JP4786156B2 - カーボンナノウォールの製造方法 - Google Patents

カーボンナノウォールの製造方法 Download PDF

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Publication number
JP4786156B2
JP4786156B2 JP2004252698A JP2004252698A JP4786156B2 JP 4786156 B2 JP4786156 B2 JP 4786156B2 JP 2004252698 A JP2004252698 A JP 2004252698A JP 2004252698 A JP2004252698 A JP 2004252698A JP 4786156 B2 JP4786156 B2 JP 4786156B2
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carbon
radical
radicals
plasma
electrode
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Japanese (ja)
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JP2006069816A5 (https=
JP2006069816A (ja
Inventor
美根男 平松
勝 堀
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NU Eco Engineering Co Ltd
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NU Eco Engineering Co Ltd
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  • Plasma Technology (AREA)
  • Carbon And Carbon Compounds (AREA)
JP2004252698A 2004-08-31 2004-08-31 カーボンナノウォールの製造方法 Expired - Fee Related JP4786156B2 (ja)

Priority Applications (1)

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JP2004252698A JP4786156B2 (ja) 2004-08-31 2004-08-31 カーボンナノウォールの製造方法

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JP2004252698A JP4786156B2 (ja) 2004-08-31 2004-08-31 カーボンナノウォールの製造方法

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JP2006069816A JP2006069816A (ja) 2006-03-16
JP2006069816A5 JP2006069816A5 (https=) 2007-10-18
JP4786156B2 true JP4786156B2 (ja) 2011-10-05

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Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5309317B2 (ja) * 2006-09-08 2013-10-09 古河電気工業株式会社 カーボンナノ構造体の製造方法及び製造装置
US8951632B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused carbon fiber materials and process therefor
US9005755B2 (en) 2007-01-03 2015-04-14 Applied Nanostructured Solutions, Llc CNS-infused carbon nanomaterials and process therefor
US8951631B2 (en) 2007-01-03 2015-02-10 Applied Nanostructured Solutions, Llc CNT-infused metal fiber materials and process therefor
US20100227134A1 (en) 2009-03-03 2010-09-09 Lockheed Martin Corporation Method for the prevention of nanoparticle agglomeration at high temperatures
WO2011017200A1 (en) 2009-08-03 2011-02-10 Lockheed Martin Corporation Incorporation of nanoparticles in composite fibers
BR112013005802A2 (pt) 2010-09-14 2016-05-10 Applied Nanostructured Sols substratos de vidro com nanotubos de carbono crescidos sobre os mesmos e métodos para sua produção
AU2011305809A1 (en) 2010-09-22 2013-02-28 Applied Nanostructured Solutions, Llc Carbon fiber substrates having carbon nanotubes grown thereon and processes for production thereof
JP5618766B2 (ja) * 2010-10-27 2014-11-05 株式会社アルバック ラジカル測定装置及びラジカル測定管
CN104163418A (zh) * 2013-05-16 2014-11-26 中山大学 一种可控定向生长石墨烯的方法及由该方法制备的石墨烯
CN114690572A (zh) * 2020-12-29 2022-07-01 台湾积体电路制造股份有限公司 极紫外光设备与其运作方法
JP7722683B2 (ja) * 2021-06-08 2025-08-13 国立大学法人東海国立大学機構 カーボンナノウォール成長用金属基板とカーボンナノウォール付き金属基板とこれらの製造方法
JP7669000B2 (ja) * 2023-07-25 2025-04-28 国立大学法人東海国立大学機構 カーボンナノ材料生成装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3441923B2 (ja) * 1997-06-18 2003-09-02 キヤノン株式会社 カーボンナノチューブの製法
JP2002146533A (ja) * 2000-11-06 2002-05-22 Mitsubishi Electric Corp 炭素薄体、炭素薄体形成方法および電界放出型電子源
EP1661855A4 (en) * 2003-08-27 2012-01-18 Mineo Hiramatsu PROCESS FOR PRODUCING CARBON NANOPAROI, CARBON NANOPAROI, AND PRODUCTION APPARATUS THEREOF

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