JP4725350B2 - Transmission X-ray measurement method - Google Patents

Description

  The present invention relates to a transmission X-ray measurement method for measuring the content and density or thickness of a plurality of elements and / or compounds contained in an object to be measured.

  Conventionally, nondestructive inspection apparatuses and medical imaging apparatuses using transmitted X-rays are known. For example, the nondestructive inspection apparatus described in Patent Document 1 is an apparatus that measures the thickness of a measurement object made of a material different from the base material provided on or inside the base material, and irradiates the measurement object. The X-ray to be measured is set so that the peak in the entire spectrum is the wavelength near the absorption edge of the element of the object to be measured, and the thickness of the object to be measured is calculated based on the intensity of the transmitted X-ray at the wavelength near the absorption edge Like to do. More specifically, the X-ray intensities after passing through the substrate and the object to be measured in the vicinity of the high energy (short wavelength) side of the absorption edge and in the vicinity of the low energy (long wavelength) side of the absorption edge are measured respectively. The thickness of the measured object is derived from the value, the linear absorption coefficient of the measured object near the high energy side of the absorption edge, and the linear absorption coefficient of the measured object near the low energy side of the absorption edge.

  The above-mentioned conventional transmission X-ray measurement method is based on the premise that the object to be measured is composed of one known component (element). Therefore, it is useful for specific purposes such as measuring the thickness of specific heavy metals attached to pipes or sealed containers, but cannot be applied when the object to be measured is a mixture of multiple elements or compounds. . In addition, the above Patent Document 1 discloses a method for obtaining the content of a specific element in an alloy when the object to be measured is an alloy. However, in this method, only the content of a specific element is obtained. The content of other elements cannot be obtained. In addition, since the method uses a formula using a linear absorption coefficient representing the attenuation rate of X-rays per unit length of the substance, the influence on the density of elements other than the specific element is not considered, The calculation accuracy of the specific element content is also low.

  By the way, in a transmission X-ray measurement apparatus, there is a strong demand for performing two-dimensional measurement as well as a certain part of a sample. Conventionally, transmission X-ray analyzers that perform two-dimensional measurements use X-ray photographic film, semiconductor two-dimensional detectors, imaging plates, and the like to detect transmitted X-rays, which are detected by such detectors. Since the transmitted X-ray energy cannot be discriminated, the magnitude of the density of the substance in the object to be measured is only two-dimensionally expressed as the intensity of the signal intensity. Therefore, such an apparatus cannot measure the thickness or content of an element in the object to be measured.

  As part of medical transmission X-ray measurement, the X-ray tube voltage for irradiating the object to be measured with X-ray tube is changed in two steps, high and low, and the measurement is performed twice. Quantification of bone minerals (mineral components in bones) of the human body is performed by processing the captured images. However, this is to obtain the content of a mixture of a plurality of elements, and the content separated for each element cannot be measured.

  On the other hand, in a transmission X-ray microscope, conventionally, a two-dimensional image using transmission X-rays is acquired by two methods. One of them is a method of irradiating an object to be measured with X-rays from a point light source and detecting the transmitted X-rays with a two-dimensional detector. Usually, the incident X-rays are monochromatized and condensed using synchrotron radiation (SR light) using a Fresnel zone plate or the like. In this case, by selecting X-rays having energy close to the absorption edge of the element contained in the object to be measured, the density of the transmission image by the element is emphasized. However, even with this method, the thickness and content of each element contained in the object to be measured cannot be obtained.

  Another method is to detect a transmitted X-ray by irradiating the object to be measured with an X-ray bundle close to a thin parallel light, and sequentially scan the object to be measured in a plane perpendicular to the incident X-ray to obtain a two-dimensional shape. This is a method for acquiring a transmission X-ray image of the first. Usually, since a detector that cannot discriminate energy is used, information such as the thickness and content of each element cannot be obtained unless the object to be measured is composed of only a single element. In some cases, X-rays from SR light are used as incident X-rays, and energy discrimination is performed using a wavelength dispersive detector to detect transmitted X-rays, so that the X-ray intensity distribution near the absorption edge of the element contained in the measured object is accurately Measurement of the chemical bonding state of the element (XAFS) is performed. However, in this case, in order to obtain a two-dimensional distribution of the thickness and content of each element contained in the object to be measured, it is necessary to scan the object to be measured in a plane perpendicular to the incident X-ray, which is long for measurement. In addition to the time required, there is a problem that the measurement accuracy decreases if the stability of incident X-rays during the measurement is not sufficient.

JP-A-11-2874633

  The present invention has been made to solve the above problems, and a first object of the present invention is to provide each element and / or compound when the object to be measured is composed of a plurality of elements and / or compounds whose types are known. Another object is to provide a transmission X-ray measurement method capable of accurately measuring the thickness, content and density of each compound in a short time.

  The second object of the present invention is to reduce the two-dimensional distribution of the thickness, content and density of each element in a short time when the object to be measured is composed of a plurality of elements and / or compounds whose types are known. It is another object of the present invention to provide a transmission X-ray measurement method that can measure accurately and accurately.

The transmitted X-ray measurement method according to the present invention, which is made to solve the above-mentioned problems , is an X-ray irradiation means for irradiating an object to be measured with X-rays having a continuous wavelength in a predetermined wavelength range instead of a single wavelength. An X-ray detector capable of energy discrimination for detecting transmitted X-rays transmitted through the object to be measured; and X-ray intensity data obtained by discriminating transmitted X-ray energy based on a detection signal from the X-ray detector. Thickness of each element and / or each compound of the object to be measured in which the type of the contained element and / or contained compound is known or can be estimated using a transmission X-ray measuring apparatus comprising the signal processing circuit to be obtained Or a transmission X-ray measurement method for measuring content and density,
The measured transmission X-ray intensity ratio at a predetermined energy, the mass absorption coefficient of all elements and / or compounds contained in the object to be measured, and the theoretical transmission X-ray intensity expressed by thickness or weight ratio and density The equation consisting of the ratio and the simultaneous equation is set up to be equal to or more than the total number of elements and / or compounds whose thickness or content is unknown contained in the object to be measured,
The X-ray intensity ratio at the predetermined energy is measured by the transmission X-ray measurement device,
Substituting the values obtained by the actual measurement into the simultaneous equations, solving the simultaneous equations, and obtaining the thickness or weight ratio and the overall density of each element and / or each compound as a solution .

  As one aspect of the transmitted X-ray measurement method according to the present invention, all elements and / or all compounds contained in the object to be measured in the energy range measurable by the combination of the X-ray irradiation means and the X-ray detector When the element inside has an absorption edge, use the simultaneous equation with the ratio of the measured values of transmitted X-rays at the energy on both sides across the absorption edge of each element as the X-ray intensity ratio, Each transmitted X-ray is detected by the X-ray detector, and the measured intensity ratio is calculated from the X-ray intensity data obtained thereby, and this is applied to the equations. The thickness or weight ratio of the element and / or each compound and the overall density can be determined.

  Since the absorption edge is unique to an element, when a certain element has an absorption edge, the intensity of transmitted X-rays is greatly different between a slightly higher energy side and a slightly lower energy side than the absorption edge. On the other hand, the intensity of direct X-rays that do not pass through the object to be measured with respect to the same energy can be regarded as substantially the same, and a simultaneous equation with relatively high calculation accuracy can be established using this. According to this, since it is only necessary to measure transmitted X-rays, direct X-ray measurement that does not pass through the object to be measured is unnecessary, and measurement time and a detector for that purpose are not required.

  As another aspect of the transmission X-ray measurement method according to the present invention, the object to be measured is transmitted at a predetermined energy equal to or greater than the total number of elements and / or compounds whose thickness or content is unknown. The transmitted X-ray transmitted through the object to be measured using a simultaneous equation in which the ratio of the intensity of the transmitted X-ray and the intensity of the direct X-ray not transmitted through the object to be measured at the same energy is used as the X-ray intensity ratio Direct X-rays that do not pass through are individually detected by the X-ray detector, the measured intensity ratio is calculated from the X-ray intensity data obtained thereby, and applied to the equations to solve the simultaneous equations. Thus, the thickness, weight ratio, and overall density of each element and / or each compound can be obtained.

  In this case, it is necessary to measure the intensity of the direct X-ray and the intensity of the transmitted X-ray at a plurality of energies (wavelengths), and use the difference in the intensity ratio between the direct X-ray and the transmitted X-ray at each wavelength. The content and density or thickness of each element and / or compound are calculated. Therefore, although a measurement time and a detector for direct X-ray measurement are separately required, there is almost no restriction on elements that can be quantified because the absorption edge is not used.

  However, since the calculation accuracy is higher when the absorption edge is used, both elements in the object to be measured, that is, elements having an absorption edge in the energy range measurable by the combination of the X-ray irradiation means and the X-ray detector, When elements that do not have absorption edges are mixed, an equation that can be applied to each element is selected, and a simultaneous equation that combines these equations may be established.

That is, for an element having an absorption edge in an energy range measurable by the combination of the X-ray irradiation means and the X-ray detector, the ratio of the measured values of transmitted X-rays at the energy on both sides across the absorption edge is On the other hand, for an element having no absorption edge in the energy range, an X-ray intensity ratio equation is used. For an element that does not pass through the measured object at the same energy as the transmitted X-ray intensity transmitted through the measured object at a predetermined energy. Using the X-ray intensity ratio as the ratio to the intensity of X-rays, and combining them, the total number of elements and / or compounds with unknown thickness or content contained in the object to be measured It is good to obtain | require the thickness or weight ratio, and the whole density of each element and / or each compound by setting simultaneous equations and calculating | requiring this solution.

Further, the transmission X-ray measurement method according to the present invention can be easily extended to two-dimensional measurement. That is, the X-ray irradiation means irradiates the object to be measured with divergent X-rays or parallel bundle X-rays in a predetermined wavelength range, and the X-ray detector detects transmitted X-rays transmitted through the object to be measured. The X-ray detection elements capable of energy discrimination are arranged two-dimensionally, and the signal processing circuit generates transmission X-rays for each micro-detection element based on a detection signal from the X-ray detector. X-ray intensity data is obtained by discriminating energy, and two-dimensional distribution information of the thickness or content and density of each element and / or each compound of the object to be measured can be measured. .

  Here, the divergent X-ray refers to a case where X-rays are emitted from a point-like or equivalent X-ray irradiation means so that the X-rays are spread with a predetermined solid angle, and the parallel bundle X-ray is planar or equivalent. X-rays emitted from the X-ray irradiating means having the shape to be substantially parallel and hardly spread.

  According to the transmission X-ray measurement method of the present invention, if the types of a plurality of elements and / or compounds contained in the object to be measured are known or can be estimated with high accuracy, each element and / or each compound Content and density, or thickness can be obtained with high accuracy and at the same time. Therefore, quantitative analysis of the elements and compounds contained in the measurement object can be performed efficiently and accurately, which is useful in a wide range of fields such as nondestructive inspection and medical use.

  In particular, according to the two-dimensional transmission X-ray measurement method according to the present invention, it is not necessary to scan the X-rays irradiated to the object to be measured two-dimensionally and sequentially detect the transmission X-rays. The measurement time is short, and even in such a short measurement, the two-dimensional distribution information of the content and density or thickness of the elements and / or compounds constituting the object to be measured can be obtained with high accuracy. .

  An embodiment of a transmission X-ray measurement method according to the present invention will be described with reference to the drawings. FIG. 1 is an overall configuration diagram of a transmission X-ray measurement apparatus for performing transmission X-ray measurement according to this embodiment.

  In FIG. 1, X-rays 2 emitted from an X-ray source 1 such as an X-ray tube irradiate an object to be measured 3, and transmitted X-rays transmitted through the object to be measured 3 enter an X-ray detector 4. The X-ray source 1 is capable of emitting X-rays in a predetermined wavelength range (in other words, a predetermined energy range) instead of a single wavelength, that is, X-rays having a plurality of wavelengths. Corresponding detection is possible.

  The X-ray detector 4 generates an electrical signal corresponding to the wavelength or energy of the incident X-ray, and this detection signal is input to the detection signal processing unit 5 and first amplified by a preamplifier (preamplifier) 51. The signal at this time is a stepped voltage pulse signal as shown in FIG. The height of each step of the signal corresponds to the energy of each element included in the DUT 3. This voltage pulse signal is input to a proportional amplifier 52 including a waveform shaping circuit, and is shaped into an appropriately shaped pulse having a wave height corresponding to the height of each step.

The multichannel analyzer 53 discriminates each pulse for each energy according to the peak value of the input pulse signal, and then counts each discriminated pulse. This discrimination target energy multichannel analyzer 53 is set by the control unit 8, and outputs a value corresponding to the X-ray intensity of the transmitted X-rays of any energy to the data processing unit 6. And the data processing part 6 performs the arithmetic processing which will be described later on the actual measurement data of the X-ray intensity value, so that the thickness, content and density of each element and / or each compound contained in the DUT 3 are measured. And the result is displayed on the display unit 7.

  Next, a method for obtaining the various elements contained in the DUT 3 and / or the contents, densities, and thicknesses of the various elements using the transmission X-ray measurement apparatus having the above configuration will be described. Here, it is assumed that the DUT 3 includes a plurality of elements whose types are known, specifically, five kinds of elements a, b, c, d, and e. As is well known, various elements generally have their own absorption edge with respect to X-rays. As described above, the X-ray source 1 can emit X-rays in a predetermined wavelength range. However, since the wavelength range is limited, the absorption edge wavelengths of the five elements a to e which are currently measured are irradiated. There are cases where it is included in the wavelength range of X-rays and cases where it is not. Therefore, both are considered separately, and the former is called the first measurement mode and the latter is called the second measurement mode.

[1] First measurement mode: When the absorption edge wavelengths of elements a, b,..., E are included in the wavelength range of irradiated X-rays and the detectable wavelength range of the X-ray detector

  FIG. 2 is a diagram illustrating an example of a spectrum of transmitted X-rays for one kind of element a. As shown in this figure, the transmitted X-ray intensity rapidly changes before and after the energy Ea corresponding to the absorption edge wavelength λa. On the other hand, since the absorption edge wavelength is unique to the element, other elements b, c, d, and e other than the element a do not have an absorption edge at the same energy Ea. Therefore, the elements b, c, d, around the absorption edge wavelength λa of the element a, that is, the wavelength λa + slightly longer than the absorption edge wavelength λa and the wavelength λa− slightly shorter than the absorption edge wavelength λa− The change in the transmitted X-ray intensity of e is small. Also, the intensity of direct X-rays hardly changes.

Conventionally, there has been proposed a method for quantifying the element by using such a rapid change in transmitted X-ray intensity before and after the absorption edge (for example, “X-ray diffraction theory” by Karity, published by Agne Jofu Co., Ltd.) P427-p431). In this proposed method, by extrapolating a long wavelength side curve and a short wavelength side curve with respect to the absorption edge wavelength in the transmission X-ray spectrum obtained by actual measurement, the long wavelength side and the short wavelength side are respectively extrapolated. Virtual X-ray intensities on the absorption edge wavelength are respectively calculated. Then, from the theoretical value in consideration of the intensity ratio between the virtual X-ray intensity on the long wavelength side and the virtual X-ray intensity on the short wavelength side based on this measurement, and the mass absorption coefficient of the sample, The weight ratio and thickness of the element a are estimated. Transmission X-ray measuring method according to Patent Document 1 is basically obtained by following the this method.

  However, in the method as described above, if the energy resolution when separating the transmission X-ray detection signal for each energy is not sufficiently high, extrapolation with sufficient accuracy to the transmission X-ray spectrum curve around the absorption edge wavelength is performed. May not be performed, and the calculation of the weight ratio and thickness of the elements may be greatly distorted. Further, as described above, when a large number of elements are included in the object to be measured, the thickness, content and density of all the elements cannot be calculated at once, and there is a problem in accuracy.

  Therefore, in the transmission X-ray measurement method according to the present embodiment, instead of using the converted value on the absorption edge wavelength of the transmission X-ray intensity before and after the sudden intensity change by extrapolating the curve of the transmission X-ray spectrum, While using the transmitted X-ray intensity values obtained in the above as they are, using the calculation formulas that take into account the effects of other elements that were ignored by the above conversion, the same calculation formulas were established for each element, and these were solved as simultaneous equations. Thus, the contents and thicknesses of a plurality of elements can be calculated in parallel.

That is, for each of the elements a, b,..., E included in the object to be measured, the transmitted X-ray intensity at an energy slightly higher than the energy at the absorption edge wavelength and the transmitted X-ray intensity at an energy slightly lower are obtained by actual measurement. . For example, it comes to elements a, as shown in FIG. 2, obtaining the transmitted X-ray intensity I _Eal of the transmitted X-ray intensity I _EAh slightly lower energy Eal slightly higher energy EAh than the energy Ea of the absorption edge wavelength. Theoretical transmitted X-ray intensity that can be calculated using the ratio I _Eah / I _Eal of the X-ray intensity at wavelengths (energy) before and after the absorption edge wavelength of the element and the mass absorption coefficient instead of the linear absorption coefficient of the element The following simultaneous equations can be established from the ratio and the theoretical ratio of transmitted X-ray intensity that can be calculated using the mass absorption coefficient of the other coexisting elements around the absorption edge wavelength. Here, the X-ray intensity of direct X-rays with respect to wavelengths before and after the absorption edge wavelength hardly changes and is regarded as equal.

[A] When obtaining the thickness of each element When obtaining the thickness of each element a, b,..., E, the following simultaneous equations are used.
_{ln (I Eah / I Eal)} = {(μ / ρ) aEal - (μ / ρ) aEah} · ρ a t a + {(μ / ρ) bEal - (μ / ρ) bEah} · ρ b t b + ... + {(μ / ρ) _eEal − (μ / ρ) _eEah } · ρ _e t _e (1)
ln (I _Ebh / I _Ebl ) = {(μ / ρ) _aEbl − (μ / ρ) _aEbh } · ρ _a t _a + {(μ / ρ) _bEbl − (μ / ρ) _bEbh } · ρ _b t _b + ... + {(μ / ρ) _eEbl − (μ / ρ) _eEbh } · ρ _e t _e (2)
………
_{ln (I Eeh / I Eel)} = {(μ / ρ) aEel - (μ / ρ) aEeh} · ρ a t a + {(μ / ρ) bEel - (μ / ρ) bEeh} · ρ b t b + ... + {(μ / ρ ) eEel - (μ / ρ) eEeh} · ρ e t e ... (3)
here,
I _EAh: transmitted X-ray intensity of the absorption edge energy slightly higher than the energy of the wavelength of the element a I _Ebh: transmitted X-ray intensity of the slightly higher energy than the energy of the absorption edge wavelength of an element b I _Eeh: the absorption edge of the element e transmitted X-ray intensity of energy slightly higher than the energy of the wavelength I _Eal: transmitted X-ray intensity of the absorption edge energy slightly lower than the energy of the wavelength of the element a I _Ebl: element b energy slightly lower than the energy of the absorption edge wavelength of Intensity of transmitted X-ray I _Eel : Transmitted X-ray intensity of energy a little lower than the energy at the absorption edge wavelength of element e
(μ / ρ) _aEal : Mass absorption coefficient of element a at energy Eal
(μ / ρ) _aEah : Mass absorption coefficient of element a at energy Eah
(μ / ρ) _bEal : Mass absorption coefficient of element b at energy Eal
(μ / ρ) _bEah : Mass absorption coefficient of element b at energy Eah
(μ / ρ) _eEal : Mass absorption coefficient of element e at energy Eal
(μ / ρ) _eEah : Mass absorption coefficient of element e at energy Eah
(μ / ρ) _aEbl : Mass absorption coefficient of element a at energy Ebl
(μ / ρ) _aEbh : Mass absorption coefficient of element a at energy Ebh
(μ / ρ) _bEbl : Mass absorption coefficient of element b at energy Ebl
(μ / ρ) _bEbh : Mass absorption coefficient of element b at energy Ebh
(μ / ρ) _eEbl : Mass absorption coefficient of element e at energy Ebl
(μ / ρ) _eEbh : mass absorption coefficient of element e at energy Ebh ρ _a : density of element a ρ _b : density of element b ρ _e : density of element e t _a : thickness of element a t _b : element b Thickness t _e : thickness of element e

[B] When it is desired to obtain the weight ratio of elements In order to obtain the weight ratio in order to calculate the content of each element a, b, ..., e and the overall density, the following simultaneous equations are used.
_{ln (I Eah / I Eal)} = [{(μ / ρ) aEal - (μ / ρ) aEah} · w a + {(μ / ρ) bEal - (μ / ρ) bEah} · w b + ... + _{{(μ / ρ) eEal -} (μ / ρ) eEah} · w e] · ρ m t m ... (4)
ln (I _Ebh / I _Ebl ) = [{(μ / ρ) _aEbl − (μ / ρ) _aEbh } · w _a + {(μ / ρ) _bEbl − (μ / ρ) _bEbh } · w _b + ... + _{{(μ / ρ) eEbl -} (μ / ρ) eEbh} · w e] · ρ m t m ... (5)
………
_{ln (I Eeh / I Eel)} = [{(μ / ρ) aEel - (μ / ρ) aEeh} · w a + {(μ / ρ) bEel - (μ / ρ) bEeh} · w b + ... + _{{(μ / ρ) eEel -} (μ / ρ) eEeh} · w e] · ρ m t m ... (6)
Here, for parameters other than those described in [A] above,
w _a: elemental weight ratio of a w _b: weight ratio of the element b w _e: elemental weight ratio of e [rho _m: mixture (or compounds) overall density t _m: a mixture (or compounds) total thickness, and the sum of the weight ratios of all elements contained in 1, ie _{w a + w b + ... +} w e = 1
It is.

[C] When not only the element but also a compound having a known type is included Now, consider a case in which the compound to be measured includes a compound having a known type, for example, a compound a instead of the element a. The type known here means that the content ratio and density of all the constituent elements of the compound a are known. In this case, in order to simultaneously determine the thickness of the compound a and the other contained elements b, c, d, e, or the content and the overall density, for example, the constituent elements of the compound a are a1, a2, and a3. If the weights w _a1 , w _a2 , w _{a3 of} these constituent elements are known, in the above formulas (1) to (6), instead of (μ / ρ) a,
(μ / ρ) a = (μ / ρ) wa ₁ + (μ / ρ) wa ₂ + (μ / ρ) wa ₃
Is substituted for the density ρ _a , thickness t _a , and weight ratio w _a of the compound a by formulating the element a as it is as the compound a. However,
(μ / ρ) a: Mass absorption coefficient of compound a
(μ / ρ) w _a1 : Mass absorption coefficient of constituent element a1
(μ / ρ) _wa2 : Mass absorption coefficient of constituent element a2
(μ / ρ) w _a3: the mass absorption coefficient of the constituent elements _{a3 w a1 + w a2 + w} a3 = 1
It is. Further, instead of the above-described equation using the absorption edge of the element a, an equation corresponding to the absorption edge of a1, a2, and a3 must be established for all elements contained in the compound a as an equation corresponding to the compound a. However, it is sufficient to establish an equation using the energy on both sides of the absorption edge only for one of the elements, for example, the element a1. Therefore, only one element having an absorption edge needs to be selected in the energy range measurable by the combination of the X-ray source 1 and the X-ray detector 4. In this case, for example, Equation (1) is
_{ln (I Eah / I Eal)} = [{(μ / ρ) a1Ea1l · w a1 + (μ / ρ) a2Ea1l · w a2 + (μ / ρ) a3Ea1l · w a3} - {(μ / ρ) a1Ea1h · w _a1 + (μ / ρ) _a2Ea1h · w _a2 + (μ / ρ) _a3Ea1h · w _a3 }] · ρ _a t _a + [(μ / ρ) _bEal − (μ / ρ) _bEah ] · ρ _b t _b + ... + [(μ / ρ ) eEal - (μ / ρ) eEah] · ρ e t e
And deformed. In addition, equations (2) and (3) are similarly modified. On the other hand, equation (4) is
_{ln (I Eah / I Eal)} = <[{(μ / ρ) a1Ea1l · w a1 + (μ / ρ) a2Ea1l · w a2 + (μ / ρ) a3Ea1l · w a3} - {(μ / ρ) a1Ea1h • w _a1 + (μ / ρ) _a2Ea1h • w _a2 + (μ / ρ) _a3Ea1h • w _a3 }] • w _a + {(μ / ρ) _bEal − (μ / ρ) _bEah } • w _b +… + _{{(μ / ρ) eEal -} (μ / ρ) eEah} · w e> · ρ m t m
And deformed. The equations (5) and (6) are similarly modified.

Among the parameters in the above simultaneous equations, the mass absorption coefficient at each energy is known for the elements a, b,..., E (or the constituent elements a1, a2, a3). Can be stored. In addition, the measured transmission X-ray intensity ratios I _Eah / I _Eal , I _Ebh / I _Ebl ,... Around the absorption edge wavelength of the elements a, b,..., E (or any of the constituent elements a 1, a 2, a 3) Since I _Eeh / I _Eel and the like can be obtained by actual measurement as described above, it can be regarded as known. In addition, the total thickness t _m of the mixture (or compound) in the simultaneous equations used when it is desired to obtain the weight ratio of the elements can be made known by separately measuring in advance. Therefore, the thickness of those other known values, each element and / or compound _{(t a, t b, ...} , t e) and weight ratio _{(w a, w b, ...} , w e) and overall density ( Unknown values such as ρ _m ) can be obtained by substituting these known values into the above simultaneous equations and solving them.

  In the first measurement mode of the transmission X-ray measurement apparatus, as described above, the X-ray 2 is irradiated onto the object 3 to be measured, and the transmitted X-ray is detected by the X-ray detector 4 and the detection signal is detected. The content of various elements and / or compounds contained in the object to be measured 3 by executing an operation for solving the simultaneous equations as described above in the data processing unit 6 based on the X-ray intensity at a predetermined energy ( Weight ratio) and density, or thickness can be derived. Then, the calculation result is displayed on the display unit 7 and provided to the measurer.

[2] Second measurement mode: When the absorption edge wavelengths of the elements a, b,..., E are not included in the wavelength range of irradiated X-rays or the detectable wavelength range of the X-ray detector

  In this case, as described above, an extreme difference in transmitted X-ray intensity around the absorption edge wavelength cannot be used. Therefore, quantitative analysis cannot be performed only with the measured intensity of transmitted X-rays, and the measured intensity of X-rays is also directly used. That is, in FIG. 1, X-rays are directly measured while the object to be measured 3 is moved so that X-rays can be directly detected by the same X-ray detector 4 before or after transmission X-ray measurement. An X-ray detector 4 ′ capable of different energy discrimination is installed at a position where X-rays from the source 1 are directly incident without passing through the DUT 3, and the transmitted X-rays are measured by the X-ray detector 4. In parallel with this, the X-ray is directly measured by the X-ray detector 4 '.

FIG. 3 is a diagram showing an example of a spectrum of transmitted X-rays and direct X-rays. As shown in this figure, since X-rays are generally absorbed when passing through the DUT 3, the transmitted X-ray intensity is lower than the direct X-ray intensity. When there are a plurality of types of elements contained in the device under test 3, that is, when the device under test 3 is a mixture or compound of a plurality of elements, the absorption of X-rays is the sum of the respective absorptions by the plurality of elements. Will be. Therefore, the X-ray intensities (I _0E1 and I _{0E2 in} FIG. 3) and the transmitted X-ray intensities (I _E1 and I _{E2 in} FIG. 3) are measured at different energies (E1 and E2 in FIG. 3), respectively. For example, the ratio of transmitted X-ray intensity and direct X-ray intensity at each energy (for example, I _0E1 / I _E1 ) and the theoretical transmitted X-ray intensity and direct X-ray intensity that can be calculated using the mass absorption coefficient of each element From the ratio, the following simultaneous equations can be established. The number of energy values for which the X-ray intensity should be determined is equal to or greater than the number of types of elements included in the object to be measured. In order to increase accuracy, it is better that the plurality of energy values are not very close to each other.

[A] When the thickness of an element is to be obtained When the thickness of each element a, b,..., E is to be obtained, the following simultaneous equations are used.
_{ln (I 0E1 / I E1)} = (μ / ρ) aEl · ρ a t a + (μ / ρ) bE1 · ρ b t b + ... + (μ / ρ) eE1 · ρ e t e ... (7)
_{ln (I 0E2 / I E2)} = (μ / ρ) aE2 · ρ a t a + (μ / ρ) bE2 · ρ b t b + ... + (μ / ρ) eE2 · ρ e t e ... (8)
………
_{ln (I 0En / I En)} = (μ / ρ) aEn · ρ a t a + (μ / ρ) bEn · ρ b t b + ... + (μ / ρ) eEn · ρ e t e ... (9)
here,
I _0E1: direct energy in E1 X-ray intensity I _0E2: direct X-ray intensity I in the energy E2 _0En: Energy En direct X-ray intensity (n types as many more values of elements contained in the object to be measured) in the I _E1 : Transmission X-ray intensity at energy E1 I _E2 : Transmission X-ray intensity at energy E2 I _En : Transmission X-ray intensity at energy En
(μ / ρ) _aEl : Mass absorption coefficient of element a at energy E1
(μ / ρ) _bE1 : Mass absorption coefficient of element b at energy E1
(μ / ρ) _eE1 : Mass absorption coefficient of element e at energy E1
(μ / ρ) _aE2 : Mass absorption coefficient of element a at energy E2
(μ / ρ) _bE2 : Mass absorption coefficient of element b at energy E2
(μ / ρ) _eE2 : Mass absorption coefficient of element e at energy E2

[B] When you want to find the weight ratio of elements
_{ln (I 0E1 / I El)} = {(μ / ρ) aE1 · w a + (μ / ρ) bE1 · w b + ... + (μ / ρ) eE1 · w e] · ρ m t m ... (10 )
_{ln (I 0E2 / I E2)} = {(μ / ρ) aE2 · w a + (μ / ρ) bE2 · w b + ... + (μ / ρ) eE2 · w e] · ρ m t m ... (11 )
………
_{ln (I 0En / I En)} = {(μ / ρ) aEn · w a + (μ / ρ) bEn · w b + ... + (μ / ρ) eEn · w e] · ρ m t m ... (12 )
, And the and the sum of the weight ratios of all elements contained in 1, ie _{w a + w b + ... +} w e = 1
It is.

[C] When not only the element but also a compound with a known type is included Now, consider a case where a compound with a known type, for example, a compound a is included in place of the element a. The type known here means that the content ratio and density of all the constituent elements of the compound a are known. In this case, in order to simultaneously determine the thickness of the compound a and the other contained elements b, c, d, e, or the content and the overall density, for example, the constituent elements of the compound a are a1, a2, and a3. If the weights w _a1 , w _a2 , w _{a3 of} these constituent elements are known, instead of (μ / ρ) a in the above formulas (7) to (12),
(μ / ρ) a = (μ / ρ) wa ₁ + (μ / ρ) wa ₂ + (μ / ρ) wa ₃
Is substituted for the density ρ _a , thickness t _a , and weight ratio w _a of the compound a by formulating the element a as it is as the compound a. Where (μ / ρ) a, (μ / ρ) _wa1 , (μ / ρ) _wa2 , and (μ / ρ) _wa3 are as defined above,
w _a1 + w _a2 + w _a3 = 1
It is. In addition, the equation corresponding to the compound a may be modified in place of the element a, and the number corresponding to the types of all the elements a1, a2, and a3 contained in the compound a, that is, three equations are established. There is no need, and the number of energies and equations does not change. In this case, for example, Equation (7) is
ln (I _0E1 / I _E1 ) = {(μ / ρ) _a1E1 · _{wa 1} + (μ / ρ) _a2E1 · _{wa 2} + (μ / ρ) _a3E1 · _{wa 3} } · ρ _a t _a + (μ / ρ _{) bE1 · ρ b t b +} ... + (μ / ρ) eE1 · ρ e t e
And deformed. The equations (8) and (9) are similarly modified. On the other hand, equation (10) is
_{ln (I 0E1 / I El)} = [{(μ / ρ) a1E1 · w a1 + (μ / ρ) a2E1 · w a2 + (μ / ρ) a3E1 · w a3} · w a + (μ / ρ) _bE1・ w _b + ... + (μ / ρ) _eE1・ w _e ] ・ ρ _m t _m
And deformed. The expressions (11) and (12) are similarly modified.

As described above, among the parameters in the above simultaneous equations, the mass absorption coefficients at various energies of various elements (or constituent elements) are known. For example, they are stored in a memory device in a database or a table in advance. I can leave. Further, since the direct X-ray intensity and the transmitted X-ray intensity at each energy can be obtained by actual measurement as described above, it can be regarded as known. In addition, the total thickness t _m of the mixture (or compound) in the simultaneous equations used when it is desired to obtain the weight ratio of the elements can be made known by separately measuring in advance. Therefore, unknown values such as thickness, weight ratio and density of each element and / or each compound can be obtained by substituting these known values into the above simultaneous equations and solving them.

  In the second measurement mode of the transmission X-ray measurement apparatus, as described above, the X-ray 2 is irradiated on the object 3 to be measured, and the transmitted X-ray is detected by the X-ray detector 4 and the object to be measured. The X-ray detector 4 or the X-ray detector 4 ′ simultaneously detects direct X-rays that do not transmit 3 and the data processing unit 6 as described above based on the X-ray intensity at a predetermined energy obtained from the detection signal. By executing the calculation to solve the simultaneous equations, the content, density, and thickness of various elements and / or various compounds contained in the DUT 3 can be derived. Then, by performing the quantitative analysis as described above corresponding to the detection signal obtained by the X-ray detector 4, the content, density, and thickness of each element and / or each compound contained in the object to be measured This is obtained and provided to the measurer by displaying on the display unit 7.

  As described above, in the transmission X-ray measurement apparatus of this embodiment, the content, density, and thickness of various elements contained in the DUT 3 can be obtained using either the first or second measurement mode. it can. When the absorption edge wavelength of the element is not included in the wavelength range of irradiation X-rays or when the absorption edge wavelength of the element is not included in the detectable wavelength range of the X-ray detector 4, the second measurement mode must be selected. However, even if measurement in the first measurement mode is possible, measurement can be performed in the second measurement mode. Therefore, it is preferable that the measurer decides which measurement mode to select. However, although the application range of the second measurement mode is wider than that of the first measurement mode, generally, the first measurement mode can provide higher accuracy. Therefore, when measurement in the first measurement mode is possible, it is better to execute the first measurement mode. That is, since the wavelength range that can be measured in the first measurement mode, that is, the type of element or compound, is known in advance, the content, density, and thickness of such element or compound are automatically determined. It is preferable to select the first measurement mode and automatically select the second measurement mode when quantifying the content, density, and thickness of elements and compounds that do not conform to it.

  In addition, among the plurality of elements included in the DUT 3, when an element having an absorption edge and an element having no absorption edge are mixed in the usable X-ray wavelength range, the element having an absorption edge is more Establish an equation in the first measurement mode with high accuracy, formulate an equation in the second measurement mode for elements that do not have an absorption edge, and combine them together to determine the thickness or content rate contained in the object to be measured. As a simultaneous equation consisting of equations equal to or greater than the total number of unknown elements and / or compounds, the thickness or content and density of each element and / or compound, which are unknown values, are solved by solving this Can do. For example, in an electronic device, when an Al and Cu thin film is formed on a Si substrate, Cu absorption edge measurement is easy in the atmosphere, but Si and Al absorption edge measurement is difficult. In such a case, the first measurement mode is applied to Cu, while the second measurement mode is applied to Si and Al, respectively, so that the second measurement mode is applied to all elements. Compared with this, the accuracy of calculation of thickness or content and density can be increased.

  As described above, in any of the first and second measurement modes, in principle, it is assumed that the types of elements and / or compounds contained in the DUT 3 are known. That is, when the element or compound of the manufacturing raw material of the object to be measured is known (for example, the information is provided by the manufacturer) or the qualitative analysis has been completed by some other method, the known element In addition, the transmission X-ray measurement method of the present invention is applied when it is desired to perform quantitative analysis on a compound. A method for grasping all the contained elements and / or compounds is not particularly limited, but fluorescent X-ray analysis, mass spectrometry, or the like can be used. Even when the contained elements and compounds are not clearly known, the above method can be applied by estimating the contained elements and compounds. In this case, when the element or compound estimated to be included is not actually included in the object to be measured, there is no practical problem because the value of the content or thickness is derived close to zero. On the other hand, if an element or compound contained in the object to be measured is not listed as an inferred element or compound, an error is caused. Therefore, it is necessary to list the elements and compounds that are actually included in the object to be measured, and there is no problem even if elements and compounds that are not included in the object to be measured are listed as objects to be calculated. become.

  Further, in the second measurement mode, not only transmitted X-rays but also direct X-rays are measured, but as shown in FIG. For this reason, when X-rays are directly measured by the same X-ray detector 4, emission from the X-ray source 1 is performed so that detection signals from the X-ray detector 4 do not saturate when direct X-rays are incident. If the intensity is determined, the S / N ratio when detecting transmitted X-rays may be deteriorated. Therefore, in direct X-ray measurement, the intensity of emitted X-rays from the X-ray source 1 is reduced to, for example, 1 / N, compared to transmission X-ray measurement. Instead, the detection signal obtained by the X-ray detector 4 is used. The dynamic range as a whole may be secured by multiplying by N. Similarly, when the transmitted X-ray is measured by the X-ray detector 4 and the X-ray is directly measured by another X-ray detector 4 ′, the intensity is, for example, 1 / X before the X-ray detector 4 ′. The detection intensity is lowered by providing an X-ray attenuation means such as an aperture such as N, and instead the detection signal obtained by the X-ray detector 4 'is multiplied N times to secure the entire dynamic range. You may make it do.

The embodiment of FIG. 1 measures the content and density, or thickness of each one-dimensional element and / or compound of the object 3 to be measured only in a certain region with respect to the X-ray passing direction. In order to obtain two-dimensional information about the device under test 3, for example, the X-ray source 1 and the X-ray detector 4 sandwiching the device under test 3 are used as a set in the extending direction of the device under test 3 (FIG. 1). Then, it is necessary to repeat the same measurement for each movement. On the other hand, a transmission X-ray measurement apparatus for performing measurement more simply and in a short time will be described with reference to FIG.

  FIG. 4 is a schematic configuration diagram of a transmission X-ray measurement apparatus according to another embodiment of the present invention. Components that are the same as or correspond to those in the apparatus shown in FIG. In the transmission X-ray measurement apparatus of this embodiment, the object 13 is irradiated with divergent X-rays 12 that are emitted from a minute point-focus X-ray source 11 such as an X-ray tube and spread, and are transmitted through the object 13. The transmitted X-rays enter the two-dimensional X-ray detector 14 having a planar detection surface. The two-dimensional X-ray detector 14 is a device in which a large number of micro X-ray detection elements capable of directly detecting X-rays in a predetermined wavelength range are arranged two-dimensionally in the vertical and horizontal directions, for example, a direct X-ray detection type CCD element. A CCD detector or the like using can be used. Similarly to the X-ray source 1, the micropoint focus X-ray source 11 can emit X-rays in a predetermined wavelength range, that is, X-rays having a plurality of wavelengths, instead of a single wavelength.

  In the two-dimensional X-ray detector 14, each minute X-ray detection element on which transmitted X-rays are incident generates an electrical signal corresponding to the wavelength, that is, energy of the X-ray. That is, the detection signals generated by the minute X-ray detection elements at different positions on the detection surface of the two-dimensional X-ray detector 14 include information on each element existing at different positions of the DUT 13. Therefore, here, the detection signal processing unit 5 gives the data processing unit 6 a value corresponding to the intensity of transmitted X-rays received for each minute X-ray detection element of the two-dimensional X-ray detector 14. Then, the data processing unit 6 performs a calculation process on each of the actual measurement value data, thereby determining the thickness, content, and density of each element and / or each compound included in the DUT 3 of the micro X-ray detection element. Calculation is made for each micro area corresponding to the position, and this is obtained for all the detection surfaces of the two-dimensional X-ray source detector 14 (actually, only the range where the detection signal is obtained) to create two-dimensional distribution information And displayed on the display unit 7.

  The thickness of each element and / or each compound of the object to be measured 13 by processing actual measurement data obtained based on the detection signal obtained for each micro X-ray detection element of the two-dimensional X-ray detector 14, or The method for calculating the content and density is as described above. In this case, for direct X-ray measurement in the second measurement mode, it is not necessary to move the object under measurement and provide an X-ray detector separately. In the X-ray detection element, the detection signal of the X-ray detection element in the portion where the X-ray from the X-ray source reaches directly without passing through the object to be measured can be used.

  As apparent from FIG. 4, the X-rays that have passed through the DUT 13 further spread until reaching the detection surface of the two-dimensional X-ray detector 14. A line image will be projected. Therefore, when the quantitative results are displayed in a two-dimensional distribution, it is necessary to consider such an increase in size.

  Further, since the irradiated X-ray is a divergent light beam, strictly speaking, even if the measured object 13 has a uniform thickness, the thickness for the transmitted X-ray varies depending on the incident position of the divergent X-ray 12. Come. That is, the apparent thickness of the transmitted X-ray increases as the distance from the measurement object 13 increases. Therefore, when calculating the content, density, and thickness of the element and / or compound as described above, correction processing may be performed to reduce the difference in the apparent thickness due to the difference in position.

  Further, the configuration of the X-ray irradiation system may be changed as shown in FIG. 5 in order to perform the two-dimensional distribution measurement. In this modification, the X-ray source 21 is planar and emits a parallel bundle X-ray 22 instead of a divergent light beam. Therefore, an X-ray image of the object to be measured 13 is projected on the actual size on the detection surface of the two-dimensional X-ray detector 14. In this case, when the DUT 13 has a uniform thickness, the thickness for the transmitted X-ray is the same regardless of the X-ray incident position. That is, since the difference in apparent thickness as in the above examples does not occur, the thickness and content of each element and / or each compound are determined with high accuracy without correcting the difference in thickness. be able to.

  It should be noted that any of the above-described embodiments is an example of the present invention, and it is obvious that any changes, modifications, and additions within the scope of the present invention are included in the scope of the claims of the present application.

The block diagram of the principal part of the transmission X-ray measuring apparatus which is one Example of this invention. The energy spectrum figure for demonstrating the method of calculating content and density, and thickness of an element and / or a compound in the transmission X-ray measuring apparatus of a present Example. The energy spectrum figure for demonstrating the method of calculating content and density, and thickness of an element and / or a compound in the transmission X-ray measuring apparatus of a present Example. The block diagram of the principal part of the transmission X-ray measuring apparatus which can perform two-dimensional distribution measurement which is one Example of this invention. The schematic block diagram of the X-ray irradiation system of the transmission X-ray measuring apparatus which can measure two-dimensional distribution by another Example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 11, 21 ... X-ray source 2 ... X-ray 12 ... Divergent X-ray 22 ... Parallel bundle X-ray 3, 13 ... DUT 4, 4 '... X-ray detector 14 ... Two-dimensional X-ray detector 5 ... Detection signal processor 51... Preamplifier 52... Proportional amplifier 53. Multichannel analyzer 6... Data processor 7.

Claims (6)

Rather than a single wavelength, the predetermined wavelength range, and X-ray irradiation means wavelength irradiates a continuous X-ray to the object to be measured, which can be energy discrimination for detecting transmitted X-rays transmitted through the object to be measured Using a transmission X-ray measurement apparatus comprising: an X-ray detector; and a signal processing circuit for discriminating transmitted X-ray energy based on a detection signal from the X-ray detector to obtain X-ray intensity data. Or a transmission X-ray measurement method for measuring the thickness or the content and density of each element and / or each compound of the measured object whose type of the contained compound is known or can be estimated,
The measured transmission X-ray intensity ratio at a predetermined energy, the mass absorption coefficient of all elements and / or compounds contained in the object to be measured, and the theoretical transmission X-ray intensity expressed by thickness or weight ratio and density The equation consisting of the ratio and the simultaneous equation is set up to be equal to or more than the total number of elements and / or compounds whose thickness or content is unknown contained in the object to be measured,
The X-ray intensity ratio at the predetermined energy is measured by the transmission X-ray measurement device,
Substituting the values obtained by the actual measurement into the simultaneous equations, solving the simultaneous equations, and finding the thickness, weight ratio, and overall density of each element and / or each compound as a solution Transmission X-ray measurement method.   When all elements and / or elements in all compounds contained in the object to be measured have an absorption edge in the energy range measurable by the combination of the X-ray irradiation means and the X-ray detector, absorption of each element Using the X-ray intensity ratio, the ratio of the measured values of transmitted X-rays at the energy on both sides across the edge is used as the X-ray intensity ratio, and the transmitted X-rays transmitted through the object to be measured are detected by the X-ray detector. The measured intensity ratio is calculated from the X-ray intensity data obtained thereby, applied to the respective equations, and the simultaneous equations are solved to obtain the thickness or weight ratio of each element and / or each compound. The transmitted X-ray measurement method according to claim 1, wherein an overall density is obtained.   Transmitted through the measured object at the same energy as the intensity of transmitted X-rays transmitted through the measured object at a predetermined energy equal to or greater than the total number of elements and / or compounds whose thickness or content is unknown. The X-ray detector detects the transmitted X-rays that have passed through the object to be measured and the direct X-rays that have not passed through the object to be measured, using a simultaneous equation with the ratio of the intensity of the direct X-rays not being used as the X-ray intensity ratio. Then, the measured intensity ratio is calculated from the X-ray intensity data obtained thereby, and this is applied to the equations, and the simultaneous equations are solved to solve the thickness or weight ratio of each element and / or compound. The transmitted X-ray measurement method according to claim 1, wherein an overall density is obtained.   The measurement method is applied when all elements included in the object to be measured do not have an absorption edge in an energy range measurable by a combination of the X-ray irradiation unit and the X-ray detector. Item 4. The transmitted X-ray measurement method according to Item 3.   For an element having an absorption edge in an energy range measurable by a combination of the X-ray irradiation means and the X-ray detector, the ratio of measured values of transmitted X-rays at the energy on both sides across the absorption edge is the X-ray. On the other hand, for an element that does not have an absorption edge in the energy range, the direct X-ray that does not pass through the measured object at the same energy as the intensity of the transmitted X-ray transmitted through the measured object at a predetermined energy. By using an equation in which the ratio of the intensity to the X-ray intensity ratio is set as described above, a simultaneous equation combining them is established to obtain this solution, thereby obtaining the thickness or weight ratio of each element and / or compound and the overall density. The transmission X-ray measurement method according to claim 1, wherein:   The X-ray irradiation means irradiates the object to be measured with divergent X-rays or parallel bundle X-rays in a predetermined wavelength range, and the X-ray detector detects transmitted X-rays transmitted through the object to be measured. The X-ray detection elements capable of discriminating energy are arranged in a two-dimensional manner, and the signal processing circuit uses the detected X-ray energy for each micro-detection element based on the detection signal from the X-ray detector. The X-ray intensity data is obtained by discrimination, and the two-dimensional distribution information of the thickness or weight ratio and density of each element and / or each compound of the object to be measured is measured. The transmission X-ray measurement method according to any one of 5.

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