JP4712298B2 - 発光装置の作製方法 - Google Patents

発光装置の作製方法 Download PDF

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Publication number
JP4712298B2
JP4712298B2 JP2003415563A JP2003415563A JP4712298B2 JP 4712298 B2 JP4712298 B2 JP 4712298B2 JP 2003415563 A JP2003415563 A JP 2003415563A JP 2003415563 A JP2003415563 A JP 2003415563A JP 4712298 B2 JP4712298 B2 JP 4712298B2
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Prior art keywords
substrate
sealing material
light
film
layer
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Expired - Fee Related
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JP2003415563A
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Japanese (ja)
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JP2004207234A (ja
JP2004207234A5 (enExample
Inventor
純矢 丸山
徹 高山
由美子 大野
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Priority to JP2003415563A priority Critical patent/JP4712298B2/ja
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Publication of JP2004207234A5 publication Critical patent/JP2004207234A5/ja
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JP2003415563A 2002-12-13 2003-12-12 発光装置の作製方法 Expired - Fee Related JP4712298B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003415563A JP4712298B2 (ja) 2002-12-13 2003-12-12 発光装置の作製方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002362352 2002-12-13
JP2002362352 2002-12-13
JP2003415563A JP4712298B2 (ja) 2002-12-13 2003-12-12 発光装置の作製方法

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JP2004207234A JP2004207234A (ja) 2004-07-22
JP2004207234A5 JP2004207234A5 (enExample) 2007-01-25
JP4712298B2 true JP4712298B2 (ja) 2011-06-29

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JP2003415563A Expired - Fee Related JP4712298B2 (ja) 2002-12-13 2003-12-12 発光装置の作製方法

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JP (1) JP4712298B2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7753751B2 (en) 2004-09-29 2010-07-13 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating the display device
JP4651429B2 (ja) * 2004-12-13 2011-03-16 三洋電機株式会社 有機エレクトロルミネッセンス素子の封止方法
CN101107729B (zh) * 2004-12-27 2012-09-05 Otb集团有限公司 制造oled或用于形成oled的坯件的方法以及这种坯件或oled
JP4539368B2 (ja) * 2005-02-24 2010-09-08 ソニー株式会社 表示装置の製造方法
JP4592473B2 (ja) * 2005-03-31 2010-12-01 三洋電機株式会社 発光パネルの製造方法、表示パネルの製造方法及び表示パネル
JP5303315B2 (ja) * 2009-03-03 2013-10-02 ローム株式会社 有機発光素子の製造方法
KR101084264B1 (ko) 2009-08-07 2011-11-16 삼성모바일디스플레이주식회사 봉지기판, 이를 포함하는 유기전계발광표시장치 및 이의 제조방법
EP2857471B1 (en) * 2012-05-31 2017-09-13 LG Chem, Ltd. Production method for an organic electronic device
US20140061610A1 (en) 2012-08-31 2014-03-06 Hyo-Young MUN Organic light emitting device and manufacturing method thereof
TWI794098B (zh) 2013-09-06 2023-02-21 日商半導體能源研究所股份有限公司 發光裝置以及發光裝置的製造方法
US9627617B2 (en) 2014-04-22 2017-04-18 Joled Inc. Method for manufacturing organic EL panel
WO2019021370A1 (ja) * 2017-07-25 2019-01-31 シャープ株式会社 塗布装置、ｅｌデバイス製造装置およびｅｌデバイス

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6454420A (en) * 1987-08-25 1989-03-01 Matsushita Electric Industrial Co Ltd Liquid crystal display element
JPH055890A (ja) * 1991-06-27 1993-01-14 Sanyo Electric Co Ltd 液晶表示パネルおよびその製造方法
JP3162313B2 (ja) * 1997-01-20 2001-04-25 工業技術院長 薄膜製造方法および薄膜製造装置
JP3139462B2 (ja) * 1998-07-17 2001-02-26 日本電気株式会社 有機薄膜ｅｌデバイスの製造方法
JP2000068050A (ja) * 1998-08-24 2000-03-03 Casio Comput Co Ltd 電界発光素子及びその製造方法
JP3080164B2 (ja) * 1998-10-28 2000-08-21 信越エンジニアリング株式会社 エレクトロルミネセンス素子封止方法
JP2000150145A (ja) * 1998-11-02 2000-05-30 Toyota Motor Corp Ｅｌ素子の密封方法
JP4255187B2 (ja) * 1999-10-22 2009-04-15 スタンレー電気株式会社 有機ｅｌ表示装置の製造方法および該方法により製造された有機ｅｌ表示装置
JP3620706B2 (ja) * 2000-04-13 2005-02-16 日本精機株式会社 有機ｅｌパネルの製造方法
JP4338335B2 (ja) * 2001-04-18 2009-10-07 トッキ株式会社 真空蒸着装置

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JP2004207234A (ja) 2004-07-22

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