JP4692598B2 - Vibrator support mechanism and vibrator unit - Google Patents

Description

  The present invention relates to a support mechanism for supporting a vibrator such as a gyro vibrator for detecting the posture, speed, and position of an object, and a vibrator unit including the vibrator and the support mechanism.

  The gyro vibrator described above is linked to the Coriolis force in order to detect the Coriolis force, and a drive unit in which the Coriolis force acts in response to rotation applied from the outside during its own vibration along one direction. It has a support part which supports both parts of the detecting part which vibrates. The gyro vibrator is placed on the substrate by the support portion being supported by a support mechanism provided on the substrate for placing the gyro vibrator.

  However, since the above-described support mechanism supports the gyro vibrator fixedly, there is a problem that vibration of the drive unit or the detection unit of the gyro vibrator is restricted or inhibited. In addition, if the rigidity of the support mechanism is reduced only in order to alleviate the inhibition of the vibration, there is a problem that reliability including impact resistance is lowered.

  In order to solve the above problems, a support mechanism for a first vibrator according to the present invention includes a drive unit in which a Coriolis force acts in a first direction according to a given rotation due to its own vibration, and the drive unit. A detection unit that vibrates in a second direction that is the same as or perpendicular to the first direction according to the Coriolis force, and that supports the drive unit and the detection unit. A support mechanism for a vibrator provided on a substrate for installing the vibrator to support the vibrator including the support section for supporting the vibrator through the support section. The natural resonance frequency of vibration along at least one of the second direction and the second direction is lower than the natural resonance frequency of vibration along a direction other than the one direction.

  The support mechanism for the second vibrator according to the present invention may be configured such that the vibration in the first direction causes the first vibrator to rotate according to a rotation given about a second direction perpendicular to the first direction. A drive unit in which a Coriolis force acts in a third direction perpendicular to the direction and the second direction, and the first unit according to the Coriolis force for detecting the magnitude of the Coriolis force acting on the drive unit. A substrate for installing the vibrator to support the vibrator including the detection section that vibrates along a direction and a support section for supporting the drive section and the detection section via the support section. A support mechanism for a vibrator provided, wherein the support mechanism has a natural resonance frequency of vibration along the first direction lower than a natural resonance frequency of vibration along the third direction. And

The support structure of the third vibrator according to the present invention has the first vibrator according to the rotation given about the second direction perpendicular to the first direction by the vibration along the first direction. A drive unit in which a Coriolis force acts in a third direction perpendicular to the direction and the second direction, and the first unit according to the Coriolis force for detecting the magnitude of the Coriolis force acting on the drive unit. A substrate for installing the vibrator to support the vibrator including the detection section that vibrates along a direction and a support section for supporting the drive section and the detection section via the support section. The support mechanism provided,
The drive unit includes a rod-shaped first drive arm unit and a second drive arm unit arranged in parallel to each other along the third direction,
The detection unit includes a rod-shaped detection arm unit disposed between the first drive arm unit and the second drive arm unit in parallel with the two drive arm units,
The vibrator further has one end connected to the center of the first drive arm, the other end connected to the center of the second drive arm, and the center connected to the center of the detection arm. A rod-like arm support portion parallel to the first direction,
The support mechanism includes a first elastic member that supports the support portion along the third direction so as to support the both portions at the center of the both portions to which the arm support portion and the detection arm portion are connected. A mechanism and a second elastic mechanism for supporting the support portion along the first direction are provided.

In the support mechanism, a natural resonance frequency of vibration along the first direction by the second elastic mechanism is lower than a natural resonance frequency of vibration along the third direction by the first elastic mechanism. It is characterized by.

The width of the second elastic mechanism is narrower than the width of the first elastic mechanism.

Each of the first elastic mechanism and the second elastic mechanism has portions having different widths.

Each of the first elastic mechanism and the second elastic mechanism has a non-uniform width.

Each of the first elastic mechanism and the second elastic mechanism has a constricted portion.

Each of the first elastic mechanism and the second elastic mechanism has a hollow portion.

Each of the first elastic mechanism and the second elastic mechanism has a bent portion.

The material constituting the first elastic mechanism and the material constituting the second elastic mechanism have a relationship in which the natural resonance frequency of the second elastic mechanism is lower than the natural resonance frequency of the first elastic mechanism. It is characterized by being.

The third vibrator unit according to the present invention has the first direction according to the rotation given about the second direction perpendicular to the first direction by the vibration along the first direction and the second direction. A drive unit in which Coriolis force acts in a third direction perpendicular to the second direction, and is arranged in parallel with the third direction and has a rod-shaped first drive arm unit arranged in parallel with each other; A drive unit comprising a second drive arm unit;
A detection unit that vibrates along the first direction in accordance with the Coriolis force to detect the magnitude of the Coriolis force acting on the drive unit, the first drive arm unit and the second drive unit A detection unit composed of a rod-shaped detection arm unit disposed between the drive arm units in parallel with the two drive arm units;
A support unit for supporting the drive unit and the detection unit;
One end is connected to the center of the first drive arm, the other end is connected to the center of the second drive arm, and the center is connected to the center of the detection arm in the first direction. A vibrator including parallel rod-shaped arm support portions;
A substrate for installing the vibrator,
One end is connected to the support portion, the other end is connected to the substrate, and the third direction is supported to support the both portions at the center of the both portions to which the arm support portion and the detection arm portion are connected. A support mechanism including a first elastic mechanism that supports the support portion along the first direction and a second elastic mechanism that supports the support portion along the first direction.

In the support mechanism, a natural resonance frequency of vibration along the first direction by the second elastic mechanism is lower than a natural resonance frequency of vibration along the third direction by the first elastic mechanism. It is characterized by.

The width of the second elastic mechanism is narrower than the width of the first elastic mechanism.

Each of the first elastic mechanism and the second elastic mechanism has portions having different widths.

Each of the first elastic mechanism and the second elastic mechanism has a non-uniform width.

Each of the first elastic mechanism and the second elastic mechanism has a constricted portion.

Each of the first elastic mechanism and the second elastic mechanism has a hollow portion.

Each of the first elastic mechanism and the second elastic mechanism has a bent portion.

The material constituting the first elastic mechanism and the material constituting the second elastic mechanism have a relationship in which the natural resonance frequency of the second elastic mechanism is lower than the natural resonance frequency of the first elastic mechanism. It is characterized by being.
more than

  FIG. 3 shows the relationship between the operation of the drive arm and the Coriolis force. As shown in FIG. 3, the first drive arm 11A is changed from the shape shown by the dotted line to the shape shown by the solid line, and the second drive arm 11B is changed from the shape shown by the dotted line to the solid line. When changing to the shape shown, if a clockwise rotation in the paper is applied, a Coriolis force is generated in the direction indicated by arrows 19A, 19B in FIG. On the other hand, the first drive arm 11A changes from the shape indicated by the solid line to the shape indicated by the dotted line, and the second drive arm 11B changes from the shape indicated by the solid line to the shape indicated by the dotted line. When a clockwise rotation in the paper is applied, the Coriolis force is generated in the direction opposite to the arrows 19A and 19B in FIG.

  Similar to the first drive arm 11A and the second drive arm 11B, the detection arm 12 is a plate member having a predetermined length extending along the Y direction shown in the drawing. That is, the first drive arm 11A, the second drive arm 11B, and the detection arm 12 are parallel to each other. The detection arm 12 transmits the Coriolis force transmitted from the first and second drive arms 11A and 11B via the arm support portion 13 so as to detect the Coriolis force acting on the first and second drive arms 11A and 11B. In response to this, vibration corresponding to the magnitude of the Coriolis force is performed.

  FIG. 4 shows the operation of the detection arm. As shown in FIGS. 4 (A) to (C), the detection arm 12 is similar to the bending operation of the first and second drive arms 11A and 11B shown in FIGS. 3 (A) to (C). A bending operation of deforming into an approximately S shape and an inverted S shape is performed. The magnitude of the Coriolis force is obtained by detecting an electrical signal generated by the rotation of the bending motion by the detection arm 12, thereby recognizing the magnitude of the rotation applied to the article.

  Returning to FIG. 1A, the arm support portion 13 has one end connected to the center of the first drive arm 11A and the other end connected to the center of the second drive arm 11B. Are connected so that the center thereof coincides with the center of the arm support portion 13. The support plate 14 is a plate-like member having a predetermined area including a connection point between the arm support portion 13 and the detection arm 12.

  Lead wires 15A and 15B extending in the X direction and 16A and 16B extending in the Y direction are belt-like members having the same shape. In addition, as shown in FIG. 1B, the lead wires 15A and 15B have one end connected to the vicinity of the corresponding side of the support plate 14 and the other end connected to the support substrate 17 so as to vibrate. The child 10 and the support substrate 17 are molded so as not to contact each other. Similarly to the lead wires 15A and 15B, the lead wires 16A and 16B have one end connected to the support plate 14 and the other end connected to the support substrate 17 so that the vibrator 10 and the support substrate 17 are not in contact with each other. ing. The support substrate 17 is, for example, a conventionally known substrate made of an insulator such as polyimide resin, and an opening 18 for molding the lead wire 15A and the like is defined in the center thereof.

  The lead wires 15A and 15B provided along the X direction have a material whose natural resonance frequency is lower than that of the lead wires 16A and 16B provided along the Y direction. That is, the rigidity with which the lead wires 15A and 15B support the gyro vibrator 10 in the X direction is lower than the rigidity with which the lead wires 16A and 16B support the gyro vibrator 10 in the Y direction.

  As described above, according to the vibrator unit of the first embodiment, since the natural resonance frequency in the X direction of the support mechanism is lower than that in the Y direction, it is detected for detecting the Coriolis force acting on the drive arms 11A and 11B. This prevents the arm 12 from interfering with the vibration along the X direction, and thereby the magnitude of the rotation applied to the object from the outside can be detected with higher accuracy than in the past.

[Example 2]
5A and 5B show the vibrator unit of the second embodiment. As shown in FIG. 5A, the gyro vibrator 20 of the second embodiment includes a first drive arm 11A and a second drive arm 11B that constitute the gyro vibrator 10 shown in FIG. The first drive arm 21A, the second drive arm 21B, the detection arm 22, the arm support unit 23, and the support plate 24 having the same functions as the detection arm 12, the arm support unit 13, and the support plate 14, respectively. Have Similarly to the lead wires 15A, 15B, 16A, and 16B that support the support plate 14 of the gyro vibrator 10, the gyro vibrator 20 includes lead wires 25A and 25B that support the gyro vibrator 20 in the X direction, and the Y direction. The gyro vibrator 20 is supported by 26A and 26B.

  The widths of the lead wires 25A and 25B as the second elastic mechanism are narrower than those of the first elastic mechanisms 26A and 26B. As a result, the natural vibration frequency of the vibration in the X direction of the support mechanism is lower than that in the Y direction, so that the detection arm 22 detects the Coriolis force acting on the drive arms 21A and 21B in the X direction. Do not disturb the vibration along.

  As shown in FIG. 5B, the other gyro vibrator 30 of the second embodiment includes a first drive arm 11A and a second drive that constitute the gyro vibrator 10 shown in FIG. The first drive arm 31A, the second drive arm 31B, the detection arm 32, the arm support portion 33, and the support plate 34 having the same functions as the arm 11B, the detection arm 12, the arm support portion 13, and the support plate 14. Have The gyro vibrator 30 is supported only by 35A, 35B, 36A, and 36B that supports the gyro vibrator 30 in the Y direction, similarly to the lead wires 16A and 16B that support the support plate 14 of the gyro vibrator 10 in the Y direction. Is not supported in the X direction.

  The lead wires 35A and 35B parallel to each other and the mutually parallel leads 35A and 35B, which are the first elastic mechanism, support the gyro vibrator 30 only in the Y direction. Therefore, the vibration that the detection arm 32 performs in the X direction for detecting the Coriolis force acting on the drive arms 31A and 31B is not hindered at all.

  As described above, according to the vibrator unit of the second embodiment, the gyro vibrator 20 is supported by the lead wires 26A and 26B in the Y direction, and its natural resonance frequency is the lead wire 26A and the lead wire 26A in the X direction. Since it is supported by the lead wires 25A and 25B lower than that of 26B, similarly to the detection arm 12 of the transducer unit 100 of the first embodiment, the vibration along the X direction by the detection arm 22 is not inhibited, This makes it possible to detect rotation applied from the outside with higher accuracy than in the past.

  Further, according to another vibrator unit of the second embodiment, the gyro vibrator 30 is supported by the lead wires 35A, 35B, 36A, and 36B only in the Y direction, and is not supported at all in the X direction, that is, X Since the direction is not subject to any movement restriction, the vibration of the detection arm 32 along the X direction is not obstructed, and as a result, the externally applied rotation can be detected with higher accuracy than in the past. become.

[Example 3]
6A to 6D show the configuration of a lead wire that supports the gyro vibrator of the third embodiment. As shown in FIG. 6A, the lead wire 40 having the same function as the lead wire 15A of the first embodiment has a smaller thickness (length in the depth direction of the paper surface) than the lead wire 15A or the like. .

  As shown in FIG. 6B, the lead wire 50 having a function similar to that of the lead wire 15A and the like of the first embodiment has at least one portion narrowed along the longitudinal direction. In other words, the width of the portion having no constriction is different from the width of the portion having constriction, that is, the width of the lead wire 50 is not uniform. Examples of the constriction include, for example, the illustrated curved constriction and a wedge-shaped constriction.

  As shown in FIG. 6C, the lead wire 60 having the same function as the lead wire 15A of the first embodiment has a portion 61 that is hollow along its longitudinal direction.

  As shown in FIG. 6D, the lead wire 70 having the same function as the lead wire 15A of the first embodiment is replaced with the hollow 61 along the longitudinal direction shown in FIG. A diamond-shaped hollow 71 is provided at the center.

  As described above, according to the vibrator unit having the lead wire of the third embodiment, the gyro vibrator is supported by the lead wires 40, 50, 60, or 70 having a structure that is easily bent. Similar to the vibrator unit of the first and second embodiments, the vibration for detection by the detection arm is not hindered, and this makes it possible to detect rotation from the outside with higher accuracy than in the past.

[Example 4]
FIG. 7 is a cross-sectional view illustrating a configuration of the vibrator unit according to the fourth embodiment. As shown in FIG. 7, the vibrator unit of the fourth embodiment has the same functions as the gyro vibrator 10, the lead wires 15A and 15B, and the support substrate 17 shown in FIG. 1B of the first embodiment. , Gyro vibrator 70, lead wires 75A and 75B, and support substrate 77.

  The lead wires 75A and 75B are bent substantially in a Z shape, and lead wires (not shown) corresponding to the lead wires 16A and 16B of the first embodiment are bent similarly. The bending can be obtained, for example, by pressing the gyro vibrator 70 in the direction of the support substrate 77 after placing the gyro vibrator 70 on the lead wires 75A and 75B attached to the support substrate 77.

  FIG. 8 is a plan view illustrating a configuration of another transducer unit according to the fourth embodiment. As shown in FIG. 8, another gyro vibrator 80 according to the fourth embodiment includes a first drive arm 11A, a second drive arm 11B, and the like that constitute the gyro vibrator 10 shown in FIG. The first drive arm 81A, the second drive arm 81B, the detection arm 82, the arm support portion 83, and the support plate 84 having the same functions as those of the detection arm 12, the arm support portion 13, and the support plate 14 are provided. Have.

  The gyro vibrator 80 is similar to the lead wires 15A, 15B, 16A, and 16B that support the support plate 14 of the gyro vibrator 10, and the lead wires 85A and 85B that support the gyro vibrator 80 in the X direction and the Y direction. Are supported by 86A and 86B which support the gyro vibrator 80. The lead wires 85A, 85B, 86A, and 86B are bent in a generally Z shape. That is, in contrast to the lead wires 75A and 75B being bent along the vertical direction, the lead wires 85A, 85B, 86A, and 86B are bent along the horizontal direction.

  As described above, according to the vibrator unit of the fourth embodiment and other vibrator units, since the lead wire 75A and the lead wire 85A are bent, the lead wire 75A and the lead wire 85A are unique. The resonance frequency is lower than that of the conventional lead wire having no bent shape. This prevents the detection arm from interfering with the vibration along the X direction for detecting the Coriolis force acting on the drive arm. It becomes possible to detect with accuracy.

  It is possible to obtain the same effect as described above by using a lead wire having a Z-shape in the horizontal direction instead of the lead wires 75A and 75B having a Z-shape in the height direction, that is, the vertical direction. Become.

  According to the vibrator supporting mechanism of the present invention, the natural resonance frequency of vibration along at least one of the first direction and the second direction is along a direction other than the one direction. Lower than the natural resonance frequency of the vibration. Therefore, the support mechanism does not restrict or inhibit the vibration along the one direction by the vibrator, and the shock resistance is started by an elastic mechanism having a relatively high natural resonance frequency in the one direction. It is possible to support the vibrator without deteriorating the reliability.

FIG. 3 is a diagram illustrating a vibrator unit and a cross section of the first embodiment in which a gyro vibrator is mounted. The figure which shows operation | movement of a drive arm. The figure which shows the relationship between operation | movement of a drive arm, and Coriolis force. The figure which shows operation | movement of a detection arm. FIG. 6 is a diagram illustrating a vibrator unit according to the second embodiment. FIG. 6 is a diagram illustrating a configuration of a lead wire that supports a gyro vibrator according to a third embodiment. FIG. 6 is a cross-sectional view illustrating a configuration of a vibrator unit according to a fourth embodiment. FIG. 10 is a plan view illustrating a configuration of another vibrator unit according to the fourth embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Gyro vibrator, 11A ... 1st drive arm, 11B ... 1st drive arm, 12 ... Detection arm, 13 ... Arm support part, 14 ... Support plate, 15A, 15B ... 1st lead wire, 16A, 16B ... 2nd lead wire, 17 ... Support substrate, 18 ... Opening part, 100 ... Vibrator unit.

Claims (18)

A third direction perpendicular to the first direction and the second direction in response to a rotation given about a second direction perpendicular to the first direction as a result of vibration along the first direction. A drive unit on which the Coriolis force acts, a detection unit that vibrates along the first direction according to the Coriolis force for detection of the magnitude of the Coriolis force acting on the drive unit, the drive unit, A support mechanism provided on a substrate for installing the vibrator to support the vibrator including the support part for supporting the detection part via the support part;
The drive unit includes a rod-shaped first drive arm unit and a second drive arm unit arranged in parallel to each other along the third direction,
The detection unit includes a rod-shaped detection arm unit disposed between the first drive arm unit and the second drive arm unit in parallel with the two drive arm units,
The vibrator further has one end connected to the center of the first drive arm, the other end connected to the center of the second drive arm, and the center connected to the center of the detection arm. A rod-like arm support portion parallel to the first direction,
The support mechanism includes a first elastic member that supports the support portion along the third direction so as to support the both portions at the center of the both portions to which the arm support portion and the detection arm portion are connected. mechanism and the first second elastic mechanism vibrator supporting mechanism, characterized in that it comprises supporting said support portion along a direction. A vibrator support mechanism according to claim 1 ,
In the support mechanism, a natural resonance frequency of vibration along the first direction by the second elastic mechanism is lower than a natural resonance frequency of vibration along the third direction by the first elastic mechanism. A vibrator support mechanism characterized by the above. A vibrator support mechanism according to claim 1 ,
The vibrator support mechanism, wherein the second elastic mechanism has a width smaller than that of the first elastic mechanism. A vibrator support mechanism according to claim 1 ,
Each of said 1st elastic mechanism and said 2nd elastic mechanism has a part from which width | variety mutually differs, The support mechanism of the vibrator | oscillator characterized by the above-mentioned. A vibrator support mechanism according to claim 1 ,
Each of the first elastic mechanism and the second elastic mechanism has a non-uniform width. A vibrator support mechanism according to claim 1 ,
Each of the first elastic mechanism and the second elastic mechanism has a constricted portion. A vibrator support mechanism according to claim 1 ,
Each of the first elastic mechanism and the second elastic mechanism has a hollow portion. A vibrator support mechanism according to claim 1 ,
Each of the first elastic mechanism and the second elastic mechanism has a bent portion. A vibrator support mechanism according to claim 1 ,
The material constituting the first elastic mechanism and the material constituting the second elastic mechanism have a relationship in which the natural resonance frequency of the second elastic mechanism is lower than the natural resonance frequency of the first elastic mechanism. A support mechanism for a vibrator characterized by being. A third direction perpendicular to the first direction and the second direction in response to a rotation given about a second direction perpendicular to the first direction as a result of vibration along the first direction. A drive unit in which a Coriolis force acts on the drive unit, which is arranged in parallel with the third direction and includes a rod-shaped first drive arm unit and a second drive arm unit arranged in parallel with each other;
A detection unit that vibrates along the first direction in accordance with the Coriolis force to detect the magnitude of the Coriolis force acting on the drive unit, the first drive arm unit and the second drive unit A detection unit composed of a rod-shaped detection arm unit disposed between the drive arm units in parallel with the two drive arm units;
A support unit for supporting the drive unit and the detection unit;
One end is connected to the center of the first drive arm, the other end is connected to the center of the second drive arm, and the center is connected to the center of the detection arm in the first direction. A vibrator including parallel rod-shaped arm support portions;
A substrate for installing the vibrator,
One end is connected to the support portion, the other end is connected to the substrate, and the third direction is supported to support the both portions at the center of the both portions to which the arm support portion and the detection arm portion are connected. A vibrator unit comprising: a support mechanism including a first elastic mechanism that supports the support portion along the first direction; and a second elastic mechanism that supports the support portion along the first direction. The vibrator unit according to claim 10 , wherein
In the support mechanism, a natural resonance frequency of vibration along the first direction by the second elastic mechanism is lower than a natural resonance frequency of vibration along the third direction by the first elastic mechanism. A vibrator unit characterized by The vibrator unit according to claim 10 , wherein
The vibrator unit, wherein the width of the second elastic mechanism is narrower than the width of the first elastic mechanism. The vibrator unit according to claim 10 , wherein
Each of the first elastic mechanism and the second elastic mechanism has portions having different widths from each other. The vibrator unit according to claim 10 , wherein
Each of the first elastic mechanism and the second elastic mechanism has a non-uniform width. The vibrator unit according to claim 10 , wherein
Each of the first elastic mechanism and the second elastic mechanism has a constricted portion. The vibrator unit according to claim 10 , wherein
Each of the first elastic mechanism and the second elastic mechanism has a hollow portion. The vibrator unit according to claim 10 , wherein
Each of the first elastic mechanism and the second elastic mechanism has a bent portion. The vibrator unit according to claim 10 , wherein
The material constituting the first elastic mechanism and the material constituting the second elastic mechanism have a relationship in which the natural resonance frequency of the second elastic mechanism is lower than the natural resonance frequency of the first elastic mechanism. A vibrator unit characterized by being.

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