JP4681821B2 - レーザ集光光学系及びレーザ加工装置 - Google Patents

レーザ集光光学系及びレーザ加工装置 Download PDF

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Publication number
JP4681821B2
JP4681821B2 JP2004132995A JP2004132995A JP4681821B2 JP 4681821 B2 JP4681821 B2 JP 4681821B2 JP 2004132995 A JP2004132995 A JP 2004132995A JP 2004132995 A JP2004132995 A JP 2004132995A JP 4681821 B2 JP4681821 B2 JP 4681821B2
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JP
Japan
Prior art keywords
laser
optical system
condensing optical
divergence point
medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004132995A
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English (en)
Japanese (ja)
Other versions
JP2005316069A (ja
JP2005316069A5 (zh
Inventor
貞志 安達
幸夫 江田
典夫 栗田
哲也 筬島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hamamatsu Photonics KK
Olympus Corp
Original Assignee
Hamamatsu Photonics KK
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics KK, Olympus Corp filed Critical Hamamatsu Photonics KK
Priority to JP2004132995A priority Critical patent/JP4681821B2/ja
Priority to TW094113232A priority patent/TWI348408B/zh
Priority to CNB2005800017270A priority patent/CN100485446C/zh
Priority to PCT/JP2005/008003 priority patent/WO2005106564A1/ja
Priority to CN2008101498409A priority patent/CN101396764B/zh
Priority to CN2008101498413A priority patent/CN101396765B/zh
Priority to EP05737135.3A priority patent/EP1684109B1/en
Priority to KR1020067012578A priority patent/KR100789538B1/ko
Publication of JP2005316069A publication Critical patent/JP2005316069A/ja
Priority to US11/450,801 priority patent/US7333255B2/en
Publication of JP2005316069A5 publication Critical patent/JP2005316069A5/ja
Priority to US11/868,210 priority patent/US8022332B2/en
Application granted granted Critical
Publication of JP4681821B2 publication Critical patent/JP4681821B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Dicing (AREA)
  • Laser Beam Processing (AREA)
JP2004132995A 2004-04-28 2004-04-28 レーザ集光光学系及びレーザ加工装置 Expired - Fee Related JP4681821B2 (ja)

Priority Applications (10)

Application Number Priority Date Filing Date Title
JP2004132995A JP4681821B2 (ja) 2004-04-28 2004-04-28 レーザ集光光学系及びレーザ加工装置
TW094113232A TWI348408B (en) 2004-04-28 2005-04-26 Laser processing device
PCT/JP2005/008003 WO2005106564A1 (ja) 2004-04-28 2005-04-27 レーザ加工装置
CN2008101498409A CN101396764B (zh) 2004-04-28 2005-04-27 激光处理装置
CN2008101498413A CN101396765B (zh) 2004-04-28 2005-04-27 激光处理装置
EP05737135.3A EP1684109B1 (en) 2004-04-28 2005-04-27 Laser processing apparatus
CNB2005800017270A CN100485446C (zh) 2004-04-28 2005-04-27 激光处理装置
KR1020067012578A KR100789538B1 (ko) 2004-04-28 2005-04-27 레이저 가공 장치
US11/450,801 US7333255B2 (en) 2004-04-28 2006-06-09 Laser processing device
US11/868,210 US8022332B2 (en) 2004-04-28 2007-10-05 Laser processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004132995A JP4681821B2 (ja) 2004-04-28 2004-04-28 レーザ集光光学系及びレーザ加工装置

Publications (3)

Publication Number Publication Date
JP2005316069A JP2005316069A (ja) 2005-11-10
JP2005316069A5 JP2005316069A5 (zh) 2007-06-14
JP4681821B2 true JP4681821B2 (ja) 2011-05-11

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Family Applications (1)

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JP2004132995A Expired - Fee Related JP4681821B2 (ja) 2004-04-28 2004-04-28 レーザ集光光学系及びレーザ加工装置

Country Status (2)

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JP (1) JP4681821B2 (zh)
CN (3) CN101396765B (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4141485B2 (ja) * 2006-07-19 2008-08-27 トヨタ自動車株式会社 レーザ加工システムおよびレーザ加工方法
JP5479925B2 (ja) 2010-01-27 2014-04-23 浜松ホトニクス株式会社 レーザ加工システム
JP2016111315A (ja) * 2014-11-27 2016-06-20 株式会社東京精密 レーザー加工装置及びレーザー加工方法
JP6602207B2 (ja) * 2016-01-07 2019-11-06 株式会社ディスコ ＳｉＣウエーハの生成方法
JP6332886B2 (ja) * 2017-05-11 2018-05-30 住友大阪セメント株式会社 加工装置のオフセット量調整方法
JP6643442B1 (ja) * 2018-10-12 2020-02-12 株式会社アマダホールディングス レーザ加工機及びレーザ加工方法
JP7394299B2 (ja) * 2020-03-09 2023-12-08 株式会社東京精密 オートフォーカス光学系及び加工光学装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6267689U (zh) * 1985-10-18 1987-04-27
JPH04327394A (ja) * 1991-04-30 1992-11-16 Amada Co Ltd 光移動型レーザ加工機
JPH07136782A (ja) * 1993-05-13 1995-05-30 Russian Technol Group Lp パルスレーザビームを用いた、透明な材料の内側に像を形成する方法及び装置
JPH0839281A (ja) * 1994-05-02 1996-02-13 Trumpf Gmbh & Co 焦点位置調整装置を備えたレーザ切断機
JP2000071088A (ja) * 1998-08-27 2000-03-07 Nisshinbo Ind Inc レ−ザ加工機
JP2003048091A (ja) * 2001-07-30 2003-02-18 Matsushita Electric Ind Co Ltd レーザ加工装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6016227A (en) * 1998-07-31 2000-01-18 The University Of Tennessee Research Corporation Apparatus and method for producing an improved laser beam

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6267689U (zh) * 1985-10-18 1987-04-27
JPH04327394A (ja) * 1991-04-30 1992-11-16 Amada Co Ltd 光移動型レーザ加工機
JPH07136782A (ja) * 1993-05-13 1995-05-30 Russian Technol Group Lp パルスレーザビームを用いた、透明な材料の内側に像を形成する方法及び装置
JPH0839281A (ja) * 1994-05-02 1996-02-13 Trumpf Gmbh & Co 焦点位置調整装置を備えたレーザ切断機
JP2000071088A (ja) * 1998-08-27 2000-03-07 Nisshinbo Ind Inc レ−ザ加工機
JP2003048091A (ja) * 2001-07-30 2003-02-18 Matsushita Electric Ind Co Ltd レーザ加工装置

Also Published As

Publication number Publication date
CN101396764A (zh) 2009-04-01
CN101396765A (zh) 2009-04-01
CN100485446C (zh) 2009-05-06
JP2005316069A (ja) 2005-11-10
CN1906522A (zh) 2007-01-31
CN101396764B (zh) 2011-01-26
CN101396765B (zh) 2011-02-09

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