JP4738220B2 - Multiple wiring board - Google Patents

Multiple wiring board Download PDF

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JP4738220B2
JP4738220B2 JP2006082225A JP2006082225A JP4738220B2 JP 4738220 B2 JP4738220 B2 JP 4738220B2 JP 2006082225 A JP2006082225 A JP 2006082225A JP 2006082225 A JP2006082225 A JP 2006082225A JP 4738220 B2 JP4738220 B2 JP 4738220B2
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conductor
wiring
wiring board
frame
grid
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JP2007123801A (en
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穣 冨田
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Kyocera Corp
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Kyocera Corp
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Description

本発明は、半導体素子や弾性表面波素子等の電子部品を搭載するために用いられる配線基板となる配線基板領域を、複数個、母基板の中央部に行列状に配列して成る複数個取り配線基板に関するものである。   In the present invention, a plurality of wiring board regions, which are wiring boards used for mounting electronic components such as semiconductor elements and surface acoustic wave elements, are arranged in a matrix at the center of the mother board. The present invention relates to a wiring board.

従来、例えば半導体素子や弾性表面波素子等の電子部品を搭載するために用いられる配線基板は、酸化アルミニウム質焼結体等のセラミックス材料から成る四角平板状の絶縁基体の上面に電子部品を搭載するための搭載部を有し、この搭載部またはその周辺から絶縁基体の下面にかけてタングステン等の金属材料から成る複数の配線導体が形成された構造を有している。   Conventionally, for example, wiring boards used for mounting electronic components such as semiconductor elements and surface acoustic wave elements have electronic components mounted on the upper surface of a rectangular flat plate-shaped insulating substrate made of a ceramic material such as an aluminum oxide sintered body. And has a structure in which a plurality of wiring conductors made of a metal material such as tungsten are formed from the mounting portion or its periphery to the lower surface of the insulating base.

配線導体は、露出表面に電子部品の電極がはんだやボンディングワイヤ等を介して電気的に接続される。このはんだの濡れ性やボンディングワイヤのボンディング性等の特性を向上させるため、配線導体の表面にはニッケルや金等のめっき層が被着される。   In the wiring conductor, the electrode of the electronic component is electrically connected to the exposed surface via solder, a bonding wire or the like. In order to improve characteristics such as the wettability of the solder and the bonding property of the bonding wire, a plating layer such as nickel or gold is deposited on the surface of the wiring conductor.

このような配線基板は、一般に、1枚の広面積のセラミック母基板から複数個の配線基板を同時集約的に得るようにした、いわゆる複数個取り配線基板の形態で製作されている。   Such a wiring board is generally manufactured in the form of a so-called multi-piece wiring board in which a plurality of wiring boards are obtained simultaneously from a single large-area ceramic mother board.

複数個取り配線基板は、例えば図3(a),(b)に示すように、平板状の母基板21の中央部に配線基板となる配線基板領域22が縦横に複数配列形成されるとともに、外周部に、配線基板領域を取り囲む枠状のダミー領域23が形成されて成る構造を有している。なお、ダミー領域23は、多数個取り配線基板の取り扱いを容易とすること等のために設けられている。   For example, as shown in FIGS. 3A and 3B, the multi-cavity wiring board has a plurality of wiring board regions 22 which are wiring boards formed in a central portion of a flat plate-like mother board 21 and are arranged in rows and columns. A frame-like dummy region 23 surrounding the wiring board region is formed on the outer peripheral portion. The dummy area 23 is provided for facilitating handling of the multi-piece wiring board.

配線導体28に対するめっき層(図示せず)の被着も、この複数個取り配線基板の状態で行なわれる。すなわち、ダミー領域23に枠状の導体24を形成しておくとともに、各配線基板領域22の配線導体28から枠状の導体24にかけて接続用の導体27を形成して枠状の導体24と各配線導体28とを電気的に接続しておく。そして、例えばニッケルの電解めっき浴中で、枠状の導体24に外部の電源(図示せず)からめっき用の電流を供給することにより、枠状の導体24および接続用の導体27を介して各配線導体28に電流が供給されて電解めっき法によりめっき層が被着される。   The plating layer (not shown) is also applied to the wiring conductor 28 in the state of the multi-piece wiring board. That is, the frame-shaped conductor 24 is formed in the dummy region 23, and the connection conductor 27 is formed from the wiring conductor 28 of each wiring board region 22 to the frame-shaped conductor 24, and the frame-shaped conductor 24 and each The wiring conductor 28 is electrically connected. Then, for example, in a nickel electrolytic plating bath, a current for plating is supplied to the frame-shaped conductor 24 from an external power source (not shown), so that the frame-shaped conductor 24 and the connection conductor 27 are interposed. A current is supplied to each wiring conductor 28, and a plating layer is deposited by electrolytic plating.

なお、複数個取り配線基板は、例えば、配線基板領域同士の境界25、および配線基板領域22とダミー領域23との境界に沿ってダイシングカットすることにより、個片の配線基板(図示せず)に分割される。
特開2005−101164号公報 特開2005−72050号公報
Note that the multi-wiring board is obtained by, for example, dicing cutting along the boundary 25 between the wiring board areas and the boundary between the wiring board area 22 and the dummy area 23 (not shown). It is divided into.
JP-A-2005-101164 JP 2005-72050 A

しかしながら、上記従来技術の複数個取り配線基板においては、各配線基板領域から母基板の外周部に位置する枠状導体まで接続導体を形成する必要があることから、接続導体は、例えば複数の配線基板領域に跨るように形成されて長さが長くなり、数も多くなる。そのため、配線基板領域を個片に分割したときに、個々の配線基板に不要な接続導体が長く、または多く残留してしまうという問題があった。   However, in the above-described prior art multi-circuit board, since it is necessary to form a connection conductor from each wiring board region to a frame-like conductor located on the outer peripheral portion of the mother board, the connection conductor is, for example, a plurality of wirings. It is formed so as to straddle the substrate region, and the length becomes long and the number also increases. Therefore, when the wiring board region is divided into individual pieces, there is a problem that unnecessary or long connection conductors remain on each wiring board.

すなわち、個々の配線基板に、不要な接続導体が長く、または多く残留することにより、例えば、接続導体と配線導体との間に不要な静電容量(浮遊容量)が大きく生じてしまい、配線導体を伝送される電気信号の伝送特性等の配線基板としての特性が低下する(例えば電気信号の伝送遅延)等の不具合が生じる。   That is, when unnecessary connection conductors are long or many remain on each wiring board, for example, unnecessary capacitance (floating capacitance) is greatly generated between the connection conductors and the wiring conductors. Inconveniences such as deterioration of the characteristics of the wiring board such as the transmission characteristics of the electrical signal transmitted (for example, electrical signal transmission delay) occur.

本発明は、かかる従来の問題点に鑑みて完成されたものであり、その目的は、配線導体と接続されてめっき用の電流を供給する接続導体の形成される長さが短く、接続導体の残留に起因する個片の配線基板における電気特性の劣化等の不具合が抑制された、複数個取り配線基板を提供することにある。   The present invention has been completed in view of such conventional problems. The object of the present invention is to shorten the length of the connection conductor that is connected to the wiring conductor and supplies the plating current. It is an object of the present invention to provide a multiple wiring board in which defects such as deterioration of electrical characteristics in the individual wiring board due to residual are suppressed.

本発明の複数個取り配線基板は、母基板の中央部に複数個の配線基板領域が行列状に配列されるとともに、外周部に前記配線基板領域を取り囲む枠状のダミー領域が設けられ、前記配線基板領域に、露出表面にめっき層が被着される配線導体が形成されてなる複数個取り配線基板であって、前記母基板は、前記配線基板領域と前記ダミー領域との境界に沿って前記ダミー領域の表面および内部に枠状導体が形成されているとともに、前記配線基板領域同士の境界に沿ってダイシングカットされる捨代部が設けられ、該捨代部の表面および内部に、端部が前記枠状導体に接続している格子状導体が形成され、前記各配線基板領域の前記配線導体から前記格子状導体にかけて前記母基板の内部に接続導体が形成され、前記母基板の内部において前記接続導体と前記枠状導体とが前記格子状導体を介して接続されており、前記格子状導体および前記枠状導体の少なくとも一方に、前記配線基板領域の少なくとも1つの角部に対応する切り欠き部を有することを特徴とするものである。
In the multiple wiring substrate of the present invention, a plurality of wiring substrate regions are arranged in a matrix at the center portion of the mother substrate, and a frame-shaped dummy region surrounding the wiring substrate region is provided on the outer peripheral portion. A wiring board region having a plurality of wiring conductors in which a wiring conductor having a plating layer deposited on an exposed surface is formed, wherein the mother board is along a boundary between the wiring board region and the dummy region. wherein together with the surface and the frame-shaped conductor in the interior of the dummy region is formed,捨代portion to be diced is provided along the boundary between the wiring substrate region, on the surface and inside of the該捨margin portion, the end A grid-like conductor is connected to the frame-shaped conductor, and a connection conductor is formed inside the mother board from the wiring conductor to the grid-like conductor in each wiring board region; Before And the connecting conductor and the frame-like conductor is connected through the grid-like conductor, at least one of the grid-like conductor and the frame-like conductor, a notch corresponding to the at least one corner of the wiring substrate area parts and is characterized in Rukoto to have a.

本発明の複数個取り配線基板によれば、配線基板領域とダミー領域との境界に沿ってダミー領域の表面および内部に枠状導体が形成されているとともに、配線基板領域同士の境界に沿ってダイシングカットされる捨代部が設けられ、捨代部の表面および内部に、端部が枠状導体に接続している格子状導体が形成され、各配線基板領域の配線導体から枠状導体にかけて母基板の内部に接続導体が形成され、母基板の内部において接続導体と枠状導体とが格子状導体を介して接続されており、格子状導体および枠状導体の少なくとも一方に、配線基板領域の少なくとも1つの角部に対応する切り欠き部を有することから、配線基板領域の配線導体と枠状導体との電気的な接続は、接続導体に加えて格子状導体を介して行なうことができ、接続導体の長さを短くしたり、数を少なくしたりすることができる。また、格子状導体および枠状導体の少なくとも一方に、配線基板領域の少なくとも1つの角部に対応する切り欠き部を有することから、例えば格子状導体や枠状導体となる金属ペーストが、配線基板領域の角部側に向かってにじみが生じても、そのにじんだ部分(にじみ部)を切り欠き部の内側に収めることができるため、格子状導体や枠状導体の幅でダイシングカットを行なったときに、その幅の外側において、ダイシングカット後の個片の配線基板に、にじみが生じることはない。したがって、個片の配線基板の露出面に不要な導体(にじみ部)が生じることは抑制され、配線基板に電気的短絡を発生させることは効果的に防止される。
According to the multiple wiring substrate of the present invention , the frame-shaped conductor is formed on the surface and inside of the dummy region along the boundary between the wiring substrate region and the dummy region, and along the boundary between the wiring substrate regions.捨代portion to be diced is provided, on the surface and inside of the捨代portion, grid-like conductor is formed whose ends are connected to the frame-shaped conductor, toward the frame-like conductor from the wiring conductors of the wiring substrate region A connection conductor is formed inside the mother board, and the connection conductor and the frame-like conductor are connected to each other via a grid-like conductor inside the mother board, and the wiring board region is connected to at least one of the grid-like conductor and the frame-like conductor. from Rukoto that have a cutout portion corresponding to at least one corner of the electrical connection between the wiring conductor and the frame conductor of the wiring substrate area, it is via a grid-like conductor in addition to the connection conductor Can be connected conductor The length or shorter, or you can reduce the number. In addition, since at least one of the grid-like conductor and the frame-like conductor has a notch corresponding to at least one corner of the wiring board region, for example, a metal paste that becomes a grid-like conductor or a frame-like conductor is used as the wiring board. Even if bleeding occurs toward the corner of the region, the bleeding portion (bleeding portion) can be accommodated inside the notch, so dicing cut was performed with the width of the grid-like conductor or frame-like conductor. Sometimes, the outside of the width does not cause bleeding on the individual wiring board after the dicing cut. Therefore, generation of unnecessary conductors (bleeding portions) on the exposed surface of the individual wiring board is suppressed, and occurrence of an electrical short circuit on the wiring board is effectively prevented.

すなわち、接続導体は、各配線基板領域の配線導体から格子状導体までの間を接続するだけの長さ(数)があれば、配線導体と枠状導体との電気的接続を行なわせるうえで十分であり、配線基板領域同士の境界を越えるように長く形成する必要がない。   In other words, if the connection conductor has a length (number) sufficient to connect between the wiring conductor and the grid-like conductor in each wiring board region, the wiring conductor and the frame-like conductor can be electrically connected. It is sufficient, and it is not necessary to form it long so as to exceed the boundary between the wiring board regions.

そのため、配線導体と接続されてめっき用の電流を供給する接続導体の形成される長さが短くなり、接続導体と配線導体との間に不要な静電容量が大きく生じることは効果的に防止される。その結果、接続導体の残留に起因する個片の配線基板における電気特性の劣化等の不具合が抑制された、複数個取り配線基板を提供することができる。   Therefore, the length of the connection conductor that is connected to the wiring conductor and supplies the plating current is shortened, and it is effectively prevented that unnecessary capacitance is generated between the connection conductor and the wiring conductor. Is done. As a result, it is possible to provide a multi-piece wiring board in which problems such as deterioration of electrical characteristics in the individual wiring board due to the remaining connection conductor are suppressed.

また、本発明の複数個取り配線基板は、格子状導体は、母基板の表面に形成されていることから、ダイシングするときの目印になり、容易にダイシングすることができる。
Further, a plurality patterning wiring board of the present invention, rank child-like conductor, since it is formed on the surface of the base substrate, will mark the time of dicing can be easily diced.

また、本発明の複数個取り配線基板は、格子状導体および枠状導体の少なくとも一方に、配線基板領域の少なくとも1つの角部に対応する切り欠き部を有することを特徴とすることから、例えば格子状導体や枠状導体となる金属ペーストが、配線基板領域の角部側に向かってにじみが生じても、そのにじんだ部分(にじみ部)を切り欠き部の内側に収めることができる。そのため、格子状導体や枠状導体の幅でダイシングカットを行なったときに、その幅の外側において、ダイシングカット後の個片の配線基板に、にじみが生じることはない。したがって、個片の配線基板の露出面に不要な導体(にじみ部)が生じることは抑制され、配線基板に電気的短絡を発生させることは効果的に防止される。
Further, a plurality patterning wiring board of the present invention, at least one of case child-like conductor and the frame conductor, since it is characterized by having a cutout portion corresponding to at least one corner of the wiring substrate area, For example, even if a metal paste that becomes a grid-like conductor or a frame-like conductor bleeds toward the corner of the wiring board region, the bleed part (bleed part) can be stored inside the notch part. Therefore, when subjected to dicing the width of the grid-like conductor or a frame-like conductor, the outside in the width, in the wiring substrate after dicing cut pieces, no bleeding occurs. Therefore, generation of unnecessary conductors (bleeding portions) on the exposed surface of the individual wiring board is suppressed, and occurrence of an electrical short circuit on the wiring board is effectively prevented.

本発明の複数個取り配線基板について添付図面に基づき説明する。   The multiple wiring board of the present invention will be described with reference to the accompanying drawings.

図1(a)は、本発明の複数個取り配線基板について実施の形態の一例を示す平面図であり、図1(b)は、その平面透視図である。   FIG. 1 (a) is a plan view showing an example of an embodiment of a multiple wiring substrate of the present invention, and FIG. 1 (b) is a plan perspective view thereof.

図1(a)および(b)において、1は母基板、2は配線基板領域、3はダミー領域、4は枠状導体、5は捨代部、6は格子状導体、7は接続導体である。   1 (a) and 1 (b), 1 is a mother board, 2 is a wiring board area, 3 is a dummy area, 4 is a frame-like conductor, 5 is an abandoned part, 6 is a grid-like conductor, and 7 is a connecting conductor. is there.

母基板1は、平板状の酸化アルミニウム質焼結体(アルミナセラミックス)、窒化アルミニウム質焼結体、ムライト質焼結体、窒化珪素質焼結体、炭化珪素質焼結体、ガラスセラミックス焼結体等の電気絶縁材料から成る。   The mother substrate 1 includes a flat aluminum oxide sintered body (alumina ceramic), an aluminum nitride sintered body, a mullite sintered body, a silicon nitride sintered body, a silicon carbide sintered body, and a glass ceramic sintered body. It consists of an electrically insulating material such as a body.

母基板1は、例えば、酸化アルミニウム質焼結体からなる場合であれば、酸化アルミニウム等の原料粉末を有機溶剤、バインダとともにシート状に加工して形成したセラミックグリーンシートを、所定の形状、寸法に加工した後、必要に応じて複数を厚み方向に積層するとともに1300〜1600℃で焼成することにより作製される。   If the mother substrate 1 is made of, for example, an aluminum oxide sintered body, a ceramic green sheet formed by processing a raw material powder such as aluminum oxide together with an organic solvent and a binder into a sheet shape is formed into a predetermined shape and size. After being processed, the plurality of layers are laminated in the thickness direction as necessary and fired at 1300 to 1600 ° C.

母基板1の中央部には、複数個の配線基板領域2が行列状に配列されている。各配線基板領域2は、それぞれが個々の配線基板(図示せず)となる領域であり、その上面中央部等の露出面に、電子部品(図示せず)を搭載する搭載部を有している。   In the central portion of the mother board 1, a plurality of wiring board regions 2 are arranged in a matrix. Each wiring board region 2 is an area that becomes an individual wiring board (not shown), and has a mounting portion for mounting electronic components (not shown) on an exposed surface such as a central portion of the upper surface. Yes.

配線基板領域2は、図1に示したような正方形平板状のものだけに限定されず、細長い長方形状のものや、一部に凹部を有し、その凹部の底面を搭載部としたもの等でもかまわない。   The wiring board region 2 is not limited to a square flat plate shape as shown in FIG. 1, but is a long and narrow rectangular shape, or has a concave portion in part and the bottom surface of the concave portion is a mounting portion. But it doesn't matter.

なお、電子部品としては、受光素子や発光素子等の光半導体素子および半導体集積回路素子を含む半導体素子、水晶振動子や弾性表面波素子等の圧電素子、圧力センサー素子、容量素子、抵抗器等が挙げられる。   Electronic components include optical semiconductor elements such as light receiving elements and light emitting elements and semiconductor elements including semiconductor integrated circuit elements, piezoelectric elements such as crystal resonators and surface acoustic wave elements, pressure sensor elements, capacitive elements, resistors, etc. Is mentioned.

各配線基板領域2の露出表面には配線導体8が形成されている。配線導体8は、電子部品(図示せず)と電気的に接続され、これを外部の電気回路等に電気的に接続させるための導電路として機能する。   A wiring conductor 8 is formed on the exposed surface of each wiring board region 2. The wiring conductor 8 is electrically connected to an electronic component (not shown) and functions as a conductive path for electrically connecting it to an external electric circuit or the like.

配線導体8について、一部が電子部品の搭載部2aに位置し、他の一部が配線基板領域2の下面等の搭載部外に位置するように形成しておくことにより、上記導電路として機能させることができる。この場合、配線導体8の搭載部2aに位置する部位に電子部品の電極(図示せず)をはんだやボンディングワイヤ等の接続材を介して接続することにより、電子部品の電極(図示せず)が配線導体8を介して配線基板領域2(個片の配線基板)の外に導出される。   By forming the wiring conductor 8 so that a part thereof is positioned on the mounting part 2a of the electronic component and the other part is positioned outside the mounting part such as the lower surface of the wiring board region 2, the conductive path is formed as described above. Can function. In this case, an electrode of an electronic component (not shown) is connected to a portion located on the mounting portion 2a of the wiring conductor 8 via a connecting material such as solder or a bonding wire. Is led out of the wiring board region 2 (individual piece of wiring board) through the wiring conductor 8.

配線導体8は、タングステンやモリブデン、マンガン、銅、銀、パラジウム、金、白金等の金属材料により形成される。   The wiring conductor 8 is formed of a metal material such as tungsten, molybdenum, manganese, copper, silver, palladium, gold, or platinum.

配線導体8は、例えば、タングステンからなる場合であれば、タングステンの粉末に有機溶剤、バインダを添加、混練して作製した金属ペーストを、母基板1となるセラミックグリーンシートに、スクリーン印刷法等の手段で所定パターンに塗布することにより形成することができる。   For example, if the wiring conductor 8 is made of tungsten, a metal paste prepared by adding and kneading an organic solvent and a binder to tungsten powder is applied to a ceramic green sheet serving as the mother substrate 1 by a screen printing method or the like. It can form by apply | coating to a predetermined pattern by a means.

配線導体8は、その露出表面に、ニッケルや金、銅、パラジウム、錫、白金等のめっき
層(図示せず)が被着される。
The wiring conductor 8 is coated with a plating layer (not shown) of nickel, gold, copper, palladium, tin, platinum or the like on the exposed surface.

めっき層は、配線導体8の酸化腐食を防止することや、配線導体8に対するはんだの濡れ性、ボンディングワイヤのボンディング性等の特性を向上させること等のためのものである。   The plating layer is for preventing the oxidative corrosion of the wiring conductor 8, improving the properties such as the wettability of the solder with respect to the wiring conductor 8 and the bonding property of the bonding wire.

めっき層は、電解めっき法や無電解めっき法等のめっき法により形成される。例えば、ニッケルのめっき層であれば、硫酸ニッケルおよび塩化ニッケルを主成分とし、ホウ酸等の緩衝剤や光沢剤等の添加剤を含むワット浴を準備し、これを適当な温度、pH(例えば、40〜65℃、pH3.8〜4.5)に調整した後、配線導体8が形成されている母基板1を液中に浸漬する。そして、外部電源(整流器等)から配線導体8に所定の電流密度(例えば2〜10A/dm2)で電流を供給することにより、ニッケルのめっき層が形成される。なお、電流を供給する時間は、被着させようとするめっき層の厚みに応じて適宜調整する。   The plating layer is formed by a plating method such as an electrolytic plating method or an electroless plating method. For example, in the case of a nickel plating layer, a watt bath containing nickel sulfate and nickel chloride as main components and containing a buffering agent such as boric acid and an additive such as a brightening agent is prepared. 40 to 65 ° C., pH 3.8 to 4.5), and then the mother board 1 on which the wiring conductor 8 is formed is immersed in the liquid. Then, a nickel plating layer is formed by supplying current to the wiring conductor 8 from an external power source (such as a rectifier) at a predetermined current density (for example, 2 to 10 A / dm 2). The time for supplying the current is appropriately adjusted according to the thickness of the plating layer to be deposited.

母基板1の外周部には、配列された複数の配線基板領域2を取り囲む枠状のダミー領域3が設けられている。   A frame-like dummy region 3 surrounding a plurality of arranged wiring substrate regions 2 is provided on the outer periphery of the mother substrate 1.

ダミー領域3は、複数個取り配線基板の取り扱いを容易とすること等のために設けられている。   The dummy area 3 is provided in order to facilitate the handling of a plurality of dummy wiring boards.

また、母基板1には、配線基板領域2とダミー領域3との境界に沿って枠状導体4が形成されているとともに、配線基板領域2同士の境界に沿ってダイシングカットされる捨代部5が設けられ、捨代部5に、端部が枠状導体4に接続する格子状導体6が形成され、各配線基板領域2の配線導体8から枠状導体4にかけて接続導体7が形成されている。   In addition, a frame-like conductor 4 is formed on the mother board 1 along the boundary between the wiring board area 2 and the dummy area 3, and a dicing section that is diced along the boundary between the wiring board areas 2 is used. 5 is provided, a grid-like conductor 6 whose end is connected to the frame-like conductor 4 is formed in the surplus portion 5, and a connection conductor 7 is formed from the wiring conductor 8 to the frame-like conductor 4 in each wiring board region 2. ing.

接続導体7および格子状導体6は、配線導体8を枠状導体4に電気的に接続させるための導電路であり、枠状導体4は、複数の配線基板領域2の各配線導体8にめっき用の電流を供給するための共通導体である。   The connection conductor 7 and the grid-like conductor 6 are conductive paths for electrically connecting the wiring conductor 8 to the frame-like conductor 4, and the frame-like conductor 4 is plated on each wiring conductor 8 of the plurality of wiring board regions 2. It is a common conductor for supplying a current for use.

すなわち、枠状導体4の一部を母基板の側面まで延在させるとともに、この延在部分(図示せず)にめっき用治具の端子(図示せず)を接続し、整流器等の外部の電源(図示せず)から治具の端子を介して枠状導体4にめっき用の電流を供給する。枠状導体4に供給されためっき用の電流は、格子状導体6を介して各接続導体7に供給され、接続導体7を介して各配線導体8に供給されることになる。   That is, a part of the frame-like conductor 4 is extended to the side surface of the mother board, and a terminal (not shown) of a plating jig is connected to this extended part (not shown) to A current for plating is supplied from a power source (not shown) to the frame-like conductor 4 through the terminals of the jig. The plating current supplied to the frame-like conductor 4 is supplied to each connecting conductor 7 via the grid-like conductor 6 and supplied to each wiring conductor 8 via the connecting conductor 7.

枠状導体4、格子状導体6および接続導体7は、配線導体8と同様の金属材料(タングステンやモリブデン、マンガン、銅、銀、パラジウム、金、白金等)により形成される。   The frame-like conductor 4, the lattice-like conductor 6, and the connection conductor 7 are formed of the same metal material (tungsten, molybdenum, manganese, copper, silver, palladium, gold, platinum, etc.) as the wiring conductor 8.

例えば、枠状導体4、格子状導体6および接続導体7がタングステンからなる場合であれば、タングステンの粉末に有機溶剤、バインダを添加、混練して作製した金属ペーストを、母基板1となるセラミックグリーンシートに、スクリーン印刷法等の手段で所定パターンに塗布することにより形成することができる。   For example, if the frame-like conductor 4, the grid-like conductor 6, and the connecting conductor 7 are made of tungsten, a metal paste prepared by adding an organic solvent and a binder to tungsten powder and kneading the ceramic is used as the mother substrate 1. The green sheet can be formed by applying a predetermined pattern by means such as screen printing.

また、捨代部5は、配線基板領域2同士の境界に沿って、ダイシングカットで使用されるダイシング刃の幅(約200μm)程度の幅で帯状に設けられた領域である。この捨代部5がダイシング刃で研削、除去されることにより、各配線基板領域2が個片の配線基板(図示せず)に分割される。   Further, the surrender portion 5 is a region provided in a strip shape with a width of about the width (about 200 μm) of the dicing blade used in the dicing cut along the boundary between the wiring board regions 2. By grinding and removing the surplus portion 5 with a dicing blade, each wiring board region 2 is divided into individual wiring boards (not shown).

捨代部5に形成されていた格子状導体6は、ダイシングカットにともない完全に除去されるので、個片の配線基板に残留することはない。なお、ダイシングカットは、配線基板領域2とダミー領域3との境界に沿った部位でも行なわれる。この、配線基板領域2とダミー領域3との境界に沿った分割により枠状導体4が除去される。   Since the grid-like conductors 6 formed in the surrogate portion 5 are completely removed along with the dicing cut, they do not remain on the individual wiring board. The dicing cut is also performed at a site along the boundary between the wiring board region 2 and the dummy region 3. The frame-like conductor 4 is removed by the division along the boundary between the wiring board region 2 and the dummy region 3.

本発明の複数個取り配線基板によれば、配線基板領域2同士の境界に沿ってダイシングカットされる捨代部5を設け、捨代部5に、端部が枠状導体4に接続する格子状導体6を形成し、各配線基板領域2の配線導体8から枠状導体4にかけて接続導体7を形成するようにしたことから、配線基板領域2の配線導体8と枠状導体4との電気的な接続は、接続導体7に加えて、配線基板領域外に位置する格子状導体6を介して行なわせることができ、接続導体7の長さを短くしたり、数を少なくしたりすることができる。   According to the multiple wiring substrate of the present invention, the surplus portion 5 that is diced and cut along the boundary between the wiring substrate regions 2 is provided, and the end portion 5 is connected to the frame-like conductor 4 at the end portion. Since the connection conductor 7 is formed from the wiring conductor 8 of each wiring board region 2 to the frame-like conductor 4, the electrical conductor between the wiring conductor 8 of the wiring board region 2 and the frame-like conductor 4 is formed. In addition to the connection conductor 7, the general connection can be made via the grid-like conductor 6 located outside the wiring board region, and the length of the connection conductor 7 can be shortened or the number can be reduced. Can do.

すなわち、接続導体7は、各配線基板領域2の配線導体8から格子状導体6までの間を接続するだけの長さ(数)があれば、配線導体8と枠状導体4との電気的接続を行なわせるうえで十分であり、配線基板領域2同士の境界を越えるように長く形成する必要がない。   That is, if the connection conductor 7 has a length (number) sufficient to connect between the wiring conductor 8 and the grid-like conductor 6 in each wiring board region 2, the electrical connection between the wiring conductor 8 and the frame-like conductor 4 is achieved. It is sufficient for making the connection, and it is not necessary to form it long so as to exceed the boundary between the wiring board regions 2.

そのため、配線導体8と接続されてめっき用の電流を供給する接続導体7の形成される長さが短くなり、接続導体7と配線導体8との間に不要な静電容量が大きく生じることは効果的に防止される。その結果、接続導体7の残留に起因する個片の配線基板における電気特性の劣化等の不具合が抑制された、複数個取り配線基板10を提供することができる。   For this reason, the length of the connection conductor 7 that is connected to the wiring conductor 8 and supplies the plating current is shortened, and unnecessary capacitance is greatly generated between the connection conductor 7 and the wiring conductor 8. Effectively prevented. As a result, it is possible to provide a multiple wiring substrate 10 in which problems such as deterioration of electrical characteristics in the individual wiring substrate due to the remaining connection conductor 7 are suppressed.

なお、このような複数個取り配線基板10においては、枠状導体4や格子状導体6となる金属ペーストににじみが発生する可能性があるので、個片に分割する際の、枠状導体4や格子状導体6の除去を確実なものとするため、図2に示すような、以下の構成を備え
In such a multiple wiring substrate 10, there is a possibility that the metal paste that becomes the frame-like conductor 4 or the grid-like conductor 6 may bleed. Therefore, the frame-like conductor 4 when divided into individual pieces. to the removal of or lattice-like conductor 6 and sure real ones, as shown in FIG. 2, Ru with the following structure
.

図2は、本発明の複数個取り配線基板の他の実施の形態の一例を示す平面図であり、図中の番号は、図1と共通のものについては、図1で付した番号を引用する。ここで、図2において9は切り欠き部を示す。   FIG. 2 is a plan view showing an example of another embodiment of a multiple wiring board according to the present invention. The numbers in the figure are the same as those in FIG. To do. Here, in FIG. 2, 9 indicates a notch.

すなわち、例えば、配線基板領域2の角部に対応する格子状導体6や枠状導体4に、にじみが発生したときに、ダイシングカット後に、にじみ部が個片の配線基板に残留し、例えば、配線基板の表面に形成された配線導体8と電気的短絡を生じてしまう不具合が発生するおそれがある。   That is, for example, when a blur occurs in the grid-like conductor 6 or the frame-like conductor 4 corresponding to the corners of the wiring board region 2, the bleeding part remains on the individual wiring board after the dicing cut, for example, There is a possibility that a defect that causes an electrical short circuit with the wiring conductor 8 formed on the surface of the wiring board may occur.

そこで、格子状導体6および枠状導体4の少なくとも一方に、配線基板領域4の少なくとも1つの角部に対応する切り欠き部を有することにより、格子状導体6や枠状導体4のにじみが生じても、そのにじんだ部分(にじみ部)を切り欠き部9の内側に収めることができる。そのため、格子状導体6や枠状導体4の幅でダイシングカットを行なったときに、その幅の外側において、ダイシングカット後の個片の配線基板に、にじみ部が生じる場合はない。したがって、個片の配線基板の露出面に不要な導体(にじみ部)が生じることは抑制され、配線基板に電気的短絡を発生させることは効果的に防止される。   Therefore, at least one of the grid-like conductor 6 and the frame-like conductor 4 has a notch corresponding to at least one corner of the wiring board region 4, so that the grid-like conductor 6 and the frame-like conductor 4 are blurred. However, the bleed portion (the bleed portion) can be accommodated inside the cutout portion 9. For this reason, when dicing cut is performed with the width of the grid-like conductor 6 or the frame-like conductor 4, a bleeding portion does not occur on the individual wiring board after the dicing cut outside the width. Therefore, generation of unnecessary conductors (bleeding portions) on the exposed surface of the individual wiring board is suppressed, and occurrence of an electrical short circuit on the wiring board is effectively prevented.

また好ましくは、切り欠き部9は、図2に示したように、格子状導体同士の少なくとも1つの交差部の配線基板領域4の角部に対応して、もしくは格子状導体と枠状導体の少なくとも1つの交差部の配線基板領域4の角部に対応して、もしくは枠状導体の少なくとも1つの配線基板領域4の角部に対応して、設けられるのが好ましい。また、切り欠き部9は、配線基板領域4のすべての角部に対応して、設けてもよい。   Preferably, the notch 9 corresponds to a corner of the wiring board region 4 at at least one intersection of the lattice conductors as shown in FIG. 2 or between the lattice conductor and the frame conductor. It is preferable to be provided corresponding to a corner of the wiring substrate region 4 at least one intersection or corresponding to a corner of at least one wiring substrate region 4 of the frame conductor. Further, the notches 9 may be provided corresponding to all the corners of the wiring board region 4.

なお本発明において、切り欠き部9とは、導体部が形成されていない部分を示すものであり、必ずしも穴や凹部といった切り欠きである必要はない。なお、切り欠き部9は、めっき用の電流の導通を確保するために、格子状導体9を切断することがないように設ける必要がある。   In the present invention, the notch portion 9 indicates a portion where the conductor portion is not formed, and is not necessarily a notch such as a hole or a recess. Note that the notches 9 need to be provided so as not to cut the grid-like conductors 9 in order to ensure conduction of current for plating.

なお、切り欠き部9は、枠状導体4や格子状導体6となる金属ペーストをセラミックグリーンシートに印刷する際に、スクリーン印刷等に使用する印刷用の製版(版面)に、切り欠き部9の形状に応じた非印刷部を設けておくこと等の手段により形成することができる。   The notch 9 is formed on the plate for printing (plate surface) used for screen printing or the like when the metal paste that becomes the frame conductor 4 or the grid conductor 6 is printed on the ceramic green sheet. It can be formed by means such as providing a non-printing part corresponding to the shape of the sheet.

なお、接続導体7は、不要な静電容量の発生を抑える上では、配線導体8から、格子状導体6のうち最も近い位置にあるものにかけて形成するようにしておくことが好ましい。この場合、配線導体8同士の間の電気絶縁性の劣化や電気的短絡等を誘発させないように注意する。   In order to suppress generation of unnecessary capacitance, the connection conductor 7 is preferably formed from the wiring conductor 8 to the closest one of the grid conductors 6. In this case, care should be taken not to induce electrical insulation deterioration or electrical short circuit between the wiring conductors 8.

また、枠状導体4は、母基板1の表面に形成されている。このことから、ダイシングカットするときの目印になり、容易にダイシングカットすることができる。
Further, the frame-shaped conductor 4 that is formed on the surface of the base substrate 1. From this, it becomes a mark at the time of dicing cut, and can be easily cut by dicing.

この場合の表面は、例えば、ダイシングカットするために複数個取り配線基板10を載置したときに上向きになる面であり、電子部品の搭載部を有する面(上面)である。また、上下両面に形成してもかまわない。   The surface in this case is, for example, a surface that faces upward when a plurality of wiring boards 10 are mounted for dicing cutting, and is a surface (upper surface) that has an electronic component mounting portion. Further, it may be formed on both upper and lower surfaces.

また、枠状導体4は、母基板1の表面だけでなく、接続する配線導体8の配置等に応じて、接続導体7の長さを極力短くするために、母基板1の内部にも形成するThe frame-like conductor 4 is formed not only on the surface of the mother board 1 but also inside the mother board 1 in order to shorten the length of the connecting conductor 7 as much as possible in accordance with the arrangement of the wiring conductors 8 to be connected. To do .

なお、格子状導体6についても、枠状導体4と同様に、少なくとも母基板1の表面に形成しておくことが好ましい。格子状導体6は、ダイシングカットされる捨代部5に形成されているので、ダイシングカット時の目印として効果的である。   Note that the lattice-like conductor 6 is also preferably formed at least on the surface of the mother board 1 in the same manner as the frame-like conductor 4. Since the grid-like conductor 6 is formed in the surplus portion 5 that is cut by dicing, it is effective as a mark at the time of dicing cut.

切り欠き部9は、図2に示す円弧状だけでなく、楕円形状や角形状であってもよい。   The notch 9 may be not only the arc shape shown in FIG. 2 but also an elliptical shape or a square shape.

なお、本発明は以上の実施の形態の例に限定されるものではなく、本発明の要旨を逸脱しない範囲内で種々の変更を施すことは差し支えない。   Note that the present invention is not limited to the above embodiments, and various modifications may be made without departing from the scope of the present invention.

(a)は本発明の複数個取り配線基板の実施の形態の一例を示す平面図であり、(b)はその平面透視図である。(A) is a top view which shows an example of embodiment of the multiple taking wiring board of this invention, (b) is the plane perspective view. は本発明の複数個取り配線基板の他の実施の形態の一例を示す平面図である。These are the top views which show an example of other embodiment of the multiple pick-up wiring board of this invention. (a)は従来技術の複数個取り配線基板の一例を示す平面図であり、(b)はその平面透視図である。(A) is a top view which shows an example of the multiple pick-up wiring board of a prior art, (b) is the plane perspective drawing.

符号の説明Explanation of symbols

1・・・・母基板
2・・・・配線基板領域
3・・・・ダミー領域
4・・・・枠状導体
5・・・・捨代部
6・・・・格子状導体
7・・・・接続導体
8・・・・配線導体
9・・・・切り欠き部
10・・・複数個取り配線基板
DESCRIPTION OF SYMBOLS 1 ... Mother board 2 ... Wiring board area 3 ... Dummy area 4 ... Frame-shaped conductor 5 ... Discarding part 6 ... Grid-shaped conductor 7 ... · Connection conductor 8 ··· Wiring conductor 9 ··· Notch 10 · · · Multiple wiring board

Claims (1)

母基板の中央部に複数個の配線基板領域が行列状に配列されるとともに、外周部に前記配線基板領域を取り囲む枠状のダミー領域が設けられ、前記配線基板領域に、露出表面にめっき層が被着される配線導体が形成されてなる複数個取り配線基板であって、前記母基板は、前記配線基板領域と前記ダミー領域との境界に沿って前記ダミー領域の表面および内部に枠状導体が形成されているとともに、前記配線基板領域同士の境界に沿ってダイシングカットされる捨代部が設けられ、該捨代部の表面および内部に、端部が前記枠状導体に接続している格子状導体が形成され、前記各配線基板領域の前記配線導体から前記格子状導体にかけて前記母基板の内部に接続導体が形成され、前記母基板の内部において前記接続導体と前記枠状導体とが前記格子状導体を介して接続されており、前記格子状導体および前記枠状導体の少なくとも一方に、前記配線基板領域の少なくとも1つの角部に対応する切り欠き部を有することを特徴とする複数個取り配線基板。 A plurality of wiring board regions are arranged in a matrix at the center of the mother board, and a frame-like dummy area surrounding the wiring board area is provided on the outer periphery, and a plating layer is provided on the exposed surface in the wiring board area. A plurality of wiring boards formed with wiring conductors to be attached, wherein the mother board has a frame shape on the surface and inside of the dummy area along the boundary between the wiring board area and the dummy area with conductors are formed, the wiring substrate region捨代portion which is diced along the boundary is provided between the surface and the interior of the該捨margin portion, the end portion is connected to the frame-like conductor A grid conductor is formed, and a connection conductor is formed in the mother board from the wiring conductor to the grid conductor in each wiring board region, and the connection conductor and the frame conductor in the mother board. Before Are connected via a grid-like conductor, at least one of the grid-like conductor and the frame-like conductor, and wherein the Rukoto that have a cutout portion corresponding to at least one corner of the wiring substrate area Multiple circuit board.
JP2006082225A 2005-09-28 2006-03-24 Multiple wiring board Expired - Fee Related JP4738220B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04239794A (en) * 1991-01-23 1992-08-27 Rohm Co Ltd Fabrication of circit board
JP2000012989A (en) * 1998-06-18 2000-01-14 Murata Mfg Co Ltd Aggregate substrate and unit substrate formed by splitting the same
JP2000091722A (en) * 1998-09-16 2000-03-31 Ibiden Co Ltd Printed wiring board and its manufacture
JP2000286529A (en) * 1999-03-31 2000-10-13 Nippon Circuit Kogyo Kk Manufacture of printed circuit board
JP2002009188A (en) * 2000-06-19 2002-01-11 Sumitomo Metal Electronics Devices Inc Ceramic package and its manufacturing method
JP2002246703A (en) * 2001-02-13 2002-08-30 Rohm Co Ltd Method for producing separate board piece, board piece and assembled board

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04239794A (en) * 1991-01-23 1992-08-27 Rohm Co Ltd Fabrication of circit board
JP2000012989A (en) * 1998-06-18 2000-01-14 Murata Mfg Co Ltd Aggregate substrate and unit substrate formed by splitting the same
JP2000091722A (en) * 1998-09-16 2000-03-31 Ibiden Co Ltd Printed wiring board and its manufacture
JP2000286529A (en) * 1999-03-31 2000-10-13 Nippon Circuit Kogyo Kk Manufacture of printed circuit board
JP2002009188A (en) * 2000-06-19 2002-01-11 Sumitomo Metal Electronics Devices Inc Ceramic package and its manufacturing method
JP2002246703A (en) * 2001-02-13 2002-08-30 Rohm Co Ltd Method for producing separate board piece, board piece and assembled board

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