JP4732524B2 - 密閉容器及び該密閉容器の蓋開閉システム - Google Patents

密閉容器及び該密閉容器の蓋開閉システム Download PDF

Info

Publication number
JP4732524B2
JP4732524B2 JP2009006602A JP2009006602A JP4732524B2 JP 4732524 B2 JP4732524 B2 JP 4732524B2 JP 2009006602 A JP2009006602 A JP 2009006602A JP 2009006602 A JP2009006602 A JP 2009006602A JP 4732524 B2 JP4732524 B2 JP 4732524B2
Authority
JP
Japan
Prior art keywords
lid
opening
pod
latch mechanism
latch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009006602A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010087455A (ja
Inventor
宏 五十嵐
俊彦 宮嶋
勉 岡部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP2009006602A priority Critical patent/JP4732524B2/ja
Publication of JP2010087455A publication Critical patent/JP2010087455A/ja
Application granted granted Critical
Publication of JP4732524B2 publication Critical patent/JP4732524B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2009006602A 2008-09-08 2009-01-15 密閉容器及び該密閉容器の蓋開閉システム Active JP4732524B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009006602A JP4732524B2 (ja) 2008-09-08 2009-01-15 密閉容器及び該密閉容器の蓋開閉システム

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008229238 2008-09-08
JP2008229238 2008-09-08
JP2009006602A JP4732524B2 (ja) 2008-09-08 2009-01-15 密閉容器及び該密閉容器の蓋開閉システム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011093561A Division JP5263633B2 (ja) 2008-09-08 2011-04-20 密閉容器及び該密閉容器の蓋開閉システム

Publications (2)

Publication Number Publication Date
JP2010087455A JP2010087455A (ja) 2010-04-15
JP4732524B2 true JP4732524B2 (ja) 2011-07-27

Family

ID=42251080

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2009006602A Active JP4732524B2 (ja) 2008-09-08 2009-01-15 密閉容器及び該密閉容器の蓋開閉システム
JP2011093561A Active JP5263633B2 (ja) 2008-09-08 2011-04-20 密閉容器及び該密閉容器の蓋開閉システム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011093561A Active JP5263633B2 (ja) 2008-09-08 2011-04-20 密閉容器及び該密閉容器の蓋開閉システム

Country Status (1)

Country Link
JP (2) JP4732524B2 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8528947B2 (en) * 2008-09-08 2013-09-10 Tdk Corporation Closed container and lid opening/closing system therefor
JP5270298B2 (ja) * 2008-10-28 2013-08-21 信越ポリマー株式会社 基板収納容器
JP4624458B2 (ja) * 2008-11-11 2011-02-02 Ｔｄｋ株式会社 密閉容器及び該密閉容器の蓋開閉システム
JP4748816B2 (ja) * 2008-11-28 2011-08-17 Ｔｄｋ株式会社 密閉容器の蓋開閉システム
JP4919123B2 (ja) * 2010-03-08 2012-04-18 Ｔｄｋ株式会社 処理基板収納ポッド及び処理基板収納ポッドの蓋開閉システム
KR102346007B1 (ko) * 2020-09-14 2022-01-03 김진국 음식물 쓰레기 처리기
JP7654147B1 (ja) * 2024-09-27 2025-03-31 平田機工株式会社 作業装置、その制御方法、コンピュータ可読式記憶媒体およびコンピュータプログラム製品
CN119121397B (zh) * 2024-11-08 2025-05-13 浙江丽水中欣晶圆半导体科技有限公司 硅基外延片厚度均匀性控制装置及控制方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11145269A (ja) * 1997-11-11 1999-05-28 Starlite Co Ltd 密閉式基板用カセット及びそれを用いたデバイスの製造方法
JP2000255677A (ja) * 1999-03-11 2000-09-19 Toshiba Corp 基板収納用容器と基板収納用容器の蓋体の開閉方法
JP3954287B2 (ja) * 1999-06-28 2007-08-08 東京エレクトロン株式会社 ウェハキャリア用蓋体の着脱装置
JP4223715B2 (ja) * 2001-12-04 2009-02-12 ミライアル株式会社 薄板用収納・保管容器
JP2003297896A (ja) * 2002-03-29 2003-10-17 Hitachi Kokusai Electric Inc 半導体製造装置
JP2004235516A (ja) * 2003-01-31 2004-08-19 Trecenti Technologies Inc ウエハ収納治具のパージ方法、ロードポートおよび半導体装置の製造方法

Also Published As

Publication number Publication date
JP2010087455A (ja) 2010-04-15
JP2011151417A (ja) 2011-08-04
JP5263633B2 (ja) 2013-08-14

Similar Documents

Publication Publication Date Title
JP4624458B2 (ja) 密閉容器及び該密閉容器の蓋開閉システム
JP4919123B2 (ja) 処理基板収納ポッド及び処理基板収納ポッドの蓋開閉システム
JP4748816B2 (ja) 密閉容器の蓋開閉システム
JP5263633B2 (ja) 密閉容器及び該密閉容器の蓋開閉システム
US8528947B2 (en) Closed container and lid opening/closing system therefor
US8171964B2 (en) Apparatus and method for opening/closing lid of closed container, gas replacement apparatus using same, and load port apparatus
KR102902818B1 (ko) 로드 포트
JP5729148B2 (ja) 基板搬送容器の開閉装置、蓋体の開閉装置及び半導体製造装置
JP4877662B2 (ja) 密閉容器及び該密閉容器の蓋開閉システム
KR102536621B1 (ko) 기판 처리 장치 및 기판 처리 시스템
JP2010153843A (ja) 密閉容器の蓋閉鎖方法及び密閉容器の蓋開閉システム
KR102602264B1 (ko) 로드 포트 장치, 로드 포트 장치의 구동 방법
JP5263587B2 (ja) 密閉容器の蓋開閉システム及び蓋開閉方法
US9401295B2 (en) Load port apparatus and clamping device to be used for the same
WO2016035480A1 (ja) 基板収納容器、ロードポート装置および基板処理装置
JP2010034146A (ja) 密閉容器及び該密閉容器の蓋開閉システム
JP3917138B2 (ja) ポッドオープナのポッドクランプユニット、当該ポッドクランプユニットを用いたポッドクランプ機構及びクランプ方法
JP2003303869A (ja) 基板搬送装置における蓋部材開閉装置
JPWO2018029915A1 (ja) ロードポート及びウェーハ搬送方法
JP2004342800A (ja) クリーンボックス開閉装置を備えるクリーン装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100222

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20110324

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110330

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110420

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140428

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4732524

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140428

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250