JP4641586B2 - 半導体装置の作製方法 - Google Patents
半導体装置の作製方法 Download PDFInfo
- Publication number
- JP4641586B2 JP4641586B2 JP2000066074A JP2000066074A JP4641586B2 JP 4641586 B2 JP4641586 B2 JP 4641586B2 JP 2000066074 A JP2000066074 A JP 2000066074A JP 2000066074 A JP2000066074 A JP 2000066074A JP 4641586 B2 JP4641586 B2 JP 4641586B2
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- JP
- Japan
- Prior art keywords
- region
- film
- type impurity
- semiconductor film
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Liquid Crystal (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Thin Film Transistor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000066074A JP4641586B2 (ja) | 1999-03-12 | 2000-03-10 | 半導体装置の作製方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6573799 | 1999-03-12 | ||
JP11-65737 | 1999-03-12 | ||
JP2000066074A JP4641586B2 (ja) | 1999-03-12 | 2000-03-10 | 半導体装置の作製方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2000332257A JP2000332257A (ja) | 2000-11-30 |
JP2000332257A5 JP2000332257A5 (fr) | 2007-05-24 |
JP4641586B2 true JP4641586B2 (ja) | 2011-03-02 |
Family
ID=26406884
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000066074A Expired - Fee Related JP4641586B2 (ja) | 1999-03-12 | 2000-03-10 | 半導体装置の作製方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4641586B2 (fr) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI288443B (en) * | 2002-05-17 | 2007-10-11 | Semiconductor Energy Lab | SiN film, semiconductor device, and the manufacturing method thereof |
JP2005333107A (ja) * | 2004-04-21 | 2005-12-02 | Mitsubishi Electric Corp | 半導体装置、画像表示装置および半導体装置の製造方法 |
JP2005311037A (ja) * | 2004-04-21 | 2005-11-04 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JP4641741B2 (ja) * | 2004-05-28 | 2011-03-02 | 三菱電機株式会社 | 半導体装置 |
JP5414712B2 (ja) * | 2011-02-21 | 2014-02-12 | 三菱電機株式会社 | 半導体装置 |
-
2000
- 2000-03-10 JP JP2000066074A patent/JP4641586B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2000332257A (ja) | 2000-11-30 |
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