manufacturing apparatus, and the abnormality can be analyzed more effectively.

  Further, according to the eighth aspect of the present invention, in the second to fourth aspects of the invention, when the instruction receiving unit receives an output instruction, the chart configuration unit includes one or more included in the output instruction. A plurality of measurement information having any of the recipe identifiers is read from the measurement information storage unit, and the measurement information for each recipe identifier is visually distinguishable from the read measurement information. It is a server apparatus which comprises the SPC chart which is a chart which plotted the several read-out measurement information in order of the time which the time information which this measurement information has.

  With such a configuration, it is possible to distinguish the charts for each recipe and to view the charts of a plurality of designated recipes at a time. As a result, it is particularly effective for abnormality analysis after an abnormality has occurred in manufacturing using a plurality of recipes. Or you can see only one recipe chart. As a result, it is very effective for anomaly analysis after an anomaly occurs in manufacturing using a specific recipe.

  In the server device according to the ninth aspect of the present invention, with respect to any one of the second to fourth aspects, when the instruction receiving unit receives an output instruction, the chart configuration unit includes one or more included in the output instruction A plurality of measurement information having any one of the recipe identifiers is read from the measurement information storage unit, and the measurement information for each recipe identifier is visually distinguishable from the read measurement information. It is a server apparatus which comprises the correlation chart which is a chart which shows the correlation of these measurement information.

  With this configuration, after detecting an abnormality, the bivariate correlation can be analyzed for each recipe, and the abnormality analysis can be performed effectively.

  Further, according to the server device of the tenth invention, with respect to any one of the second to fourth inventions, when the instruction receiving unit receives an output instruction, the chart configuration unit includes one or more included in the output instruction A plurality of measurement information having any one of the recipe identifiers is read from the measurement information storage unit, and measurement information for each recipe identifier is visually distinguishable from the read measurement information, and is a chart of three types It is a server apparatus which comprises MD chart which is a chart which shows the correlation of the above measurement information.

  With this configuration, after detecting an abnormality, the multivariate correlation can be analyzed for each recipe, and the abnormality can be analyzed more effectively.

  According to the group management system of the present invention, after detecting an abnormality, measurement information for each device or for each recipe can be taken out and displayed, and abnormality analysis is facilitated.

Hereinafter, embodiments of a group management system and the like will be described with reference to the drawings. In addition, since the component which attached | subjected the same code | symbol in embodiment performs the same operation | movement, description may be abbreviate | omitted again.
(Embodiment)

  FIG. 1 is a conceptual diagram of a group management system in the present embodiment. The group management system is a system that controls a manufacturing apparatus such as a semiconductor manufacturing apparatus or a liquid crystal panel manufacturing apparatus. The group management system has a function of performing an abnormality analysis after detecting an abnormality. Further, the group management system includes one or more manufacturing apparatuses 11 (manufacturing apparatuses 11 (1) to 11 (n)), a server apparatus 12, and a client apparatus 13.

  The manufacturing apparatus 11 is an apparatus that performs a predetermined process on a substrate to be processed. More specifically, the manufacturing apparatus 11 is a manufacturing apparatus such as a semiconductor manufacturing apparatus or a liquid crystal panel manufacturing apparatus. The manufacturing apparatus 11 performs various processes on the substrate to be processed such as a film forming process, an etching process, and a thermal oxidation process. The manufacturing apparatus 11 is, for example, a composite process type semiconductor wafer manufacturing apparatus. An example of this semiconductor wafer manufacturing apparatus is shown in FIG. As shown in FIG. 2, the semiconductor wafer manufacturing apparatus includes a plurality of (for example, three) process chambers 1 that perform various processes, such as a film forming process, an etching process, and a thermal oxidation process, on a semiconductor wafer. 2, 3, between cassette chambers 4, 5 that accommodate cassettes C 1, C 2 that can accommodate a large number (for example, 50) of wafers W, and between process chambers 1, 2, 3 and cassette chambers 4, 5 And a transfer chamber 6 for transferring the wafer W. The chambers are connected via a gate valve G so as to be freely opened and closed. In the transfer chamber 6, for example, an articulated transfer arm 7 capable of bending and extending and rotating is provided, and the transfer arm 7 transfers the wafer W between the chambers. The cassettes C1 and C2 are turned 90 degrees when taken into the cassette chambers 4 and 5, and the wafer insertion / removal ports of the cassettes C1 and C2 are rotated so as to face the center in the transfer chamber 6, thereby transferring the transfer arms 7 Is installed in a posture in which the wafer W can be taken in and out.

  In addition, the manufacturing apparatus 11 stores, for example, a recipe (usually a set of process condition values) that is information related to a predetermined process for the substrate to be processed, and performs control using the recipe.

  The server device 12 is a server device that constitutes a so-called group management system, stores various measurement information in the plurality of manufacturing apparatuses 11, and has a function of performing abnormality analysis on the measurement information. In addition, the server device 12 normally has an abnormality detection function. The server device 12 normally provides an abnormality analysis function to the user after detecting the abnormality. The abnormality detection function stores in advance a normal range threshold (for example, an upper limit threshold and a lower limit threshold) or an abnormal range threshold in a recording medium (for example, a threshold storage unit), and uses the threshold. And a determination unit for determining whether the measurement information is normal or abnormal, and the abnormality is detected by the determination of the determination unit. Such a general abnormality detection function is a well-known technique and will not be described in detail.

  In addition, the client device 13 issues various requests to the server device 12 and accepts processing results in the server device 12.

  FIG. 3 is a block diagram of the group management system in the present embodiment.

  The group management system includes one or more manufacturing apparatuses 11, a server apparatus 12, and a client apparatus 13.

  The manufacturing apparatus 11 includes a recipe storage unit 1101, a processing unit 1102, a measurement unit 1103, an original information accumulation unit 1104, and an original information transmission unit 1105.

  The server device 12 includes a measurement information storage unit 1201, an original information reception unit 1202, a measurement information acquisition unit 1203, a measurement information storage unit 1204, an instruction reception unit 1205, a chart configuration unit 1206, an output unit 1207, and an output instruction storage unit 1208. To do.

  The client device 13 includes an instruction input unit 1301, an instruction sending unit 1302, a chart receiving unit 1303, and a chart display unit 1304.

  The recipe storage unit 1101 stores a recipe used to control the manufacturing apparatus 11. A recipe is information about a predetermined process for a substrate to be processed, and usually includes a set of process parameter information. The process parameter information includes, for example, a category name, item name, parameter name, and value. The category name is a name indicating the type of process parameter, for example, “temperature”, “gas flow rate”, “boat elevator speed”, and the like. The item name is a name indicating the attribute of the process parameter, and is, for example, “vertical speed” or “rotational speed”. The parameter name is a name of a process parameter, for example, “C” or “A”. The value is a value given to a variable called a process parameter. Usually, the recipe is stored in a pair with a recipe identifier (for example, recipe name) for identifying the recipe. The recipe storage unit 1101 is preferably a non-volatile recording medium, but can also be realized by a volatile recording medium.

  The processing unit 1102 reads the recipe stored in the recipe storage unit 1101 and performs a predetermined process on the substrate to be processed according to the recipe. The processing unit 1102 can be usually realized by an MPU, a memory, or the like. The processing procedure of the processing unit 1102 is usually realized by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The measurement unit 1103 measures one or more values such as the temperature, gas flow rate, and pressure in the manufacturing apparatus 11, and acquires original information that is information that is the basis of measurement information that is charted. The original information is information such as the measured temperature. The original information usually has time information indicating the measured time. The original information includes a recipe identifier that identifies a recipe that was processed when the measurement unit 1103 measured a value such as temperature, one or more measured values, and time information indicating the measured time. Further preferred. It goes without saying that the measuring unit 1103 may measure a plurality of temperatures at a plurality of locations and a plurality of values such as temperature and gas flow rate. The measuring unit 1103 can be realized by a sensor such as one or more temperature sensors or one or more flow sensors.

  The original information accumulation unit 1104 accumulates the original information acquired by the measurement unit 1103 in a recording medium (not shown). The original information storage unit 1104 can usually be realized by an MPU, a memory, or the like. The processing procedure of the original information storage unit 1104 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit). The recording medium is preferably a non-volatile recording medium, but can also be realized as a volatile recording medium.

  The original information transmission unit 1105 transmits the original information accumulated by the original information accumulation unit 1104 to the server device 12. The trigger of transmission of original information is not ask | required. Moreover, it is preferable that the original information transmitted by the original information transmission unit 1105 has a measured value, time information, and a manufacturing apparatus identifier that identifies the manufacturing apparatus 11. Furthermore, the original information transmitted by the original information transmission unit 1105 preferably includes a measured value, time information, a manufacturing apparatus identifier that identifies the manufacturing apparatus 11, and a recipe identifier. That is, the original information accumulated by the original information accumulation unit 1104 and the original information transmitted by the original information transmission unit 1105 may have different structures and configurations. Further, the original information may be configured to have one manufacturing apparatus identifier and / or one recipe identifier for a plurality of measured values. Furthermore, the original information transmission unit 1105 may transmit a set of measured values and time information and attribute values such as a manufacturing apparatus identifier and a recipe identifier at different timings. The original information transmission unit 1105 can be realized by wireless or wired communication means.

  The measurement information storage unit 1201 can store a plurality of measurement information. The plurality of pieces of measurement information is time-series information about information measured by the plurality of manufacturing apparatuses 11, and is information having a device identifier for identifying the manufacturing apparatus 11 and time information indicating the time. Furthermore, the plurality of pieces of measurement information are time-series information about information measured by the plurality of manufacturing apparatuses 11, a device identifier for identifying the manufacturing apparatus 11, a recipe identifier for identifying the recipe, and time information indicating time. It may be information having. The measurement information storage unit 1201 is preferably a nonvolatile recording medium, but can also be realized by a volatile recording medium. Note that the measurement information stored in the measurement information storage unit 1201 may be information stored in the measurement information storage unit 1204, information received directly from the manufacturing apparatus 11, or information read from a recording medium (not shown).

  The original information receiving unit 1202 receives original information, which is information that is the basis of a plurality of measurement information, from the plurality of manufacturing apparatuses 11. The original information receiving unit 1202 can be realized by a wireless or wired communication unit or the like.

  The measurement information acquisition unit 1203 performs a predetermined calculation on the plurality of pieces of original information received by the original information reception unit 1202 and acquires a plurality of pieces of measurement information. Predetermined calculation means, for example, calculating an average value of a plurality of values included in a plurality of original information, obtaining a maximum value, obtaining a minimum value, or calculating a standard deviation at predetermined time intervals. Or a median value. In addition, the predetermined calculation is, for example, for each predetermined step in the recipe, calculating an average value of a plurality of values of a plurality of original information, acquiring a maximum value, acquiring a minimum value, An operation for calculating a standard deviation or obtaining a median value may be used. The measurement information acquisition unit 1203 can usually be realized by an MPU, a memory, or the like. The processing procedure of the measurement information acquisition unit 1203 is usually realized by software, and the software is recorded in a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The measurement information accumulation unit 1204 accumulates the plurality of measurement information acquired by the measurement information acquisition unit 1203 in the measurement information storage unit 1201. The measurement information accumulating unit 1204 is a plurality of pieces of measurement information acquired by the measurement information acquisition unit 1203. The measurement information determined by a determination unit (not shown) is abnormal and measurement information having a certain relationship with the measurement information ( It is preferable to accumulate only the measurement information of the same manufacturing apparatus and the same recipe as the abnormal measurement information in the measurement information storage unit 1201. The measurement information storage unit 1204 can be usually realized by an MPU, a memory, or the like. The processing procedure of the measurement information storage unit 1204 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The instruction receiving unit 1205 receives an instruction. This instruction is normally received from the client device 13, but may be received from a keyboard or mouse connected to the server device 12. The instruction received by the instruction receiving unit 1205 corresponds to, for example, an output instruction for a chart including one or more device identifiers, an output instruction for a chart including one or more recipe identifiers, and an output instruction accumulated by the output instruction accumulation unit 1208. For example, a chart output instruction. The output instruction is an output instruction for performing an abnormality analysis after an abnormality is detected. The output instruction may include information on the type of chart (such as an SPC chart, a correlation chart, or an MD chart). Further, the output instruction may include the type of data to be output as a chart (measurement information such as temperature, gas flow rate, pressure). The output instruction may include attribute information of points or / and lines constituting the chart. The attribute information includes a point color, a point type (shape), a line color, a line type, and the like. Further, when the output instruction includes a recipe identifier, the recipe identifier usually indicates a plurality of recipes having the same identifier of a plurality of devices. The instruction receiving unit 1205 includes, for example, a wireless or wired receiving unit. The instruction input means may be anything such as a numeric keypad, a keyboard, a mouse, or a menu screen. The instruction receiving unit 1205 can be realized by a device driver for input means such as a numeric keypad and a keyboard, control software for a menu screen, and the like.

  When the instruction receiving unit 1205 receives the output instruction, the chart configuration unit 1206 reads a plurality of measurement information having one of one or more device identifiers included in the output instruction from the measurement information storage unit 1201 and reads From the measured information, the chart of the aspect which can distinguish the measurement information for every apparatus identifier visually is comprised. In addition, when the instruction receiving unit 1205 receives an output instruction, the chart configuration unit 1206 reads a plurality of pieces of measurement information having one of one or more recipe identifiers included in the output instruction from the measurement information storage unit 1201, The chart of the aspect which can distinguish the measurement information for every recipe identifier visually from the said read measurement information is comprised. Here, the chart in which the measurement information for each device identifier can be visually distinguished is the type of the point where the measurement information for each device identifier is different when the output instruction includes two or more device identifiers (the shape of a square and a circle) , Color, size), a chart in which measurement information for each device identifier is connected with different line colors, and the like. In addition, the chart in which the measurement information for each device identifier can be visually distinguished is a chart including a plurality of measurement information of the one device identifier when the output instruction includes only one device identifier. In addition, the chart in which the measurement information for each recipe identifier can be visually distinguished is different from the chart in which the measurement information for each recipe identifier is different when the output instruction includes two or more recipe identifiers (square and round shapes, Color, size), and charts in which measurement information for each recipe identifier is connected by different line types (solid line, broken line, etc.). In addition, the chart in which the measurement information for each recipe identifier can be visually distinguished is a chart composed of a plurality of measurement information of the one recipe identifier when the output instruction includes only one recipe identifier. In addition, the chart configuration unit 1206 reads a chart output instruction corresponding to the accumulated output instruction according to the instruction received by the instruction reception unit 1205, and configures the chart according to the output instruction. Further, when the instruction receiving unit 1205 receives an output instruction, the chart configuration unit 1206 reads a plurality of measurement information having one of one or more device identifiers included in the output instruction from the measurement information storage unit 1201, It is a chart of a mode in which measurement information for each device identifier can be visually distinguished from the read measurement information, and the plurality of read measurement information is plotted in the order of time indicated by time information of one type of measurement information You may comprise the SPC chart (univariate abnormality detection chart) which is a chart. The SPC chart is a chart for detecting anomalies by monitoring univariates. In the SPC chart, the upper and lower limit values (management values) to be monitored are set (held by the chart configuration unit 1206 in advance), and when the value is outside the management value, an abnormality is detected and the detected abnormality is visually Is preferable. Further, when the instruction receiving unit 1205 receives an output instruction, the chart configuration unit 1206 reads a plurality of measurement information having one of one or more device identifiers included in the output instruction from the measurement information storage unit 1201, It is a chart in an aspect in which measurement information for each device identifier can be visually distinguished from the read measurement information, and constitutes a correlation chart (bivariate abnormality detection chart) that is a chart showing the correlation between two types of measurement information Also good. The correlation chart is a chart for monitoring the bivariate correlation. When the instruction receiving unit 1205 receives the output instruction, the chart configuration unit 1206 reads a plurality of measurement information having one of one or more device identifiers included in the output instruction from the measurement information storage unit 1201 and reads Even if the MD chart (multivariate abnormality detection chart) which is a chart in which the measurement information for each device identifier can be visually distinguished from the measured information and which shows the correlation of three or more types of measurement information is configured good. The MD chart is a chart for monitoring a multivariate and detecting an abnormality, and is a chart that handles a plurality of SPC charts collectively. For example, it is preferable that the chart configuration unit 1206 performs abnormality determination using the Mahalanobis distance and outputs an MD chart that visually indicates whether the abnormality is normal or normal. In addition, when the instruction receiving unit 1205 receives an output instruction, the chart configuration unit 1206 reads a plurality of pieces of measurement information having one of one or more recipe identifiers included in the output instruction from the measurement information storage unit 1201, It is a chart of a mode in which measurement information for each recipe identifier can be visually distinguished from the read measurement information, and a chart in which a plurality of read measurement information is plotted in order of time indicated by time information of one type of measurement information An SPC chart may be configured. In addition, when the instruction receiving unit 1201 receives an output instruction, the chart configuration unit 1206 reads a plurality of measurement information having one of one or more recipe identifiers included in the output instruction from the measurement information storage unit 1201, A correlation chart that is a chart in an aspect in which measurement information for each recipe identifier can be visually distinguished from the read measurement information, and a chart showing a correlation between two types of measurement information may be configured. In addition, when the instruction receiving unit 1205 receives an output instruction, the chart configuration unit 1206 reads a plurality of pieces of measurement information having one of one or more recipe identifiers included in the output instruction from the measurement information storage unit 1201, An MD chart, which is a chart in a mode in which the measurement information for each recipe identifier can be visually distinguished from the read measurement information, and shows a correlation between three or more types of measurement information may be configured. The configuration of the chart is a process of obtaining a chart by connecting a plurality of pieces of measurement information with lines according to a time axis, for example. When a plurality of pieces of measurement information having values and time information are given, the process of forming a chart is a known technique, and thus detailed description thereof is omitted. In addition, when a plurality of pieces of measurement information having values and time information are given, the processing for configuring the SPC chart, the correlation chart, and the MD chart is a known technique, and thus detailed description thereof is omitted. The two types of measurement information include information including two types of measured values (for example, temperature and gas flow rate) in one measurement information. The three or more types of measurement information includes information including three or more types of measured values (for example, temperature, gas flow rate, and pressure) in one measurement information. The chart configuration unit 1206 can be usually realized by an MPU, a memory, or the like. The processing procedure of the chart configuration unit 1206 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The output unit 1207 outputs the chart configured by the chart configuration unit 1206. Here, the output is usually transmission to the client device 13. However, the output unit 1207 may display a chart on a display connected to the server device 12, print it on a printer, or send it to an external device. The output unit 1207 can be realized by wireless or wired communication means. However, the output unit may be realized by 1207, output device driver software, or output device driver software and output device.

  The output instruction accumulation unit 1208 accumulates an output instruction which is an instruction such as having point or / and line attribute information and a device identifier, or having point or / and line attribute information and a recipe identifier. For example, when the instruction receiving unit 1205 receives an accumulation instruction that is an instruction for accumulating chart settings (including color information), the output instruction accumulating unit 1208 includes point or / and line attribute information and a device identifier, or An output instruction having point or / and line attribute information and a recipe identifier may be accumulated. Further, the output instruction storage unit 1208 can be usually realized by an MPU, a memory, or the like. The processing procedure of the output instruction storage unit 1208 is usually realized by software, and the software is recorded on a recording medium such as a ROM. However, it may be realized by hardware (dedicated circuit).

  The instruction input unit 1301 inputs various instructions. The various instructions include a start instruction, a chart output instruction, an instruction to change a chart attribute value (line type, line color, point type, point color, etc.). Here, the chart output instruction and chart attribute value (line type, line color, point type, point color, etc.) change instructions are analyzed after the user is notified of the abnormality detection. This is an instruction to input. The instruction input means may be anything such as a numeric keypad, a keyboard, a mouse, or a menu screen. The instruction input unit 1301 can be realized by an input unit such as a numeric keypad and a keyboard, a device driver thereof, control software for a menu screen, and the like.

  The instruction sending unit 1302 sends the instruction input from the instruction input unit 1301 to the server device 12. The sending here is usually sending using communication means. The instruction sending unit 1302 can be realized by wireless or wired communication means.

  The chart receiving unit 1303 receives chart information from the server device 12. The acceptance here is usually reception using communication means. The chart receiving unit 1303 can be realized by a wireless or wired communication unit or the like.

  The chart display unit 1304 displays information on the chart received by the chart receiving unit 1303 on the display. The chart display unit 1304 may be considered to include or not include a display. The chart display unit 1304 can be realized by display driver software or display driver software and a display.

  Next, the operation of the group management system will be described. First, operation | movement of the manufacturing apparatus 11 is demonstrated using the flowchart of FIG.

  (Step S401) The processing unit 1102 reads the recipe stored in the recipe storage unit 1101.

  (Step S402) The processing unit 1102 assigns 1 to the counter i.

  (Step S403) The processing unit 1102 determines whether or not the i-th processing step exists in the recipe read in step S401. If the i-th processing step exists, the process goes to step S404, and if the i-th processing step does not exist, the process goes to step S409.

  (Step S404) The processing unit 1102 executes the process of the i-th step.

  (Step S405) The measurement unit 1103 performs a predetermined measurement, and acquires original information (the original information here usually has only a value). The measurement here may be two or more values (for example, temperature, gas flow rate, pressure, etc.).

  (Step S406) The measuring unit 1103 obtains time information from a clock (not shown), adds time information to the measured information (one or more values), and configures original information. Further, the measuring unit 1103 may read the manufacturing apparatus identifier and the recipe identifier stored in advance, and add them to the original information here. This recipe identifier is identification information of a recipe that is being processed.

  (Step S407) The original information accumulation unit 1104 accumulates the original information configured in step S406 on a recording medium (not shown).

  (Step S408) The processing unit 1102 increments the counter i by 1, and returns to step S403.

  (Step S409) The original information transmission unit 1105 determines whether or not it is timing to transmit the original information. The original information transmission unit 1105 goes to step S410 if it is the timing to transmit the original information, and ends the process if it is not the timing to transmit the original information. If the original information is not transmitted, the original information is usually read into the server device 12 by another means (for example, via a portable recording medium).

  (Step S410) The original information transmission unit 1105 reads the original information accumulated by the original information accumulation unit 1104.

  (Step S411) The original information transmission unit 1105 reads the manufacturing apparatus identifier and the recipe identifier for identifying the manufacturing apparatus 11, assigns the original information read in step S410, and configures the original information to be transmitted. Note that the manufacturing apparatus identifier is held in advance by the manufacturing apparatus 11. The manufacturing apparatus identifier and the recipe identifier are preferably stored in a non-volatile recording medium of the manufacturing apparatus 11, but may be stored in a non-volatile recording medium.

  (Step S412) The original information transmission unit 1105 transmits the original information configured in step S411 to the server device 12. It is assumed that the original information transmission unit 1105 holds information (for example, the IP address of the server device 12) for communicating with the server device 12.

  In addition, in the flowchart of FIG. 4, the recipe identifier and the manufacturing apparatus identifier were provided to the original information and transmitted. However, a set of one or more values and time information, a recipe identifier, and a manufacturing apparatus identifier may be separately transmitted to the server apparatus 12. Furthermore, in such a case, every time one piece of original information composed of a set of one or more values and time information is acquired, it may be transmitted to the server device 12. Then, after the processing of all recipe steps is completed, the recipe identifier and the manufacturing device identifier may be transmitted to the server device 12. That is, the transmission timing of the original information and the transmission timing of each part of the original information (a set of value and time information, a manufacturing apparatus identifier, etc.) are not limited.

  Next, operation | movement of the server apparatus 12 is demonstrated using the flowchart of FIG.

  (Step S501) The instruction receiving unit 1205 determines whether an instruction has been received in order to perform an abnormality analysis after detecting an abnormality. If an instruction is accepted, the process goes to step S502, and if no instruction is accepted, the process goes to step S507.

  (Step S502) The chart configuration unit 1206 determines whether or not the instruction received in step S501 is a chart output instruction. If it is a chart output instruction, the process proceeds to step S503, and if it is not a chart output instruction, the process proceeds to step S508.

  (Step S503) The chart configuration unit 1206 acquires one or more device identifiers and / or one or more recipe identifiers included in the instruction received in Step S501.

  (Step S504) The chart configuration unit 1206 searches the measurement information storage unit 1201 using one or more device identifiers or / and one or more recipe identifiers acquired in Step S503 or Step S510 as a key, and searches for one or more pieces of measurement information. To get. Note that the measurement information includes at least one value (such as temperature and gas flow rate) and time information. Here, the chart configuration unit 1206 includes measurement information having one of one or more device identifiers included in the output instruction and / or measurement information having one of one or more recipe identifiers included in the output instruction. get.

  (Step S505) The chart configuration unit 1206 configures a chart according to the received output instruction from the measurement information retrieved in step S504. The attribute value of the chart line is the attribute value acquired in step S510, the instructed attribute value, the default attribute value, or the like, and the chart configuration unit 1206 configures the chart using the attribute value. To do. The chart to be configured is a chart in which the measurement information for each device identifier can be visually distinguished, and / or a chart in which the measurement information for each recipe identifier can be visually distinguished. Further, the charts to be configured are charts according to chart type information (SPC chart, correlation chart, MD chart, etc.) included in the output instruction.

  (Step S506) The output unit 1207 outputs the chart configured in step S506. Here, the output is transmission to the client device 13. The process returns to step S501.

  (Step S507) The original information receiving unit 1202 determines whether or not the original information is received from the manufacturing apparatus 11. If the original information is received, the process goes to step S514. If the original information is not received, the process returns to step S501.

  (Step S508) The chart construction unit 1206 determines whether or not the instruction received in step S501 is a chart output instruction in accordance with the accumulated chart output instruction. If it is an instruction to output the chart, go to Step S509, and if it is not an instruction to output the chart, go to Step S510.

  (Step S509) The chart construction unit 1206 reads out the output instruction accumulated in Step S512 in accordance with the instruction received in Step S501, and from the output instruction, the apparatus identifier or / and the recipe identifier, the chart dot or line attribute value (Point color, point shape, point size, line color, line type, line thickness, etc.) are acquired.

  (Step S510) The output instruction accumulation unit 1208 determines whether or not the instruction received in step S501 is an accumulation instruction. If it is an accumulation instruction, the process proceeds to step S511, and if it is not an accumulation instruction, the process returns to step S501.

  (Step S511) The output instruction storage unit 1208 acquires information on the output instruction of the output chart. The output instruction information of the output chart includes the device identifier or / and recipe identifier, and the attribute values of the dots and lines of the chart (point and line colors, dot and line types, dot and line thickness, etc.) Etc.

  (Step S512) The output instruction accumulation unit 1208 accumulates the information of the output instruction acquired in step S512. The process returns to step S501.

  (Step S513) The measurement information acquisition unit 1203 performs a predetermined calculation on the plurality of pieces of original information received by the original information reception unit 1202 in step S507, and acquires one or more pieces of measurement information.

  (Step S514) The measurement information storage unit 1204 stores one or more pieces of measurement information acquired in step S513 in the measurement information storage unit 1201. The process returns to step S501.

  In the flowchart of FIG. 5, the process ends when the power is turned off or the process ends.

  In the flowchart of FIG. 5, the original information and the measurement information may be the same information. In such a case, in step S513, processing for reading the original information is performed.

  In the flowchart of FIG. 5, the user may input a chart attribute value such as a line type or a line color of the chart, the server apparatus may receive the input, and output a chart according to the input.

  In the flowchart of FIG. 5, the abnormality detection process in the server device 12 is omitted. The above-described abnormality detection function can be performed by a known technique.

  Further, in the flowchart of FIG. 5, when the original information is accumulated and the chart is output, a predetermined calculation is performed on the plurality of original information, and one or more measurement information is acquired. A chart may be configured and output using the measurement information. That is, the timing which comprises measurement information is not ask | required.

  Next, the operation of the client device 13 will be described. When the instruction input accepting unit 1301 of the client device 13 accepts a chart output instruction from the user, the instruction sending unit 1302 sends the output instruction to the server device 12, and chart information that is a processing result in the server device 12. Is received by the chart receiving unit 1303, and the chart display unit 1304 displays the chart.

  Hereinafter, a specific operation of the group management system in the present embodiment will be described. A conceptual diagram of the group management system is shown in FIG.

  In this specific example, original information measured by a plurality of manufacturing apparatuses 11, for example, temperature information in the manufacturing apparatuses is transmitted to the server apparatus 12 one after another. An example of the original information is shown in FIG. The original information includes temperature, time information, recipe identifier, and device identifier. The time information is information indicating the time, and may be information specifying hours, minutes, and seconds, or information only about date and time. The recipe identifier is information for identifying the recipe, and is the ID of the recipe that was executed when the temperature was measured. The device identifier is information for identifying the manufacturing device 11 whose temperature has been measured. In this specific example, the original information is measured and acquired by each manufacturing apparatus 11 every second.

  Then, the original information receiving unit 1202 of the server device 12 receives and accumulates the original information from the plurality of manufacturing apparatuses 11 one after another. Here, it is assumed that the server device 12 first stores the original information as it is. The plurality of accumulated source information is shown in the source information management table of FIG. The source information management table includes a plurality of source information having measurement results of the measurement unit 1103 when a plurality of recipes of a plurality of manufacturing apparatuses 11 are executed.

  Next, it is assumed that the user inputs an instruction for detecting an abnormality from the client device 13. In response to this instruction, the measurement information acquisition unit 1203 of the server device 12 performs a predetermined calculation on the value of each record in the original information management table in FIG. 7 to obtain a representative value. Here, it is assumed that the predetermined calculation is, for example, processing for obtaining the maximum temperature among the temperatures measured in the execution time of three steps constituting the recipe. The time information corresponding to the representative value is the first time information of the execution time of 3 steps. Then, the measurement information acquisition unit 1203 obtains the information (measurement information management table) of FIG. 8 and temporarily stores it on the memory. And the judgment part which is not illustrated detects an abnormal value from the information of FIG. 8, and notifies a user. The presentation of the abnormality to the user may be a chart, a buzzer, or a list of abnormalities. In addition, since the detection method of an abnormal value is a well-known technique as mentioned above, description is abbreviate | omitted.

  Next, the user inputs an instruction to output a chart having the device identifier “device A” from the client device 13 in order to analyze the abnormality after detecting the abnormality. The instruction input unit 1301 receives the output instruction. Then, the instruction sending unit 1302 sends a chart output instruction having the device identifier “device A” to the server device 12.

  Next, the instruction receiving unit 1205 of the server apparatus 12 receives a chart output instruction having the apparatus identifier “apparatus A”. Next, the chart configuration unit 1206 searches the measurement information management table of FIG. 8 using “device A” as a key. And the chart structure part 1206 acquires the chart information of FIG. Chart information is information that constitutes a chart. The chart information in FIG. 9 is information obtained by filtering the record having the device identifier “device A” from the measurement information management table in FIG.

  Next, the chart configuration unit 1206 reads the information in FIG. 9 and configures the chart. This chart is a line graph in which the horizontal axis indicates the time indicated by the time information and the vertical axis indicates the value.

  Next, the output unit 1207 transmits the line graph configured by the chart configuration unit 1206 to the client device 13.

  Next, the chart receiving unit 1303 of the client device 13 receives the line graph, and the chart display unit 1304 displays the line graph on the display as shown in FIG.

  With the above processing, the user can know the manufacturing state of the manufacturing apparatus by focusing only on the value measured by the desired manufacturing apparatus after detecting the abnormality, which is extremely effective for analyzing the abnormality of the manufacturing apparatus. is there.

  Next, for example, the user inputs an output instruction of a chart having the recipe identifier “recipe Y” from the client device 13. The instruction input unit 1301 receives the output instruction. Then, the instruction sending unit 1302 transmits a chart output instruction having the recipe identifier “recipe Y” to the server device 12.

  Next, the instruction receiving unit 1205 of the server apparatus 12 receives a chart output instruction having the recipe identifier “recipe Y”. Next, the chart configuration unit 1206 searches the measurement information management table of FIG. 8 using “recipe Y” as a key. Then, the chart configuration unit 1206 obtains the chart information of FIG. Chart information is information that constitutes a chart. The chart information in FIG. 11 is information obtained by filtering the record having the recipe identifier “recipe Y” from the measurement information management table in FIG.

  Next, the chart configuration unit 1206 reads the information in FIG. 11 and configures the chart. This chart is a line graph in which the horizontal axis indicates the time indicated by the time information and the vertical axis indicates the value.

  Next, the output unit 1207 transmits the line graph configured by the chart configuration unit 1206 to the client device 13.

  Next, the chart receiving unit 1303 of the client device 13 receives the line graph, and the chart display unit 1304 displays the line graph on the display as shown in FIG.

  By the above processing, the user can know the quality of the recipe by paying attention only to the value measured when the desired recipe is executed, and is extremely effective in detecting the recipe problem.

  Further, when outputting the charts of FIGS. 10 and 13, the user can set chart attribute information such as line color and line type. In such a case, the chart configuration unit 1206 configures a chart according to the setting information of the chart.

  When the user of the client device 13 inputs an output instruction accumulation instruction, the output instruction accumulation unit 1208 has a device identifier or / and a recipe identifier designated by the user, and chart attribute information such as a line color. Take out the output instructions and store them. Thereafter, the user can call the output instruction by designating the accumulated output instruction and output a chart according to the output instruction.

  As described above, according to the present embodiment, after abnormality detection, measurement information for each apparatus or for each recipe can be extracted and displayed for abnormality analysis. As a result, abnormality analysis can be easily performed with high accuracy.

  Further, according to the present embodiment, output instructions for chart output for useful abnormality analysis can be accumulated and reused. With such a function, an effective abnormality analysis method accumulated at the site can be reused even if time passes, and can be reused at another site.

  In the present embodiment, as shown in FIG. 13, the output chart is one of one or more device identifiers included in an output instruction for abnormality analysis after abnormality detection, and / or one or more It is a chart of an aspect in which a plurality of measurement information having any of the recipe identifiers is read from the measurement information storage unit 1201, and the measurement information for each device identifier and / or for each recipe identifier can be visually distinguished from the read measurement information The SPC chart may be a chart in which a plurality of read measurement information is plotted in the order of the time indicated by the time information included in one type of measurement information. Note that the SPC chart shown in FIG. 13 is an SPC chart composed of measurement information of one device identifier, for example. In the SPC chart shown in FIG. 13, a management value (upper limit) and a management value (lower limit) are output. If the value is outside the management value, it indicates an abnormality. The management value (upper limit) and the management value (lower limit) are held in advance by the chart configuration unit 1206 or means not shown.

  In the present embodiment, as shown in FIG. 14, the output chart is one of one or more device identifiers included in an output instruction for abnormality analysis after abnormality detection, and / or one or more ones. A chart of a mode in which a plurality of measurement information having any of the recipe identifiers is read from the measurement information storage unit 1201, and the measurement information for each device identifier and / or for each recipe identifier can be visually distinguished from the read measurement information. There may be a correlation chart that is a chart showing the correlation between two types of measurement information (for example, temperature and pressure). Note that the correlation chart shown in FIG. 14 is a correlation chart composed of two types of measurement information of one device identifier, for example. In the correlation chart shown in FIG. 14, two management values are output. If the value is out of the range of these two management values, it indicates an abnormality.

  In the present embodiment, as shown in FIG. 15, the output chart is one of one or more device identifiers included in an output instruction for abnormality analysis after abnormality detection, and / or one or more It is a chart of an aspect in which a plurality of measurement information having any of the recipe identifiers is read from the measurement information storage unit 1201, and the measurement information for each device identifier and / or for each recipe identifier can be visually distinguished from the read measurement information The MD chart may be a chart showing the correlation between three or more types of measurement information (for example, temperature at two locations, gas flow rate, and pressure). Note that the MD chart shown in FIG. 15 is an MD chart composed of measurement information of one device identifier, for example. Also, the MD chart shown in FIG. 15 is a chart in which an abnormality is determined using, for example, the Mahalanobis distance. More specifically, the MD chart shown in FIG. 15 is a chart in which normal data is modeled and the degree of abnormality is numerically expressed using Mahalanobis distance. In the MD chart shown in FIG. 15t, two management values are output. If the value is out of the range of these two management values, it indicates an abnormality.

  Further, in the specific example of the present embodiment, the output chart is a chart in which the measurement information of one device identifier or one recipe is displayed, and in the order of the times indicated by the time information included in one type of measurement information. It was one line graph which connected several read-out measurement information. However, as shown in FIG. 16, the output chart reads a plurality of measurement information having three device identifiers included in the output instruction from the measurement information storage unit 1201, and measures each device identifier from the read measurement information. It is a chart of a mode in which information can be visually distinguished, and may be three charts in which a plurality of read measurement information is plotted in the order of time indicated by time information included in one type of measurement information. In such a case, the output instruction includes, for example, three device identifiers of “device A”, “device B”, and “device C”. Then, the chart configuration unit 1206 searches the measurement information storage unit 1201 three times using “device A”, “device B”, and “device C” as keys, and obtains measurement information three times, for each key. The charts of attribute values of different points and lines are configured separately to obtain three charts. Then, three charts are output.

  In the present embodiment, the display form of three or more charts (SPC chart, correlation chart, MD chart, etc.) can be freely selected as described above, so that anomaly analysis according to the result of 100% inspection is possible. .

  In the specific example of the present embodiment, the server apparatus 12 may hold the original information and the measurement information in advance. In such a case, the original information or the measurement information is acquired from the manufacturing apparatus 11 by means not shown and passed to the server apparatus 12 via a recording medium or the like.

  Further, in the specific example of the present embodiment, the chart is output by specifying the apparatus identifier or the recipe identifier, but the chart may be output by specifying one or more apparatus identifiers and one or more recipe identifiers. When the user inputs an output specification including one or more device identifiers and one or more recipe identifiers, the chart configuration unit 1206 measures each of the specified one or more device identifiers and one or more recipe identifiers as keys. Search for information (or source information) and construct a chart.

  In the present embodiment, the user inputs an instruction to enlarge a part of the chart of interest, changes the scale of a part of the chart (changes the time interval of measurement information and the interval of steps), and outputs the chart. It is preferable to do.

  In the present embodiment, the original information and the measurement information may have the same configuration. In such a case, the measurement information acquisition unit and the measurement information storage unit are not necessary.

  In the present embodiment, it is not essential to transmit and receive original information between the manufacturing apparatus and the server apparatus. The original information may be given from the manufacturing device to the server device via a recording medium, for example.

  In the present embodiment, the group management system may not have the client device 13. In such a case, the user inputs an instruction such as an output instruction to the server device 12.

  Furthermore, the processing in the present embodiment may be realized by software. Then, this software may be distributed by software download or the like. Further, this software may be recorded and distributed on a recording medium such as a CD-ROM. Note that the software that implements the server device in the present embodiment is the following program. In other words, this program is time-series information about information measured by a plurality of manufacturing apparatuses that perform a predetermined process on a substrate to be processed in a computer, and a device identifier that identifies the manufacturing apparatus and time information indicating time A plurality of pieces of measurement information, which is information having the following, is stored, and when abnormality analysis is performed after abnormality detection, an instruction reception step for receiving an output instruction for a chart including one or more device identifiers, and output in the instruction reception step A mode in which, when an instruction is received, a plurality of pieces of measurement information having one of one or more device identifiers included in the output instruction is read, and measurement information for each device identifier can be visually distinguished from the read measurement information A chart composing step constituting the chart, and an output step for outputting the chart constructed in the chart composing step. Program for executing the flop is.

  The program for realizing the server device is time-series information about information measured by a plurality of manufacturing apparatuses that perform a predetermined process on the substrate to be processed, and shows a recipe identifier for identifying a recipe and a time. A plurality of pieces of measurement information, which is information having time information, and an instruction receiving step for receiving an output instruction for a chart including one or more recipe identifiers when performing abnormality analysis after detecting an abnormality, and the instruction receiving step When the output instruction is received, the plurality of measurement information having any of the recipe identifiers included in the output instruction is read, and the measurement information for each recipe identifier can be visually distinguished from the read measurement information. A chart configuration step for configuring a chart, and a chart configured by the chart configuration step is output. Program for executing a force step is.

  In addition, the program includes, in a computer, an original information receiving step for receiving original information that is a source of the plurality of measurement information from the plurality of manufacturing apparatuses, and a plurality of original information received in the original information receiving step. A program for further executing a measurement information acquisition step for performing a predetermined calculation on the measurement information and acquiring a plurality of measurement information, and a measurement information storage step for storing the plurality of measurement information acquired in the measurement information acquisition step, is there.

  In the above program, the output instruction also includes attribute information of the points or / and lines constituting the chart, and the computer transmits the attribute information of the points or / and lines and the device identifier or the points or / and lines of the chart. An output instruction accumulation step for accumulating an output instruction having attribute information and the recipe identifier is further executed, and in the instruction reception step, an accumulation output instruction that is an output instruction of a chart corresponding to the output instruction accumulated by the output instruction accumulation unit In the chart configuration step, when the accumulated output instruction is received in the instruction receiving step, the chart output instruction corresponding to the accumulated output instruction is read, the chart is configured according to the output instruction, and the output step Output the chart configured in the chart configuration step. , It is suitable.

  In the chart configuration step of the program, when an output instruction is received in the instruction receiving step, a plurality of pieces of measurement information having one of one or more device identifiers included in the output instruction is read and the read It is a chart in an aspect in which measurement information for each device identifier can be visually distinguished from measurement information, and is a chart in which the plurality of read measurement information is plotted in order of time indicated by time information of one type of measurement information. It is preferable to construct the SPC chart.

  In the chart configuration step of the program, when an output instruction is received in the instruction receiving step, a plurality of pieces of measurement information having one of one or more device identifiers included in the output instruction is read and the read It is preferable to construct a correlation chart that is a chart in a mode in which measurement information for each device identifier can be visually distinguished from measurement information, and is a chart showing a correlation between two types of measurement information.

  In the chart configuration step of the program, when an output instruction is received in the instruction receiving step, a plurality of pieces of measurement information having one of one or more device identifiers included in the output instruction is read and the read It is preferable that the measurement information for each device identifier is a chart that can be visually distinguished from the measurement information, and that an MD chart that is a chart showing the correlation of three or more types of measurement information is configured.

  Further, in the chart configuration step of the program, when an output instruction is received in the instruction receiving step, a plurality of pieces of measurement information having one or more recipe identifiers included in the output instruction is read, and a recipe is read from the read measurement information. It is a chart in an aspect in which measurement information for each identifier can be visually distinguished, and constitutes an SPC chart that is a chart in which a plurality of read measurement information is plotted in order of time indicated by time information included in one type of measurement information. It is preferable.

  Further, in the chart configuration step of the program, when an output instruction is received in the instruction receiving step, a plurality of measurement information having one of one or more recipe identifiers included in the output instruction is read and the read It is preferable that the measurement information for each recipe identifier is a chart that can be visually distinguished from the measurement information, and that a correlation chart that is a chart showing the correlation between two types of measurement information is configured.

  Further, in the chart configuration step of the program, when an output instruction is received in the instruction receiving step, a plurality of measurement information having one of one or more recipe identifiers included in the output instruction is read and the read It is preferable that the measurement information for each recipe identifier is a chart that can be visually distinguished from the measurement information, and that an MD chart that is a chart showing the correlation of three or more types of measurement information is configured.

  In each of the above embodiments, each process (each function) may be realized by centralized processing by a single device (system), or by distributed processing by a plurality of devices. May be.

  In the above program, in a transmission step for transmitting information, a reception step for receiving information, etc., processing performed by hardware, for example, processing performed by a modem or an interface card in the transmission step (only performed by hardware). Not included) is not included.

  Further, the computer that executes the program may be singular or plural. That is, centralized processing may be performed, or distributed processing may be performed.

  In each of the above embodiments, it goes without saying that two or more communication means (such as an instruction receiving unit) existing in one apparatus may be physically realized by one medium.

  The present invention is not limited to the above-described embodiments, and various modifications are possible, and it goes without saying that these are also included in the scope of the present invention.

  As described above, the group management system according to the present invention can extract and display time series information for each manufacturing apparatus or for each recipe when performing abnormality analysis after detecting abnormality. For example, a group management including two or more manufacturing apparatuses that perform a predetermined process on a substrate to be processed and a server apparatus connected to the two or more manufacturing apparatuses. It is useful as a system.

Conceptual diagram of group management system in an embodiment The figure which shows the example of the same semiconductor wafer manufacturing equipment Block diagram of the group management system Flow chart for explaining the operation of the manufacturing apparatus Flow chart for explaining the operation of the server device The figure which shows the example of the same origin information Figure showing the same information management table Figure showing the same measurement information management table The figure which shows the example of the chart information The figure which shows the output example of the chart in the same client apparatus The figure which shows the example of the chart information The figure which shows the output example of the chart in the same client apparatus The figure which shows the output example of the chart in the same client apparatus The figure which shows the output example of the chart in the same client apparatus The figure which shows the output example of the chart in the same client apparatus The figure which shows the output example of the chart in the same client apparatus

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Manufacturing apparatus 12 Server apparatus 13 Client apparatus 1101 Recipe storage part 1102 Processing part 1103 Measurement part 1104 Original information storage part 1105 Original information transmission part 1201 Measurement information storage part 1202 Original information reception part 1203 Measurement information acquisition part 1204 Measurement information storage part 1205 Instruction reception unit 1206 Chart configuration unit 1207 Output unit 1208 Output instruction storage unit 1301 Instruction input unit 1302 Instruction sending unit 1303 Chart reception unit 1304 Chart display unit

Claims (13)

Server apparatus comprising a plurality of manufacturing apparatuses that perform a predetermined process on a substrate to be processed and a server apparatus connected to the plurality of manufacturing apparatuses, and constituting a group management system having a function of performing abnormality analysis after detecting an abnormality Because
A measurement information storage unit that can store a plurality of pieces of measurement information that is time-series information about information measured by the plurality of manufacturing apparatuses and includes information that includes a device identifier that identifies the manufacturing apparatus and time information that indicates time. When,
An instruction receiving unit that receives an output instruction of a chart including one or more device identifiers;
When the instruction receiving unit receives an output instruction, a plurality of pieces of measurement information having one of one or more device identifiers included in the output instruction is read from the measurement information storage unit, and the device is determined based on the read measurement information. It is a chart of a mode in which the measurement information for each identifier can be visually distinguished , and a chart configuration unit that constitutes a chart capable of analyzing an abnormality ,
A server apparatus comprising an output unit that outputs a chart configured by the chart configuration unit. Server apparatus comprising a plurality of manufacturing apparatuses that perform a predetermined process on a substrate to be processed and a server apparatus connected to the plurality of manufacturing apparatuses, and constituting a group management system having a function of performing abnormality analysis after detecting an abnormality Because
A measurement information storage unit that can store a plurality of measurement information that is time-series information about information measured by the plurality of manufacturing apparatuses and includes information including a recipe identifier that identifies a recipe and time information that indicates time;
An instruction receiving unit that receives an output instruction of a chart including one or more recipe identifiers;
When the instruction receiving unit receives an output instruction, a plurality of pieces of measurement information having one of one or more recipe identifiers included in the output instruction is read from the measurement information storage unit, and the recipe is read from the read measurement information. It is a chart of a mode in which the measurement information for each identifier can be visually distinguished , and a chart configuration unit that constitutes a chart capable of analyzing an abnormality ,
A server apparatus comprising an output unit that outputs a chart configured by the chart configuration unit. An original information receiving unit that receives original information, which is information based on the plurality of measurement information, from the plurality of manufacturing apparatuses;
A measurement information acquisition unit that performs a predetermined calculation on a plurality of pieces of original information received by the original information reception unit and acquires a plurality of measurement information;
The server apparatus according to claim 1, further comprising a measurement information storage unit that stores a plurality of pieces of measurement information acquired by the measurement information acquisition unit in the measurement information storage unit. The output instruction also includes attribute information of points or / and lines constituting the chart,
An output instruction accumulating unit for accumulating an output instruction having the point or / and line attribute information and the device identifier, or the point or / and line attribute information and the recipe identifier;
The instruction receiving unit
Also accepts an accumulation output instruction that is an output instruction of a chart corresponding to the output instruction accumulated by the output instruction accumulation unit,
The chart component is
When the instruction accepting unit accepts the accumulated output instruction, the chart output instruction corresponding to the accumulated output instruction is read, and the chart is configured according to the output instruction,
The output unit is
The server device according to claim 1, wherein the chart configured by the chart configuration unit is output. The chart component is
When the instruction receiving unit receives an output instruction, a plurality of pieces of measurement information having one of one or more device identifiers included in the output instruction is read from the measurement information storage unit, and the device is determined based on the read measurement information. It is a chart in an aspect in which measurement information for each identifier can be visually distinguished, and constitutes an SPC chart that is a chart in which a plurality of read measurement information is plotted in order of time indicated by time information included in one type of measurement information. The server device according to claim 1, claim 3, or claim 4. The chart component is
When the instruction receiving unit receives an output instruction, a plurality of pieces of measurement information having one of one or more device identifiers included in the output instruction is read from the measurement information storage unit, and the device is determined based on the read measurement information. The server according to any one of claims 1, 3 and 4, wherein the measurement information for each identifier is a chart in an aspect in which the information can be visually distinguished, and constitutes a correlation chart which is a chart showing a correlation between two types of measurement information. apparatus. The chart component is
When the instruction receiving unit receives an output instruction, a plurality of pieces of measurement information having one of one or more device identifiers included in the output instruction is read from the measurement information storage unit, and the device is determined based on the read measurement information. The measurement information for each identifier is a chart of an aspect that can be visually distinguished, and constitutes an MD chart that is a chart showing a correlation of three or more types of measurement information. Server device. The chart component is
When the instruction receiving unit receives an output instruction, a plurality of pieces of measurement information having one of one or more recipe identifiers included in the output instruction is read from the measurement information storage unit, and the recipe is read from the read measurement information. It is a chart in an aspect in which measurement information for each identifier can be visually distinguished, and constitutes an SPC chart that is a chart in which a plurality of read measurement information is plotted in order of time indicated by time information included in one type of measurement information. The server apparatus in any one of Claims 2-4. The chart component is
When the instruction receiving unit receives an output instruction, a plurality of pieces of measurement information having one of one or more recipe identifiers included in the output instruction is read from the measurement information storage unit, and the recipe is read from the read measurement information. 5. The server device according to claim 2, which is a chart in a mode in which measurement information for each identifier can be visually distinguished, and constitutes a correlation chart that is a chart showing a correlation between two types of measurement information. The chart component is
When the instruction receiving unit receives an output instruction, a plurality of pieces of measurement information having one of one or more recipe identifiers included in the output instruction is read from the measurement information storage unit, and the recipe is read from the read measurement information. The server apparatus according to any one of claims 2 to 4, which is a chart in a mode in which measurement information for each identifier can be visually distinguished, and constitutes an MD chart that is a chart showing a correlation between three or more types of measurement information. On the computer,
Measurement information that is time-series information about information measured by a plurality of manufacturing apparatuses that perform a predetermined process on the substrate to be processed, and includes information that includes a device identifier that identifies the manufacturing apparatus and time information that indicates time. It stores multiple,
An instruction receiving step for receiving an output instruction for a chart including one or more device identifiers when performing an abnormality analysis after detecting an abnormality;
When an output instruction is received in the instruction receiving step, a plurality of pieces of measurement information having one of one or more device identifiers included in the output instruction is read, and measurement information for each device identifier is read from the read measurement information. It is a chart in a visually distinguishable mode , and a chart configuration step that constitutes a chart that can be analyzed abnormally ;
A program for executing an output step of outputting a chart configured in the chart configuration step. On the computer,
A plurality of pieces of measurement information, which is time-series information about information measured by a plurality of manufacturing apparatuses that perform a predetermined process on a substrate to be processed, and information including a recipe identifier for identifying a recipe and time information indicating time And
An instruction receiving step for receiving an output instruction of a chart including one or more recipe identifiers when performing an abnormality analysis after detecting an abnormality;
When an output instruction is received in the instruction receiving step, a plurality of pieces of measurement information having one of one or more recipe identifiers included in the output instruction is read, and measurement information for each recipe identifier is read from the read measurement information. It is a chart in a visually distinguishable mode , and a chart configuration step that constitutes a chart that can be analyzed abnormally ;
A program for executing an output step of outputting a chart configured in the chart configuration step. On the computer,
An original information receiving step of receiving original information, which is information that is the basis of the plurality of measurement information, from the plurality of manufacturing apparatuses;
A measurement information acquisition step for performing a predetermined calculation on the plurality of original information received in the original information reception step and acquiring a plurality of measurement information;
The program according to claim 11 or 12, for further executing a measurement information accumulation step of accumulating a plurality of measurement information acquired in the measurement information acquisition step.