JP4657441B2 - マイクロ電子機械可変光学遅延線 - Google Patents

マイクロ電子機械可変光学遅延線 Download PDF

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Publication number
JP4657441B2
JP4657441B2 JP2000341870A JP2000341870A JP4657441B2 JP 4657441 B2 JP4657441 B2 JP 4657441B2 JP 2000341870 A JP2000341870 A JP 2000341870A JP 2000341870 A JP2000341870 A JP 2000341870A JP 4657441 B2 JP4657441 B2 JP 4657441B2
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Japan
Prior art keywords
mirror
delay line
input
light wave
micromachine
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Expired - Fee Related
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JP2000341870A
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Japanese (ja)
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JP2001208988A (ja
JP2001208988A5 (enExample
Inventor
ジョン ビショップ デビッド
クリントン ガイルズ ランディー
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アルカテル−ルーセント ユーエスエー インコーポレーテッド
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Publication of JP2001208988A publication Critical patent/JP2001208988A/ja
Publication of JP2001208988A5 publication Critical patent/JP2001208988A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2861—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using fibre optic delay lines and optical elements associated with them, e.g. for use in signal processing, e.g. filtering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/023—Catoptric systems, e.g. image erecting and reversing system for extending or folding an optical path, e.g. delay lines

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2000341870A 1999-11-10 2000-11-09 マイクロ電子機械可変光学遅延線 Expired - Fee Related JP4657441B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US16445899P 1999-11-10 1999-11-10
US09/515999 2000-02-29
US60/164458 2000-02-29
US09/515,999 US6356377B1 (en) 1999-11-10 2000-02-29 Mems variable optical delay lines

Publications (3)

Publication Number Publication Date
JP2001208988A JP2001208988A (ja) 2001-08-03
JP2001208988A5 JP2001208988A5 (enExample) 2007-12-20
JP4657441B2 true JP4657441B2 (ja) 2011-03-23

Family

ID=26860581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000341870A Expired - Fee Related JP4657441B2 (ja) 1999-11-10 2000-11-09 マイクロ電子機械可変光学遅延線

Country Status (5)

Country Link
US (1) US6356377B1 (enExample)
EP (1) EP1099972B1 (enExample)
JP (1) JP4657441B2 (enExample)
CA (1) CA2323914C (enExample)
DE (1) DE60035396T2 (enExample)

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US6760506B2 (en) * 1999-06-04 2004-07-06 Herzel Laor Optical switch and servo mechanism
JP2002091512A (ja) * 2000-09-12 2002-03-29 Meidensha Corp シーケンサのプログラミング支援装置
US6934431B2 (en) * 2000-12-06 2005-08-23 Lucent Technologies Inc. Variable optical delay lines and methods for making same
US6590697B2 (en) * 2001-10-04 2003-07-08 Megasense VOA with a movable focusing mirror
WO2003052883A2 (en) * 2001-12-14 2003-06-26 Agilent Technologies, Inc. Retro-reflecting device in particular for tunable lasers
US20090279171A1 (en) * 2008-05-12 2009-11-12 Raytheon Company Method and Apparatus for Providing an Adjustable Optical Delay
TW201013291A (en) * 2008-09-19 2010-04-01 Univ Nat Chiao Tung Adjustable optical-signal delay module and method of same
JP5110533B2 (ja) * 2008-10-06 2012-12-26 Ｎｅｃエンジニアリング株式会社 光路長補正モジュール
JP6082594B2 (ja) * 2009-04-17 2017-02-15 シーウェア システムズＳｉ−Ｗａｒｅ Ｓｙｓｔｅｍｓ 光路遅延増大器を提供するｍｅｍｓデバイス、その作製方法、及び当該デバイスを用いた光学装置
US8610625B2 (en) 2010-12-22 2013-12-17 LGS Innovations LLC Method and apparatus for transmitting and receiving phase-controlled radiofrequency signals
TWI473373B (zh) * 2012-11-30 2015-02-11 Ind Tech Res Inst 間隔時間可調脈衝序列產生裝置
WO2015161136A1 (en) 2014-04-17 2015-10-22 Femtometrix, Inc. Wafer metrology technologies
JP2016017762A (ja) * 2014-07-04 2016-02-01 株式会社東芝 光学遅延装置及び光コヒーレンストモグラフィー装置
EP3218924B1 (en) 2014-11-12 2020-02-12 Femtometrix, Inc. Systems for parsing material properties from within shg signals
KR102533125B1 (ko) 2015-09-03 2023-05-15 캘리포니아 인스티튜트 오브 테크놀로지 높은-ｋ 유전체를 특징화하는 시스템 및 방법
WO2018092101A1 (en) * 2016-11-20 2018-05-24 Unispectral Ltd. Multi-band imaging systems
CN113056814B (zh) 2018-04-27 2025-05-27 菲拓梅里克斯公司 确定半导体器件特性的系统和方法
JP2021530670A (ja) 2018-05-15 2021-11-11 フェムトメトリクス， インク． 第二高調波発生（ｓｈｇ）光学的検査システムの設計
CN112615673B (zh) * 2020-11-30 2023-05-23 四川梓冠光电科技有限公司 一种连续可调高精度宽范围光学延迟系统
US20220364850A1 (en) 2021-05-12 2022-11-17 Femtometrix, Inc. Second-harmonic generation for critical dimensional metrology
CN116243429B (zh) * 2023-03-27 2025-08-12 中国科学院上海微系统与信息技术研究所 一种百皮秒级真时延mems光纤延迟线及其阵列

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4103991A (en) * 1976-12-03 1978-08-01 Xerox Corporation Optical system for scanning during reciprocal motion providing 180°r
US4142797A (en) * 1977-02-11 1979-03-06 Barnes Engineering Company Common path interferometer
FR2570836B1 (fr) 1984-09-21 1987-11-20 Thomson Csf Dispositif a ligne a retard optique circulante
JPS63273280A (ja) * 1987-04-30 1988-11-10 Nec Home Electronics Ltd ヘッド送り装置
US5033853A (en) 1989-04-10 1991-07-23 Coherent, Inc. Apparatus for autocorrelating optical radiation signals
US5066088A (en) * 1990-08-27 1991-11-19 Westinghouse Electric Corp. Optical variable delay line and variable-frequency fiber-optic multiplexer
US5220463A (en) 1991-01-29 1993-06-15 Clark Instrumentation, Inc. Optical delay line
US5461687A (en) * 1992-03-18 1995-10-24 Trw Inc. Wavelength controlled optical true time delay generator
US5208880A (en) * 1992-04-30 1993-05-04 General Electric Company Microdynamical fiber-optic switch and method of switching using same
US6075239A (en) 1997-09-10 2000-06-13 Lucent Technologies, Inc. Article comprising a light-actuated micromechanical photonic switch
US5974207A (en) * 1997-12-23 1999-10-26 Lucent Technologies, Inc. Article comprising a wavelength-selective add-drop multiplexer
JPH11284263A (ja) * 1998-01-30 1999-10-15 Hitachi Cable Ltd 超広帯域波長分散補償デバイス，およびそれを用いた光通信システム
US6155490A (en) * 1999-04-22 2000-12-05 Intermec Ip Corp. Microelectromechanical systems scanning mirror for a laser scanner

Also Published As

Publication number Publication date
JP2001208988A (ja) 2001-08-03
DE60035396D1 (de) 2007-08-16
CA2323914A1 (en) 2001-05-10
DE60035396T2 (de) 2008-03-06
EP1099972A2 (en) 2001-05-16
CA2323914C (en) 2005-01-04
EP1099972A3 (en) 2004-05-19
US6356377B1 (en) 2002-03-12
EP1099972B1 (en) 2007-07-04

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