JP4660533B2 - スキャトロメータ、及びフォーカス分析方法 - Google Patents
スキャトロメータ、及びフォーカス分析方法 Download PDFInfo
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- JP4660533B2 JP4660533B2 JP2007309571A JP2007309571A JP4660533B2 JP 4660533 B2 JP4660533 B2 JP 4660533B2 JP 2007309571 A JP2007309571 A JP 2007309571A JP 2007309571 A JP2007309571 A JP 2007309571A JP 4660533 B2 JP4660533 B2 JP 4660533B2
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
- G03F9/7026—Focusing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70625—Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70641—Focus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/7085—Detection arrangement, e.g. detectors of apparatus alignment possibly mounted on wafers, exposure dose, photo-cleaning flux, stray light, thermal load
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
(I32+I34+I38)−(I33+I37+I39)
Claims (9)
- 基板の特性を測定するためのスキャトロメータであって、
放射を投影するように構成された放射プロジェクタと、
前記放射を前記基板上に投影するように構成された高開口数レンズと、
第一所定値以上の強度を有する反射した前記放射の断面エリアを検出するように構成された第一ディテクタと、
第二所定値以上の強度を有する前記反射した放射の断面エリアを検出するように構成された第二ディテクタと、
を備え、
前記高開口数レンズは、前記基板から反射した放射を、前記高開口数レンズの後側焦点面に向けて又は前記高開口数レンズの前側焦点面の共役に向けて投影し、前記第一ディテクタ及び前記第二ディテクタの配置は、前記第一ディテクタが前記高開口数レンズの後側焦点面の手前、つまり前記高開口数レンズと前記高開口数レンズの後側焦点面との間に位置し、前記第二ディテクタが前記高開口数レンズの後側焦点面の後ろに位置するような配置とするか、又は、前記第一ディテクタが前記高開口数レンズの前記前側焦点面の共役の手前、つまり前記高開口数レンズと前記高開口数レンズの前側焦点面の共役との間に位置し、前記第二ディテクタが前記高開口数レンズの前側焦点面の共役の後ろに位置するような配置とし、
前記第一ディテクタ及び前記第二ディテクタは、前記反射した放射の光路に沿って直列に、かつ、前記後側焦点面又は前記前側焦点面の共役から等距離に配設され、
前記第一所定値が前記第二所定値より大きく設定されている、スキャトロメータ。 - 前記反射した放射の角度分解スペクトルを検出するように構成された角度ディテクタをさらに備える、
請求項1に記載のスキャトロメータ。 - 前記第一ディテクタによって検出された、前記第一所定値以上の強度を有する前記反射した放射の断面エリアと、前記第二ディテクタによって検出された、前記第二所定値以上の強度を有する前記反射した放射の断面エリアとを比較するための、コンパレータをさらに備える、
請求項1に記載のスキャトロメータ。 - 前記反射した放射を前記第一ディテクタへ反射するように構成された、
第一リフレクタをさらに備える、請求項1に記載のスキャトロメータ。 - 前記第一ディテクタが複数の第一サブディテクタを備える、
請求項1に記載のスキャトロメータ。 - 前記第二ディテクタが複数の第二サブディテクタを備える、
請求項1に記載のスキャトロメータ。 - 基板がレンズの焦点面内にあるか否かを検出するためのフォーカス分析方法であって、
放射プロジェクタを使用して、放射を高開口数レンズを介して前記基板上へ投影する工程と、
前記基板から反射して前記高開口数レンズを通過した、第一所定値以上の強度を有する前記放射の第一断面エリアを検出する工程と、
前記基板から反射して前記高開口数レンズを通過した、第二所定値以上の強度を有する前記放射の第二断面エリアを検出する工程と、
を備え、
前記反射した放射ビームの前記第一断面エリアを検出する前記第一工程では、前記高開口数レンズと、前記高開口数レンズの後側焦点面又は前記高開口数レンズの前側焦点面の共役との間の前記放射ビームを検出し、前記反射した放射ビームの前記第二断面エリアを検出する工程では、前記高開口数レンズの後側焦点面の後ろ側、又は、前記高開口数レンズの前側焦点面の共役の後ろ側で、前記反射した放射ビームを検出し、
前記第一断面エリアを検出する第一ディテクタ及び前記第二断面エリアを検出する第二ディテクタは、前記反射した放射ビームの光路に沿って直列に、かつ、前記後側焦点面又は前記前側焦点面の共役から等距離に配設され、
前記第一所定値が前記第二所定値より大きく設定されている、方法。 - 前記反射した放射の前記第一断面エリアと、前記反射した放射の前記第二断面エリアとを比較する工程をさらに備える、
請求項7に記載の方法。 - 反射した放射のスペクトルの角度を検出する工程をさらに備える、
請求項7に記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/635,787 US20080135774A1 (en) | 2006-12-08 | 2006-12-08 | Scatterometer, a lithographic apparatus and a focus analysis method |
Publications (2)
Publication Number | Publication Date |
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JP2008185581A JP2008185581A (ja) | 2008-08-14 |
JP4660533B2 true JP4660533B2 (ja) | 2011-03-30 |
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JP2007309571A Active JP4660533B2 (ja) | 2006-12-08 | 2007-11-30 | スキャトロメータ、及びフォーカス分析方法 |
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Country | Link |
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US (2) | US20080135774A1 (ja) |
EP (1) | EP1930774B1 (ja) |
JP (1) | JP4660533B2 (ja) |
KR (2) | KR100954762B1 (ja) |
CN (1) | CN101226340B (ja) |
IL (2) | IL211805A (ja) |
SG (1) | SG143215A1 (ja) |
TW (1) | TWI375131B (ja) |
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- 2007-11-30 JP JP2007309571A patent/JP4660533B2/ja active Active
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- 2007-12-07 KR KR1020070127150A patent/KR100954762B1/ko active IP Right Grant
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TWI375131B (en) | 2012-10-21 |
US20080151228A1 (en) | 2008-06-26 |
US7630070B2 (en) | 2009-12-08 |
EP1930774B1 (en) | 2014-10-22 |
JP2008185581A (ja) | 2008-08-14 |
KR20080053232A (ko) | 2008-06-12 |
CN101226340A (zh) | 2008-07-23 |
SG143215A1 (en) | 2008-06-27 |
EP1930774A1 (en) | 2008-06-11 |
KR100989377B1 (ko) | 2010-10-25 |
US20080135774A1 (en) | 2008-06-12 |
TW200837507A (en) | 2008-09-16 |
IL211805A (en) | 2013-10-31 |
KR20090048552A (ko) | 2009-05-14 |
IL187798A (en) | 2014-06-30 |
KR100954762B1 (ko) | 2010-04-28 |
IL187798A0 (en) | 2008-03-20 |
CN101226340B (zh) | 2010-08-25 |
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