CA2323914C - Mems variable optical delay lines - Google Patents

Mems variable optical delay lines Download PDF

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Publication number
CA2323914C
CA2323914C CA002323914A CA2323914A CA2323914C CA 2323914 C CA2323914 C CA 2323914C CA 002323914 A CA002323914 A CA 002323914A CA 2323914 A CA2323914 A CA 2323914A CA 2323914 C CA2323914 C CA 2323914C
Authority
CA
Canada
Prior art keywords
input
light wave
output
linear rack
micro machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA002323914A
Other languages
English (en)
French (fr)
Other versions
CA2323914A1 (en
Inventor
David John Bishop
Randy Clinton Giles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agere Systems LLC
Nokia of America Corp
Original Assignee
Agere Systems LLC
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agere Systems LLC, Lucent Technologies Inc filed Critical Agere Systems LLC
Publication of CA2323914A1 publication Critical patent/CA2323914A1/en
Application granted granted Critical
Publication of CA2323914C publication Critical patent/CA2323914C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/2804—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers
    • G02B6/2861—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals forming multipart couplers without wavelength selective elements, e.g. "T" couplers, star couplers using fibre optic delay lines and optical elements associated with them, e.g. for use in signal processing, e.g. filtering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/023—Catoptric systems, e.g. image erecting and reversing system for extending or folding an optical path, e.g. delay lines

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Theoretical Computer Science (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
CA002323914A 1999-11-10 2000-10-19 Mems variable optical delay lines Expired - Fee Related CA2323914C (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US16445899P 1999-11-10 1999-11-10
US60/164,458 1999-11-10
US09/515,999 US6356377B1 (en) 1999-11-10 2000-02-29 Mems variable optical delay lines
US09/515,999 2000-02-29

Publications (2)

Publication Number Publication Date
CA2323914A1 CA2323914A1 (en) 2001-05-10
CA2323914C true CA2323914C (en) 2005-01-04

Family

ID=26860581

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002323914A Expired - Fee Related CA2323914C (en) 1999-11-10 2000-10-19 Mems variable optical delay lines

Country Status (5)

Country Link
US (1) US6356377B1 (enExample)
EP (1) EP1099972B1 (enExample)
JP (1) JP4657441B2 (enExample)
CA (1) CA2323914C (enExample)
DE (1) DE60035396T2 (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6760506B2 (en) * 1999-06-04 2004-07-06 Herzel Laor Optical switch and servo mechanism
JP2002091512A (ja) * 2000-09-12 2002-03-29 Meidensha Corp シーケンサのプログラミング支援装置
US6934431B2 (en) * 2000-12-06 2005-08-23 Lucent Technologies Inc. Variable optical delay lines and methods for making same
US6590697B2 (en) * 2001-10-04 2003-07-08 Megasense VOA with a movable focusing mirror
EP1459111B1 (en) * 2001-12-14 2007-06-06 Agilent Technologies, Inc. External cavity with retro-reflecting device in particular for tunable lasers
US20090279171A1 (en) * 2008-05-12 2009-11-12 Raytheon Company Method and Apparatus for Providing an Adjustable Optical Delay
TW201013291A (en) * 2008-09-19 2010-04-01 Univ Nat Chiao Tung Adjustable optical-signal delay module and method of same
JP5110533B2 (ja) * 2008-10-06 2012-12-26 Ｎｅｃエンジニアリング株式会社 光路長補正モジュール
JP6082594B2 (ja) * 2009-04-17 2017-02-15 シーウェア システムズＳｉ−Ｗａｒｅ Ｓｙｓｔｅｍｓ 光路遅延増大器を提供するｍｅｍｓデバイス、その作製方法、及び当該デバイスを用いた光学装置
US8610625B2 (en) 2010-12-22 2013-12-17 LGS Innovations LLC Method and apparatus for transmitting and receiving phase-controlled radiofrequency signals
TWI473373B (zh) * 2012-11-30 2015-02-11 Ind Tech Res Inst 間隔時間可調脈衝序列產生裝置
EP3132467A4 (en) 2014-04-17 2017-11-01 Femtometrix, Inc. Wafer metrology technologies
JP2016017762A (ja) * 2014-07-04 2016-02-01 株式会社東芝 光学遅延装置及び光コヒーレンストモグラフィー装置
US10551325B2 (en) 2014-11-12 2020-02-04 Femtometrix, Inc. Systems for parsing material properties from within SHG signals
EP3344972B1 (en) 2015-09-03 2022-12-14 California Institute of Technology Optical systems and methods of characterizing high-k dielectrics
KR20190111906A (ko) * 2016-11-20 2019-10-02 유니스펙트럴 리미티드. 다중-대역 이미징 시스템
CN113056814B (zh) 2018-04-27 2025-05-27 菲拓梅里克斯公司 确定半导体器件特性的系统和方法
CN113167741A (zh) 2018-05-15 2021-07-23 菲拓梅里克斯公司 二次谐波产生(shg)光学检查系统设计
CN112615673B (zh) * 2020-11-30 2023-05-23 四川梓冠光电科技有限公司 一种连续可调高精度宽范围光学延迟系统
EP4337940A4 (en) 2021-05-12 2025-05-21 Femtometrix, Inc. GENERATION OF THE SECOND HARMONIC FOR CRITICAL METROLOGY
CN116243429B (zh) * 2023-03-27 2025-08-12 中国科学院上海微系统与信息技术研究所 一种百皮秒级真时延mems光纤延迟线及其阵列

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4103991A (en) * 1976-12-03 1978-08-01 Xerox Corporation Optical system for scanning during reciprocal motion providing 180°r
US4142797A (en) * 1977-02-11 1979-03-06 Barnes Engineering Company Common path interferometer
FR2570836B1 (fr) 1984-09-21 1987-11-20 Thomson Csf Dispositif a ligne a retard optique circulante
JPS63273280A (ja) * 1987-04-30 1988-11-10 Nec Home Electronics Ltd ヘッド送り装置
US5033853A (en) 1989-04-10 1991-07-23 Coherent, Inc. Apparatus for autocorrelating optical radiation signals
US5066088A (en) * 1990-08-27 1991-11-19 Westinghouse Electric Corp. Optical variable delay line and variable-frequency fiber-optic multiplexer
US5220463A (en) 1991-01-29 1993-06-15 Clark Instrumentation, Inc. Optical delay line
US5461687A (en) * 1992-03-18 1995-10-24 Trw Inc. Wavelength controlled optical true time delay generator
US5208880A (en) * 1992-04-30 1993-05-04 General Electric Company Microdynamical fiber-optic switch and method of switching using same
US6075239A (en) 1997-09-10 2000-06-13 Lucent Technologies, Inc. Article comprising a light-actuated micromechanical photonic switch
US5974207A (en) * 1997-12-23 1999-10-26 Lucent Technologies, Inc. Article comprising a wavelength-selective add-drop multiplexer
JPH11284263A (ja) * 1998-01-30 1999-10-15 Hitachi Cable Ltd 超広帯域波長分散補償デバイス，およびそれを用いた光通信システム
US6155490A (en) * 1999-04-22 2000-12-05 Intermec Ip Corp. Microelectromechanical systems scanning mirror for a laser scanner

Also Published As

Publication number Publication date
EP1099972A2 (en) 2001-05-16
DE60035396T2 (de) 2008-03-06
JP2001208988A (ja) 2001-08-03
EP1099972B1 (en) 2007-07-04
DE60035396D1 (de) 2007-08-16
JP4657441B2 (ja) 2011-03-23
CA2323914A1 (en) 2001-05-10
EP1099972A3 (en) 2004-05-19
US6356377B1 (en) 2002-03-12

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MKLA Lapsed

Effective date: 20191021