JPS57191507A - Distance measuring device - Google Patents

Distance measuring device

Info

Publication number
JPS57191507A
JPS57191507A JP7654981A JP7654981A JPS57191507A JP S57191507 A JPS57191507 A JP S57191507A JP 7654981 A JP7654981 A JP 7654981A JP 7654981 A JP7654981 A JP 7654981A JP S57191507 A JPS57191507 A JP S57191507A
Authority
JP
Japan
Prior art keywords
lens
distance
tip
injection opening
undulations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7654981A
Other languages
Japanese (ja)
Inventor
Kiyoshi Nakagawa
Hideaki Kawashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7654981A priority Critical patent/JPS57191507A/en
Publication of JPS57191507A publication Critical patent/JPS57191507A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G01B13/12—Measuring arrangements characterised by the use of fluids for measuring distance or clearance between spaced objects or spaced apertures

Abstract

PURPOSE:To accurately measure the distance between a movable body and a reference body under no influence of undulations of the surface of the reference body by a distance measuring instrument which utilizes the pressure of an injected fluid, by providing a fluid injection intake surrounding the tip of the movable body. CONSTITUTION:In the process of manufacturing a semiconductor element, etc., the distance between a lens 11 and a body 12 such as a wafer is measured for focusing in inspecting the body through the lens. A nozzle body 13 is at the circumference of the tip of the lens. The air injection opening 14 at the tip of the nozzle body 13 is provided surrounding the tip of the lens. Highly pressurized air is supplied from a supply opening 15 and blown to the observed surface of the body, as shown by an arrow, from the injection opening 14 and the air pressure is detected to measure the distance between the injection opening and body. Since the injection opening is at the circumference of the end part of the lens, so undulations of the body surface, even if it has them, exert no influence upon the accurate measurement of th distance between the lens and body surface.
JP7654981A 1981-05-22 1981-05-22 Distance measuring device Pending JPS57191507A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7654981A JPS57191507A (en) 1981-05-22 1981-05-22 Distance measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7654981A JPS57191507A (en) 1981-05-22 1981-05-22 Distance measuring device

Publications (1)

Publication Number Publication Date
JPS57191507A true JPS57191507A (en) 1982-11-25

Family

ID=13608337

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7654981A Pending JPS57191507A (en) 1981-05-22 1981-05-22 Distance measuring device

Country Status (1)

Country Link
JP (1) JPS57191507A (en)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0463255A2 (en) * 1990-06-22 1992-01-02 Armco Inc. Pneumatic gap sensor and method
US6978658B1 (en) 2004-12-20 2005-12-27 Asml Holding N.V. Proximity sensor with self compensation for mechanism instability
US7010958B2 (en) * 2002-12-19 2006-03-14 Asml Holding N.V. High-resolution gas gauge proximity sensor
US7017390B1 (en) 2004-12-07 2006-03-28 Asml Holding N.V. Proximity sensor nozzle shroud with flow curtain
US7134321B2 (en) * 2004-07-20 2006-11-14 Asml Holding N.V. Fluid gauge proximity sensor and method of operating same using a modulated fluid flow
US7472580B2 (en) 2005-12-30 2009-01-06 Asml Holding N.V. Pressure sensor
US7472579B2 (en) 2002-12-19 2009-01-06 Asml Holding N.V. Liquid flow proximity sensor for use in immersion lithography
US7549321B2 (en) 2005-12-29 2009-06-23 Asml Holding N.V. Pressure sensor
US7578168B2 (en) * 2007-06-27 2009-08-25 Asml Holding N.V. Increasing gas gauge pressure sensitivity using nozzle-face surface roughness
EP2133661A1 (en) * 2008-06-09 2009-12-16 Marposs AG Measuring procedure for measuring a distance from a base surface to a regenerating body surface

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0463255A2 (en) * 1990-06-22 1992-01-02 Armco Inc. Pneumatic gap sensor and method
US7010958B2 (en) * 2002-12-19 2006-03-14 Asml Holding N.V. High-resolution gas gauge proximity sensor
US7021119B2 (en) 2002-12-19 2006-04-04 Asml Holding N.V. Liquid flow proximity sensor for use in immersion lithography
US7124624B2 (en) 2002-12-19 2006-10-24 Asml Holding N.V. High-resolution gas gauge proximity sensor
US7472579B2 (en) 2002-12-19 2009-01-06 Asml Holding N.V. Liquid flow proximity sensor for use in immersion lithography
USRE42650E1 (en) 2004-07-20 2011-08-30 Asml Holding N.V. Fluid gauge proximity sensor and method of operating same using a modulated fluid flow
US7134321B2 (en) * 2004-07-20 2006-11-14 Asml Holding N.V. Fluid gauge proximity sensor and method of operating same using a modulated fluid flow
US7017390B1 (en) 2004-12-07 2006-03-28 Asml Holding N.V. Proximity sensor nozzle shroud with flow curtain
US7140233B2 (en) 2004-12-07 2006-11-28 Asml Holding N.V. Immersion lithography proximity sensor having a nozzle shroud with flow curtain
US6978658B1 (en) 2004-12-20 2005-12-27 Asml Holding N.V. Proximity sensor with self compensation for mechanism instability
US7549321B2 (en) 2005-12-29 2009-06-23 Asml Holding N.V. Pressure sensor
US7472580B2 (en) 2005-12-30 2009-01-06 Asml Holding N.V. Pressure sensor
US7578168B2 (en) * 2007-06-27 2009-08-25 Asml Holding N.V. Increasing gas gauge pressure sensitivity using nozzle-face surface roughness
EP2133661A1 (en) * 2008-06-09 2009-12-16 Marposs AG Measuring procedure for measuring a distance from a base surface to a regenerating body surface
WO2009150126A1 (en) * 2008-06-09 2009-12-17 Marposs Ag Method for measuring a distance from a base area to a tapering area of a body
JP2011523069A (en) * 2008-06-09 2011-08-04 マーポス、ソチエタ、ペル、アツィオーニ Method for measuring the distance from the base surface to the tapered surface of an object
US8307718B2 (en) 2008-06-09 2012-11-13 Marposs Societa' Per Azioni Method for measuring a distance from a base surface to a tapering surface of a body

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