JP4790972B2 - 2つのスピン・オン誘電材料から構成されるハイブリッド型低誘電率相互接続構造 - Google Patents
2つのスピン・オン誘電材料から構成されるハイブリッド型低誘電率相互接続構造 Download PDFInfo
- Publication number
- JP4790972B2 JP4790972B2 JP2002570287A JP2002570287A JP4790972B2 JP 4790972 B2 JP4790972 B2 JP 4790972B2 JP 2002570287 A JP2002570287 A JP 2002570287A JP 2002570287 A JP2002570287 A JP 2002570287A JP 4790972 B2 JP4790972 B2 JP 4790972B2
- Authority
- JP
- Japan
- Prior art keywords
- dielectric
- span
- layer
- interconnect structure
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000003989 dielectric material Substances 0.000 title claims description 37
- 238000000034 method Methods 0.000 claims description 43
- 229910052751 metal Inorganic materials 0.000 claims description 42
- 239000002184 metal Substances 0.000 claims description 42
- 230000008569 process Effects 0.000 claims description 33
- 238000005498 polishing Methods 0.000 claims description 29
- 238000000059 patterning Methods 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 16
- 239000004020 conductor Substances 0.000 claims description 14
- 238000005530 etching Methods 0.000 claims description 11
- 230000009977 dual effect Effects 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 9
- 239000002318 adhesion promoter Substances 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 8
- 239000011148 porous material Substances 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- 239000000956 alloy Substances 0.000 claims description 2
- 229910045601 alloy Inorganic materials 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 125000003118 aryl group Chemical group 0.000 claims description 2
- 229910052758 niobium Inorganic materials 0.000 claims description 2
- 150000001282 organosilanes Chemical class 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 229920001187 thermosetting polymer Polymers 0.000 claims description 2
- 239000004634 thermosetting polymer Substances 0.000 claims description 2
- 229910052718 tin Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 66
- 239000010949 copper Substances 0.000 description 9
- 238000001020 plasma etching Methods 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 8
- 230000008021 deposition Effects 0.000 description 6
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 6
- 238000001312 dry etching Methods 0.000 description 5
- 238000010304 firing Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 238000005137 deposition process Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000004952 furnace firing Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 229920003209 poly(hydridosilsesquioxane) Polymers 0.000 description 3
- 238000005382 thermal cycling Methods 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000000224 chemical solution deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 210000002381 plasma Anatomy 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000013557 residual solvent Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910018182 Al—Cu Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910004166 TaN Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76835—Combinations of two or more different dielectric layers having a low dielectric constant
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/022—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being a laminate, i.e. composed of sublayers, e.g. stacks of alternating high-k metal oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02203—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being porous
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76807—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures
- H01L21/76811—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics for dual damascene structures involving multiple stacked pre-patterned masks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/312—Organic layers, e.g. photoresist
- H01L21/3121—Layers comprising organo-silicon compounds
- H01L21/3122—Layers comprising organo-silicon compounds layers comprising polysiloxane compounds
- H01L21/3124—Layers comprising organo-silicon compounds layers comprising polysiloxane compounds layers comprising hydrogen silsesquioxane
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Description
a)Cu線の厚み(すなわちトレンチの深さ)および抵抗率の制御が不充分、
b)低k誘電体の熱膨張率(CTE)が高く、そのために最終的に熱サイクル中の故障につながる、
c)超低k材料は化学機械式研磨(CMP)に耐えることができない、
d)該構造を形成するためのコストが増加すること
を含む。
R.D. Goldblattらによる、"A High Performance 0.13 μm Copper BEOL Technology with Low-K Dielectric", Proceedings of the International Interconnect Technology Conference, IEEE Electron Devices Society, June 5-7,(2000),ページ261-263
a)該表面に形成されたパターン化されたハイブリッド型低k誘電体を有する基板で、前記パターン化されたハイブリッド型低k誘電体は、約2.6あるいはそれ以下の有効誘電率を有し、底部スパン・オン誘電体および上部スパン・オン誘電体から構成され、前記底部および前記上部スパン・オン誘電体は異なる原子組成を有し、前記スパン・オン誘電体の少なくとも一つは多孔質であることを含み、
b)前記パターン化されたハイブリッド型低k誘電体の上に形成された研磨止め層、および
c)前記パターン化されたハイブリッド型低k誘電体内部に形成された金属導体領域
を含む相互接続構造が提供される。
(a)基板の表面上にハイブリッド型低k誘電体を形成し、前記ハイブリッド型低k誘電体は、約2.6あるいはそれ以下の有効誘電率を有し、かつ底部スパン・オン誘電体および上部スパン・オン誘電体から構成され、前記底部および上部スパン・オン誘電体は異なる原子組成を有しかつ前記スパン・オン誘電体の少なくとも一つは多孔質であることを含み、
(b)前記ハイブリッド型低k誘電体の上にハード・マスクを形成し、前記ハード・マスクは少なくとも研磨止め層を含んでおり、
(c)前記ハイブリッド型低k誘電体の一部を露出するために前記ハード・マスクにおいて開口部を形成し、
(d)前記ハイブリッド型低k誘電体の前記露出された一部において前記ハード・マスクをエッチング・マスクとして使用してトレンチを形成し、
(e)前記トレンチを少なくとも導電金属で充填し、および
(f)前記導電金属を前記研磨止め層の上で止めて平坦化する
工程を含む。
(a) 発明による構造(言い換えれば、低k誘電体に加えて金属導体相互接続構造)は、金属導電抵抗の精密で均一な制御ができ、
(b)高度に制御された金属導電抵抗は、追加のプロセス・コストなしでかつ真空ベースの堆積装置の使用を減らしても達成でき、
(c)本発明の構造は、一つの好ましい実施形態において、ビアを取り囲む多孔質の無機誘電体が低熱膨張率のために熱サイクル(ビアの抵抗は大きくは変化しない)中、安定であり、
(d)本発明の構造は、別の好ましい実施形態において、金属配線を取り囲む多孔質のより丈夫な有機誘電体の存在により通常のCMPプロセスに耐える
という優位性を有する。
12 ハイブリッド型低k誘電体
12’硬化済みハイブリッド型低k誘電体
14 底部スパン・オン誘電体
14’硬化済み底部スパン・オン誘電体
16 上部スパン・オン誘電体
16’硬化済み上部スパン・オン誘電体
18 ハード・マスク
18’硬化済みハード・マスク
20 研磨止め層
20’硬化済み研磨止め層
22 パターニング層
22’硬化済みパターニング層
24 (第1の)開口部
26 第2の開口部
28 トレンチ
30 ライナー材料
32 導電金属
Claims (16)
- (a)基板と、
(b)前記基板の上に配置され、2.6あるいはそれ以下の有効誘電率を有し、底部スパン・オン(スピン・オンされた)誘電体および上部スパン・オン誘電体から構成され、前記底部スパン・オン誘電体と前記上部スパン・オン誘電体の間に接着促進剤が配置され、前記底部スパン・オン誘電体および前記上部スパン・オン誘電体は異なる原子組成を有し、かつ前記スパン・オン誘電体の少なくとも一つは多孔質である、ハイブリッド型低k誘電体と、
(c)前記ハイブリッド型低k誘電体の上に形成された研磨止め層と、
(d)前記ハイブリッド型低k誘電体および前記研磨止め層の内部に形成されたトレンチと、
(e)前記トレンチ内に充填された金属導体領域と、を含み、
前記研磨止め層と前記研磨止め層上に形成されたパターニング層とを含み、前記上部スパン・オン誘電体内に形成される配線トレンチに対応する第1の開口部が、前記パターニング層内に形成され、前記底部スパン・オン誘電体内に形成されるビア・トレンチに対応する第2の開口部が、前記第1の開口部の内側で前記研磨止め層内に形成される、ハード・マスクを用いて前記トレンチが形成され、
前記底部スパン・オン誘電体は前記上部スパン・オン誘電体のための固有のエッチング・ストッパ層として使用される、相互接続構造。 - 前記ハイブリッド型低k誘電体の前記有効誘電率が1.2乃至2.2である、請求項1に記載の相互接続構造。
- 両方の前記スパン・オン誘電体が、多孔質(porous)の誘電材料であり、前記上部スパン・オン誘電体が有機誘電体であり、かつ前記底部スパン・オン誘電体が無機誘電体である、請求項1に記載の相互接続構造。
- 前記上部スパン・オン誘電体は無機誘電体でかつ前記底部スパン・オン誘電体は有機誘電体である、または前記上部スパン・オン誘電体は有機誘電体でかつ前記底部スパン・オン誘電体は無機誘電体である、請求項1に記載の相互接続構造。
- 前記上部スパン・オン誘電体の前記無機誘電体は、多孔質であり、5乃至80%の体積多孔率で、5乃至500Åの孔径を有する、請求項4に記載の相互接続構造。
- 前記無機誘電体は、Si、O、とHおよび任意選択のCを含む、請求項5に記載の相互接続構造。
- 前記無機誘電体は、HOSP、MSQ、TEOS、HSQ、MSQ−HSQ共重合体、オルガノシランもしくはその他Si含有材料である、請求項6に記載の相互接続構造。
- 前記有機誘電体は、C、O、およびHを含む、請求項4に記載の相互接続構造。
- 前記有機誘電体は、芳香族熱硬化高分子樹脂である、請求項8に記載の相互接続構造。
- 前記上部スパン・オン誘電体の前記有機誘電体は、多孔質であり、5乃至35%の体積多孔率で、1乃至50nmの孔径を有する、請求項4に記載の相互接続構造。
- 前記研磨止め層が、無機誘電体または有機誘電体である、請求項1に記載の相互接続構造。
- 前記金属導体領域が、Al、Cu、Ag、Wおよびその合金から構成されるグループから選択された少なくとも一つの導電金属を含む、請求項1に記載の相互接続構造。
- 前記金属導体領域が、ライナー材料をさらに含み、前記ライナー材料は、TiN、TaN、Ta、Ti、W、WN、Cr、Nbとその混合物から構成されるグループから選択される、請求項12に記載の相互接続構造。
- 底部スパン・オン誘電体および上部スパン・オン誘電体から構成され、前記底部スパン・オン誘電体と前記上部スパン・オン誘電体の間に接着促進剤が配置され、2.6あるいはそれ以下の誘電率を有し、前記底部および上部スパン・オン誘電体は異なる原子組成を有し、かつ前記誘電体の少なくとも一つは多孔質である、ハイブリッド型低k誘電体と、
研磨止め層と、前記研磨止め層の上に形成されるパターニング層とを含み、前記上部スパン・オン誘電体内に形成される配線トレンチに自己整合する、第1の開口部(24)が前記パターニング層内に形成され、前記底部スパン・オン誘電体内に形成されるビア・トレンチに自己整合する、前記第1の開口部内に形成され前記研磨止め層を貫通する第2の開口部(26)とを有する、ハード・マスクとを含み、前記底部スパン・オン誘電体は上部スパン・オン誘電体のための固有のエッチング・ストッパ層として使用される、
デュアル・ダマシン型の相互接続構造の形成に用いる構造体。 - (a)基板の表面上に底部スパン・オン誘電体、接着促進剤、および上部スパン・オン誘電体を順次形成して、ハイブリッド型低k誘電体を形成する工程であって、前記ハイブリッド型低k誘電体は、2.6以下の有効誘電率を有し、前記底部および上部スパン・オン誘電体は異なる原子組成を有し、かつ前記スパン・オン誘電体の少なくとも一つは多孔質である工程と、
(b)前記ハイブリッド型低k誘電体の上に、研磨止め層(20)とパターニング層を順次堆積して、前記研磨止め層とパターニング層を含むハード・マスク層を形成する工程と、
(c)前記研磨止め層の一部を露出するために、前記パターニング層内に第1の開口部を形成する工程と、
(d)前記第1の開口部の内側に前記ハイブリッド型低k誘電体の一部を露出するために、前記研磨止め層内に第2の開口部を形成する工程と、
(e)前記ハード・マスク層の前記研磨止め層をエッチング・マスクとして使用して、前記第2の開口部に対応するビア・トレンチを、前記上部スパン・オン誘電体を貫通して前記底部スパン・オン誘電体内に形成し、続いて前記ハード・マスク層の前記パターニング層をエッチング・マスクとして使用し、かつ前記底部スパン・オン誘電体を前記上部スパン・オン誘電体に対する固有のエッチング・ストッパ層として使用して、前記第1の開口部に対応する配線トレンチを、前記上部スパン・オン誘電体内に形成する工程と、
(f)前記ビア・トレンチおよび配線トレンチを導電金属で充填する工程と、
(g)前記導電金属を前記研磨止め層の上で止めて平坦化する工程と
を含む、相互接続構造を形成する方法。 - 前記導電金属で充填する工程の前に前記トレンチの中にライナー材料を堆積する工程をさらに含む、請求項15に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/795,429 | 2001-02-28 | ||
US09/795,429 US6677680B2 (en) | 2001-02-28 | 2001-02-28 | Hybrid low-k interconnect structure comprised of 2 spin-on dielectric materials |
PCT/US2001/047794 WO2002071468A1 (en) | 2001-02-28 | 2001-12-10 | HYBRID LOW-k INTERCONNECT STRUCTURE COMPRISED OF 2 SPIN-ON DIELECTRIC MATERIALS |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2004523910A JP2004523910A (ja) | 2004-08-05 |
JP4790972B2 true JP4790972B2 (ja) | 2011-10-12 |
Family
ID=25165490
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002570287A Expired - Fee Related JP4790972B2 (ja) | 2001-02-28 | 2001-12-10 | 2つのスピン・オン誘電材料から構成されるハイブリッド型低誘電率相互接続構造 |
Country Status (7)
Country | Link |
---|---|
US (1) | US6677680B2 (ja) |
EP (1) | EP1371090A4 (ja) |
JP (1) | JP4790972B2 (ja) |
KR (1) | KR100538750B1 (ja) |
CN (1) | CN1261989C (ja) |
TW (1) | TW533544B (ja) |
WO (1) | WO2002071468A1 (ja) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7425346B2 (en) * | 2001-02-26 | 2008-09-16 | Dielectric Systems, Inc. | Method for making hybrid dielectric film |
US7011864B2 (en) * | 2001-09-04 | 2006-03-14 | Tokyo Electron Limited | Film forming apparatus and film forming method |
US7183195B2 (en) | 2002-02-22 | 2007-02-27 | Samsung Electronics, Co., Ltd. | Method of fabricating dual damascene interconnections of microelectronic device using hybrid low k-dielectric and carbon-free inorganic filler |
TWI278962B (en) * | 2002-04-12 | 2007-04-11 | Hitachi Ltd | Semiconductor device |
US6917108B2 (en) * | 2002-11-14 | 2005-07-12 | International Business Machines Corporation | Reliable low-k interconnect structure with hybrid dielectric |
US7288292B2 (en) * | 2003-03-18 | 2007-10-30 | International Business Machines Corporation | Ultra low k (ULK) SiCOH film and method |
US20040191417A1 (en) * | 2003-03-28 | 2004-09-30 | Dorie Yontz | Method of integrating a porous dielectric in an integrated circuit device |
KR100538379B1 (ko) * | 2003-11-11 | 2005-12-21 | 주식회사 하이닉스반도체 | 반도체 소자의 금속배선 형성 방법 |
JP2005244031A (ja) * | 2004-02-27 | 2005-09-08 | Nec Electronics Corp | 半導体装置およびその製造方法 |
US7015150B2 (en) * | 2004-05-26 | 2006-03-21 | International Business Machines Corporation | Exposed pore sealing post patterning |
JP4878779B2 (ja) | 2004-06-10 | 2012-02-15 | 富士フイルム株式会社 | 膜形成用組成物、絶縁膜及び電子デバイス |
US20070042609A1 (en) * | 2005-04-28 | 2007-02-22 | Senkevich John J | Molecular caulk: a pore sealant for ultra-low k dielectrics |
US7361541B2 (en) * | 2005-07-27 | 2008-04-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Programming optical device |
US8368220B2 (en) * | 2005-10-18 | 2013-02-05 | Taiwan Semiconductor Manufacturing Co. Ltd. | Anchored damascene structures |
US20070278682A1 (en) * | 2006-05-31 | 2007-12-06 | Chung-Chi Ko | Self-assembled mono-layer liner for cu/porous low-k interconnections |
US7544608B2 (en) * | 2006-07-19 | 2009-06-09 | International Business Machines Corporation | Porous and dense hybrid interconnect structure and method of manufacture |
US7466027B2 (en) * | 2006-09-13 | 2008-12-16 | Taiwan Semiconductor Manufacturing Co., Ltd. | Interconnect structures with surfaces roughness improving liner and methods for fabricating the same |
US7723226B2 (en) * | 2007-01-17 | 2010-05-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnects containing bilayer porous low-k dielectrics using different porogen to structure former ratio |
US7947565B2 (en) | 2007-02-07 | 2011-05-24 | United Microelectronics Corp. | Forming method of porous low-k layer and interconnect process |
US7629264B2 (en) * | 2008-04-09 | 2009-12-08 | International Business Machines Corporation | Structure and method for hybrid tungsten copper metal contact |
CN102024790B (zh) * | 2009-09-22 | 2012-08-22 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件、其制造方法以及包含其的集成电路和电子设备 |
US8786050B2 (en) | 2011-05-04 | 2014-07-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | High voltage resistor with biased-well |
US8664741B2 (en) | 2011-06-14 | 2014-03-04 | Taiwan Semiconductor Manufacturing Company Ltd. | High voltage resistor with pin diode isolation |
US9373619B2 (en) | 2011-08-01 | 2016-06-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | High voltage resistor with high voltage junction termination |
CN102386129A (zh) * | 2011-08-15 | 2012-03-21 | 中国科学院微电子研究所 | 同时制备垂直导通孔和第一层再布线层的方法 |
US8994178B2 (en) | 2012-03-29 | 2015-03-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect structure and method for forming the same |
KR20140083696A (ko) | 2012-12-26 | 2014-07-04 | 제일모직주식회사 | 반도체 소자의 듀얼 다마신 구조 형성 방법 및 그에 따른 반도체 소자 디바이스 |
US10396042B2 (en) | 2017-11-07 | 2019-08-27 | International Business Machines Corporation | Dielectric crack stop for advanced interconnects |
US10534888B2 (en) | 2018-01-03 | 2020-01-14 | International Business Machines Corporation | Hybrid back end of line metallization to balance performance and reliability |
US10475753B2 (en) | 2018-03-28 | 2019-11-12 | International Business Machines Corporation | Advanced crack stop structure |
US10490513B2 (en) | 2018-03-28 | 2019-11-26 | International Business Machines Corporation | Advanced crack stop structure |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10112503A (ja) * | 1996-10-03 | 1998-04-28 | Sony Corp | 半導体装置の製造方法 |
JP2000106396A (ja) * | 1998-09-29 | 2000-04-11 | Sharp Corp | 半導体装置の製造方法 |
JP2000150516A (ja) * | 1998-09-02 | 2000-05-30 | Tokyo Electron Ltd | 半導体装置の製造方法 |
JP2001024060A (ja) * | 1999-05-13 | 2001-01-26 | Internatl Business Mach Corp <Ibm> | デュアル・ダマシン法のためのシルセスキオキサン誘電体の一時酸化 |
JP2003526197A (ja) * | 1998-08-27 | 2003-09-02 | アライドシグナル インコーポレイテッド | シランをベースとするナノポーラスシリカ薄膜 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6197696B1 (en) * | 1998-03-26 | 2001-03-06 | Matsushita Electric Industrial Co., Ltd. | Method for forming interconnection structure |
US6232235B1 (en) * | 1998-06-03 | 2001-05-15 | Motorola, Inc. | Method of forming a semiconductor device |
TW437040B (en) * | 1998-08-12 | 2001-05-28 | Applied Materials Inc | Interconnect line formed by dual damascene using dielectric layers having dissimilar etching characteristics |
US6071809A (en) | 1998-09-25 | 2000-06-06 | Rockwell Semiconductor Systems, Inc. | Methods for forming high-performing dual-damascene interconnect structures |
US6312874B1 (en) * | 1998-11-06 | 2001-11-06 | Advanced Micro Devices, Inc. | Method for forming a dual damascene trench and underlying borderless via in low dielectric constant materials |
US6153514A (en) * | 1999-01-04 | 2000-11-28 | Advanced Micro Devices, Inc. | Self-aligned dual damascene arrangement for metal interconnection with low k dielectric constant materials and nitride middle etch stop layer |
US6255735B1 (en) * | 1999-01-05 | 2001-07-03 | Advanced Micro Devices, Inc. | Dual damascene arrangement for metal interconnection with low k dielectric constant materials in dielectric layers |
US6159842A (en) * | 1999-01-11 | 2000-12-12 | Taiwan Semiconductor Manufacturing Company | Method for fabricating a hybrid low-dielectric-constant intermetal dielectric (IMD) layer with improved reliability for multilevel interconnections |
-
2001
- 2001-02-28 US US09/795,429 patent/US6677680B2/en not_active Expired - Lifetime
- 2001-12-10 CN CNB018229018A patent/CN1261989C/zh not_active Expired - Lifetime
- 2001-12-10 WO PCT/US2001/047794 patent/WO2002071468A1/en active IP Right Grant
- 2001-12-10 KR KR10-2003-7010646A patent/KR100538750B1/ko not_active IP Right Cessation
- 2001-12-10 EP EP01990106A patent/EP1371090A4/en not_active Withdrawn
- 2001-12-10 JP JP2002570287A patent/JP4790972B2/ja not_active Expired - Fee Related
-
2002
- 2002-02-22 TW TW091103227A patent/TW533544B/zh not_active IP Right Cessation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10112503A (ja) * | 1996-10-03 | 1998-04-28 | Sony Corp | 半導体装置の製造方法 |
JP2003526197A (ja) * | 1998-08-27 | 2003-09-02 | アライドシグナル インコーポレイテッド | シランをベースとするナノポーラスシリカ薄膜 |
JP2000150516A (ja) * | 1998-09-02 | 2000-05-30 | Tokyo Electron Ltd | 半導体装置の製造方法 |
JP2000106396A (ja) * | 1998-09-29 | 2000-04-11 | Sharp Corp | 半導体装置の製造方法 |
JP2001024060A (ja) * | 1999-05-13 | 2001-01-26 | Internatl Business Mach Corp <Ibm> | デュアル・ダマシン法のためのシルセスキオキサン誘電体の一時酸化 |
Also Published As
Publication number | Publication date |
---|---|
TW533544B (en) | 2003-05-21 |
JP2004523910A (ja) | 2004-08-05 |
US6677680B2 (en) | 2004-01-13 |
WO2002071468A1 (en) | 2002-09-12 |
EP1371090A4 (en) | 2007-10-24 |
EP1371090A1 (en) | 2003-12-17 |
KR100538750B1 (ko) | 2005-12-26 |
KR20030079994A (ko) | 2003-10-10 |
CN1518762A (zh) | 2004-08-04 |
US20020117754A1 (en) | 2002-08-29 |
CN1261989C (zh) | 2006-06-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4790972B2 (ja) | 2つのスピン・オン誘電材料から構成されるハイブリッド型低誘電率相互接続構造 | |
JP4166576B2 (ja) | 多層スピンオン多孔性誘電体からなるlow−k配線構造 | |
US6710450B2 (en) | Interconnect structure with precise conductor resistance and method to form same | |
US7304386B2 (en) | Semiconductor device having a multilayer wiring structure | |
US7285853B2 (en) | Multilayer anti-reflective coating for semiconductor lithography and the method for forming the same | |
JP2011061228A (ja) | ハイブリッド誘電体を備えた高信頼低誘電率相互接続構造 | |
US10062645B2 (en) | Interconnect structure for semiconductor devices | |
KR100473513B1 (ko) | 패터닝된 상호접속 구조물 형성 방법 | |
US20070249164A1 (en) | Method of fabricating an interconnect structure | |
US6724069B2 (en) | Spin-on cap layer, and semiconductor device containing same | |
US20060105558A1 (en) | Inter-metal dielectric scheme for semiconductors | |
US6225226B1 (en) | Method for processing and integrating copper interconnects | |
US20060118955A1 (en) | Robust copper interconnection structure and fabrication method thereof | |
JP3774399B2 (ja) | デュアルダマシン構造体及びその形成方法、並びに半導体装置及びその製造方法 | |
JP2002043306A (ja) | 層間絶縁膜材料並びにそれを用いた半導体装置とその製造方法 | |
JP2001267417A (ja) | 半導体装置の製造方法 | |
JP2007242966A (ja) | 半導体装置の配線形成方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070710 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070919 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20071022 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080116 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080307 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20080312 |
|
A912 | Re-examination (zenchi) completed and case transferred to appeal board |
Free format text: JAPANESE INTERMEDIATE CODE: A912 Effective date: 20080404 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110721 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140729 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |