JP4694803B2 - 紫外光照射装置及び照射方法、基板製造装置及び基板製造方法 - Google Patents

紫外光照射装置及び照射方法、基板製造装置及び基板製造方法 Download PDF

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Publication number
JP4694803B2
JP4694803B2 JP2004248795A JP2004248795A JP4694803B2 JP 4694803 B2 JP4694803 B2 JP 4694803B2 JP 2004248795 A JP2004248795 A JP 2004248795A JP 2004248795 A JP2004248795 A JP 2004248795A JP 4694803 B2 JP4694803 B2 JP 4694803B2
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ultraviolet light
substrate
irradiation
sealing agent
sealant
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JP2004248795A
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Japanese (ja)
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JP2005099783A (ja
JP2005099783A5 (enrdf_load_stackoverflow
Inventor
育生 早藤
允 大橋
晃 平岡
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Publication of JP2005099783A5 publication Critical patent/JP2005099783A5/ja
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JP2004248795A 2003-08-28 2004-08-27 紫外光照射装置及び照射方法、基板製造装置及び基板製造方法 Expired - Fee Related JP4694803B2 (ja)

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JP2004248795A JP4694803B2 (ja) 2003-08-28 2004-08-27 紫外光照射装置及び照射方法、基板製造装置及び基板製造方法

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JP2003209280 2003-08-28
JP2003209280 2003-08-28
JP2004248795A JP4694803B2 (ja) 2003-08-28 2004-08-27 紫外光照射装置及び照射方法、基板製造装置及び基板製造方法

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JP2005099783A JP2005099783A (ja) 2005-04-14
JP2005099783A5 JP2005099783A5 (enrdf_load_stackoverflow) 2007-10-04
JP4694803B2 true JP4694803B2 (ja) 2011-06-08

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Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006195128A (ja) * 2005-01-13 2006-07-27 Ushio Inc パネルの貼り合せ装置
JP5180439B2 (ja) * 2005-01-28 2013-04-10 芝浦メカトロニクス株式会社 紫外光照射装置及び照射方法、基板製造装置及び基板製造方法
JP4852907B2 (ja) * 2005-06-29 2012-01-11 ウシオ電機株式会社 ディスプレイパネルの貼り合せ装置
JP2007334039A (ja) * 2006-06-15 2007-12-27 Ulvac Japan Ltd 光源装置及びこれを用いた基板の貼り合わせ方法
JP5060748B2 (ja) * 2006-07-28 2012-10-31 芝浦メカトロニクス株式会社 シール剤硬化装置及び基板製造装置
JP5137001B2 (ja) * 2006-11-30 2013-02-06 国立大学法人名古屋大学 大気圧プラズマ照射による処理装置および方法
KR100780367B1 (ko) 2006-12-22 2007-11-30 (주)리드 액정표시패널용 기판의 밀봉재 경화장치 및 이를 이용한경화방법
JP2009169386A (ja) * 2007-12-18 2009-07-30 Ulvac Japan Ltd 光照射装置
KR101097307B1 (ko) 2009-04-16 2011-12-21 삼성모바일디스플레이주식회사 실링 장치
KR101240367B1 (ko) * 2009-04-28 2013-03-11 가부시키가이샤 알박 광조사 장치의 광조사 방법 및 광조사 장치
JP2010266616A (ja) * 2009-05-13 2010-11-25 Ulvac Japan Ltd 光照射装置
KR101663563B1 (ko) * 2009-12-24 2016-10-07 엘지디스플레이 주식회사 액정표시장치의 제조방법
KR101196324B1 (ko) * 2010-07-20 2012-11-01 가부시키가이샤 아루박 광 조사 장치
JP2013025054A (ja) * 2011-07-20 2013-02-04 V Technology Co Ltd シール剤の硬化処理装置及び硬化処理方法
JP2012086576A (ja) * 2012-01-04 2012-05-10 Ulvac Japan Ltd 光源装置及びこれを用いた基板の貼り合わせ方法
JP5767666B2 (ja) 2013-03-31 2015-08-19 Ｈｏｙａ Ｃａｎｄｅｏ Ｏｐｔｒｏｎｉｃｓ株式会社 光照射装置
KR102232034B1 (ko) * 2019-06-11 2021-03-25 세메스 주식회사 약액 경화 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0637521Y2 (ja) * 1988-10-05 1994-09-28 高橋 柾弘 マイクロ波励起による紫外線発生装置
JPH10333160A (ja) * 1996-11-28 1998-12-18 Lopco:Kk 紫外光硬化型樹脂用の紫外光照射装置および紫外光照射方法と紫外光照射装置を備えた基板貼り合わせ処理システム
JP2002292750A (ja) * 2001-03-29 2002-10-09 Minolta Co Ltd 三次元造形装置及び方法、並びに三次元造形システム
JP4140429B2 (ja) * 2003-04-22 2008-08-27 ウシオ電機株式会社 ディスプレイパネルの貼り合わせ装置

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