TW200815952A - Server and program - Google Patents

Abstract

To solve the problem that time-series information for each semiconductor manufacturing apparatus cannot be extracted and displayed when abnormality analysis is executed after an abnormality is detected in a conventional group management system. A server stores a plurality of items of measurement information, as time-series information about information measured with a plurality of semiconductor manufacturing apparatuses, and as information having an apparatus identifier for identifying semiconductor manufacturing apparatuses and time information indicating a time. In executing the abnormality analysis after abnormality detection, the server accepts an instruction of outputting a chart including the apparatus identifier, reads a plurality of items of measurement information having one or more apparatus identifiers included in the output instruction, constructs a chart of a mode with which the measurement information per apparatus identifier can be visually discriminated based on the read measurement information, and outputs the constructed chart. In this way, the time-series information for each semiconductor manufacturing apparatus can be extracted and displayed.

Description

[Technical Field] The present invention relates to a group management apparatus including, for example, a manufacturing apparatus that performs a specific process for a substrate to be processed, and a server apparatus that is connected to the two or more manufacturing apparatuses. , as well as server devices, etc. [Prior Art]

In the group management system, the group management system of the semiconductor manufacturing apparatus that can automatically and accurately process the data sent from the measuring device is processed. > Processing method (refer to, for example, Patent Document). In the measurement data processing method, the measurement data transmitted by the measuring device to the measuring unit of the group management unit of the group management system is received. The measurement data processing method is a calculation formula for registering the measurement data in advance, and when the measurement data is received, the measurement data is stored in the measurement data receiving buffer, and based on the recipe name of the bedding material, From the calculation formula of the foregoing registration, selecting at least one calculation formula having the same recipe name suitable for processing the aforementioned measurement data, and storing it in a calculation storage buffer, and calculating the stored measurement data for the calculation formula of the foregoing selection , the calculation result is memorized in the processed data storage buffer. ☆ ☆ The group management system of the semiconductor manufacturing equipment in the past has the function of displaying the sequence information between the semiconductor manufacturing equipments (the following is the function of the field). The graph shows the Junyang tube ^ ^ ^ ^ ^ ^ Information on semiconductor manufacturing equipment. _ ^The system's official hard number R., ..., after, the group management system has the use of charts for anomaly detection, 苴

And cla .f.. The function of FDC (plus U SS1 coffee 1011. error detection and classification). 120407.doc 200815952 In summary, the conventional group management system takes the abnormality detection in the inspection target group (period, device group, formula group, and/or parameter group) set by the user, and then takes in the inspection target group. All inspection data and abnormal analysis by the user. Further, as an abnormality analysis method in the case where an abnormality occurs, there are analysis methods by an SPC (Univariate Abnormality Detection) graph, a related (2-variable abnormality detection) graph, and an MC (Multivariate Anomaly Detection) graph. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 11-354395 (First page, FIG. 1 and the like) [Disclosure] [Problems to be Solved by the Invention] However, in the conventional group management system, an abnormality after abnormality detection In the analysis, all the inspection data of the detection target group are displayed, so that it is impossible to immediately analyze which manufacturing device has undergone an abnormality, or what formula is related to the abnormality. Especially in the case where the tweezer device is connected with tens to hundreds of manufacturing devices, the above abnormal analysis is very difficult. [Technical means for solving the problem] The server device of the present invention is configured to include a plurality of manufacturing devices that perform specific processing on the substrate to be processed, and a server device connected to the plurality of manufacturing devices, and have a function of performing abnormality detection after abnormality detection. a group management system; and a measurement information storage unit that stores a plurality of measurement information, wherein the measurement information is time series information about information measured by the plurality of manufacturing devices, and has a device identifier for identifying the manufacturing device or a recipe identifier for identifying a recipe and information indicating time information of the time; the instruction receiving unit accepts an output instruction of a chart including one or more device identifiers or more than one recipe identifier; the chart component is tied to The aforementioned refers to 120407.doc 200815952, from the aforementioned measurement information storage

And the output unit, wherein the receiving unit receives the output instruction, and reads the (1) solid number and the complex information included in the output instruction, and the recipe identifiers read from the visually It is possible to output a chart composed of the above-described chart forming unit. [Embodiment] The following describes the implementation of a group management system and the like by referring to the formula. Further, since the constituent elements having the same reference numerals in the embodiment are performed: the same operation, the description will be omitted. (Embodiment) FIG. 1 is a conceptual diagram of a group management system of the present embodiment. The group management system is a system for controlling a manufacturing apparatus such as a semiconductor manufacturing apparatus, a liquid crystal panel manufacturing apparatus, and the like. Moreover, the group management system has the function of performing abnormality analysis after abnormality detection. Further, the group management system has more than one manufacturing device 11 (manufacturing device 11 (1) to manufacturing device 11 (n)), server device 丨 2, and client device 13. The k device 11 is a device that performs specific processing on the substrate to be processed. More specifically, the manufacturing apparatus 11 is a semiconductor manufacturing apparatus and a liquid crystal panel mounted device. The manufacturing apparatus 11 performs various processes on the substrate to be processed, such as a film forming apparatus, an etching process, and a thermal oxidation process. The manufacturing apparatus 11 is, for example, a composite process type semiconductor wafer manufacturing apparatus. An example of the semiconductor wafer manufacturing apparatus is shown in Fig. 2 . As shown in FIG. 2, the semiconductor wafer manufacturing apparatus is configured to have a plurality of (for example, three) processes such as a film forming process, an etching process, or a thermal oxidation process, which are performed on various places of the semiconductor wafer. The processing chambers l 2, 3 are arranged to accommodate a plurality of sheets (for example, "sheets" of wafers W, C, and C2 processing chambers 4, 5; and in the processing chambers 1 2, 3 /, card processing to In the transfer processing chamber 6 in which the wafers w are delivered, the transfer processing chambers 6 are connected to each other via the gate valve G. The transfer processing chamber 6 is provided with, for example, multiple joints that can perform the flexion and extension operations and the rotation operation. The transfer arm 7 carries out the transfer of the wafer boundary between the processing chambers by the transfer arm 7. The cards Eci, C2 are reversed by 90 degrees when taken into the cassette processing chambers 4, 5 and The wafer insertion opening of the heads C1 and C2 is rotated toward the inside of the transport processing chamber 6, so that the wafer W can be taken out by the transfer arm 7 and placed in the wafer W. Formulations for information about specific processes of the substrate being processed (usually process condition values) The collection device is controlled by the recipe. The server device 12 is a server device that constitutes a so-called group management system, and has various functions for detecting abnormality of the sensor. Moreover, the server device usually has the function of abnormality detection. Then, in the server device (4), the abnormality analysis function is usually provided to the user after the abnormal 'normal k measurement. The recording medium (for example, the threshold storage unit) stores in advance the threshold value (for example, the upper limit threshold and the lower limit threshold) or the abnormal range limit of the positive fe and the use of the threshold to determine The measurement information is normal or "the judgment of ten" is detected by the judgment of the judgment unit. The function of this discriminating $detection is a well-known technique, so the detailed description of 120407.doc 200815952 is omitted. Further, the client device 13 issues various requests to the server device 12 and accepts the processing result of the server device 12. Figure 3 is a block diagram of the group management system of the present embodiment. The group management system includes one or more manufacturing devices, a server device 12, and a 'client device 13. The manufacturing apparatus 11 includes a recipe storage unit 1101, a processing unit 11 2, a measurement unit 1, a unit 1103, an original information storage unit 1104, and an original information transmission unit 丨丨〇5. The server device 12 includes a measurement information storage unit 12, an original information receiving unit 1202, a measurement information acquisition unit 丨2〇3, a measurement information storage unit 12〇4, an instruction logic unit 1205, a chart configuration unit 1206, and an output unit. 12〇7 and the output indication storage unit 1208. The client device 13 includes an instruction input unit 13〇1, an instruction delivery unit 1302, a chart reception unit 1303, and a chart display unit 13〇4. The recipe storage unit 1101 stores the Q-party used to control the manufacturing apparatus u. A recipe is information about a particular process for a substrate being processed, and typically contains a collection of information about process parameters. The process parameter information includes, for example, the species name, project name, parameter name, and value. The category name indicates the name of the type of process parameters, such as "temperature", "gas flow rate", "speed of plate lifter - degree", and the like. The item name indicates the name of the attribute of the process parameter, such as ^, lower speed, and "rotation speed". The parameter name is $冉 on the process parameter, which is like C", "A", etc. The value is assigned to the variable of the process parameter. Usually, the recipe is associated with the recipe identifier of the identification recipe (for example, stored in pairs. The recipe storage unit 1101 is preferably a non-volatile recording medium, name) 120407.doc -10- 200815952 A volatile recording medium can also be realized. The processing unit (4) "the square portion 11 () 1 finds a specific process for the substrate to be processed according to the recipe. The processing portion 11 () 2 can be realized by an MPU or a memory, etc. The processing of the processing portion (4) is usually It is realized by software. The software is recorded on a recording medium such as R〇M. However, it can also be realized by a hardware (dedicated circuit). Ο The measurement unit «determines the temperature, gas flow rate, or pressure deficiencies of the manufacturing system. The value 'acquires the original information of the poor news as the source of the information. The original information is the temperature of the temperature. The original information usually has information indicating the moment of the moment. The original information should have: Recipe identifier , the formula processed when identifying the value of the crotch (10), the temperature, etc.; the value of the measurement is unique; and the time information indicating the time of the deuterium. The measuring unit 11 3 can of course measure the complex temperature of the plurality, or The measurement unit 11〇3 can be realized by a temperature sensor of i or more, a sensor such as a flow sensor of 1 or more, etc. The original information storage unit 11〇4 is a measurement unit 11原3 obtained the original information The original information storage unit (10) can be realized by a memory or the like. The processing program of the original information storage unit 11〇4 is usually implemented by software. The software is recorded on a recording medium such as R〇M. However, it can also be implemented by hardware (dedicated circuit). Moreover, the recording medium should be a non-volatile recording medium, but it can also be realized by a volatile recording medium. The original information transmission department will use the original information storage unit 11〇4 The original information of the accumulation is transmitted to the word processor device 12. The original information transmitted by the original information transmission unit should have the measured value, and the time is 120407.doc -11 - 200815952 Ο

Information and identification manufacturing device u manufacturing device identifier. And the transmission unit (10) should have a value of 敎, a time=, and a manufacturing device identifier of the manufacturing device u, and a recipe identifier. , Lv Zhi, the original information accumulated by the original information accumulation department Lan and the original information transmitted by the original information transmission department 1105 may be different in structure or structure. Further, the original information may be composed of one manufacturing device identifier or/and one recipe identifier for the plurality of measured values. Further, the original information transmitting unit 11〇5 may transmit the attribute values such as the combination of the value of the time and the time information, and the attribute values such as the manufacturing device identifier and the recipe identifier in an irregular sequence. The original information transmitting unit 1105 can be realized by a wireless or wired communication mechanism or the like. The measurement information storage unit 1201 can store the plurality of measurement information. The plural measurement information is time-series information on the information measured by the plurality of manufacturing devices U, which is information having the device identifier identifying the manufacturing device U and the time information indicating the time. Further, the plurality of measurement information is further related to the time series information of the information measured by the plurality of manufacturing apparatuses 11, which is information having the device identifier identifying the manufacturing apparatus 11, the recipe identifier of the identification recipe, and the time information of the time of the representation. Also. The measurement information storage unit is preferably a non-volatile recording medium, but can also be realized by a volatile recording medium. Further, the measurement information of the measurement information storage unit 12〇1 may be information stored in the measurement information storage unit 1204, information directly received from the manufacturing device, or information read from a recording medium not shown. The original information receiving unit 1202 receives the original information of the information as the source of the plurality of measurement information from the plurality of manufacturing apparatuses 11. The original information receiving unit 12〇2 can be realized by a wireless or wired communication mechanism or the like. 120407.doc -12- 200815952 The measurement information acquisition unit 1203 performs a specific calculation on the plurality of original information received by the original information receiving unit 1202, and acquires the plurality of measurement information. For example, at a specific time interval, the specific operation calculates the average of the complex values of the plurality of original information, obtains the maximum value, obtains the minimum value, and calculates the standard deviation or the value of one. Moreover, the specific operation system is, for example, the calculation of the average value of the complex value of the plurality of original information, the maximum value of the service, the minimum value, the calculation of the standard deviation, or the calculation of the intermediate value in each of the recipes in the recipe. The predetermined hash acquisition unit 1203 reads, for example, a specific open type held in advance, and substitutes the plurality of original information in the arithmetic expression to obtain the plurality of measurement information. The measurement and acquisition unit 1203 can be realized by an MPU, a memory, or the like. The processing program of the measurement information acquisition unit 1203 is usually realized by software, and the software σ is recorded on a recording medium such as ROM. However, it is also possible to realize the measurement information storage unit 1204 by using the hardware (dedicated circuit). The measurement information acquisition unit 1204 stores the plurality of measurement information acquired by the measurement information acquisition unit 12〇3 in the measurement information storage unit 1201. In addition, the measurement information accumulation 12〇4 should be determined only by the determination information obtained by the measurement information acquisition unit 丨2〇3, and the determination unit determined by the determination unit has an abnormal relationship with the measurement information and the measurement information. The measurement information (measurement information of the same manufacturing apparatus as the measurement information of the abnormality, and the measurement information of the same recipe) is stored in the measurement shellfish storage unit 12〇1. The measurement information storage unit 12〇4 can be generally realized by an MPU or a memory. The processing procedure of the measurement information storage unit 1204 is usually realized by software, and the software is recorded on a recording medium such as R〇M. But it can also be implemented in hardware (dedicated circuit).

The ceremony does not accept the instructions from the party department 12〇5. The instruction is normally received from the client device U 120407.doc -13 - 200815952: but the instruction received from the keyboard or the slippery air connected to the server device 12 may be accepted, for example, including 丨 or more. The output instruction of the graph of the identifier includes the recipe identifier on (1): an output instruction of the graph, or an output instruction of a graph corresponding to the output instruction stored in the output instruction storage unit 12〇8. The output indication is an output indication for anomaly analysis after anomaly detection. Moreover, the export instructions can also include the type of chart (SPC chart, related chart or MD chart, etc.). Ο Ο and the 'output indication can also include the type of data (measurement information such as temperature, gas flow or pressure) of the object to be output from the chart. Moreover, the output indication may also include attribute information of points or/and lines constituting the chart. The attribute information refers to the color, point type (shape), line color, and line type. Also, when the round finger refers to the case where the 3 recipe identifier is not included, the recipe identifier generally indicates a plural recipe having the same identifier of the plurality of devices. The instruction accepting unit 1205 is composed of, for example, a wireless or wired receiving mechanism. The input mechanism indicated is by the numeric keypad, keyboard, mouse or menu face, and so on. The fingerprint receiving unit 1205 can be realized by a component driver of an input mechanism such as a numeric keypad or a keyboard, or a control software for a menu screen. When the instruction receiving unit 12〇5 receives the output instruction, the chart configuration unit 1206 reads out the plural number of the device identifiers including one or more of the device identifiers included in the output instruction from the measurement information storage unit 12〇1. The measurement information is used to form a map in which the measurement information of each device identifier is visually distinguishable from the measurement information read out. Further, when the chart configuration unit 12〇6 is instructing the text processing unit 1205 to receive the output instruction, the measurement information storage unit 1201 reads the recipe identifier 120407.doc-14 having the i or more included in the output instruction. The plural measurement information of any one of 200815952 ,, from the measurement information read out, constitutes a visually distinguishable aspect of the measurement information of each recipe identifier. Here, the graph which visually distinguishes the measurement information of each device identifier means that when the output instruction includes two or more device identifiers, the measurement information of each device identifier is different at different points (four corners and The chart outputted by the shape, color, and size of the circle, or the measurement information of each device identifier is a chart linked by different line colors. Moreover, the chart which visually distinguishes the measurement information of each device identifier means that the output finger includes not only! In the case of a device identifier, a graph consisting of the number of parameters of the shock identifier is determined. Moreover, the visually distinguishable chart of the measurement information of each recipe identifier means that when the output indication includes more than 2 formula identifiers, the measurement information of each recipe identifier is not in the (four) class (four) and the circle. The shape, color, size), or each formula 'do not pay, the measurement information is linked to different types of lines (solid lines, broken lines, etc.). Moreover, the visually distinguishable measurement information of each recipe identifier is a graph indicating that only one recipe identifier is included in the output indication: when the condition is determined by the complex determination information of the recipe identifier In addition, the graph configuration unit 1206 corresponds to the indication received by the instruction accepting unit 1205, and the output is displayed in accordance with the output instruction, and the composition is displayed in accordance with the output instruction. The part 1206 may also read the stepped query from the measurement of the Λ Λ 邛 1201 when the receiving unit 12 〇 5 receives the ^ 输出 输出 输出 , , , , , , , § § § § § § § § § § § § § § § § § § § § § § § § The measurement information of any one of the 1 payment, from the 兮4 Φ message to form the SPC 円矣 円矣 曰 曰, 〇攸 ~ 5 出 之 测定 测定 测定 测定 5 5 5 5 5 5 5 5 5 5 5 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定 测定Doc 200815952 The measurement information of the inconsistency is visually distinguishable, and the above-mentioned read complex measurement information is plotted on the basis of the time sequence indicated by the time information of the one type of measurement. Charts are used to monitor single variables In the case of the SPC chart, it is preferable to set the upper limit value (management value) of the monitoring target in advance (the graph configuration unit 1206 is held in advance), and when the value is other than the management value, an abnormality is detected. The abnormality detected by * is visually displayed. Further, when the instruction accepting unit 1205 receives the output instruction, the graph configuration unit 1206 may, from the measurement information storage unit 12〇1, have one of the output instructions. The plural measurement information of any one of the above device identifiers constitutes a correlation chart (2 variable abnormality detection chart) from the read measurement information, which is a visually distinguishable aspect of the measurement information of each device identifier. A graph showing the correlation between the two kinds of measurement information. The related graph is a graph for monitoring the correlation between the two variables. The graph configuration unit 1206 can also store the information from the test information when the instruction accepting unit 12〇5 receives the output instruction. The unit 120 1 reads the complex measurement information having any one of the device identifiers included in the output instruction, and forms the MD from the read measurement information. Table (multivariate anomaly detection chart), which is a visually distinguishable aspect of the measurement information of each device identifier, and represents a graph related to three or more kinds of measurement information. The MD chart monitors multivariate. The abnormality detection is performed, and the graph of the plurality of SPC charts is summarized. Then, for example, the graph forming unit 1206 should use the Mahalanobis distance to perform the abnormality judgment 'and output an MD graph which visually displays an abnormality or a normal image. Moreover, the graph The configuration unit 1206 may read, from the measurement information storage unit 12〇1, the recipe identification including one or more of the output instruction units 120407.doc-16-200815952 when the instruction reception unit 1205 receives the f-month status of the output instruction. The plural measurement information of any one of the symbols, and the SPC chart is formed from the read measurement information, which is a visually distinguishable aspect of the measurement information of each recipe identifier, and the time of the measurement information according to one type The order of the moments indicated in the information is a graph that plots the complex measurement information read. Further, when the instruction accepting unit 1205 accepts the output instruction, the chart configuration unit 1206 may read out one of the recipe identifiers including one or more of the output instructions included in the output instruction from the measurement information storage unit 12〇1. The plurality of measurement information forms a related chart from the read measurement information, which is a visually distinguishable aspect of the measurement information of each recipe identifier and represents a graph relating to two types of measurement information. Further, when the instruction accepting unit 1205 accepts the output instruction, the chart configuration unit 1206 may read, from the measurement information storage unit 012, a plural number of one or more of the recipe identifiers included in the output instruction. The measurement information is used to form an MD chart from the read measurement information, which is a visually distinguishable measurement information of each device identifier, and represents a graph relating to three or more types of measurement information. The chart is constructed by, for example, connecting a plurality of measurement information by a line on a time axis to obtain a chart. In the case where a plurality of measurement information having the value and the time information is given, since the processing for constituting the chart is a conventional technique, detailed description is omitted. Further, when a plurality of measurement information having a value and time information is given, since the processing of the spc chart, the related chart, or the MD chart is a conventional technique, detailed description thereof will be omitted. Moreover, the two kinds of measurement information also include information on two kinds of measured values (such as temperature and gas flow rate) in the measurement information. Further, the three or more types of measurement information include three or more kinds of measurement values (for example, temperature, gas flow 120407.doc -17-200815952, and pressure) in the measurement information. The table configuration unit 1206 can usually be (10) or memory. Come to the current chart structure! The processing procedure of 2〇6 is usually implemented by software, which is recorded on a recording medium such as R〇M. But it can also be implemented in hardware (dedicated circuit). The output unit 1207 outputs a graph composed of the chart forming units 12〇6. Thus, the output generally refers to the transfer to the client device 13. Wherein, the output portion is connected to the display of the stitcher device 12, the display chart, and the printing 往

(J or external transmission can be carried out. The output unit 1207 can be realized by a wireless or wired L mechanism. The output unit can also be a driver device of the output device or a driver software of the output device and The output command storage unit 1208 stores the attribute information having a dot or/and a line, and sets the identifier, or the attribute information of the point or/and the line, the recipe identifier, etc. The output instruction storage unit 1208 is, for example, a product indicating the acceptance of the setting of the storage chart (including color information), the month/father day f, and the accumulation of attribute information and devices having points or/and lines. The output information of the attribute information and the recipe identifier of the first, the <", or / and the line means that each of the 'output indication storage unit 1208 can normally output the instruction part by the MPU or the memory only a °. The software is used to record the software, and the software is recorded in R记录M and other recording media. However, it can also be implemented by hardware (dedicated circuit). Body image ΪΠΓ-"3.11 input various indications. Various indications are for starting Change of indication, point color, etc.: Table: (Line type 颜色 line color, point type or even more buckle. Here, the output of the chart or the attribute value of the chart 120407.doc •18- 200815952 (line type, line color, point type or point color, etc.) The change instruction or the like is an instruction input for the abnormality analysis after the user is notified of the abnormality detection. The input mechanism for the instruction is any one of a numeric keypad, a keyboard, a mouse, or a menu face. The portion 13〇1 can be realized by an input mechanism such as a sub-keyboard or a keyboard, a component driver thereof, or a menu software, a control software, etc. The instruction delivery unit 1302 transmits an instruction input from the instruction input unit 13〇1. The delivery to the server device 12 is generally referred to as the transmission using the communication mechanism. The instruction delivery unit 312 can be implemented by a wireless or wired communication mechanism, etc. The chart reception unit 1303 receives the information of the chart from the server device 12. The reception is generally referred to as reception using a communication unit. The chart reception unit 13〇3 can be realized by a wireless or wired communication unit or the like. The chart display unit 1304 accepts the chart. The information of the chart accepted by 1303 is displayed on the display unit. The chart display unit 13〇4 can be regarded as containing or not including the display Q. The chart display unit 13 04 can be used as the display driver software, or the display driver software and display. Next, the operation of the group management system will be described. First, the operation of the manufacturing apparatus will be described using the flowchart of Fig. 4. (Step S401) The processing unit Π02 reads out the recipe of the recipe storage unit 11〇1. (Step S402) The processing unit 11〇2 substitutes 1 for the counter}. (Step S403) The processing unit 1102 determines whether or not the i-th processing step exists in the recipe read in step S4〇1. If there is a step processing step, then step S404, if there is no i-th processing step, proceed to step 120407.doc -19-200815952 S409 ° (step S4〇4) processing unit 11〇2 to execute the i-th track The processing of the steps. (Step S405) The measurement unit 1103 performs a predetermined measurement (the original information here usually has only a value). The measurement here also has two values (such as temperature, gas flow and pressure, etc.). Ο u

(Step S 4 0 6) The measurement unit 110 3 acquires the time information from the clock (not shown), and gives the time information to the measured information (one or more values) to constitute the original information. Further, the measurement unit 1103 reads the pre-stored manufacturing device identifier I recipe identifier, and may be added to the original information. The recipe identifier is the identification information of the recipe being processed. (Step S407) The original information storage unit 积04 accumulates the original information constituted in the step S4 〇6 on a recording medium (not shown). Returning to the step (step S408), the processing unit 11〇2 increments the counter i by j S403 〇 (step S409), the original information transmitting unit 11〇5 determines whether or not the timing of transmitting the original information. If the timing of transmitting the original information is transmitted, the system information transmitting unit (10) proceeds to step S410' to terminate the processing if the original information is not transmitted. In the case where the original information is not transmitted, the original information is read into the server device by another institution (for example, via a removable recording medium). (Step S4H)) The original information transmitting unit reads the original information accumulated in the original information storage department. (Step S4U) The original information transfer unit (4) manufacturing device identifier and the recipe identifier are used to constitute the original information of the transfer for the original information read immediately after the step. Further, the manufacturing device identifier pre-120407.doc -20-200815952 is first held by the manufacturing device 11. The manufacturing device identifier and the recipe identifier are preferably stored in a non-volatile recording medium of the manufacturing apparatus 11, but may be stored in a non-volatile recording medium. (Step S412) The original information transmitting unit 1105 transmits the original information constituted by the step § 411 to the server device 12. Further, the original information transmitting unit 11〇5 holds information for communicating with the server device 12 (e.g., 15 of the server device 12> address, etc.). Further, in the flowchart of Fig. 4, the recipe identifier and the manufacturing device identifier are transmitted to the original information. However, it can also be transmitted to the server device 12 by dividing the value of the above value with the time information, the recipe identifier, and the manufacturing device identifier. Further, in this case, the original information composed of the combinations of the values of the above-mentioned types and the time information may be acquired, that is, transmitted to the server device 12. Then, after the processing of the steps of all the recipes is completed, the recipe identifier and the manufacturing device identifier are transmitted to the server device 12. In summary, the transmission timing of the original information transmission timing, one of the original information (the combination of value and time information, manufacturing device identifier, etc.). Next, the operation of the server device 12 will be described using the flowchart of Fig. 5. (Step S501) In order to perform abnormality analysis after the abnormality detection, the instruction accepting unit 1205 determines whether or not the instruction has been accepted. If the instruction is received, the process proceeds to step S502, and if the instruction is not received, the process proceeds to step S5:7. (Step S502) The chart constructing unit 1206 determines whether or not the instruction accepted in step S501 is an output instruction of the graph. If it is an output indication of the graph, the first 120407.doc •21 - 200815952 goes to step S503, and if it is not the output of the graph, the flow goes to step S508. (Step S503) The chart configuration unit 12〇6 acquires one or more device identifiers, or/and one or more recipe identifiers, which are included in the instruction received in step S501. (Step S504) The chart configuration unit 1206 searches for the measurement information storage unit 1201 by using the device identifier of 1 or more and/or the recipe identifier of 1 or more acquired in the step S503 or the step S510, and acquires measurement information of 1 or more. Further, the measurement information has at least one value (temperature or gas flow value, etc.) and time information. Here, the graph configuration unit 1206 acquires measurement information having one of the device identifiers included in the output instruction or more, and/or the determination of any one or more of the recipe identifiers included in the output instruction. News. (Step S505) The graph constructing unit 1206 is a graph that is obtained from the measurement information retrieved in step S504, and constitutes a map in accordance with the received output instruction. Further, the attribute value of the line of the graph is the attribute value acquired in step S 5 10, the attribute value indicated, or the preset attribute value, etc., and the chart constructing unit 1206 uses the attribute value to form a graph. The constructed chart is a graph that visually distinguishes the aspect of the measurement information of each device identifier, or/and a visually distinguishable aspect of the measurement information of each recipe identifier. Further, the chart to be constructed is a chart based on the information (SPC chart, related chart, MD chart, etc.) of the type of the chart indicating the output. (Step S506) The output unit 1207 outputs the map formed in the step S5〇6. Here, the output refers to the transmission to the client device 13. Returning to step S501 〇 120407.doc -22- 200815952 (step S507), the original information receiving unit 1202 determines whether or not the original information is received from the manufacturing apparatus 1. If the original information is received, the process goes to step S514, and if the original information is not received, the process returns to step S501. (Step S508) The chart constructing unit 1206 determines whether or not it is an output instruction of the graph indicating the output instruction of the graph accumulated in accordance with the instruction received in step 85〇1. If the output of the graph is instructed, then the process goes to step S5, and if it is not the indication of the map, the process goes to step S510.

Display (Step S509) The chart constructing unit 1206 reads the output instruction stored in step S512 in accordance with the finger received in step S5〇i, and acquires the identifier or/and the recipe identifier or the point of the chart from the output instruction. Or the attribute value of the line (point color, point shape, point size, etc.). Go to step S504. The line color, the line type, and the line thickness (step S510) are outputted to the storage unit to determine whether or not the instruction received in the determination step S50i is an accumulation instruction. If it is the accumulation finger*, the process goes to step S511, and if it does not accumulate the instruction, the process returns to step S5〇i. Ο (Step S511) The information indicating the output instruction of the graph in which the accumulation unit (4) obtains the output is output. Output Chart 夕钤山4b— ^ The output of the round table refers to the information of the device identification or / and the formula identifier, or the attribute value of the point or line of the chart (point or line color, point Or the seller of the line, the thickness of the point or line, etc.). (Step S512) The information indicating the storage unit (4) is outputted, and the information of the output instruction obtained by the step is added to the specific memory medium. Going back to step S501. (Step S5U) The measurement information acquisition unit performs a specific calculation on the plurality of original information received by the step-in-time information receiving unit 1202, and acquires one or more pieces of measurement information. τ 120407.doc • 23- 200815952 (Step SS14) The measurement information storage unit (3) 4 accumulates the measurement information of the step i or more of the steps 3 in the measurement information storage unit 1201β back to the step S501. y In addition, the flowchart of Fig. 5 ends the processing by inserting the power off or processing end. Moreover, in the flow chart of Fig. 5, the original information and the measurement information may be the same information. In this case, the original information processing is performed in step S513. Ο u Further, in the flowchart of Fig. 5, the user inputs the input value of the graph such as the type of the graph or the line color, and the server device accepts the input and outputs a graph according to the input. Further, in the flowchart of Fig. 5, the abnormality detecting process of the server device 12 is omitted. The above abnormality detecting function can be realized by a conventional technique. Further, in the flowchart of FIG. 5, the original information may be accumulated in advance, and when the chart output is executed, a specific calculation is performed on the plurality of original information, and the measured body information is obtained, and the measurement information is configured using the one or more pieces of measurement information to output a chart. . In short, it does not constitute the timing of measuring information. Next, the operation of the client device 13 will be described. When the instruction input accepting unit 1301 receives the instruction to output the graph from the user, the instruction accepting unit 1302 delivers the output instruction to the server device, and the chart accepting unit 1303 accepts the server device 12 The chart display unit 1304 displays the chart of the result of the processing. The following describes the specific actions of the group management system relating to the present embodiment. The conceptual diagram of the group management system is shown in Figure 1. 120407.doc •24- 200815952 In the present specific example, the original information of the temperature information in the device, for example, measured by the plurality of manufacturing devices n, has to be transferred to the server device 12. An example of the original information is Figure 6. The original information has temperature, time information, recipe identifier, and device identifier. The time information is the information indicating the time, which is the specific time/minute/second information, or only the time and timely information can be used - the ι square identifier is the information for identifying the formula 'it is the time when the temperature is taken out ' ID of the recipe being executed. The device identifier identifies the information of the manufacturing device 测定 £U that has been measured to the temperature. Further, in the specific example, the original information is acquired by each manufacturing device 11 in h seconds. Then, the original information receiving unit 12〇2 of the server device 12 successively receives the original information from the complex system and stores it. Here, the server device 12 first directly accumulates the original information. The original information of the accumulation is shown in the original information of Figure 7. The plural original information of the original information official table has the measurement results of the measuring unit 11〇3 when the plurality of recipes 11 are executed by the plurality of recipes. Next, the user inputs an indication for detecting an abnormality from the client device 13. With this instruction, the measurement information acquisition unit 1203 of the server device 12 performs a specific calculation on the values of the respective records of the original information management table of Fig. 7 to obtain a representative value. Here, the specific operation refers to a process of obtaining a maximum temperature, for example, at a temperature measured at the execution time of the three steps constituting the formulation. Then, the time information corresponding to the representative value is the initial moment of the execution time of the 3-step. Then, the measurement information acquisition unit 12〇3 obtains the information (measurement information table) of Fig. 8 and temporarily stores it in the memory. Then, the determination unit (not shown) detects the abnormal value from the information of Fig. 8 and notifies the user. For the user's abnormal prompts, such as charts, buzzers, etc., abnormal list, etc. 120407.doc -25· 200815952 can be 0. In addition, as mentioned above, Lidang recognizes, Japanese, and + from the book value; ^ The measurement method is a conventional technique, and the description is omitted. Next, in order to perform an abnormality analysis after the abnormality detection, the user inputs a pointer with a device identifier "device" from the client: device 13'. Then, the instruction input unit 13〇1 accepts the output instruction. Then, the indication delivery unit 13〇2 transmits an output indication to the server device 12 that the chart with the device identification device A” is transmitted. Ο

Next, the finger accepting unit 12 () 5 of the device 11 device 12 receives an output instruction of the chart having the appearance of the device "Device A". Next, the chart configuration: 1206 searches for the measurement information management table of FIG. 8 using "device A" as a key. Then, the chart constructing unit 1206 acquires the chart information of FIG. Chart information refers to the information that becomes the source of the chart. The chart information of Fig. 9 is filtered from the measurement information management table of Fig. 8 to filter the information with the device identification (4) "Device A". Next, the chart configuration unit 12〇6 reads the information of FIG. 9 to form a graph. This chart shows the time when the axis represents the time information, and the vertical axis represents the line of the value. Next, the output unit 1207 transmits the line graph formed by the chart forming unit 12〇6 to the client device 13. Next, the graph accepting unit 13〇3 of the client device 13 receives the line graph, and the graph display unit 1304 displays a line graph on the display as shown in FIG. • By the above processing, the user can know the manufacturing state of the manufacturing apparatus only by focusing on the value of the required measurement after the abnormality detection, and is extremely effective for the abnormal analysis of the manufacturing apparatus. Then, for example, the user enters a turn-out indication from the client device 13 with a chart identifying the recipe ID 120407.doc -26- 200815952 'Formulation Y'. Then, the instruction input unit 13 01 in turn ignores the output indication. Then, the instruction delivery unit 13G2 transmits an output instruction to the server device 12 having the chart of the recipe identifier "formulation γ". Next, the instruction accepting unit 12〇5 of the server device 12 receives an output instruction of the chart having the recipe identifier 酉 Υ 。. Next, the chart configuration unit searches the measurement information management table of Fig. 8 using the recipe Υ as a key. • ^, the chart constructing unit 1206 obtains the chart information of FIG. Chart Information Department 〇 # Become the source of the chart. The chart information of Fig. 11 is filtered from the measurement of the 疋 讯 管理 management table of Fig. 8 and the information with the recipe identifier "formulation γ" is filtered. Next, the chart constructing unit 1206 reads the information of FIG. 11 to form a graph. This chart shows the time when the horizontal axis represents the time information and the vertical axis represents the line value of the value. Next, the output unit 1207 transmits the line graph formed by the chart forming unit 1206 to the client device 13. Next, the graph accepting unit 13〇3 of the client device 13 receives the line graph, and the graph display unit 1304 displays a line graph on the display as shown in Fig. 12 . By the above processing, the user can only know the value of the recipe by focusing on the value measured when executing the desired recipe, and the detection of the problem of the recipe is extremely effective. • When outputting the graphs in Fig. 10, Fig. 13, etc., the user can set the attribute information of the graph such as the line color or line type. Then, in this case, the chart constructing unit 1206 constitutes a chart in accordance with the setting information of the chart. Further, when the user of the client device 13 inputs the indication of the output instruction, the output instruction storage unit 1208 extracts and accumulates the attribute identifiers of the device identifiers specified by the user 120407.doc -27-200815952. The wheel identifier of the chart identifier, such as the square identifier and the line color, can be used to specify the indicator that has been indicated. According to the present embodiment, in order to extract the measurement resources of each device or each formula, the accuracy of the analysis is high, and the result can be easily performed. Ο “Two according to this embodiment” can be accumulated and reused in order to be useful: 1: Output indication for chart output. With this function, even if the effective anomaly analysis method accumulated on the site is reused, it can be reused at other sites. In the case of this type of evil, as shown in Figure ,, the output graph is after U detection. ‘Reading from the measurement information storage unit has an output indication containing abnormal analysis! Any one of the above fission identifiers, or ... the plural number of the formula identifiers of the formula, from which the determination of the beta, the identifier of each device or/and the identification information of each recipe identifier is The visually distinguishable aspect, and the SPC chart of the chart of the plural measurement information of the reading edge can also be obtained according to the time information of the one type of measurement information. Further, the spc chart shown in Fig. 13 is, for example, an SPC chart composed of measurement information of one device identifier. Further, in the SPC chart shown in Fig. 13, the management value (upper limit) and the management value (lower limit) are output. When it is a value other than the official value, it is displayed as an exception. The management value (upper limit) and the official value (lower limit) are held in advance by the chart forming unit 1206 or a mechanism not shown. 120407.doc -28- 200815952 =, in this embodiment, as shown in Figure 14, the output chart is after j's previous (four) information storage department to read out the output indication containing the analysis of the different tool Any one of the above device identifiers, or one of the plural identification information of the formula identifier of the Λ, from the read 之 疋, each device identifier or / and each recipe identification The measurement information of the symbol is visually distinguishable, and the related chart indicating the correlation between the two types of measurement information (such as temperature and fortitude) is also awkward. Further, the graph related to Ο 图 shown in Fig. 14 is composed of, for example, two kinds of measurement information of one 罟1 』1U 罝 identifier: Fig. 纟. Moreover, in the related chart shown in Fig. 14, the output has two kinds of management values. When it is a value outside the range of the two management values, it is not abnormal. Further, in the present embodiment, as shown in FIG. 15, the output graph is read from the measurement information storage unit 12A1, and the device identifier having one or more output instructions including the abnormality analysis output is read from the measurement information storage unit 12A1. a plurality of determination information of any one or more of the recipe identifiers, from which the measured information, the identifier of each device or/and the measurement information of each recipe identifier are visually distinguishable, and MD chart of graphs related to more than three types of measurement information (eg, temperature, gas flow, and pressure at 2 locations). Further, the MD chart shown in Fig. 15 is an MD chart composed of, for example, measurement information of one device identifier. Further, the iMD chart shown in Fig. 15 is a graph for abnormality determination using, for example, the Mahalanobis distance. More specifically, the MD chart shown in Fig. 15 models a normal time data, and uses a Mahalanobis distance to represent the degree of abnormality as a numerical value. Moreover, in the MD chart shown in Fig. 15, the output has two management values of 120407.doc -29-200815952. When it is a value outside the range of the two management values, it is displayed as an exception. Moreover, in the specific example of the present embodiment, the graph of the output indicates a graph of the presence identifier or the measurement information of a recipe, which is the order of time indicated by the time information of the one type of the poor news. A line drawing of one of the complex test information read out. However, as shown in FIG. 16, the output graph may be read from the measurement information storage unit 1201, and the plurality of measurement information including the three device identifiers included in the output instruction may be read, and the read resource V 1 is read. 'The measurement information of each device identifier is a diagram of a visually distinguishable aspect' and the three pieces of the complex measurement information read out are plotted in the order of the time indicated by the time information of the one type of measurement information. In this case, the output indication includes three I-identifiers such as "Device A", "Device B", and "Device c". Then, the chart configuration unit 1206 uses "device a", "device B", and "device C" as keys, and searches for the measurement information storage unit 1201 three times, and acquires measurement information three times, and the individual keys are individually configured differently ( A graph of the attribute values of J 2 or the line is obtained by three graphs. Then, three graphs are output. In the present embodiment, three or more graphs (SPC graph, related graph, MD graph, etc.) can be freely selected as described above. The display type can be analyzed for the abnormality in response to the full inspection result. Further, in the specific example of the present embodiment, the original information or the measurement information may be held in advance by the server device 12. In this case, the original The information or the measurement information is obtained from the manufacturing device by a mechanism (not shown), and is delivered to the server device 12 via a recording medium or the like. 120407.doc -30- 200815952 Moreover, the specific t 6 of the present embodiment ^ ^ Λ. ^ ^ ^ The button is printed and the formula is recognized and the output chart is output, but the device identifier of 1 and above and the formula identifier of 1 are outputted. When the name identifier of 1 or more and the output of the formula identifier of 1 or more are specified, the chart constructing unit 1206 specifies the device identifier 1 and the device identifiers of 1 or more and 1 or more recipes. The identifier is used as a key to retrieve the measurement information (or the original information) to form a chart. Ο Ο Moreover, in the present embodiment, the user is removed and a part of the chart of the enlarged eye is input. Instructed to change the _ 兮 main Wrr \ ^ and the scale of one part of the chart (change the time interval of the measurement information or the interval of the steps) and output the chart. Moreover, in this embodiment, the original information and the measurement information are The same configuration is also possible. In this case, it is necessary to determine the information acquisition unit or the information storage unit. In this embodiment, it is not necessary to transmit and receive the original information between the manufacturing device and the server device. The server device can be given from the manufacturing device via, for example, a recording medium. Moreover, in the present embodiment, the group management system may not have the client device 13. In this case, the user is for the server. The input and output fingers of the present invention can be implemented by software. Then, the software can be transmitted by software downloading, etc. Moreover, the software can also be recorded on the CD- In addition, the software system of the present embodiment implements the following program: In general, the program is stored in a computer, and the complex number is stored in a specific process for the substrate to be processed 120407. Doc -31- 200815952 The time series information of the information measured by the manufacturing device, and having the information identifying the device identifier of the manufacturing device and the information indicating the time information of the time, the private mode is used to enable the computer to perform the following steps: The instruction accepting step of accepting an output instruction including a device identifier of one or more device identifiers when the abnormality analysis is performed after the abnormality detection, and a chart structuring step of accepting the output instruction in the instruction accepting step And reading 13 pieces of measurement information having any one of the device identifiers included in the output indication, and reading therefrom The measurement information constitutes a graphically distinguishable aspect of the measurement information of each device identifier; and an output step of outputting a chart composed of the aforementioned chart forming steps. Moreover, the program for implementing the server device is stored in the computer, and stores a plurality of time-series warehouse messages in a plurality of manufacturing devices (4) for a specific process of the substrate to be disposed, and has a recipe identifier and a representation time for identifying the recipe. The measurement information of the information of the moment information; the program is used to enable the computer to perform the following steps: the instruction acceptance step, the abnormality analysis after the abnormality detection, and the output of the chart containing the formula identifier of 1 or more a step of constructing a plurality of measurement information having any one of the recipe identifiers on the W included in the output instruction, in the case where the instruction accepting step accepts the output • # indication The measurement information read out is a graph that visually distinguishes the measurement information of each recipe identifier, and an output step that outputs a graph composed of the above-described graph composition steps. Moreover, the above-mentioned private system further enables the computer to execute the following steps: the original shell receiving step, which is based on the above-mentioned plurality of manufacturing apparatuses, and receives the information of the source of the poor information of the first 120407.doc 32 - 200815952 The original information; the measurement information acquisition step, = the plurality of original information received by the original information receiving step is obtained by the special information to obtain the plurality of measurement information; and the measurement information accumulation step is performed by storing the measurement information obtaining step The multiple test signals obtained. ' Ο Ο Moreover, in the above program, the output indication should also contain the attribute information of the points or / and lines constituting the chart. · It is advisable for the computer to further execute the output instruction accumulation step 'the system stores the point or / and the line> 1 information and the device identifier, or (4) or / and the attribute information of the line and the rounding instruction of the formula identifier; the instruction receiving step is also adapted to accept the output instruction accumulated in the output heart pool In the chart construction step, it is preferable that when the instruction accepting step receives the accumulation output instruction, the output instruction of the chart corresponding to the accumulation and storage is read, and the output instruction is configured according to the output instruction. In the graph description output step, it is preferable to output a graph composed of the above-described graph constituting step. Further, in the above-described graph constituting step of the above-described program, it is preferable to accept the acceptance step to the output 浐 主 主 、 、 、 、 、 On the second of U, read the test with the round of the finger ^ "the identification of the table - the determination of the plural number of cautions n buy out; t information to The SPC chart is composed of the measurement information of each of the different types, and the information of the measurement is visually identifiable, and the above-mentioned = measurement information is marked according to the time sequence indicated by the time information of the first measurement sub-message. Painted chart. < the last number and 'in the above-mentioned chart constituting step of the above-mentioned program, in the case where the acceptance step is accepted to the rounding instruction, the device having the μ included in the round = 120407.doc -33-200815952 is read out. The plural measurement information of the identifier is formed from the measured information to form a related chart, which is a visually distinguishable aspect of the measurement information of each device, and represents two types of measurement = information Related charts. In the above-described chart construction step of the above-described program, it is preferable to read one of the device identifiers including one or more of the device identifiers included in the output display when the instruction reception step receives the output instruction. The plural measurement information is used to form an MD chart from the read measurement information, which is a visually distinguishable aspect of the measurement information of the respective symbols, and represents a graph relating to three or more types of measurement information. Further, in the above-described chart configuration step of the above-described program, it is preferable that when the instruction accepting step receives the output instruction, the plural measurement information in the recipe identifier including one or more of the rounds included in the round presentation is read, and the reading information is read from 4 The measurement information is used to form an SPC chart, which is a visually distinguishable aspect of each recipe identifier 2 = and the information is read in accordance with the time sequence indicated by the time information of the measurement information. The plot of the plot is plotted. Further, in the above-described chart construction step of the above-described program, it is preferable that when the instruction accepting step accepts an output instruction, the plurality of measurement information in the recipe identifier including one or more of the round fingers is not read. From the read measurement information, a related chart is formed, which is a visually distinguishable aspect of the measurement information of each recipe identifier, and a graph showing the correlation between the two types of measurement information. Further, in the above-described chart construction step of the above program, it is preferable that the above-mentioned finger 120407.doc -34-200815952 does not receive the output instruction in the step, and the readout includes the output indication included! The plural determination information of the above formula identifiers - from the read measurement information to constitute an MD chart, which is a visually distinguishable aspect of the measurement information of each recipe identifier, and represents three types to: A chart of the relevant information for the measurement. Further, in each of the above embodiments, each processing (each function) is realized by performing centralized processing using the early device (system) or by performing distributed processing using a plurality of devices. In addition, in the above-mentioned program towel, the step of transmitting the information or the step of receiving the received information does not include the processing by the hardware, for example, the processing performed by the data machine or the interface card. (Only handled by hardware). Moreover, the computer that executes the above program can be single or plural. That is, it is possible to perform centralized processing or dispersion processing. Further, in each of the above embodiments, the communication means (instruction accepting unit or the like) existing in two or more devices can be physically realized by one medium. The present invention is not limited to the above embodiment, and can be performed. Various changes, of course, are also included within the scope of the invention. The disclosure of the Japanese Patent Application No. 2 _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ [Industrial Applicability] As described above, the group management system of the present invention can take out the time-series information of each manufacturing apparatus or each recipe in the case of abnormal analysis of 120407.doc -35-200815952 after abnormality detection. As a result, there is an effect that the abnormality can be performed very effectively, for example, as a group having a manufacturing process in which a manufacturing process U is performed on a substrate to be processed, and a manufacturing device connected to the two or more manufacturing devices is provided. Management systems, etc. are useful. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a conceptual diagram showing a group management system of an implementation type. Fig. 2 is a view showing an example of the semiconductor wafer manufacturing apparatus. Figure 3 is a block diagram of the group management system. Figure 4 is a flow chart showing the operation of the manufacturing apparatus. Figure 5 is a flow chart showing the operation of the server device. Fig. 6 is a view showing an example of the original information. Fig. 7 is a view showing the original information management table. Fig. 8 is a view showing the measurement information management table. Figure 9 is a diagram showing an example of the chart information. Fig. 10 is a view showing an example of output of a chart of the client device. Fig. 11 is a diagram showing an example of the information of the chart. Figure 2 is a diagram showing an example of the output of the chart of the client device. Fig. 13 is a view showing an example of output of a chart of the client device. Fig. 14 is a view showing an example of output of a chart of the client device. Fig. 15 is a view showing an example of output of a chart of the client device. Fig. 16 is a view showing an example of output of a chart of the client device. [Description of main component symbols] i, 2, 3 process chamber 120407.doc -36- 200815952 4, 5 6 7 11,11(1),11(2), ll(n) 12 13 1101 f, 1102 1103 1104 1105 1201 1202 1203 1204

O 1205 1206 ' 1207 1208 1301 1302 1303 13 04 120407.doc cassette processing chamber transport processing chamber transport arm manufacturing device server device client device recipe storage unit processing unit measurement unit original information storage unit original information transmission unit measurement information storage unit Original information receiving unit measurement information acquisition unit measurement information storage unit instruction reception unit chart configuration unit output unit output instruction storage unit instruction input unit instruction delivery unit chart reception unit chart display unit -37-200815952

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Claims (1)

200815952 X. Patent Application Range: 1 . A server device comprising a plurality of manufacturing devices for performing specific processing on a substrate to be processed and a server device connected to the plurality of manufacturing devices, and configured to perform abnormality analysis after abnormality detection a group management system; and comprising: a measurement information storage unit that stores a plurality of measurement information, wherein the measurement information is time series information about information measured by the plurality of manufacturing devices, and has device identification for identifying the manufacturing device And an information indicating a time information of the time; the instruction receiving unit receives an output instruction of a chart including one or more device identifiers; and the chart configuration unit is configured to receive the output instruction from the instruction receiving unit The measurement information storage unit reads the plurality of measurement information having one of the device identifiers included in the output instruction. The measurement information that constitutes the device identifier from the read measurement information is visually distinguishable. Chart of the aspect; and the output section, which is output before A chart composed of the chart components. 2. A server device comprising a group management system including a plurality of manufacturing apparatuses that perform specific processing on a substrate to be processed and a server device connected to the plurality of manufacturing apparatuses, and having an abnormality detection function after abnormality detection; And comprising: a measurement information storage unit, wherein the plurality of measurement information is stored, wherein the measurement information is time series information related to the information measured by the plurality of manufacturing devices, and has a recipe identifier for identifying the recipe and a time of representation 120407 .doc 200815952 Information on engraving information; refers to the non-acceptance department, which accepts the output instructions including the Hgl formula recognition table; the diagram and the table structure constitute °卩, which is the case where the instruction acceptance unit accepts the output to eight. From the measurement information storage unit, the measurement information of the plurality of test identifiers having any one or more of the formula identifiers included in the round out 1 = 10 is included, and the determination information of each recipe identifier is formed. a visually distinguishable aspect of the information; and the output section of the shell's output of the above-mentioned components of the table Table. 3. The feed device of the requester, wherein the step further comprises: the original information receiving unit 'receiving the original information as the source of the plurality of measured information sources from the plurality of manufacturing devices; and determining the information obtaining unit The original information receiving unit receives a specific calculation to obtain a plurality of measurement information and a measurement information accumulation unit, wherein the plurality of measurement information obtained by the measurement information acquisition unit is stored in the measurement information storage. unit. 4. The server device of claim 2, wherein the other plurality of manufacturing devices are purely used as the original information of the information of the plurality of information sources; Performing a specific calculation on the plurality of original poor messages received by the original foreign-informed receiving unit to obtain a plurality of measurement information 1. The measurement information acquisition unit stores the plurality of measurement information obtained by the measurement information acquisition unit in the measurement information. Store Qiu. 5. The feeder device of claim 1, wherein the output refers to: the attribute information of the point or/and the line of the structure of 120407.doc 200815952; the progress includes outputting the attribute indicating the line of the accumulation line 1 A, The X system stores an output instruction having the point or/and the second and the second device identifier, or the formula identifier; and the instruction receiving unit accepts the tr + p-iou as the accumulation instruction (4) Accumulation output indicator of the output instruction of the uncorresponding chart. When the chart component is instructed, read and store the accumulated output, and the instruction is made according to the rounding instruction. '; does not correspond to the chart 6 as 1 = the output of the chart constitutes the chart. The item 2 device of the second item, wherein the aforementioned round-out instruction also includes the point of the chart or the attribute information of the line, and the information of the line further includes an output indication storage unit, Ο: attribute information and The device identifier, or the output of the recipe identifier, and the attribute product of the recipe identifier are also accepted as a circle corresponding to the rounding indication accumulated by the output indication neighboring neighbor The accumulation of the output of the 丸 丸 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; The above-mentioned round-out part of the chart of the output of the sub-character is shown in the figure 7. The charter device of the requester: the chart. In the case where the instruction receiving unit receives the output instruction, the fan chart configuration unit reads out any one of the above-mentioned split symbols included in the round-trip instruction from the measurement capital % storage unit ′. Complex measurement macro times # ^ ^ Qiu Wenshuangcheng I 疋 讯 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The film system is based on the sequence of time indicated by the time information of one type of measurement information, and the chart of the multiple measurement information is read by 椤 1 8. ί 8. 8. 8. 8. 8. 8. 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如In the case where the device, the syllabus, the syllabus, the syllabus, the syllabus, the syllabus, the syllabus, the syllabus, the syllabus, the The multi-measurement of the output of the one or more of the ones that are not included in the date of the output, and the number of the data is not related to the data. Each device % μ , ° combined device identifier The information is in the form of the visual difference, and there are no two types of information related to the test information, such as the server installation of the request item 1, a total/attack, in which the Lishu chart component is in front. When the non-receiving unit receives the b under the output index, the multi-measurement tester that has one of the one or more device identifications not included in the output finger and the date of the output is read from the measurement-preferred storage unit. The master measurement of the Zoucheng MD chart, which is the device ^, β ^, the identification of the measurement information is visually different from the chart, and is based on the chart. The three or more kinds of measurement information are received by the server installation instruction receiving unit of the request item 2, and the output storage unit reads the output, and the graph configuration unit is not in the case of the above-mentioned measurement information. The plural measurement information of any one of the above-mentioned formulas is identified as 120407.doc 200815952. The measurement information from the readout constitutes an SPC chart, which is visually distinguishable between the information of each recipe identifier. The chart 'and the order of the moments indicated by the information at the time of the measurement information, and the chart of the above-mentioned multiple information read. 11 Ο 12. Ο 13. • If the item 2 of the service is 2 When the instruction receiving unit receives the output instruction, the graph configuration unit reads, from the measurement information storage unit, the plurality of measurement information including any one or more of the recipe identifiers included in the output instruction. The read measurement information constitutes a related chart, which is a visually distinguishable sadness chart of each recipe identifier, and is a graph showing two types of measurement information related to the server. In the case where the instruction receiving unit receives an instruction to output an instruction, the plurality of measurement information including one or more of the recipe identifiers included in the output instruction is read from the measurement information storage unit. The read measurement information constitutes an MD chart, which is a graphically distinguishable aspect of the measurement information of each recipe identifier, and represents three types of A chart related to the measurement information. A computer-readable recording medium for recording a program for storing a plurality of measurement information relating to time-series information measured by a plurality of manufacturing devices for performing specific processing on a substrate to be processed And the information identifying the device identifier of the manufacturing device and the time information indicating the time; and performing the following steps: 120407.doc 200815952 Instructing the acceptance step, in the case of abnormal analysis after the abnormality detection, [The diagram of the above device identifiers is shown in the figure; the chart construction step is to read out one of the one or more identifiers included in the output instruction when the instruction acceptance step is accepted until the output button is not received. The plurality of measurement information, the measurement information read out constitutes a graphically distinguishable aspect of the measurement information of each device identifier, and the output step is outputted to the chart formed by the chart construction step. 14. A computer-readable recording medium for recording a program for causing a computer to store a plurality of measurement information relating to time series information relating to information measured by a plurality of manufacturing devices for performing specific processing on a substrate to be processed. And the recipe identifier of the identification formula and the moment indicating the moment of the moment, and performing the following steps: Instructing the acceptance step, which is based on the abnormality analysis and the abnormality analysis, the text contains more than one recipe identifier An output instruction of the graph; a graph structuring step 'when the instruction accepting step accepts an output instruction, the plurality of measurement information having any one or more of the recipe identifiers included in the output instruction is obtained from The read measurement information constitutes a graphically distinguishable aspect of the measurement information of each recipe identifier; and an output step is outputted in the table of the above-mentioned chart forming step of FIG. 120407.doc 200815952. 15. The computer-readable recording medium of the recording program of claim 13, wherein the computer further performs the following steps: ^ an original information receiving step of receiving information from the plurality of manufacturing devices as a source of the plurality of measured information The original information; the measurement of the 疋 疋 汛 汛 , , , 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛 汛The step of storing the plurality of measurement information obtained by the measurement information obtaining step. 16. The computer-readable recording medium of the recording program of claim 14, wherein the computer further performs the following steps: the original information receiving step of receiving the information as the source of the plurality of measured information sources from the plurality of manufacturing devices Information; measuring the δ κκ acquisition step, which performs a specific operation on the plurality of original babies received by the original information receiving step U to obtain the plurality of measurement information, and the Α Α Α Α Α ' 其 其 其 ' ' ' Obtain the complex measurement information obtained in the step. 120407.doc