JP4689571B2 - 軽量接合ヘッド組立体 - Google Patents

軽量接合ヘッド組立体 Download PDF

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Publication number
JP4689571B2
JP4689571B2 JP2006280417A JP2006280417A JP4689571B2 JP 4689571 B2 JP4689571 B2 JP 4689571B2 JP 2006280417 A JP2006280417 A JP 2006280417A JP 2006280417 A JP2006280417 A JP 2006280417A JP 4689571 B2 JP4689571 B2 JP 4689571B2
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Japan
Prior art keywords
head assembly
joining
joining head
motor
support structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2006280417A
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English (en)
Japanese (ja)
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JP2007110136A (ja
JP2007110136A5 (enExample
Inventor
アジット・ゴーネカール
ゲイリー・ピーター・ウィドーソン
Original Assignee
エーエスエム・テクノロジー・シンガポール・ピーティーイー・リミテッド
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Publication of JP2007110136A publication Critical patent/JP2007110136A/ja
Publication of JP2007110136A5 publication Critical patent/JP2007110136A5/ja
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Publication of JP4689571B2 publication Critical patent/JP4689571B2/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Die Bonding (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Wire Bonding (AREA)
JP2006280417A 2005-10-14 2006-10-13 軽量接合ヘッド組立体 Active JP4689571B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/250,270 2005-10-14
US11/250,270 US7303111B2 (en) 2005-10-14 2005-10-14 Lightweight bondhead assembly

Publications (3)

Publication Number Publication Date
JP2007110136A JP2007110136A (ja) 2007-04-26
JP2007110136A5 JP2007110136A5 (enExample) 2010-03-11
JP4689571B2 true JP4689571B2 (ja) 2011-05-25

Family

ID=37433618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006280417A Active JP4689571B2 (ja) 2005-10-14 2006-10-13 軽量接合ヘッド組立体

Country Status (6)

Country Link
US (1) US7303111B2 (enExample)
EP (1) EP1775753A3 (enExample)
JP (1) JP4689571B2 (enExample)
CN (1) CN100440426C (enExample)
MY (1) MY138793A (enExample)
SG (1) SG131882A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1424884A1 (de) * 2002-11-29 2004-06-02 Leica Geosystems AG Verfahren zur Montage miniaturisierter Bauteile auf einer Trägerplatte
US8293043B2 (en) * 2006-07-24 2012-10-23 Asm Assembly Automation Ltd Automatic level adjustment for die bonder
US8215648B2 (en) * 2008-04-21 2012-07-10 Asm Assembly Automation Ltd Collet mounting assembly for a die bonder
CN101635267B (zh) * 2008-07-21 2015-03-25 旺矽科技股份有限公司 取放晶粒的装置及方法
US8651159B2 (en) * 2009-06-12 2014-02-18 Asm Assembly Automation Ltd Die bonder providing a large bonding force
KR200460026Y1 (ko) 2010-02-03 2012-04-27 리드텍(주) 비접촉 구동 모터를 이용한 다이본딩 장치
CN102343477B (zh) * 2010-08-02 2014-02-19 北京中电科电子装备有限公司 一种键合头装置
CN102343476B (zh) * 2010-08-02 2015-06-03 北京中电科电子装备有限公司 键合头装置
CN102157409A (zh) * 2011-03-17 2011-08-17 南通富士通微电子股份有限公司 键合机
JP5813432B2 (ja) * 2011-09-19 2015-11-17 ファスフォードテクノロジ株式会社 ダイボンダ及びボンディング方法
US20130127193A1 (en) * 2011-11-18 2013-05-23 Nike, Inc. Manufacturing Vacuum Tool
US8858744B2 (en) 2011-11-18 2014-10-14 Nike, Inc. Multi-functional manufacturing tool
US8849620B2 (en) 2011-11-18 2014-09-30 Nike, Inc. Automated 3-D modeling of shoe parts
US9010827B2 (en) 2011-11-18 2015-04-21 Nike, Inc. Switchable plate manufacturing vacuum tool
US9136243B2 (en) 2013-12-03 2015-09-15 Kulicke And Soffa Industries, Inc. Systems and methods for determining and adjusting a level of parallelism related to bonding of semiconductor elements
CN105762099B (zh) * 2014-12-17 2019-07-09 北京中电科电子装备有限公司 一种芯片供送机构及粘片机
CN105789101B (zh) * 2014-12-25 2020-05-05 北京中电科电子装备有限公司 一种芯片供送机构及粘片机
CN106964889A (zh) * 2017-04-28 2017-07-21 菲斯达排放控制装置（苏州）有限公司 便于深腔结构焊接的点焊装置
CN111573266B (zh) * 2019-02-18 2022-01-11 宁波舜宇光电信息有限公司 载具拼板上下料设备及自动扣料机

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3209447A (en) * 1962-03-12 1965-10-05 Aeroprojects Inc Transducer coupling system
JP3749330B2 (ja) * 1997-02-28 2006-02-22 芝浦メカトロニクス株式会社 ペレットボンディング装置
DE19724732A1 (de) * 1997-06-12 1998-12-17 Heidenhain Gmbh Dr Johannes Längenmeßsystem mit modular aufgebautem Maßstab
WO2004073914A1 (en) * 1999-11-10 2004-09-02 Asm Technology Singapore Pte Ltd. Force sensing apparatus
US6640423B1 (en) * 2000-07-18 2003-11-04 Endwave Corporation Apparatus and method for the placement and bonding of a die on a substrate
KR100773170B1 (ko) * 2000-09-12 2007-11-02 언액시스 인터내셔널 트레이딩 엘티디 반도체 칩을 장착하는 방법 및 장치
JP3885867B2 (ja) * 2000-11-29 2007-02-28 日本電気株式会社 ワイヤボンディング装置
US6813225B2 (en) * 2001-08-20 2004-11-02 Asm Assembly Automation Limited Linear motor driven mechanism using flexure bearings for opto-mechanical devices
TW200414992A (en) * 2002-11-29 2004-08-16 Esec Trading Sa Method for picking semiconductor chips from a foil
ATE522925T1 (de) * 2003-01-16 2011-09-15 Nxp Bv Chiptransferverfahren und vorrichtung
US7305757B2 (en) * 2004-03-15 2007-12-11 Asm Technology Singapore Pte Ltd. Die ejector system using linear motor
US7202956B2 (en) * 2004-10-08 2007-04-10 Asm Technology Singapore Pte Ltd. Translation mechanism for opto-mechanical inspection

Also Published As

Publication number Publication date
US7303111B2 (en) 2007-12-04
EP1775753A2 (en) 2007-04-18
SG131882A1 (en) 2007-05-28
JP2007110136A (ja) 2007-04-26
CN1956144A (zh) 2007-05-02
EP1775753A3 (en) 2009-01-07
US20070084901A1 (en) 2007-04-19
MY138793A (en) 2009-07-31
CN100440426C (zh) 2008-12-03

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