JP4743411B2 - Manufacturing method of laminated electronic component - Google Patents

Manufacturing method of laminated electronic component Download PDF

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JP4743411B2
JP4743411B2 JP2005315181A JP2005315181A JP4743411B2 JP 4743411 B2 JP4743411 B2 JP 4743411B2 JP 2005315181 A JP2005315181 A JP 2005315181A JP 2005315181 A JP2005315181 A JP 2005315181A JP 4743411 B2 JP4743411 B2 JP 4743411B2
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green chip
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正継 山本
要 上田
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Description

本発明は、積層電子部品の製造方法に関する。   The present invention relates to a method for manufacturing a laminated electronic component.

一般に、積層セラミックコンデンサなどの積層電子部品は、次のような工程によって製造されている。まず、原料となる誘電体粉末にバインダ、可塑剤及び溶剤を加えた誘電体ペーストをPETフィルム上に塗布し、誘電体グリーンシートを形成する。次に、この誘電体グリーンシートに内部電極を印刷する。更に、内部電極を有する誘電体グリーンシートを複数枚積層し、圧着してシート積層体を作る。次に、シート積層体を複数のチップ領域に裁断し、積層グリーンチップを得る。更に、その積層グリーンチップに対して、バインダ等を除去する脱バインダ処理を行い、所定条件で焼成する。その後、端子電極形成などの周知の工程を行い、積層電子部品を得る。   In general, a multilayer electronic component such as a multilayer ceramic capacitor is manufactured by the following process. First, a dielectric paste obtained by adding a binder, a plasticizer, and a solvent to dielectric powder as a raw material is applied on a PET film to form a dielectric green sheet. Next, internal electrodes are printed on the dielectric green sheet. Further, a plurality of dielectric green sheets having internal electrodes are laminated and pressed to make a sheet laminate. Next, the sheet laminate is cut into a plurality of chip regions to obtain a laminated green chip. Further, the laminated green chip is subjected to binder removal processing for removing the binder and the like, and is fired under predetermined conditions. Thereafter, a known process such as terminal electrode formation is performed to obtain a laminated electronic component.

かような積層電子部品の製造方法において、裁断で得られた積層グリーンチップの端部には、裁断処理による鋭利な角が生じており、この状態のままで積層グリーンチップを取り扱うと、焼成の前後で欠けや積層の剥がれなどの端面クラックが生じる可能性がある。   In such a method of manufacturing a laminated electronic component, sharp edges due to the cutting process occur at the end of the laminated green chip obtained by cutting. There is a possibility that end face cracks such as chipping and peeling of the laminate occur before and after.

そこで、積層グリーンチップにバレル研磨を施し、チップ端部の角を丸める技術が知られている。   Therefore, a technique is known in which the laminated green chip is barrel-polished to round the corners of the chip end.

特許文献1は、積層グリーンチップに含まれる可塑剤成分の20%〜80%を熱分解した後、乾式バレル研磨を行うことを提案している。これは、同文献によれば、可塑剤成分の熱分解率が80%を超えるとチップ表面に欠けや剥離等が発生し易くなり、熱分解率が20%未満ではチップ同士の付着が発生するとしているためである(同文献の段落番号0019参照)。しかし、実際には、可塑剤の熱分解率が20%程度でも、欠けや積層の剥がれが生じる。
特開2004−172526号公報
Patent Document 1 proposes performing dry barrel polishing after thermally decomposing 20% to 80% of the plasticizer component contained in the laminated green chip. According to this document, chipping or peeling is likely to occur on the chip surface when the thermal decomposition rate of the plasticizer component exceeds 80%, and adhesion between chips occurs when the thermal decomposition rate is less than 20%. (See paragraph number 0019 of the same document). However, actually, even when the thermal decomposition rate of the plasticizer is about 20%, chipping or peeling of the laminate occurs.
JP 2004-172526 A

本発明は、バレル研磨において、チップの端面クラックを低減するとともに、チップ同士の付着を防止し得る積層電子部品の製造方法を提供することを目的とする。   An object of the present invention is to provide a method for manufacturing a laminated electronic component capable of reducing chip end face cracks and preventing adhesion between chips in barrel polishing.

上述した課題を解決するため、本発明に係る積層電子部品の製造方法は、積層グリーンチップを固化乾燥させる工程と、その後、積層グリーンチップにバレル研磨を施す工程とを含む。   In order to solve the above-described problems, a method for manufacturing a laminated electronic component according to the present invention includes a step of solidifying and drying a laminated green chip, and then a step of barrel polishing the laminated green chip.

積層グリーンチップを固化乾燥させる工程は、積層グリーンチップに含まれる樹脂バインダ成分と可塑剤成分との総量を基準として、積層グリーンチップに含まれる可塑剤成分の分解量が7.0%〜14.0%になるように積層グリーンチップに熱処理を施す工程を含む。   In the step of solidifying and drying the laminated green chip, the decomposition amount of the plasticizer component contained in the laminated green chip is 7.0% to 14.4% based on the total amount of the resin binder component and the plasticizer component contained in the laminated green chip. A step of heat-treating the laminated green chip so as to be 0%.

上述したように、本発明に係る積層電子部品の製造方法は、積層グリーンチップを固化乾燥させる工程と、その後、積層グリーンチップにバレル研磨を施す工程とを含む。積層グリーンチップの固化乾燥工程は、積層グリーンチップを固化させて積層グリーンチップを研磨し易くする役割を担うとともに、研磨の際、積層グリーンチップ中の可塑剤成分が溶媒に溶出してチップ同士が付着するのを防ぐ役割を担う。   As described above, the method for manufacturing a multilayer electronic component according to the present invention includes a step of solidifying and drying the multilayer green chip, and then a step of barrel polishing the multilayer green chip. The solidification drying process of the laminated green chip plays a role of solidifying the laminated green chip so that the laminated green chip can be easily polished, and at the time of polishing, the plasticizer component in the laminated green chip is eluted into the solvent and the chips are separated from each other. Plays a role to prevent adhesion.

積層グリーンチップの固化乾燥工程は、積層グリーンチップに熱処理を施す工程を含む。熱処理によって、積層グリーンチップに含まれる可塑剤成分の一部を熱分解することができる。発明者の検討によれば、可塑剤成分の分解量が多いと、積層グリーンチップが固くなり過ぎて衝撃に弱くなり、バレル研磨の際、端面クラックが多発する恐れがある。かといって、可塑剤成分の分解量が少ないと、残留有機成分が多くなり、バレル研磨の際、チップ同士が付着する恐れがある。   The step of solidifying and drying the laminated green chip includes a step of performing a heat treatment on the laminated green chip. A part of the plasticizer component contained in the laminated green chip can be thermally decomposed by the heat treatment. According to the inventor's study, if the amount of decomposition of the plasticizer component is large, the laminated green chip becomes too hard and weak against impact, and end face cracks may occur frequently during barrel polishing. On the other hand, if the amount of decomposition of the plasticizer component is small, the residual organic component increases, and there is a risk that chips adhere to each other during barrel polishing.

本発明では、積層グリーンチップに含まれる樹脂バインダ成分と可塑剤成分との総量を基準として、積層グリーンチップに含まれる可塑剤成分の分解量が7.0%〜14.0%になるように積層グリーンチップに熱処理を施す。発明者の実験によれば、かかる数値範囲内では、バレル研磨によるチップ端面のクラックを低減するとともに、チップ同士の付着を防止できることがわかった。   In the present invention, the decomposition amount of the plasticizer component contained in the laminated green chip is 7.0% to 14.0% based on the total amount of the resin binder component and the plasticizer component contained in the laminated green chip. Heat treatment is applied to the laminated green chip. According to the inventor's experiment, it was found that, within such a numerical range, it is possible to reduce chip end face cracks due to barrel polishing and to prevent adhesion between chips.

以上述べたように、本発明によれば、バレル研磨において、チップの端面クラックを低減するとともに、チップ同士の付着を防止し得る積層電子部品の製造方法を提供することができる。   As described above, according to the present invention, it is possible to provide a method for manufacturing a laminated electronic component capable of reducing chip end face cracks and preventing adhesion between chips in barrel polishing.

以下、本発明を積層セラミックコンデンサの製造方法に適用した場合の実施の形態について説明する。   Hereinafter, an embodiment when the present invention is applied to a method of manufacturing a multilayer ceramic capacitor will be described.

まず、原料となる誘電体粉末にバインダ、可塑剤及び溶剤を加えた誘電体ペーストを調製する。バインダとしては、ブチラール樹脂などを用いることができる。また、可塑剤としては、フタル酸ジオクチル(ジオクチルフタレート)を用いることができる。また、溶剤としては、ソルミックス、n-プロパノールやキシレンなどを用いることができる。   First, a dielectric paste is prepared by adding a binder, a plasticizer and a solvent to a dielectric powder as a raw material. As the binder, butyral resin or the like can be used. As the plasticizer, dioctyl phthalate (dioctyl phthalate) can be used. Moreover, as a solvent, Solmix, n-propanol, xylene, etc. can be used.

次に、誘電体ペーストをPETフィルム上に塗布し、誘電体グリーンシートを形成する。更に、この誘電体グリーンシートに、導電性ペーストにより複数の内部電極をスクリーン印刷法などで形成する。更に、内部電極を有する誘電体グリーンシートを、内部電極の位置がずらされた状態とずらされていない状態とが交互に重なるように複数枚積層し、圧着してシート積層体を作製する。この他、シート積層体を作製するための手法として、誘電体グリーンシートの形成工程及び内部電極の印刷工程を、必要な回数だけ可撓性支持体上で繰り返すことによりシート積層体を作製する手法を採用することもできる。   Next, a dielectric paste is applied on the PET film to form a dielectric green sheet. Further, a plurality of internal electrodes are formed on the dielectric green sheet with a conductive paste by a screen printing method or the like. Further, a plurality of dielectric green sheets having internal electrodes are laminated so that the positions of the internal electrodes are shifted and the positions where the internal electrodes are not shifted are alternately stacked, and pressed to produce a sheet laminate. In addition, as a method for producing a sheet laminate, a method for producing a sheet laminate by repeating a dielectric green sheet forming step and an internal electrode printing step on a flexible support as many times as necessary. Can also be adopted.

次に、シート積層体を複数のチップ領域に裁断し、積層グリーンチップを得る。シート積層体を裁断するための手法としては、例えば、円盤状の切断刃を回転させてシート積層体を切断する回転刃切断法が用いられる。   Next, the sheet laminate is cut into a plurality of chip regions to obtain a laminated green chip. As a method for cutting the sheet laminated body, for example, a rotary blade cutting method is used in which a disk-shaped cutting blade is rotated to cut the sheet laminated body.

図1は、切断によって得られた積層グリーンチップを示す斜視図である。図示のように、積層グリーンチップは、長さ方向X、幅方向Y及び厚さ方向Zで定義される直方体形状となっており、誘電体基体2の内部に、複数の内部電極4を厚さ方向Zの間隔を隔てて埋設した構造となっている。   FIG. 1 is a perspective view showing a laminated green chip obtained by cutting. As shown in the drawing, the laminated green chip has a rectangular parallelepiped shape defined by the length direction X, the width direction Y, and the thickness direction Z, and a plurality of internal electrodes 4 are formed in the dielectric substrate 2 with a thickness. The structure is embedded with an interval in the direction Z.

図示のように、切断で得られた積層グリーンチップの端部には、切断処理による鋭利な角6が生じている。従って、この状態のままで積層グリーンチップを取り扱うと、焼成の前後で欠けや積層の剥がれが生じる可能性がある。   As shown in the figure, a sharp corner 6 is generated at the end of the laminated green chip obtained by the cutting process. Therefore, if the laminated green chip is handled in this state, chipping or peeling of the laminate may occur before and after firing.

そこで、積層グリーンチップを固化乾燥させ、その後、積層グリーンチップに湿式バレル研磨を施すことにより、チップ端部の角6を丸める。   Accordingly, the laminated green chip is solidified and dried, and then the laminated green chip is subjected to wet barrel polishing to round the corner 6 at the end of the chip.

積層グリーンチップの固化乾燥工程は、積層グリーンチップに熱処理を施す工程を含む。熱処理によって、積層グリーンチップに含まれる可塑剤成分の一部を熱分解することができる。発明者の検討によれば、可塑剤成分の分解量が多いと、積層グリーンチップが固くなり過ぎて衝撃に弱くなり、湿式バレル研磨の際、端面クラックが多発する恐れがある。かといって、可塑剤成分の分解量が少ないと、湿式バレル研磨の際、積層グリーンチップ中の可塑剤成分が溶媒に溶出し、この可塑剤成分でチップ同士が付着する恐れがある。   The step of solidifying and drying the laminated green chip includes a step of performing a heat treatment on the laminated green chip. A part of the plasticizer component contained in the laminated green chip can be thermally decomposed by the heat treatment. According to the inventor's study, when the amount of decomposition of the plasticizer component is large, the laminated green chip becomes too hard and weak against impact, and end face cracks may occur frequently during wet barrel polishing. However, when the amount of decomposition of the plasticizer component is small, the plasticizer component in the laminated green chip is eluted in the solvent during wet barrel polishing, and the chips may adhere to each other with this plasticizer component.

本発明では、積層グリーンチップに含まれる樹脂バインダ成分と可塑剤成分との総量を基準として、積層グリーンチップに含まれる可塑剤成分の分解量が7.0%〜14.0%になるように積層グリーンチップに熱処理を施す。発明者の実験によれば、かかる数値範囲内では、湿式バレル研磨によるチップ端面のクラックを低減するとともに、チップ同士の付着を防止できることがわかった。   In the present invention, the decomposition amount of the plasticizer component contained in the laminated green chip is 7.0% to 14.0% based on the total amount of the resin binder component and the plasticizer component contained in the laminated green chip. Heat treatment is applied to the laminated green chip. According to the inventor's experiment, it was found that within such a numerical range, cracks on the chip end face due to wet barrel polishing can be reduced and adhesion between the chips can be prevented.

なお、可塑剤成分の分解量を少なくすることにより、積層グリーンチップの弾力性が増し、積層グリーンチップが研磨されにくくなった場合でも、バレル研磨時間を通常より長く、例えば通常の1.5倍に設定することにより、積層グリーンチップの研磨を確実に行うことができる。   Note that by reducing the amount of decomposition of the plasticizer component, the elasticity of the laminated green chip increases, and even when the laminated green chip becomes difficult to polish, the barrel polishing time is longer than usual, for example, 1.5 times the usual. By setting to, the laminated green chip can be reliably polished.

次に、可塑剤成分の熱分解量の算出方法について述べる。   Next, a method for calculating the amount of thermal decomposition of the plasticizer component will be described.

可塑剤分解量は、熱処理前の積層グリーンチップに含まれていたバインダ成分及び可塑剤成分の総量を基準とし、400℃熱処理における重量変化から算出した。なお、誘電体ペーストに含まれていた溶剤(ソルミックス、n-プロパノール、キシレン)は、積層グリーンチップを切断するまでの工程で、ほぼ揮発していることから、積層グリーンチップにはほとんど残存していないと考えられる。   The amount of plasticizer decomposition was calculated from the change in weight during heat treatment at 400 ° C., based on the total amount of binder component and plasticizer component contained in the laminated green chip before heat treatment. Note that the solvent (Solmix, n-propanol, xylene) contained in the dielectric paste is almost volatilized in the process until the laminated green chip is cut, and therefore almost remains in the laminated green chip. It is thought that it is not.

下記の表1は、固化乾燥条件別に、積層グリーンチップの重量減少率と、熱処理による可塑剤分解量とを示した表である。

Figure 0004743411
表1に、固化乾燥条件による積層グリーンチップの重量変化率、可塑剤分解量を示す。固化乾燥条件「切断後、熱処理なし」では、切断後、熱処理を施していない積層グリーンチップを測定した。一方、固化乾燥条件「固化後、熱処理(140℃及び1時間)」では、固化後、140℃及び1時間の熱処理を施した積層グリーンチップを測定した。また、固化乾燥条件「固化後、熱処理(180℃及び10時間)」では、固化後、180℃及び10時間の熱処理を施した積層グリーンチップを測定した。 Table 1 below is a table showing the weight reduction rate of the laminated green chip and the amount of plasticizer decomposed by heat treatment according to the solidification drying conditions.
Figure 0004743411
Table 1 shows the weight change rate and plasticizer decomposition amount of the laminated green chip depending on the solidification drying conditions. Under the solidification drying condition “after cutting, no heat treatment”, the laminated green chips that were not heat-treated after cutting were measured. On the other hand, under the solidification drying conditions “heat treatment after solidification (140 ° C. and 1 hour)”, the laminated green chip subjected to heat treatment at 140 ° C. and 1 hour after solidification was measured. In addition, under the solidification drying condition “heat treatment after solidification (180 ° C. and 10 hours)”, a laminated green chip subjected to heat treatment at 180 ° C. and 10 hours after solidification was measured.

各固化乾燥条件の積層グリーンチップについて、熱重量測定装置で400℃までの昇温処理を施し、重量減少率を算出した(表1中、重量減少率の欄を参照)。   About the lamination | stacking green chip | tip of each solidification drying condition, the temperature rising process to 400 degreeC was performed with the thermogravimetry apparatus, and the weight reduction rate was calculated (refer the column of the weight reduction rate in Table 1).

400℃までの昇温処理を施すと、積層グリーンチップに含まれていたバインダ成分及び可塑剤成分は、全て分解または揮発することから、積層グリーンチップに含まれていたバインダ成分及び可塑剤成分の総量を、昇温処理による重量減少率として求めることができる。   When the temperature raising treatment up to 400 ° C. is performed, the binder component and the plasticizer component contained in the laminated green chip are all decomposed or volatilized. The total amount can be obtained as the weight reduction rate due to the temperature raising process.

「切断後、熱処理なし」の積層グリーンチップの熱重量減少率を測定したところ、7.30%となった。   When the thermal weight reduction rate of the laminated green chip “no heat treatment after cutting” was measured, it was 7.30%.

同様に、「固化後、熱処理(140℃及び1時間)」の積層グリーンチップの熱重量減少率を測定したところ、6.76%となることから、0.54%の可塑剤が140℃及び1時間の熱処理で分解されたと算出される。   Similarly, when the thermal weight reduction rate of the laminated green chip of “heat treatment after solidification (140 ° C. and 1 hour)” was measured to be 6.76%, 0.54% of the plasticizer was 140 ° C. and It is calculated that it was decomposed by heat treatment for 1 hour.

従って、(バインダ成分+可塑剤成分)に対する可塑剤成分の分解量は、次のように算出される。
(0.54/7.30)×100(%)=7.4(%)
「固化後、熱処理(180℃及び10時間)」の積層グリーンチップについても、同様に、可塑剤分解量の算出を行うことができる。
Therefore, the decomposition amount of the plasticizer component with respect to (binder component + plasticizer component) is calculated as follows.
(0.54 / 7.30) × 100 (%) = 7.4 (%)
Similarly, the amount of plasticizer decomposition can be calculated for the laminated green chip “heat treated (180 ° C. and 10 hours) after solidification”.

切断後、熱処理なしの積層グリーンチップの熱重量減少率をAとし、固化後、熱処理を施した積層グリーンチップの熱重量減少率をBとすると、熱処理による可塑剤分解量Xは、次の式で与えられる。   When the thermal weight reduction rate of the laminated green chip without cutting after heat treatment is A, and the thermal weight reduction rate of the laminated green chip subjected to heat treatment after solidification is B, the plasticizer decomposition amount X by the heat treatment is expressed by the following formula: Given in.

X=[(A−B)/A]×100(%) (1)
(1)式に従い、熱処理条件(140〜160℃、1〜3hr)により、可塑剤分解量を制御し、端面クラック及びチップ付着量を評価した。結果を下記の表2に示す。

Figure 0004743411
実施例1〜3及び比較例1、2についてのデータは、次のようにして得た。 X = [(A−B) / A] × 100 (%) (1)
According to the formula (1), the amount of plasticizer decomposition was controlled by heat treatment conditions (140 to 160 ° C., 1 to 3 hours), and the end face cracks and chip adhesion amount were evaluated. The results are shown in Table 2 below.
Figure 0004743411
Data for Examples 1 to 3 and Comparative Examples 1 and 2 were obtained as follows.

<実施例1〜3>
バインダ成分としてブチラール樹脂(略称PVB)、可塑剤成分としてフタル酸ジオクチル(略称DOP)、溶剤としてソルミックス、n-プロパノール及びキシレンを含有する誘電体ペーストを調製した。
<Examples 1-3>
A dielectric paste containing butyral resin (abbreviated as PVB) as a binder component, dioctyl phthalate (abbreviated as DOP) as a plasticizer component, and solmix, n-propanol and xylene as solvents was prepared.

次に、この誘電体ペーストを用いて先に述べた積層グリーンチップ製造工程を行い、積層グリーンチップを得た。   Next, the multilayer green chip manufacturing process described above was performed using this dielectric paste to obtain a multilayer green chip.

そして、切断後の積層グリーンチップを140℃で加熱し、処理時間を変化させて可塑剤分解量を制御した。   And the laminated | stacked green chip | tip after a cutting | disconnection was heated at 140 degreeC, the processing time was changed and the plasticizer decomposition amount was controlled.

次に、熱処理後の積層グリーンチップ1000g及びメディア1500gを、2Lの容器に入れ純水で満たし、85回転/分で240分間バレル研磨を行った。その際、チップ同士の付着状態を調べた。   Next, 1000 g of the laminated green chip and 1500 g of the medium after heat treatment were put in a 2 L container and filled with pure water, and barrel polishing was performed for 240 minutes at 85 rpm. At that time, the adhesion state between the chips was examined.

その後、メディアから積層グリーンチップを分離し、積層グリーンチップを脱バイ、焼成した後、得られた積層チップの外観を顕微鏡で確認した。   Thereafter, the laminated green chip was separated from the media, the laminated green chip was removed and fired, and the appearance of the obtained laminated chip was confirmed with a microscope.

<比較例1、2>
比較例1では、切断後の積層グリーンチップに120℃及び1.5時間の熱処理を施し、比較例2では、切断後の積層グリーンチップに180℃及び10時間の熱処理を施した。その他の点については、実施例1〜3と同様とした。実施例1〜3と同様に、バレル研磨の際、チップ同士の付着状態を調べた。更に、焼成後、得られた積層チップの外観を確認した。
<Comparative Examples 1 and 2>
In Comparative Example 1, the laminated green chip after cutting was subjected to heat treatment at 120 ° C. and 1.5 hours, and in Comparative Example 2, the laminated green chip after cutting was subjected to heat treatment at 180 ° C. and 10 hours. Other points were the same as those in Examples 1 to 3. In the same manner as in Examples 1 to 3, the state of adhesion between the chips was examined during barrel polishing. Furthermore, the external appearance of the obtained multilayer chip | tip was confirmed after baking.

更に、実施例1〜3及び比較例1、2のそれぞれについて、上記式(1)を適用し、熱重量減少率から、全有機成分に対する可塑剤成分の分解量を算出した。また、チップ付着の判定については、チップ付着率が1000ppm未満の場合、良好(○)とし、1000ppm以上の場合、不良(△)とした。   Furthermore, the above formula (1) was applied to each of Examples 1 to 3 and Comparative Examples 1 and 2, and the amount of decomposition of the plasticizer component relative to the total organic component was calculated from the thermal weight reduction rate. In addition, regarding the determination of chip adhesion, when the chip adhesion rate was less than 1000 ppm, it was judged as good (◯), and when it was 1000 ppm or more, it was judged as bad (Δ).

表2より、可塑剤分解量が7.0%以上では、チップ付着結果が良好となるが(実施例1〜3)、可塑剤分解量が7.0%未満では、チップ付着判定結果が悪くなる(比較例1)。   From Table 2, when the plasticizer degradation amount is 7.0% or more, the chip adhesion result is good (Examples 1 to 3), but when the plasticizer degradation amount is less than 7.0%, the chip adhesion determination result is poor. (Comparative Example 1)

また、可塑剤分解量が14.0%以下では、端面クラックの発生率が低く抑えられるが(実施例1〜3)、可塑剤分解量が14.0%を超えると、端面クラックの発生率が急増する(比較例2)。   In addition, when the plasticizer decomposition amount is 14.0% or less, the occurrence rate of end face cracks can be kept low (Examples 1 to 3), but when the plasticizer decomposition amount exceeds 14.0%, the occurrence rate of end face cracks. Increase rapidly (Comparative Example 2).

従って、チップの端面クラックを低減するとともに、チップ同士の付着を防止するには、可塑剤分解量を7.0%以上14.0%以下とすればよいことがわかる。   Therefore, it can be seen that the amount of plasticizer decomposition should be 7.0% or more and 14.0% or less in order to reduce chip end face cracks and prevent adhesion between chips.

なお、可塑剤分解量を少なくすることにより、残留有機成分が多くなり、チップ同士の付着が生じたとしても、メディアからのチップの分離を、振動を与えながら行うことにより、チップ同士の付着を回避することが可能である。   Note that by reducing the amount of plasticizer decomposition, residual organic components increase, and even if chip-to-chip adhesion occurs, chip-to-chip adhesion can be achieved by separating the chip from the media while applying vibration. It is possible to avoid it.

裁断によって得られた積層グリーンチップを示す斜視図である。It is a perspective view which shows the lamination | stacking green chip obtained by cutting.

符号の説明Explanation of symbols

2 誘電体基体
4 内部電極

2 Dielectric substrate 4 Internal electrode

Claims (2)

積層グリーンチップを固化乾燥させる工程と、その後、積層グリーンチップにバレル研磨を施す工程とを含む積層電子部品の製造方法であって、
積層グリーンチップを固化乾燥させる工程は、積層グリーンチップに含まれる樹脂バインダ成分と可塑剤成分との総量を基準として、積層グリーンチップに含まれる可塑剤成分の分解量が7.0%〜14.0%になるように積層グリーンチップに熱処理を施す工程を含み、
さらに、前記熱処理は、処理温度が140℃以上160℃以下の範囲、処理時間が1時間以上3時間以下の範囲で施され、
前記可塑剤の分解量(X)は、前記樹脂バインダ成分と可塑剤成分との前記総量を熱分解させた積層グリーンチップの熱重量減少率をAとし、前記熱処理を施した積層グリーンチップの熱重量減少率をBとしたとき、
X=[(A−B)/A]×100(%)
で表される、
積層電子部品の製造方法。
A method for producing a laminated electronic component comprising a step of solidifying and drying a laminated green chip and then a step of barrel polishing the laminated green chip,
In the step of solidifying and drying the laminated green chip, the decomposition amount of the plasticizer component contained in the laminated green chip is 7.0% to 14.4% based on the total amount of the resin binder component and the plasticizer component contained in the laminated green chip. Including a step of heat-treating the laminated green chip so as to be 0%,
Furthermore, the heat treatment is performed in a range where the processing temperature is 140 ° C. or higher and 160 ° C. or lower and the processing time is 1 hour or longer and 3 hours or shorter,
The decomposition amount (X) of the plasticizer is defined as A, which is the thermal weight reduction rate of the laminated green chip obtained by pyrolyzing the total amount of the resin binder component and the plasticizer component, and the heat of the laminated green chip subjected to the heat treatment. When the weight reduction rate is B,
X = [(A−B) / A] × 100 (%)
Represented by
A method for manufacturing a laminated electronic component.
請求項1又は2に記載された積層電子部品の製造方法であって、A method for manufacturing a laminated electronic component according to claim 1 or 2,
前記樹脂バインダ成分は、ブチラール樹脂を主成分とし、The resin binder component is mainly composed of butyral resin,
前記可塑剤は、フタル酸ジオクチルを主成分とする、The plasticizer is mainly composed of dioctyl phthalate,
積層電子部品の製造方法。A method for manufacturing a laminated electronic component.
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