JP4665868B2 - 光スキャナおよび画像形成装置 - Google Patents

光スキャナおよび画像形成装置 Download PDF

Info

Publication number
JP4665868B2
JP4665868B2 JP2006223658A JP2006223658A JP4665868B2 JP 4665868 B2 JP4665868 B2 JP 4665868B2 JP 2006223658 A JP2006223658 A JP 2006223658A JP 2006223658 A JP2006223658 A JP 2006223658A JP 4665868 B2 JP4665868 B2 JP 4665868B2
Authority
JP
Japan
Prior art keywords
mass
resin
support
silicon
elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006223658A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008046511A (ja
JP2008046511A5 (enExample
Inventor
昭浩 村田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2006223658A priority Critical patent/JP4665868B2/ja
Publication of JP2008046511A publication Critical patent/JP2008046511A/ja
Publication of JP2008046511A5 publication Critical patent/JP2008046511A5/ja
Application granted granted Critical
Publication of JP4665868B2 publication Critical patent/JP4665868B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Laser Beam Printer (AREA)
JP2006223658A 2006-08-18 2006-08-18 光スキャナおよび画像形成装置 Expired - Fee Related JP4665868B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006223658A JP4665868B2 (ja) 2006-08-18 2006-08-18 光スキャナおよび画像形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006223658A JP4665868B2 (ja) 2006-08-18 2006-08-18 光スキャナおよび画像形成装置

Publications (3)

Publication Number Publication Date
JP2008046511A JP2008046511A (ja) 2008-02-28
JP2008046511A5 JP2008046511A5 (enExample) 2009-08-20
JP4665868B2 true JP4665868B2 (ja) 2011-04-06

Family

ID=39180287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006223658A Expired - Fee Related JP4665868B2 (ja) 2006-08-18 2006-08-18 光スキャナおよび画像形成装置

Country Status (1)

Country Link
JP (1) JP4665868B2 (enExample)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000081589A (ja) * 1998-07-09 2000-03-21 Olympus Optical Co Ltd 光偏向器
JP4674017B2 (ja) * 2000-11-20 2011-04-20 オリンパス株式会社 光偏向器
JP2002307396A (ja) * 2001-04-13 2002-10-23 Olympus Optical Co Ltd アクチュエータ

Also Published As

Publication number Publication date
JP2008046511A (ja) 2008-02-28

Similar Documents

Publication Publication Date Title
CN100533205C (zh) 执行器件、光扫描仪以及图像形成装置
JP4691704B2 (ja) 光走査装置
JP4092283B2 (ja) 2次元光スキャナ及び光学装置
JP4492252B2 (ja) アクチュエータ
JP3733383B2 (ja) 2次元光スキャナ
US8610987B2 (en) Optical device, optical scanner, and image forming apparatus
JP5614167B2 (ja) 光偏向器、光走査装置、画像形成装置及び画像投影装置
JP2008304553A (ja) アクチュエータ、光スキャナおよび画像形成装置
JP3759598B2 (ja) アクチュエータ
US9664899B2 (en) Optical scanning device and image reading system
JP3974068B2 (ja) プレーナー型電磁アクチュエータ
KR100891851B1 (ko) 고정자와 이를 갖는 압전 초음파 모터
JP2008116668A (ja) アクチュエータ、光スキャナおよび画像形成装置
EP2275853A1 (en) Method of assembling light scanning apparatus
JPH10123449A (ja) 光スキャナ
JP2005099063A (ja) 偏向アクチュエータ、光走査素子、及び受光走査素子
JP4665868B2 (ja) 光スキャナおよび画像形成装置
JPH0646207A (ja) 圧電駆動マイクロスキャナ
JP4882595B2 (ja) 光スキャナおよび画像形成装置
JP4720699B2 (ja) アクチュエータ、光スキャナおよび画像形成装置
JP2010107572A (ja) 光走査装置
JP2005279863A (ja) アクチュエータの製造方法およびアクチュエータ
JP2009154264A (ja) Memsモジュール
JP4620789B1 (ja) 光走査装置
JP3776521B2 (ja) 光スキャナ

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090702

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20090702

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20101005

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20101012

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101119

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20101214

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20101227

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140121

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4665868

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees