JP4768044B2 - Si結合SiCセラミックスの焼成方法 - Google Patents
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- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/65—Reaction sintering of free metal- or free silicon-containing compositions
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- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
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Description
平均粒径が5μmの金属珪素粉末20質量部に、平均粒径が40μmの炭化珪素粉末80質量部、外配として炭酸ストロンチウム1質量部、有機バインダとしてのメチルセルロース5質量部、造孔剤としての発泡樹脂5質量部を添加して、適量の水を加えて混練し、土練することによって成形用の坏土を得た。これを押出成形機によって、セル密度300セル/平方インチ(約46.5セル/cm2)、隔壁厚さ12mil(約305μm)のハニカム状に押出成形し、熱風乾燥及びマイクロ波乾燥を組み合わせた乾燥方法により乾燥して、外径40mm角、長さ300mmのハニカム状の成形体を得た。得られた成形体を、対向する一対の枠板にのみ溝の形成された、内表面積650cm2の枠部材を有する内容積5408cm3の匣鉢に、溝形成枠板が対向する方向と成形体の長手方向とが一致するよう、7個設置した。この時、成形体の積載率は50%であり、匣鉢の開口率は11%であった。また、仮焼時、本焼成時共に、溝の開口部を覆う蓋等は設置しなかった。成形体の設置された上記の匣鉢を耐火容器に10個積載し、溝の開口部がトンネル炉の奥行方向を向くよう、一定の速度で炉内へと搬送し、仮焼及び本焼成を行い、Si結合SiCセラミックス(多孔質のハニカム構造体)を得た。この時、炉内の風速は1.5m/secであった。尚、表1に示す以外の条件として、仮焼は、炉内最高温度が450℃となるよう8時間加熱することにより行い、本焼成は、常圧、Ar雰囲気中、炉内最高温度が1430℃となるよう15時間加熱することにより行った。
各焼成条件をそれぞれ表1の通りとしたほかは、実施例1と同様にして、実施例2及び比較例1〜5のSi結合SiCセラミックスを得た。
上記実施例1,2、及び比較例1〜5について、本焼成後に、仮焼時のバインダ除去性、及び本焼成時の炉内酸素の影響等を調べ、結果を表1に示した。ここで、仮焼時のバインダ除去性については、残炭素による製品変色の有無、及び製品の発熱程度を調べることによって判定した。即ち、製品変色が見られず、温度測定の結果、製品の発熱ピークが、製品の外周周辺の雰囲気温度よりも50℃以上高い時は、バインダ除去性が良好であると判定され、一方、製品変色が見られ、製品の発熱ピークが、製品の外周周辺の雰囲気温度を0℃以上50℃未満の範囲で上回る時は、バインダ除去性が十分でないと判定された。また、本焼成時の炉内酸素の影響については、炉内微量酸素による酸化変色の有無を調べることによって判定し、製品に酸化変色が見られなかった時は、炉内酸素の影響無し、酸化変色が見られた時は、炉内酸素の影響有りと判定された。
Claims (10)
- 金属珪素及び有機バインダを含む原料に炭化珪素粉末を添加して得られた坏土を所定の形状に成形し、得られた成形体を溝が形成された匣鉢内に設置し、複数の匣鉢の積載された耐火容器を複数個並列させた状態で焼成炉へ導入し、仮焼して前記成形体中の有機物を除去した後、不活性ガス雰囲気中で前記成形体を本焼成する、Si結合SiCセラミックスの焼成方法であって、
前記溝は、前記匣鉢の側面を構成する、対向する一対の枠板にのみ形成されており、
前記仮焼と前記本焼成のうち、少なくとも前記本焼成において、それぞれの匣鉢の前記溝の形成された枠板である溝形成枠板と、前記それぞれの匣鉢と前記焼成炉の奥行方向に隣接する匣鉢の前記溝形成枠板とが向かい合い、それぞれの前記溝形成枠板が、前記焼成炉の幅方向と平行となるよう、前記複数の匣鉢が配置されており、
前記複数の匣鉢の積載された前記耐火容器を、互いに接しない程度の間隔を保持しつつ、複数個並列させた状態で前記焼成炉へと導入し焼成を行う、Si結合SiCセラミックスの焼成方法。 - 前記不活性ガス雰囲気はAr雰囲気である請求項1に記載のSi結合SiCセラミックスの焼成方法。
- 前記成形体は、前記溝形成枠板が対向する方向と、前記成形体の長手方向とが一致するよう位置決めされて設置される請求項1又は2に記載のSi結合SiCセラミックスの焼成方法。
- 前記溝は、前記枠板の上端部及び下端部に、左右対称に切り欠きを設けることによって形成された請求項1〜3の何れか一項に記載のSi結合SiCセラミックスの焼成方法。
- 前記枠板の前記上端部及び前記下端部のそれぞれにおける左右一組の溝は、前記匣鉢の内側から外側に向かって斜めに開いていくように形成された請求項4に記載のSi結合SiCセラミックスの焼成方法。
- 4面の前記枠板からなり、前記匣鉢の側面全体を構成する部材である枠部材の、内表面積に占める前記溝の開口面積の割合である前記匣鉢の開口率は、1〜15%の範囲内である請求項1〜5の何れか一項に記載のSi結合SiCセラミックスの焼成方法。
- 前記仮焼において、それぞれの前記匣鉢の、前記溝の形成されていない前記枠板である密閉枠板と、前記それぞれの匣鉢と前記焼成炉の奥行方向に隣接する匣鉢の前記密閉枠板とが向かい合い、それぞれの前記匣鉢の前記溝形成枠板が、前記焼成炉の幅方向と直交するよう、前記複数の匣鉢が配置されており、
前記複数の匣鉢の積載された前記耐火容器を、互いに接しない程度の間隔を保持しつつ、複数個並列させた状態で前記焼成炉へと導入し焼成を行う、請求項1〜6の何れか一項に記載のSi結合SiCセラミックスの焼成方法。 - 前記Si結合SiCセラミックスはハニカム構造体である請求項1〜7の何れか一項に記載のSi結合SiCセラミックスの焼成方法。
- 前記Si結合SiCセラミックスは、隣接するセルが互いに反対となる端部において目封止された目封止ハニカム構造体である請求項1〜8の何れか一項に記載のSi結合SiCセラミックスの焼成方法。
- 前記仮焼及び前記本焼成は、炉内の温度分布の制御された連続式のトンネル炉を使用して行われる請求項1〜9の何れか一項に記載のSi結合SiCセラミックスの焼成方法。
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JP2009078198A JP4768044B2 (ja) | 2009-03-27 | 2009-03-27 | Si結合SiCセラミックスの焼成方法 |
AT10250597T ATE542097T1 (de) | 2009-03-27 | 2010-03-26 | Verfahren zum befeuern von si-gebundener sic- keramik |
EP10250597A EP2233871B1 (en) | 2009-03-27 | 2010-03-26 | Method for firing Si-bonded SiC ceramics |
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DE102019001027A1 (de) | 2018-02-19 | 2019-08-22 | NGK lnsulators, Ltd. | Verfahren zum zusammenbauen oder zerlegen eines aufnahmeregals, verfahren zur herstellung eines gebrannten keramikkörpers und umsetzsystem |
US11192256B2 (en) | 2018-02-19 | 2021-12-07 | Ngk Insulators, Ltd. | Method of assembling or disassembling housing shelf, method of producing ceramic fired body, and transferring system |
DE102019001027B4 (de) | 2018-02-19 | 2022-11-03 | NGK lnsulators, Ltd. | Verfahren zum zusammenbauen oder zerlegen eines aufnahmeregals, verfahren zur herstellung eines gebrannten keramikkörpers und umsetzsystem |
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JP2010228966A (ja) | 2010-10-14 |
ATE542097T1 (de) | 2012-02-15 |
EP2233871A1 (en) | 2010-09-29 |
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