JP4746027B2 - 基板搬送方法 - Google Patents

基板搬送方法 Download PDF

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Publication number
JP4746027B2
JP4746027B2 JP2007319013A JP2007319013A JP4746027B2 JP 4746027 B2 JP4746027 B2 JP 4746027B2 JP 2007319013 A JP2007319013 A JP 2007319013A JP 2007319013 A JP2007319013 A JP 2007319013A JP 4746027 B2 JP4746027 B2 JP 4746027B2
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link body
wafer
axis
substrate
link
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Japanese (ja)
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JP2008103755A (ja
JP2008103755A5 (enExample
Inventor
康彦 橋本
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Kawasaki Motors Ltd
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Kawasaki Jukogyo KK
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Publication of JP2008103755A5 publication Critical patent/JP2008103755A5/ja
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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2007319013A 2007-12-10 2007-12-10 基板搬送方法 Active JP4746027B2 (ja)

Priority Applications (1)

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JP2007319013A JP4746027B2 (ja) 2007-12-10 2007-12-10 基板搬送方法

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JP2007319013A JP4746027B2 (ja) 2007-12-10 2007-12-10 基板搬送方法

Related Parent Applications (1)

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JP2006198771A Division JP4098338B2 (ja) 2006-07-20 2006-07-20 ウェハ移載装置および基板移載装置

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JP2008103755A JP2008103755A (ja) 2008-05-01
JP2008103755A5 JP2008103755A5 (enExample) 2009-09-03
JP4746027B2 true JP4746027B2 (ja) 2011-08-10

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JP2007319013A Active JP4746027B2 (ja) 2007-12-10 2007-12-10 基板搬送方法

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9252035B2 (en) 2012-11-09 2016-02-02 Kabushiki Kaisha Yaskawa Denki Substrate transfer system, substrate processing system, and substrate transfer robot

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5364769B2 (ja) 2011-09-26 2013-12-11 株式会社安川電機 搬送ロボットおよび基板処理装置
TWI629743B (zh) * 2012-02-10 2018-07-11 布魯克斯自動機械公司 基材處理設備
JP6468159B2 (ja) * 2015-10-15 2019-02-13 株式会社安川電機 搬送システムおよび搬送方法
WO2023188181A1 (ja) * 2022-03-30 2023-10-05 平田機工株式会社 基板搬送システム及び移載ロボット
WO2025062703A1 (ja) * 2023-09-20 2025-03-27 株式会社Kokusai Electric 基板処理装置、基板処理ユニット、基板処理方法及びプログラム

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3453223B2 (ja) * 1994-08-19 2003-10-06 東京エレクトロン株式会社 処理装置
JPH11135595A (ja) * 1997-10-30 1999-05-21 Sankyo Seiki Mfg Co Ltd 基板受渡し装置
WO2003007129A2 (en) * 2001-07-13 2003-01-23 Broks Automation, Inc. Trajectory planning and motion control strategies for a planar three-degree-of-freedom robotic arm

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9252035B2 (en) 2012-11-09 2016-02-02 Kabushiki Kaisha Yaskawa Denki Substrate transfer system, substrate processing system, and substrate transfer robot
US9252036B2 (en) 2012-11-09 2016-02-02 Kabushiki Kaisha Yaskawa Denki Substrate transfer system, substrate processing system, and substrate transfer robot
US9293355B2 (en) 2012-11-09 2016-03-22 Kabushiki Kaisha Yaskawa Denki Substrate transfer system and substrate processing system
US9570336B2 (en) 2012-11-09 2017-02-14 Kabushiki Kaisha Yaskawa Denki Substrate transfer system and substrate processing system
US9620405B2 (en) 2012-11-09 2017-04-11 Kabushiki Kaisha Yaskawa Denki Substrate transfer system, substrate processing system, and substrate transfer robot

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JP2008103755A (ja) 2008-05-01

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