JP4695061B2 - 圧力センサ - Google Patents
圧力センサ Download PDFInfo
- Publication number
- JP4695061B2 JP4695061B2 JP2006347276A JP2006347276A JP4695061B2 JP 4695061 B2 JP4695061 B2 JP 4695061B2 JP 2006347276 A JP2006347276 A JP 2006347276A JP 2006347276 A JP2006347276 A JP 2006347276A JP 4695061 B2 JP4695061 B2 JP 4695061B2
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- flow
- channel
- gas
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 claims description 122
- 239000012530 fluid Substances 0.000 claims description 14
- 239000000523 sample Substances 0.000 description 20
- 239000007788 liquid Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 239000000126 substance Substances 0.000 description 8
- 238000000671 immersion lithography Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 238000000206 photolithography Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 1
- 238000004378 air conditioning Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000001143 conditioned effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 238000001393 microlithography Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B13/00—Measuring arrangements characterised by the use of fluids
- G01B13/12—Measuring arrangements characterised by the use of fluids for measuring distance or clearance between spaced objects or spaced apertures
Description
[0060] 上記の説明では本発明の様々な実施形態について記載したが、当然のことながら、これらは制限ではなく例示として提示されたものである。当業者には明らかなように、本発明の精神および範囲を逸脱することなく、形態および詳細につき多様な変更を加えることができる。
Claims (8)
- 少なくとも1つの測定開口部を有し、かつ当該少なくとも1つの測定開口部の圧力を示す測定を行うように配された少なくとも1つのディテクタを備えているセンサチャネルシステム、を備える圧力センサであって、
前記少なくとも1つの測定開口部を介して前記センサチャネルシステムの中へと流体を吸引して流体フローを生成するように配されたフロー手段と、
少なくとも1つの基準面に面する少なくとも1つの基準開口部と、
を備え、
前記ディテクタは、前記少なくとも1つの測定開口部のうちの1つ以上と前記少なくとも1つの基準開口部のうちの1つ以上との間の差圧の測定を行う、圧力センサ。 - 前記フロー手段が、ポンプおよびベンチレータのうちの少なくとも1つを備える、請求項1に記載の圧力センサ。
- 前記フロー手段が、所定の圧力よりも低い前記ディテクタの下流の圧力を維持するように配されている、請求項1または2に記載の圧力センサ。
- 前記流体フローがガスフローである、請求項1〜3のいずれか一項に記載の圧力センサ。
- 前記センサチャネルシステムが、
前記少なくとも1つの測定開口部を備える少なくとも1つの測定ブランチ、
前記少なくとも1つの基準開口部を備える少なくとも1つの基準ブランチ、
前記少なくとも1つの測定ブランチのうちの1つと前記少なくとも1つの基準ブランチのうちの1つとの間の少なくとも1つのブリッジ、および
前記ブリッジに配置された前記ディテクタ
を備える、請求項1〜4のいずれか一項に記載の圧力センサ。 - 前記ディテクタが、マスフローメータ、風速計、および圧力計のうちの少なくとも1つを備える、請求項5に記載の圧力センサ。
- 前記少なくとも1つのブリッジと前記フロー手段との間に、前記少なくとも1つの測定ブランチと前記少なくとも1つの基準ブランチに接続された接合点を備える、請求項5または6に記載の圧力センサ。
- 前記少なくとも1つのブリッジと前記フロー手段との間に1つ以上の制限エレメントを備える、請求項5〜7のいずれか一項に記載の圧力センサ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/321,651 US20070151328A1 (en) | 2005-12-30 | 2005-12-30 | Vacuum driven proximity sensor |
US11/321,651 | 2005-12-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007212444A JP2007212444A (ja) | 2007-08-23 |
JP4695061B2 true JP4695061B2 (ja) | 2011-06-08 |
Family
ID=38222970
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006347276A Expired - Fee Related JP4695061B2 (ja) | 2005-12-30 | 2006-12-25 | 圧力センサ |
Country Status (2)
Country | Link |
---|---|
US (2) | US20070151328A1 (ja) |
JP (1) | JP4695061B2 (ja) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7694549B2 (en) * | 2007-10-23 | 2010-04-13 | Michel Dechape | Pneumatic gauging system A.K.A. air gauging system A.K.A. air electric converter |
US8208118B2 (en) * | 2008-02-07 | 2012-06-26 | Asml Netherlands B.V. | Method for determining exposure settings, lithographic exposure apparatus, computer program and data carrier |
NL2003456A (en) * | 2008-11-10 | 2010-05-11 | Asml Netherlands Bv | Gas gauge, lithographic apparatus and device manufacturing method. |
US8104340B2 (en) * | 2008-12-19 | 2012-01-31 | Honeywell International Inc. | Flow sensing device including a tapered flow channel |
JP2010164545A (ja) * | 2009-01-19 | 2010-07-29 | Ojiya Seiki Co Ltd | 操作性や使い勝手の良いマイクロメータ装置 |
US8312774B2 (en) * | 2009-02-19 | 2012-11-20 | Honeywell International Inc. | Flow-through pressure sensor apparatus |
DK2241344T3 (en) * | 2009-04-16 | 2014-03-03 | Hoffmann La Roche | Portable infusion with feel-testing device |
EP4059553A1 (en) | 2009-08-11 | 2022-09-21 | ResMed Motor Technologies Inc. | Modular ventilator system |
JP5419634B2 (ja) * | 2009-10-26 | 2014-02-19 | 株式会社東芝 | パターン形成方法 |
US8656772B2 (en) | 2010-03-22 | 2014-02-25 | Honeywell International Inc. | Flow sensor with pressure output signal |
US8397586B2 (en) * | 2010-03-22 | 2013-03-19 | Honeywell International Inc. | Flow sensor assembly with porous insert |
US8113046B2 (en) | 2010-03-22 | 2012-02-14 | Honeywell International Inc. | Sensor assembly with hydrophobic filter |
US8756990B2 (en) | 2010-04-09 | 2014-06-24 | Honeywell International Inc. | Molded flow restrictor |
US8418549B2 (en) | 2011-01-31 | 2013-04-16 | Honeywell International Inc. | Flow sensor assembly with integral bypass channel |
US9003877B2 (en) | 2010-06-15 | 2015-04-14 | Honeywell International Inc. | Flow sensor assembly |
US8695417B2 (en) | 2011-01-31 | 2014-04-15 | Honeywell International Inc. | Flow sensor with enhanced flow range capability |
JP5773360B2 (ja) * | 2011-09-30 | 2015-09-02 | 株式会社アルバック | 流量測定装置 |
DE102011088321B4 (de) * | 2011-12-12 | 2018-01-04 | Asm Assembly Systems Gmbh & Co. Kg | Pneumatisches Bestimmen der Höhenlage eines Bauelements relativ zu einer Bauelement-Haltevorrichtung |
US9052217B2 (en) | 2012-11-09 | 2015-06-09 | Honeywell International Inc. | Variable scale sensor |
US9952079B2 (en) | 2015-07-15 | 2018-04-24 | Honeywell International Inc. | Flow sensor |
NL2017595A (en) * | 2015-11-10 | 2017-05-26 | Asml Netherlands Bv | Proximity sensor, lithographic apparatus and device manufacturing method |
JP6883325B2 (ja) * | 2017-08-09 | 2021-06-09 | アドバンス電気工業株式会社 | 液マイクロメータ |
Citations (8)
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JPH02232507A (ja) * | 1989-01-25 | 1990-09-14 | Perkin Elmer Corp:The | 流体ゲージセンサ |
JPH06129886A (ja) * | 1992-10-20 | 1994-05-13 | Japan Tobacco Inc | 通気度検出方法及びその装置 |
JPH06201359A (ja) * | 1990-05-07 | 1994-07-19 | Gardner P Wilson | 気体間隙測定装置 |
JPH10206141A (ja) * | 1997-01-24 | 1998-08-07 | Tokyo Seimitsu Co Ltd | 距離測定装置及び研磨装置 |
JP2004198429A (ja) * | 2002-12-19 | 2004-07-15 | Asml Holding Nv | 高分解能のガスゲージ近接センサ |
JP2004198430A (ja) * | 2002-12-19 | 2004-07-15 | Asml Holding Nv | 浸漬リソグラフィにおいて使用するための液体流近接センサ |
JP2005338094A (ja) * | 2004-05-27 | 2005-12-08 | Asml Holding Nv | ガスゲージ近接センサおよび測定方法 |
JP2006514744A (ja) * | 2003-08-25 | 2006-05-11 | エーエスエムエル ホールディング ナームローゼ フェンノートシャップ | 高分解能ガスゲージ近接センサ |
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US7021120B2 (en) | 2004-04-28 | 2006-04-04 | Asml Holding N.V. | High resolution gas gauge proximity sensor |
US7134321B2 (en) * | 2004-07-20 | 2006-11-14 | Asml Holding N.V. | Fluid gauge proximity sensor and method of operating same using a modulated fluid flow |
US7017390B1 (en) | 2004-12-07 | 2006-03-28 | Asml Holding N.V. | Proximity sensor nozzle shroud with flow curtain |
US6978658B1 (en) | 2004-12-20 | 2005-12-27 | Asml Holding N.V. | Proximity sensor with self compensation for mechanism instability |
-
2005
- 2005-12-30 US US11/321,651 patent/US20070151328A1/en not_active Abandoned
-
2006
- 2006-12-25 JP JP2006347276A patent/JP4695061B2/ja not_active Expired - Fee Related
- 2006-12-29 US US11/647,575 patent/US7472580B2/en not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02232507A (ja) * | 1989-01-25 | 1990-09-14 | Perkin Elmer Corp:The | 流体ゲージセンサ |
JPH06201359A (ja) * | 1990-05-07 | 1994-07-19 | Gardner P Wilson | 気体間隙測定装置 |
JPH06129886A (ja) * | 1992-10-20 | 1994-05-13 | Japan Tobacco Inc | 通気度検出方法及びその装置 |
JPH10206141A (ja) * | 1997-01-24 | 1998-08-07 | Tokyo Seimitsu Co Ltd | 距離測定装置及び研磨装置 |
JP2004198429A (ja) * | 2002-12-19 | 2004-07-15 | Asml Holding Nv | 高分解能のガスゲージ近接センサ |
JP2004198430A (ja) * | 2002-12-19 | 2004-07-15 | Asml Holding Nv | 浸漬リソグラフィにおいて使用するための液体流近接センサ |
JP2006514744A (ja) * | 2003-08-25 | 2006-05-11 | エーエスエムエル ホールディング ナームローゼ フェンノートシャップ | 高分解能ガスゲージ近接センサ |
JP2005338094A (ja) * | 2004-05-27 | 2005-12-08 | Asml Holding Nv | ガスゲージ近接センサおよび測定方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2007212444A (ja) | 2007-08-23 |
US20070151328A1 (en) | 2007-07-05 |
US20070176121A1 (en) | 2007-08-02 |
US7472580B2 (en) | 2009-01-06 |
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