JP6330501B2 - Vibration type angular velocity sensor - Google Patents

Description

  The present invention relates to a vibration type angular velocity sensor.

  Conventionally, in Patent Document 1, a vibration type angular velocity sensor has been proposed. In this angular velocity sensor, when the drive vibration of the movable part provided in the angular velocity sensor and the detection vibration direction are on the xy plane, when unnecessary vibration in the z-axis direction occurs, the detection signal does not require unnecessary vibration. Since a signal is included, this is corrected. Specifically, a correction electrode is formed on the movable part, and a correction signal having a phase opposite to that of the detection signal included in the detection signal is extracted by the correction electrode and added to the detection signal so that the unnecessary signal is attenuated. I have to.

JP 2011-59040 A

  As described in Patent Document 1 described above, unnecessary vibrations vibrate in a direction other than the direction in which the movable part is originally intended to vibrate, and noise is added to the detection signal due to the unnecessary vibrations, so that the vibration-type angular velocity is increased. The detection accuracy of the sensor is lowered. As shown in Patent Document 1, even if the correction signal with the opposite phase is extracted by the correction electrode and the unnecessary signal can be attenuated from the detection signal, the unnecessary vibration cannot be suppressed, so the unnecessary vibration itself is suppressed. It is desirable to do.

  Conventionally, unnecessary vibrations have been made less likely to occur by improving the rigidity of the movable part or designing the frequency, but if the direction and magnitude of the unnecessary vibrations change, that is, if they have fluctuations. Can not respond.

  In view of the above points, an object of the present invention is to provide a vibration type angular velocity sensor that can suppress unnecessary vibration of a movable part and improve detection accuracy.

  In order to achieve the above object, in the vibration type angular velocity sensor according to the first aspect of the present invention, a fixed portion (20, 100) fixed to the substrate (1), a drive weight (31, 32, 122), and A movable part (30, 120) having a detection weight (31, 32, 121) and a drive beam (42, 114) that supports the fixed weight while allowing the drive weight to move on a plane parallel to the plane of the substrate. And a beam portion (40, 110) having a detection beam (41, 113) that supports the fixed weight while allowing the detection weight to move on a plane parallel to the plane of the substrate. Is driven and vibrated in one direction on the plane of the substrate, and the angular velocity is detected based on the fact that the detection weight vibrates in the direction perpendicular to the one direction on the plane of the substrate as the angular velocity is applied.

  In such a vibration type angular velocity sensor, a drive unit (51, 131) including a drive thin film (51b) which is arranged on a drive beam and is composed of a piezoelectric film configured to drive and vibrate a drive weight, and a detection beam. The detection element (53, 133) for detecting the displacement of the detection beam due to the application of the angular velocity, and the vibration that is disposed on the drive beam and suppresses unnecessary vibration in which the drive weight moves in the normal direction with respect to the plane of the substrate is generated. And a control unit (52, 132) including a control thin film (52b) made of a piezoelectric film.

  In such a configuration, when the driving weight and the driving beam are driven to vibrate, if the driving weight moves in a direction normal to the plane of the substrate, the detection beam is displaced by the unnecessary vibration. Can be detected by the detection element. Then, by driving the control unit in accordance with the unnecessary vibration, unnecessary vibration is generated by generating vibration having a phase opposite to the unnecessary vibration in a direction in which the unnecessary vibration is suppressed, for example, in a normal direction to the plane of the substrate. Counteract. Thereby, unnecessary vibration can be suppressed. And since the vibration can be generated by feeding back the unnecessary vibration in this way and driving the control unit so as to cancel the unnecessary vibration, even if the direction and magnitude of the unnecessary vibration change, it is possible to cope with it. It becomes possible.

  In addition, the code | symbol in the bracket | parenthesis of each said means shows an example of a corresponding relationship with the specific means as described in embodiment mentioned later.

It is a top view of a vibration type angular velocity sensor concerning a 1st embodiment of the present invention. It is a perspective view of the vibration type angular velocity sensor shown in FIG. FIG. 3 is a sectional view taken along line III-III ′ in FIG. 1. FIG. 4 is a sectional view taken along line IV-IV ′ in FIG. 1. It is the top view which showed the mode at the time of the drive vibration of the vibration type angular velocity sensor shown in FIG. It is the top view which showed the mode at the time of the angular velocity application of the vibration type angular velocity sensor shown in FIG. In a cross section passing through the fixed portion 20 and the driving / detecting weights 31 and 32, (a) is a diagram showing a state when unnecessary vibration is not generated, and (b) is a state when unnecessary vibration is generated. It is the figure which showed a mode. It is a perspective view of a vibration type angular velocity sensor concerning a 2nd embodiment of the present invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following embodiments, parts that are the same or equivalent to each other will be described with the same reference numerals.

(First embodiment)
A first embodiment of the present invention will be described. The vibration type angular velocity sensor (gyro sensor) described in the present embodiment is a sensor for detecting an angular velocity as a physical quantity, and is used for detecting a rotational angular velocity around a center line parallel to the vertical direction of the vehicle, for example. Further, the vibration type angular velocity sensor can be applied to other than the vehicle.

  Hereinafter, the vibration type angular velocity sensor according to the present embodiment will be described with reference to FIGS.

  The vibration type angular velocity sensor is mounted on the vehicle such that the xy plane in FIG. 1 is oriented in the horizontal direction of the vehicle and the z-axis direction coincides with the vertical direction of the vehicle. The vibration type angular velocity sensor is formed using a plate-like substrate 10. In the present embodiment, the substrate 10 is configured by an SOI (Silicon on insulator) substrate having a structure in which a buried oxide film 13 that is a sacrificial layer is sandwiched between a support substrate 11 and a semiconductor layer 12. One direction of the plane of the substrate 10 is the x-axis, the direction perpendicular to the x-axis on the plane is the y-axis, and the normal direction of the plane and the direction perpendicular to the x-axis and the y-axis are the z-axis. Is a plane parallel to the xy plane. A vibration type angular velocity sensor is configured using such a substrate 10 and, as shown in FIG. 2, for example, the buried oxide film 13 is partially removed after the semiconductor layer 12 side is etched into the pattern of the sensor structure. And it is comprised by releasing a part of sensor structure. Although the support substrate 11 is simplified in the drawing, it is actually configured as a flat plate. Although FIG. 2 is not a cross-sectional view, hatching is shown in the support substrate 11 and the buried oxide film 13 in order to make the drawing easy to see.

  The semiconductor layer 12 is patterned into the fixed portion 20, the movable portion 30 and the beam portion 40. As shown in FIG. 2, the fixed portion 20 has the buried oxide film 13 left at least on a part of the back surface thereof, and is not released from the support substrate 11, but is supported via the buried oxide film 13. 11 is fixed. The movable portion 30 and the beam portion 40 constitute a vibrator in the vibration type angular velocity sensor. The movable portion 30 is released from the support substrate 11 from which the buried oxide film 13 is removed on the back surface side. The beam portion 40 supports the movable portion 30 and displaces the movable portion 30 in the x-axis direction and the y-axis direction in order to detect angular velocity. Specific structures of the fixed portion 20, the movable portion 30, and the beam portion 40 will be described.

  The fixed portion 20 is a portion that supports the movable portion 30 and is formed with a pad for applying a driving voltage and a pad for taking out a detection signal used for angular velocity detection (not shown). In the present embodiment, each of these functions is realized by a single fixed unit 20, but for example, a support fixed unit for supporting the movable unit 30, a drive fixed unit to which a drive voltage is applied, and angular velocity detection. It may be configured to be divided into detection fixing parts to be used. In this case, for example, the fixing unit 20 shown in FIG. 1 is used as a support fixing unit, and a driving fixing unit and a detection fixing unit are provided so as to be connected to the supporting fixing unit, and a driving voltage is applied to the driving fixing unit. And a detection signal extraction pad may be provided in the detection fixing portion.

  Specifically, the fixed portion 20 has, for example, a quadrangular upper surface shape, and has a structure in which a detection beam 41 (to be described later) in the beam portion 40 is connected to the center portion of two opposite sides. The buried oxide film 13 is left below the fixed portion 20, and the fixed portion 20 is fixed to the support substrate 11 through the buried oxide film 13.

  The movable portion 30 is a portion that is displaced in response to the application of the angular velocity, and a detection weight that is vibrated according to the angular velocity when the angular velocity is applied during the driving vibration and a driving weight that is driven and vibrated by the application of the driving voltage. The configuration includes a weight. In the case of the present embodiment, as the movable portion 30, drive and detection weights 31, 32 that serve as a drive weight and a detection weight by the same weight are provided. The drive and detection weights 31 and 32 are disposed on both sides of the fixed portion 20 in the x-axis direction, and are disposed at equal intervals from the fixed portion 20. Each of the driving and detection weights 31 and 32 is configured with the same size (the same mass), and in the case of the present embodiment, the upper surface shape is configured with a quadrangle. Each of the drive / detection weights 31 and 32 is supported at both ends by being connected to a drive beam 42 (described later) provided in the beam portion 40 at two opposite sides. Under the driving and detection weights 31 and 32, the buried oxide film 13 is removed, and the driving and detection weights 31 and 32 are released from the support substrate 11. For this reason, each of the driving and detecting weights 31 and 32 can be driven to vibrate in the x-axis direction by deformation of the driving beam 42, and when the angular velocity is applied, the fixed portion including the y-axis direction by deformation of the driving beam 42 and the like. It is also possible to vibrate in the direction of rotation about 20.

  The beam portion 40 is configured to include a detection beam 41, a drive beam 42, and a support member 43.

  The detection beam 41 is a linear beam extending in the y-axis direction that connects the fixed portion 20 and the support member 43. The dimension of the detection beam 41 in the x-axis direction is thinner than the dimension in the z-axis direction, and can be deformed in the x-axis direction.

  The drive beam 42 is a linear beam extending in the y-axis direction connecting the drive and detection weights 31 and 32 and the support member 43, that is, in a direction parallel to the detection beam 41. The driving beam 42 provided on each of the driving and detection weights 31 and 32 and the detection beam 41 are equidistant. The dimension of the drive beam 42 in the x-axis direction is also thinner than the dimension in the z-axis direction, and can be deformed in the x-axis direction. Thereby, the drive and detection weights 31 and 32 can be displaced in the xy plane.

  The support member 43 is a linear member extending in the x-axis direction, and the detection beam 41 is connected at the center position of the support member 43, and the drive beams 42 are connected at both end positions. The support member 43 has a dimension in the y-axis direction larger than a dimension in the x-axis direction of the detection beam 41 and the drive beam 42. For this reason, the driving beam 42 is mainly deformed during driving vibration, and the detection beam 41 and the driving beam 42 are mainly deformed when the angular velocity is applied.

  With such a structure, the drive beam 42, the support member 43, and the drive / detection weights 31 and 32 form a frame having a quadrangular upper surface shape, and the vibration beam type in which the detection beam 41 and the fixing portion 20 are disposed inside thereof. An angular velocity sensor is configured.

  Further, the drive beam 42 is formed with a drive unit 51 and a control unit 52 as shown in FIGS. 1 and 3, and the detection beam 41 is detected with vibration as shown in FIG. A portion 53 is formed. The drive type 51, the control unit 52, and the vibration detection unit 53 are electrically connected to a control device (not shown) provided outside, so that the vibration type angular velocity sensor is driven.

  As shown in FIG. 1, the drive unit 51 is provided in the vicinity of the connection portion of each drive beam 42 to the support member 43, and two drive units 51 are arranged at a predetermined distance from each other in the y-axis direction. It is extended. As shown in FIG. 3, the driving unit 51 has a structure in which a lower layer electrode 51a, a driving thin film 51b, and an upper layer electrode 51c are sequentially stacked on the surface of the semiconductor layer 12 constituting the driving beam. The lower layer electrode 51a and the upper layer electrode 51c are composed of, for example, an Al electrode. The lower layer electrode 51a and the upper layer electrode 51c are connected to a pad or GND for applying a driving voltage (not shown) through the wiring members 51d and 51e drawn out to the fixing unit 20 through the support member 43 and the detection beam 41 shown in FIG. It is connected to the pad for connection. The driving thin film 51b is made of, for example, a lead zirconate titanate (PZT) film.

  In such a configuration, by generating a potential difference between the lower layer electrode 51a and the upper layer electrode 51c, the driving thin film 51b sandwiched therebetween is displaced, and the driving beam 42 is forcibly vibrated, thereby driving and driving. The detection weights 31 and 32 are driven to vibrate along the x-axis direction. For example, one drive unit 51 is provided at each end in the x-axis direction of each drive beam 42, and the drive thin film 51b of one drive unit 51 is displaced by a compressive stress and the other drive unit 51 is driven. The thin film 51b is displaced by tensile stress. Such voltage application is alternately and repeatedly performed on each drive unit 51, thereby driving and detecting weights 31 and 32 to be driven to vibrate along the x-axis direction.

  As shown in FIGS. 1 and 3, the control unit 52 is provided in the vicinity of the connecting portion with the support member 43 among the drive beams 42, and between the two drive units 51 arranged at each location. These are disposed at a predetermined distance from each drive unit 51 and extend in the y-axis direction. As shown in FIG. 3, the control unit 52 has a structure in which a lower layer electrode 52 a, a control thin film 52 b, and an upper layer electrode 52 c are sequentially stacked on the surface of the semiconductor layer 12 constituting the drive beam 42. The lower layer electrode 52a, the upper layer electrode 52c, and the control thin film 52b have the same configuration as the lower layer electrode 51a, the upper layer electrode 51c, and the driving thin film 51b that constitute the driving unit 51, respectively. The lower layer electrode 52a and the upper layer electrode 52c are connected to a pad or GND connection for applying a control voltage (not shown) through the wiring parts 52d and 52e drawn to the fixing part 20 through the support member 43 and the detection beam 41 shown in FIG. Is connected to the pad.

  In such a configuration, by generating a potential difference between the lower layer electrode 52a and the upper layer electrode 52c, the control thin film 52b sandwiched therebetween is displaced, and a desired vibration is applied to the drive beam 42. it can. Thereby, it is possible to control the vibrations of the drive and detection weights 31 and 32 and to apply vibrations that suppress unnecessary vibrations.

  As shown in FIGS. 1 and 4, the vibration detection unit 53 is provided in the vicinity of the connection portion of the detection beam 41 with the fixed unit 20, and is provided on each side of the detection beam 41 in the x-axis direction. It extends in the y-axis direction. As shown in FIG. 4, the vibration detection unit 53 has a structure in which a lower layer electrode 53a, a detection thin film 53b, and an upper layer electrode 53c are sequentially stacked on the surface of the semiconductor layer 12 constituting the detection beam 41. The lower layer electrode 53a, the upper layer electrode 53c, and the detection thin film 53b have the same configuration as the lower layer electrode 51a, the upper layer electrode 51c, and the driving thin film 51b that constitute the vibration detection unit 53, respectively. The lower layer electrode 53a and the upper layer electrode 53c are connected to a detection signal output pad (not shown) through the wiring portions 53d and 53e drawn to the fixing portion 20 shown in FIG.

  In such a configuration, when the detection beam 41 is displaced as the angular velocity is applied, the detection thin film 53b is deformed accordingly. As a result, for example, an electric signal (current value in the case of constant voltage driving, current value in the case of constant current driving) between the lower layer electrode 53a and the upper layer electrode 53c changes, and this is used as a detection signal indicating the angular velocity. The signal is output to the outside through a detection signal output pad (not shown).

  The vibration detection unit 53 also detects unnecessary vibration. In the angular velocity detection, the driving and detection weights 31 and 32 are basically vibrated on the xy plane, and vibration in the z-axis direction becomes unnecessary vibration. Even when such unnecessary vibration occurs, the detection beam 41 is displaced, so that an electric signal between the lower layer electrode 53a and the upper layer electrode 53c (current value in constant voltage driving, constant current) Current value in the case of driving) changes. It is output to the outside through a pad (not shown) as a detection signal indicating unnecessary vibration.

  Since the vibration phase when the angular velocity is applied is different from the unnecessary vibration, it is possible to check whether the vibration corresponding to the angular velocity is applied or the unnecessary vibration based on the phase of the change in the electrical signal. it can. This makes it possible to determine whether the change in the electrical signal is due to application of angular velocity or unnecessary vibration.

  As described above, the vibration type angular velocity sensor according to the present embodiment is configured. Next, the operation of the vibration type angular velocity sensor configured as described above will be described.

  First, as shown in FIG. 3, a drive voltage is applied to the drive unit 51 provided in the drive beam 42. Specifically, by generating a potential difference between the lower layer electrode 51a and the upper layer electrode 51c, the driving thin film 51b sandwiched therebetween is displaced. Of the two driving units 51 provided side by side, the driving thin film 51b of one driving unit 51 is displaced by compressive stress and the driving thin film 51b of the other driving unit 51 is displaced by tensile stress. . Such voltage application is alternately and repeatedly performed on each drive unit 51, thereby driving and vibrating the weights 31 and 32 for driving and detection along the x-axis direction. As a result, as shown in FIG. 5, the driving and detection weights 31 and 32 supported on both ends by the driving beam 42 are driven in the opposite directions in the x-axis direction with the fixed portion 20 interposed therebetween. That is, both the driving and detection weights 31 and 32 are in a mode in which the state where the fixed portion 20 approaches and the state where the fixing portion 20 moves away are repeated.

  When this driving vibration is performed, if an angular velocity, that is, a vibration around the x-axis with the fixed portion 20 as the central axis is applied to the vibration-type angular velocity sensor, as shown in FIG. In the detection mode, the weights 31 and 32 vibrate in the rotational direction around the fixed portion 20 including the y-axis direction. Accordingly, the detection beam 41 is also displaced, and the detection thin film 53 b provided in the vibration detection unit 53 is deformed along with the displacement of the detection beam 41. Thereby, for example, an electrical signal between the lower layer electrode 53a and the upper layer electrode 53c changes, and the generated angular velocity can be detected by inputting this electrical signal to a control device (not shown) provided outside. It becomes.

  When performing such an operation, for example, vibration transmitted from a part other than the vibration type angular velocity sensor (vehicle vibration, etc.), axial orientation deviation, processing asymmetry, existence of crystal defects, etc. Unnecessary vibration may occur. For example, as shown in FIG. 7A, in the normal state where unnecessary vibration is not generated, the driving and detecting weights 31 and 32 vibrate symmetrically in the x-axis direction with the fixed portion 20 interposed therebetween. There is no movement in the z-axis direction. On the other hand, as shown in FIG. 7B, when unnecessary vibration occurs, the driving and detecting weights 31 and 32 also move in the z-axis direction.

  In that case, the detection beam 41 is displaced by unnecessary vibration in the z-axis direction, and the electrical signal between the lower layer electrode 53a and the upper layer electrode 53c changes accordingly. It is input to a control device (not shown) provided outside as a detection signal indicating unnecessary vibration. For this reason, the control device detects unnecessary vibration and drives the control unit 52 to generate unnecessary vibration in a direction in which the unnecessary vibration is suppressed, for example, in the z-axis direction. Counteract. Thereby, unnecessary vibration can be suppressed. And since the unnecessary vibration is fed back and the control unit 52 can be driven to generate the vibration so as to cancel the unnecessary vibration, even if the direction and the magnitude of the unnecessary vibration change, it is possible to cope with it. Is also possible.

(Second Embodiment)
A second embodiment of the present invention will be described. In this embodiment, the shape of the vibration type angular velocity sensor is changed with respect to the first embodiment, and the other parts are the same as those in the first embodiment. Therefore, only the parts different from the first embodiment will be described.

  The vibration type angular velocity sensor of the present embodiment shown in FIG. 8 also patterns the semiconductor layer 12 formed on the support substrate 11 via the buried oxide film 13 to fix the fixed portion 100, the beam portion 110, the movable portion 120, and the like. It is manufactured by forming. Specifically, the vibration type angular velocity sensor of the present embodiment is configured as follows.

  A cantilever support beam 111 is formed from one side of the fixed portion 100 having a quadrangular upper surface, and a support member 112 extends in a direction perpendicular to the support beam 111. Specifically, the support beam 111 is coupled at the center position of the support member 112. Then, a detection beam 113 is formed on the opposite side of the support beam 111 with the support member 112 interposed therebetween, and a detection weight 121 is provided at the tip of the detection beam 113 and is driven in the same direction as the support beam 111 at both ends of the support member 112. A beam 114 is formed, and a driving weight 122 is provided at the tip thereof.

  Among these, the fixed part 100 corresponds to the fixed part 20 in the first embodiment. The support member 112, the detection beam 113, and the drive beam 114 correspond to the support member 43, the detection beam 102, and the detection beam 41 in the first embodiment, respectively, and play a similar role, and configure the beam portion 110 together with the support beam 111. doing. The detection weight 121 and the drive weight 122 constitute the movable part 120. Although these are constituted separately, the roles of the driving and detection weights 31 and 32 are performed separately.

  The support beam 111 supports the detection beam 113, the detection weight 121, the drive beam 114, and the drive weight 122 via the support member 112, and is fixed to the fixing portion 100.

  Although various wirings are not shown, a drive unit 131 and a control unit 132 are formed on the drive beam 114, and a vibration detection unit 133 is formed on the detection beam 113. The drive unit 131, the control unit 132, and the vibration detection unit 133 play the same role as the drive unit 51, the control unit 52, and the vibration detection unit 53 in the first embodiment.

  As described above, the vibration-type angular velocity sensor having the structure in which the movable unit 120 and the beam unit 110 are cantilevered by the fixed unit 100 also includes a control unit 52 in addition to the drive unit 51 and the vibration detection unit 53. be able to. Even with such a configuration, it is possible to suppress unnecessary vibration using the control unit 52, and the same effect as in the first embodiment can be obtained.

(Other embodiments)
The present invention is not limited to the embodiment described above, and can be appropriately changed within the scope described in the claims.

For example, in each of the above embodiments, a detection element that detects the vibration detection units 53 and 133 uses a structure using a piezoelectric film similar to the drive units 51 and 131 and the control units 52 and 132. However, in addition to the structure using the piezoelectric film, other detection elements may be used as long as the detection elements can extract the displacement of the detection beams 41 and 113 as an electric signal. For example, a piezoresistance (gauge resistance) may be formed in the semiconductor layer 12 constituting the detection beams 41 and 113, and the piezoresistance may be used as a detection element. For example, a piezoresistor can be obtained by forming a p ⁺ -type layer or an n ⁺ -type layer in the surface layer portion of the semiconductor layer 12.

  In addition, a comb-tooth electrode is provided on the detection beams 41 and 113, and a capacitive sensor including a comb-tooth electrode facing the comb-tooth electrode provided on the detection beams 41 and 113 as a detection fixing portion is used as a detection element. You may make it take out the change of the capacity | capacitance comprised between electrodes as an electrical signal.

  In each of the above embodiments, the vibration detection units 53 and 133 can detect both vibration and unnecessary vibration when an angular velocity is applied. However, these may be detected by separate configurations. . Further, the detection beams 41 and 113 are also provided with a control unit similar to the control units 52 and 114, and when unnecessary vibration is applied to the detection beams 41 and 113, the unnecessary vibration can be suppressed.

  Moreover, in the said embodiment, the drive parts 51 and 131, the control parts 52 and 132, and the vibration detection parts 53 and 133 are provided only in the vicinity of the support members 43 and 112 among the detection beams 41 and 113 and the drive beams 42 and 114. Structure. This is merely an example. For example, these may be provided in the entire area of the detection beams 41 and 113 and the drive beams 42 and 114.

DESCRIPTION OF SYMBOLS 10 Board | substrate 20,100 Fixed part 30,120 Movable part 31 Weight for drive and detection 40,110 Beam part 41,113 Detection beam 42,114 Drive beam 51,131 Drive part 52,132 Control part 53,133 Vibration detection part 121 Detection weight 122 Drive weight

Claims (7)

A fixing part (20, 100) fixed to the substrate (1);
A movable part (30, 120 ) having a driving weight (31, 32, 122) and a detection weight (31, 32, 121 ) ;
A driving beam (42, 114) that supports the fixed weight while allowing the driving weight to move on a plane parallel to the plane of the substrate, and the detection weight on a plane parallel to the plane of the substrate A beam portion (40, 110) having a detection beam (41, 113) that is movable and supports the fixed portion,
The drive weight is driven to vibrate in one direction on the plane of the substrate, and angular velocity detection is performed based on the fact that the detection weight vibrates in the direction perpendicular to the one direction on the plane of the substrate as the angular velocity is applied. A vibration type angular velocity sensor,
A drive unit (51, 131) including a drive thin film (51b) arranged on the drive beam and configured by a piezoelectric film configured to drive and vibrate the drive weight;
A detection element (53, 133) disposed on the detection beam for detecting displacement of the detection beam accompanying application of the angular velocity;
A control unit (52) including a control thin film (52b) disposed on the drive beam and configured by a piezoelectric film that generates vibrations that suppress unnecessary vibrations in which the drive weight moves in a direction normal to the plane of the substrate. , and 132), with a,
The fixed part, the movable part and the beam part are formed by patterning a semiconductor layer (12) provided in the substrate,
The driving unit has a configuration in which a lower layer electrode (51a), the driving thin film and an upper layer electrode (51c) are stacked on the semiconductor layer, and a driving voltage is applied between the lower layer electrode and the upper layer electrode. The drive weight is driven to vibrate by deforming the driving thin film by being applied,
The control unit has a configuration in which a lower layer electrode (52a), the control thin film, and an upper layer electrode (52c) are stacked on the semiconductor layer, and a control voltage is applied between the lower layer electrode and the upper layer electrode. A vibration that suppresses the unnecessary vibration by deforming the control thin film by being applied,
Further, two of the drive sections are extended in parallel to the drive beam at a predetermined distance along a direction perpendicular to the direction of the drive vibration,
The vibration type angular velocity sensor , wherein the control unit extends between the two drive units along the drive beam along a direction perpendicular to the direction of the drive vibration . The detection element has a configuration in which a lower electrode (53a) and a detection thin film (53b) composed of a piezoelectric film and an upper electrode (52c) are stacked on the semiconductor layer, and the angular velocity is applied to the detection element. 2. The vibration type angular velocity sensor according to claim 1 , wherein the angular velocity is detected by a change in an electrical signal between the lower layer electrode and the upper layer electrode accompanying displacement of a detection thin film. 3. The vibration type angular velocity sensor according to claim 2 , wherein the detection element also detects the unnecessary vibration based on a change in the electrical signal accompanying displacement of the thin film for detection due to the unnecessary vibration. The detecting element, the formed of a piezo resistor formed in a surface portion of the semiconductor layer, by the resistance change of the piezoresistive by application of the angular velocity according to claim 1, characterized in that detecting the angular velocity Vibration type angular velocity sensor. The detection element is a capacitive sensor including a comb electrode provided on the detection beam and a comb electrode facing the comb electrode provided on the detection beam as a detection fixing portion. Item 2. The vibration type angular velocity sensor according to Item 1 . Drive and detection weights (31, 32) serving as the drive weight and the detection weight are arranged on both sides of the fixed portion as the center in the same direction as the direction of the drive vibration,
The detection beam (41) extends on both sides in a direction perpendicular to the direction of the drive vibration, with the fixed portion as a center,
The drive beam (42) extends on both sides in a direction perpendicular to the direction of the drive vibration, with the drive / detection weight as the center.
Claims 1, characterized in that the side opposite to the driving and detecting weight of the opposite side and the driving beam and the fixed part of the detecting beam is connected to the linear support member (43) of 5 The vibration type angular velocity sensor according to any one of the above. The beam portion (110) has a support beam (111) fixed to the fixed portion,
A linear support member (112) extending in the direction of the drive vibration is provided on the opposite side of the fixed portion across the support beam,
The detection beam (113) extends in a direction perpendicular to the direction of the drive vibration on the opposite side to the fixed portion across the support member, and at the end portion on the opposite side to the support member. The detection weight (121) is connected,
The drive beam (42) extends in a direction perpendicular to the direction of the drive vibration on the opposite side to the fixed portion across the support member, and at the end opposite to the support member, the drive beam (42). The vibration type angular velocity sensor according to any one of claims 1 to 5, wherein a driving weight (122) is connected.

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