JP4626500B2 - Manufacturing method of semiconductor device - Google Patents

Description

  The present invention relates to a semiconductor device and a method for manufacturing the semiconductor device, and is particularly suitable for application to an SOI (Silicon On Insulator) transistor provided with a back gate electrode.

A field effect transistor formed on an SOI (Silicon On Insulator) substrate has attracted attention because of its ease of element isolation, latch-up free, and small source / drain junction capacitance.
Further, for example, in Patent Document 1, in order to form a silicon thin film with good crystallinity and uniformity on a large-area insulating film, an amorphous or polycrystalline silicon layer formed on the insulating film is irradiated with ultraviolet rays. By irradiating the beam in a pulse shape, a polycrystalline silicon film in which single crystal grains close to squares are arranged in a grid pattern is formed on an insulating film, and the surface of the polycrystalline silicon film is subjected to CMP (chemical mechanical film). A method of flattening by mechanical polishing) is disclosed.
JP-A-10-261799

However, the silicon thin film formed on the insulating film has grain boundaries, micro twins, and various other minute defects. For this reason, the field effect transistor formed on such a silicon thin film has a problem that the transistor characteristics are inferior to that of a field effect transistor formed on completely single crystal silicon.
When a field effect transistor formed on a silicon thin film is stacked, the field effect transistor is present in the lower layer. As a result, the flatness of the underlying insulating film on which the upper silicon thin film is formed deteriorates, and heat treatment conditions for forming the upper silicon thin film are limited, and the crystallinity of the upper silicon thin film is lower than that of the lower silicon thin film. There was a problem of being inferior to the crystallinity of the thin film.

  Further, in the conventional semiconductor integrated circuit, when the channel length is shortened as the transistor is miniaturized, the rising characteristic of the drain current in the subthreshold region is deteriorated. This hinders the low-voltage operation of the transistor and increases the leakage current at the time of off, which increases the power consumption during operation and standby, and also causes a transistor breakdown factor. .

  Accordingly, an object of the present invention is to provide a semiconductor device and a semiconductor device capable of improving threshold controllability by a back gate electrode while suppressing deterioration in crystallinity of a semiconductor layer in which a field effect transistor is formed. It is to provide a manufacturing method.

In order to solve the above-described problem, according to a semiconductor device of one embodiment of the present invention, a back gate electrode formed of a first semiconductor layer formed over a first insulating layer and formed over the first semiconductor layer. A second insulating layer formed thereon, a second semiconductor layer formed on the second insulating layer, a gate electrode formed on the second semiconductor layer, and formed on the second semiconductor layer, the gate electrode A source layer disposed on one side of the gate electrode and a drain layer formed on the second semiconductor layer and disposed on the other side of the gate electrode, the first semiconductor under the source layer and the drain layer The impurity concentration of the layer is lower than the impurity concentration of the back gate electrode under the gate electrode

Further, a back gate electrode is arranged in a self-aligned manner under the channel region of the SOI-MOSFET, and a semiconductor having an intrinsic or low concentration impurity surrounded by an insulating layer under the source / drain region of the MOSFET. Layers are arranged. As a result, the potential of the active region of the SOI transistor can be controlled by the back gate electrode, the rise characteristic of the drain current of the subthreshold region can be improved, and the electric field at the channel end on the drain side can be improved. Can be relaxed. Accordingly, the transistor can be operated at a low voltage, the leakage current at the time of off can be reduced, the power consumption during operation and standby can be reduced, and the breakdown voltage of the SOI transistor can be improved. Can do.

  In addition, the impurity concentration of the back gate electrode under the source layer and the drain layer is lower than the impurity concentration of the back gate electrode under the gate electrode or is made intrinsic, so that the potential of the active region of the SOI transistor is backed up. While enabling efficient control with the gate electrode, it is possible to widen the depletion layer formed in the back gate electrode under the source layer and the drain layer, and to reduce the parasitic capacitance of the source layer and the drain layer. . For this reason, it is possible to improve the rising characteristics of the drain current in the subthreshold region, and even when a semiconductor layer having a back gate electrode is disposed under the source layer and the drain layer, the source layer and the drain layer The time required for charging and discharging the parasitic capacitance can be reduced, and the power consumption during operation and standby can be reduced, and the speed of the SOI transistor can be increased.

According to the semiconductor device of one embodiment of the present invention, the back gate electrode under the gate electrode further includes an impurity introduction layer introduced in a self-aligned manner into the gate electrode in the first semiconductor layer. It is characterized by.
As a result, the back gate electrode having a high concentration impurity can be formed on the front and back sides of the SOI layer channel region in a self-aligned manner together with the gate electrode.

In addition, it is possible to increase the impurity concentration of the back gate electrode under the gate electrode while preventing the impurity concentration of the back gate semiconductor layer under the source layer and the drain layer from increasing. Even when the back gate semiconductor layer is disposed, the parasitic capacitance of the source layer and the drain layer can be reduced.
Further, since the low-resistance back gate electrode having a high concentration impurity can be disposed under the SOI layer channel in a self-aligned manner, the SOI transistor control capability of the back gate electrode is improved. When the back gate electrode and the gate electrode are controlled independently, the threshold value of the SOI transistor can be dynamically controlled by applying a low voltage back gate.

The semiconductor device according to one embodiment of the present invention further includes a wiring layer that electrically connects the back gate electrode and the gate electrode.
As a result, the back gate electrode and the gate electrode can be controlled to be at the same potential, the control of the potential in the deep part of the channel region can be improved, and the rise of the subthreshold region drain current can be made steep. it can. For this reason, it is possible to reduce the off-state leakage current while suppressing the increase in chip size, to reduce the power consumption during operation and standby, and to increase the breakdown voltage of the field-effect transistor Can be achieved.

According to one embodiment of the present invention, there is provided a method for manufacturing a semiconductor device, comprising: forming a first semiconductor layer over a semiconductor substrate; and providing a second semiconductor layer having a lower etching rate than the first semiconductor layer on the first semiconductor layer. Forming a film on the second semiconductor layer, and forming a third semiconductor layer having an etching rate equivalent to that of the first semiconductor layer on the second semiconductor layer. Forming a fourth semiconductor layer on the third semiconductor layer, forming a first groove from the first semiconductor layer through the fourth semiconductor layer to expose the semiconductor substrate, and the semiconductor substrate Forming a support in the first groove to support the second semiconductor layer and the fourth semiconductor layer, and at least one of the first semiconductor layer and the third semiconductor layer in which the support is formed. Second groove exposing part And a first cavity portion in which the first semiconductor layer and the third semiconductor layer are removed by selectively etching the first semiconductor layer and the third semiconductor layer from the second groove. Forming a second cavity, and forming a first buried insulating layer and a second buried insulating layer embedded in the first cavity and the second cavity, respectively, and on the fourth semiconductor layer And forming an impurity introduction layer arranged in a self-aligned manner in the second semiconductor layer under the gate electrode by performing ion implantation into the second semiconductor layer through the gate electrode. A method of manufacturing a semiconductor device.
In addition, according to the method for manufacturing a semiconductor device of one embodiment of the present invention, the step of forming the first semiconductor layer over the semiconductor substrate and the second semiconductor layer having an etching rate smaller than that of the first semiconductor layer are provided. A step of forming a film on the first semiconductor layer, a step of forming a third semiconductor layer having an etching rate equivalent to that of the first semiconductor layer on the second semiconductor layer, and a step equivalent to that of the second semiconductor layer. Forming a fourth semiconductor layer having an etching rate on the third semiconductor layer; forming a first groove through the first to fourth semiconductor layers to expose the semiconductor substrate; Forming a support for supporting the second and fourth semiconductor layers on the semiconductor substrate in the first groove; and at least part of the first and third semiconductor layers on which the support is formed Exposed from second and fourth semiconductor layers Forming the second groove, and selectively etching the first and third semiconductor layers through the second groove to remove the first and third semiconductor layers, respectively. A step of forming two cavities, a step of forming a buried insulating layer embedded in each of the first and second cavities, a step of forming a gate electrode on the fourth semiconductor layer, and through the gate electrode Forming an impurity introduction layer disposed in a self-aligned manner in the second semiconductor layer under the gate electrode by performing ion implantation on the second semiconductor layer.

  Thereby, even when the second and fourth semiconductor layers are respectively stacked on the first and third semiconductor layers, the etching solution or the etching gas is brought into contact with the first and third semiconductor layers through the second groove. The first and third semiconductor layers can be removed while leaving the second and fourth semiconductor layers, and the first and second cavities below the second and fourth semiconductor layers can be removed. A buried insulating layer embedded in each can be formed. Also, by forming the support embedded in the first groove, the second and fourth semiconductor layers can be formed even when the first and second cavities are formed below the second and fourth semiconductor layers, respectively. It can be supported on a semiconductor substrate.

Therefore, it is possible to dispose the second and fourth semiconductor layers on the buried insulating layer while reducing the occurrence of defects in the second and fourth semiconductor layers, and the SOI transistor can be formed without using the SOI substrate. It is possible to form four semiconductor layers, and it is possible to dispose a back gate electrode under the SOI transistor.
In addition, by performing ion implantation into the second semiconductor layer through the gate electrode, an impurity introduction layer arranged in a self-aligned manner in the second semiconductor layer under the gate electrode can be formed, and under the source layer and the drain layer. The impurity concentration of the back gate electrode can be made lower than the impurity concentration of the back gate electrode under the gate electrode. As a result, it is possible to improve the threshold controllability by the back gate electrode, reduce the parasitic capacitance of the source layer and the drain layer, suppress the increase in cost, and reduce the power consumption during operation and standby. Can be reduced, and the speed of the SOI transistor can be increased.

According to the method for manufacturing a semiconductor device of one embodiment of the present invention, the semiconductor substrate and the second and fourth semiconductor layers are single crystal Si, and the first and third semiconductor layers are single crystal SiGe. It is characterized by.
Thereby, the etching rate of the first and third semiconductor layers can be made larger than that of the semiconductor substrate and the second and fourth semiconductor layers while enabling lattice matching between the semiconductor substrate and the first to fourth semiconductor layers. Is possible. Therefore, the second and fourth semiconductor layers having good crystal quality can be formed on the first and third semiconductor layers, respectively, and the second and fourth semiconductor layers can be formed without deteriorating the quality of the second and fourth semiconductor layers. It is possible to achieve insulation between the fourth semiconductor layer and the semiconductor substrate.

Hereinafter, a semiconductor device and a manufacturing method thereof according to embodiments of the present invention will be described with reference to the drawings.
1A to 11A are plan views showing a method for manufacturing a semiconductor device according to an embodiment of the present invention, and FIGS. 1B to 11B are FIGS. Sectional views cut along lines A1-A1 ′ to A11-A11 ′ in FIG. 11A, and FIGS. 1C to 11C show B1- in FIG. 1A to FIG. It is sectional drawing cut | disconnected by the B1'-B11-B11 'line | wire, respectively.

  In FIG. 1, semiconductor layers 51, 33, 52, and 35 are sequentially stacked on a semiconductor substrate 31 by epitaxial growth. Here, the film thickness of the semiconductor layer 51 can be made larger than the film thickness of the semiconductor layer 52. The semiconductor layers 51 and 52 can be made of a material having an etching rate larger than that of the semiconductor substrate 31 and the semiconductor layers 33 and 35. Examples of the material of the semiconductor substrate 31 and the semiconductor layers 51, 33, 52, and 35 include A combination selected from Si, Ge, SiGe, SiC, SiSn, PbS, GaAs, InP, GaP, GaN, ZnSe, and the like can be used. In particular, when the semiconductor substrate 31 is Si, it is preferable to use SiGe as the semiconductor layers 51 and 52 and Si as the semiconductor layers 33 and 35. Accordingly, it is possible to ensure the lattice matching between the semiconductor layers 51 and 52 and the semiconductor layers 33 and 35, while ensuring the selection ratio between the semiconductor layers 51 and 52 and the semiconductor layers 33 and 35. it can. Further, as the semiconductor layers 51, 33, 52, and 35, a polycrystalline semiconductor layer, an amorphous semiconductor layer, or a porous semiconductor layer may be used in addition to a single crystal semiconductor layer. In place of the semiconductor layers 51 and 52, a metal oxide film such as γ-aluminum oxide capable of forming a single crystal semiconductor layer by epitaxial growth may be used. The film thickness of the semiconductor layers 51, 33, 52, and 35 can be set to about 1 to 100 nm, for example. The semiconductor layers 33 and 35 are preferably formed of intrinsic semiconductors that are not doped with impurities.

Then, a base oxide film 53 that protects the surface of the semiconductor layer 35 is formed by thermal oxidation of the semiconductor layer 35 or a CVD method. Then, an antioxidant film 54 is formed on the entire surface of the base oxide film 53 by a method such as CVD. For example, a silicon nitride film can be used as the antioxidant film 54.
Next, as shown in FIG. 2, the antioxidant film 54, the base oxide film 53, and the semiconductor layers 35, 52, 33, and 51 are patterned by using a photolithography technique and an etching technique, thereby forming one of the semiconductor substrates 31. A groove 36 exposing the portion is formed along a predetermined direction. The arrangement position of the trench 36 can correspond to a part of the element isolation region of the semiconductor layer 33. When a part of the semiconductor substrate 31 is exposed, the etching may be stopped on the surface of the semiconductor substrate 31, or the semiconductor substrate 31 may be over-etched to form a recess in the semiconductor substrate 31. .

Further, by patterning the antioxidant film 54, the base oxide film 53, and the semiconductor layers 35 and 52 using photolithography technology and etching technology, a groove having a width wider than the groove 36 disposed so as to overlap the groove 36. 37 is formed. Here, the arrangement position of the groove 37 can correspond to the element isolation region of the semiconductor layer 35.
Next, as shown in FIG. 3, a support 56 that is embedded in the grooves 36 and 37 and supports the semiconductor layers 33 and 35 on the semiconductor substrate 31 is formed on the entire surface of the semiconductor substrate 31 by a method such as CVD. To do. As a material of the support 56, an insulator such as a silicon oxide film, a silicon nitride film, or a silicon oxynitride film can be used. Alternatively, as the material of the support 56, a polycrystalline semiconductor layer, an amorphous semiconductor layer, or the like may be used in addition to the crystalline semiconductor layer. Here, the support body 56 formed so as to cover the entire surface of the semiconductor substrate 31 needs to support the semiconductor layers 33 and 35 while maintaining the flatness by suppressing the bending of the semiconductor layers 33 and 35. is there. Therefore, in order to ensure the mechanical strength, it is preferable to make the film thickness thicker than the minimum element isolation width.

  Next, as shown in FIG. 4, a part of the semiconductor layer 51 is patterned by patterning the antioxidant film 54, the base oxide film 53, and the semiconductor layers 35, 52, 33, 51 using a photolithography technique and an etching technique. A groove 38 that exposes is formed along a direction orthogonal to the groove 36. The arrangement position of the groove 38 can correspond to the element isolation region of the semiconductor layers 33 and 35. When a part of the semiconductor layer 51 is exposed, the etching may be stopped on the surface of the semiconductor layer 51, or the semiconductor layer 51 may be over-etched to form a recess in the semiconductor layer 51. . Alternatively, the surface of the semiconductor substrate 31 may be exposed through the semiconductor layer 51 in the groove 38.

Next, as shown in FIG. 5, an etching gas or an etchant is brought into contact with the semiconductor layers 51 and 52 through the groove 38 to remove the semiconductor layers 51 and 52 by etching. A cavity 57 a is formed between the semiconductor layers 33 and 35, and a cavity 57 b is formed between the semiconductor layers 33 and 35.
Here, by providing the support 56 in the grooves 36 and 37, the semiconductor layers 33 and 35 can be supported on the semiconductor substrate 31 even when the semiconductor layers 51 and 52 are removed. By providing the groove 38 separately from the grooves 36 and 37, it becomes possible to contact the etching gas or the etching solution with the semiconductor layers 51 and 52 disposed under the semiconductor layers 33 and 35, respectively. For this reason, it is possible to achieve insulation between the semiconductor layers 33 and 35 and the semiconductor substrate 31 without impairing the crystal quality of the semiconductor layers 33 and 35.

  Note that when the semiconductor substrate 31 and the semiconductor layers 33 and 35 are Si and the semiconductor layers 51 and 52 are SiGe, it is preferable to use hydrofluoric acid as an etching solution for the semiconductor layers 51 and 52. As a result, a Si / SiGe selection ratio of about 1: 100 to 1000 can be obtained, and the semiconductor layers 51 and 52 can be removed while over-etching of the semiconductor substrate 31 and the semiconductor layers 33 and 35 is suppressed. It becomes. Further, as an etchant for the semiconductor layers 51 and 52, hydrofluoric acid overwater, ammonia overwater, or hydrofluoric acid overwater may be used.

  Further, before the semiconductor layers 51 and 52 are removed by etching, the semiconductor layers 51 and 52 may be made porous by a method such as anodic oxidation, or by ion implantation into the semiconductor layers 51 and 52, The semiconductor layers 51 and 52 may be made amorphous, or a P-type semiconductor substrate may be used as the semiconductor substrate 51. Thereby, the etching rate of the semiconductor layers 51 and 52 can be increased, and the etching area of the semiconductor layers 51 and 52 can be increased.

  Next, as shown in FIG. 6, by performing thermal oxidation of the semiconductor substrate 31 and the semiconductor layers 33 and 35, the buried insulating layer 32 is formed in the cavity 57 a between the semiconductor substrate 31 and the semiconductor layer 33. The buried insulating layer 34 is formed in the cavity 57b between the semiconductor layers 33 and 35. In the case where the buried insulating layers 32 and 34 are formed by thermal oxidation of the semiconductor substrate 31 and the semiconductor layers 33 and 35, it is preferable to use low-temperature wet oxidation that is reaction-controlled in order to improve the embedding property. Here, when the buried insulating layers 32 and 34 are formed by thermal oxidation of the semiconductor substrate 31 and the semiconductor layers 33 and 35, the semiconductor substrate 31 and the semiconductor layers 33 and 35 in the groove 38 are oxidized and the side walls in the groove 38 are oxidized. Then, an oxide film 39 is formed.

  Thereby, the film thickness of the semiconductor layers 33 and 35 after element isolation is determined by the film thickness of the semiconductor layers 33 and 35 during epitaxial growth and the film thickness of the buried insulating layers 32 and 34 formed during thermal oxidation of the semiconductor layers 33 and 35. Can be defined respectively. For this reason, the film thickness of the semiconductor layers 33 and 35 can be accurately controlled, and the semiconductor layers 33 and 35 can be thinned while enabling variation in the film thickness of the semiconductor layers 33 and 35 to be reduced. it can. Further, by providing the antioxidant film 54 on the semiconductor layer 35, it is possible to form the buried insulating layer 34 on the back side of the semiconductor layer 35 while preventing the surface of the semiconductor layer 35 from being thermally oxidized. Become.

  Note that high-temperature annealing at 1100 ° C. or higher may be performed after the buried insulating layers 32 and 34 are formed in the cavities 57a and 57b, respectively. Thereby, the buried insulating layers 32 and 34 can be reflowed, the stress of the buried insulating layers 32 and 34 can be reduced, and the interface state at the boundary with the second semiconductor layer 4 can be reduced. Can do. The buried insulating layers 32 and 34 may be formed so as to fill all the cavities 57a and 57b, or may be formed so that the cavities 57a and 57b are partially left.

  6, the semiconductor substrate 31 and the semiconductor layers 33 and 35 are thermally oxidized to form the buried insulating layer 32 in the cavity 57a between the semiconductor substrate 31 and the semiconductor layer 33, and the semiconductor. Although the method for forming the buried insulating layer 34 in the cavity 57b between the layers 33 and 35 has been described, an insulating film is formed in the cavity 57a and 57b between the semiconductor substrate 31 and the semiconductor layers 33 and 35 by the CVD method. By forming a film, the entire cavities 57a and 57b between the semiconductor substrate 31 and the semiconductor layers 33 and 35 may be buried with a buried insulating layer.

  This makes it possible to fill the cavities 57a and 57b between the semiconductor substrate 31 and the semiconductor layers 33 and 35 with a material other than the oxide film while preventing the semiconductor layers 33 and 35 from being reduced. Therefore, it is possible to increase the thickness of the buried insulating layers 32 and 34 disposed on the back surfaces of the semiconductor layers 33 and 35, respectively, and reduce the parasitic capacitance on the back surfaces of the semiconductor layers 33 and 35. Can do.

The material of the buried insulating layer buried in the cavities 57a and 57b is, for example, a silicon oxide film, a high-K film or a low-K film such as an FSG (fluorinated silicate glass) film or a silicon nitride film. Etc. may be used.
Next, as shown in FIG. 7, a buried insulator 45 is deposited on the support 56 so that the inside of the groove 38 is buried by a method such as CVD. As the material of the embedded insulator 45, an insulator such as a silicon oxide film, a silicon nitride film, or a silicon oxynitride film can be used.

  Next, as shown in FIG. 8, the buried insulator 45 and the support 56 are thinned using a method such as chemical mechanical polishing (CMP), and the antioxidant film 54 and the base oxide film 53 are removed. As a result, the surface of the semiconductor layer 35 is exposed. The antioxidant film 54 can be used as a stopper layer when the buried insulator 45 and the support 56 are thinned by a method such as CMP.

  Next, as illustrated in FIG. 9, the gate insulating film 41 is formed on the surface of the semiconductor layer 35 by performing thermal oxidation on the surface of the semiconductor layer 35. Then, a polycrystalline silicon layer is formed on the semiconductor layer 35 on which the gate insulating film 41 is formed by a method such as CVD. Then, a resist pattern R is formed on the polycrystalline silicon layer using a photolithography technique, and the polycrystalline silicon layer is etched using the resist pattern R as a mask, thereby forming the gate electrode 42 on the semiconductor layer 35.

Then, ion implantation IP of impurities such as As, P, B, and BF ₂ is performed on the semiconductor layer 33 through the resist pattern R and the gate electrode 42, so that the semiconductor layer 33 is disposed in a self-aligned manner under the gate electrode 42. Impurity introduction layer 50 (back gate electrode) is formed. Here, regarding the film thickness of the resist pattern R and the energy at the time of ion implantation IP, the impurity concentration peak R _P1 is located near or below the center in the depth direction of the semiconductor layer 33 below the gate electrode 42, as shown in FIG. Under the source layer 43a and the drain layer 43b, it is preferable to set the impurity concentration peak R _{P2 to} be in the semiconductor substrate 31.

Thereby, the impurity introduction layer 50 (back gate electrode) arranged in a self-aligned manner on the semiconductor layer 33 under the gate electrode 42 can be formed, and the impurity concentration of the semiconductor layer 33 under the source layer 43a and the drain layer 43b can be formed. Can be made lower than the impurity concentration of the semiconductor layer 33 in the back gate electrode region under the gate electrode 42.
Next, as shown in FIG. 10, the gate electrode 42 is patterned by using a photolithography technique and an etching technique to remove the portion of the gate electrode 42 that covers the step of the semiconductor layer 33.

Next, as shown in FIG. 11, impurities such as As, P, B, and BF ₂ are ion-implanted into the semiconductor layer 35 using the gate electrode 42 as a mask, and are arranged on the side of the gate electrode 42. An LDD layer made of a low concentration impurity introduction layer is formed on the semiconductor layer 35. Then, an insulating layer is formed on the semiconductor layer 35 on which the LDD layer is formed by a method such as CVD, and the insulating layer is etched back using anisotropic etching such as RIE, so that the sidewall of the gate electrode 42 is formed. Sidewalls 44 are formed. Then, by using the gate electrode 42 and the sidewall 44 as a mask, impurities such as As, P, B, and BF ₂ are ion-implanted into the semiconductor layer 35, whereby high-concentration impurities respectively disposed on the sides of the sidewall 44. A source layer 43 a and a drain layer 43 b made of an introduction layer are formed in the semiconductor layer 35.

  Then, an interlayer insulating layer 46 is deposited on the gate electrode 42 by a method such as CVD. Then, the back gate contact electrode C4 embedded in the interlayer insulating layer 46 and the support 56 and connected to the semiconductor layer 33 is formed on the interlayer insulating layer 46 and embedded in the interlayer insulating layer 46, and the gate electrode 42, the source A gate contact electrode C1, a source contact electrode C2, and a drain contact electrode C3 connected to the layer 43a and the drain layer 43b, respectively, are formed on the interlayer insulating layer 46.

  As a result, it is possible to dispose the semiconductor layers 33 and 35 on the buried insulating layers 32 and 34 while reducing the occurrence of defects in the semiconductor layers 33 and 35, and the SOI transistor can be formed on the semiconductor without using the SOI substrate. The back gate electrode can be formed under the SOI transistor. Further, by performing ion implantation into the semiconductor layer 33 through the gate electrode 42, the impurity introduction layer 50 arranged in a self-aligned manner in the semiconductor layer 33 under the gate electrode 42 can be formed, and the source layer 43a and the drain layer The impurity concentration of the semiconductor layer 33 under 43b can be made lower than the impurity concentration of the back gate electrode 50 under the gate electrode. Therefore, the potential of the active region of the SOI transistor can be efficiently controlled by the back gate electrode 50, and the depletion layer formed in the semiconductor layer 33 under the source layer 43a and the drain layer 43b can be expanded. Thus, the parasitic capacitance of the source layer 43a and the drain layer 43b can be reduced. For this reason, it is possible to improve the threshold control capability by the back gate electrode 50 at a low voltage, and even when the semiconductor layer having the back gate electrode formed under the source layer 43a and the drain layer 43b is disposed. The time required for charging and discharging the parasitic capacitances of the source layer 43a and the drain layer 43b can be reduced, and the power consumption during operation and standby can be reduced, and the speed of the SOI transistor can be increased. Can do.

  Note that the gate electrode 42 and the semiconductor layer 35 may be electrically connected through the back gate contact electrode C4. Accordingly, the back gate electrode and the gate electrode 42 can be controlled to have the same potential, the control of the potential in the channel region can be improved, and the drain current rise in the subthreshold region can be made steep. For this reason, it is possible to reduce the off-state leakage current while suppressing the increase in chip size, to reduce the power consumption during operation and standby, and to increase the breakdown voltage of the field-effect transistor Can be achieved.

The figure which shows the manufacturing method of the semiconductor device which concerns on one Embodiment of this invention. The figure which shows the manufacturing method of the semiconductor device which concerns on one Embodiment of this invention. The figure which shows the manufacturing method of the semiconductor device which concerns on one Embodiment of this invention. The figure which shows the manufacturing method of the semiconductor device which concerns on one Embodiment of this invention. The figure which shows the manufacturing method of the semiconductor device which concerns on one Embodiment of this invention. The figure which shows the manufacturing method of the semiconductor device which concerns on one Embodiment of this invention. The figure which shows the manufacturing method of the semiconductor device which concerns on one Embodiment of this invention. The figure which shows the manufacturing method of the semiconductor device which concerns on one Embodiment of this invention. The figure which shows the manufacturing method of the semiconductor device which concerns on one Embodiment of this invention. The figure which shows the manufacturing method of the semiconductor device which concerns on one Embodiment of this invention. The figure which shows the manufacturing method of the semiconductor device which concerns on one Embodiment of this invention.

Explanation of symbols

  31 Semiconductor substrate, 33, 35 Second semiconductor layer, 51, 52 First semiconductor layer, 41 Gate insulating film, 42 Gate electrode, 43a Source layer, 43b Drain layer, 36, 37, 38 Groove, 46 Interlayer insulating layer, 32 , 34 buried insulating layer, 39 oxide film, 45 buried insulator, 50 impurity introduction layer, 53 base oxide film, 54 antioxidant film, 56 support, 57a, 57b cavity, 44 sidewall, R resist pattern, C1 gate Contact electrode, C2 source contact electrode, C3 drain contact electrode, C4 back gate contact electrode

Claims (3)

Forming a first semiconductor layer on a semiconductor substrate;
A step of forming a second semiconductor layer on the first semiconductor layer,
A step of forming a third semiconductor layer on the second semiconductor layer,
A step of forming a fourth semiconductor layer on said third semiconductor layer,
Forming a first groove that exposes the semiconductor substrate through the fourth semiconductor layer from said first semiconductor layer,
Forming a support for supporting the second semiconductor layer and the fourth semiconductor layer on said semiconductor substrate in said first groove,
Forming a second groove for out dew at least a portion of said support the formed first semiconductor layer and said third semiconductor layer,
By selectively etching the first semiconductor layer and the third semiconductor layer from said second groove, the first cavity and the second cavity of the first semiconductor layer and said third semiconductor layer has been removed, respectively Forming a step;
Forming a first buried insulating layer and the second buried insulating layer embedded respectively in said first cavity and the second cavity,
Forming a gate electrode on the fourth semiconductor layer;
By ion implantation into the second semiconductor layer through the gate electrode, characterized in that it comprises a step of forming an impurity introduced layer, which is self-aligned manner disposed on the second semiconductor layer under said gate electrode A method for manufacturing a semiconductor device. In the step of forming the first cavity and the second cavity,
  The second semiconductor layer has a lower etching rate than the first semiconductor layer,
  The third semiconductor layer has an etching rate equivalent to that of the first semiconductor layer;
  2. The method of manufacturing a semiconductor device according to claim 1, wherein the fourth semiconductor layer has an etching rate equivalent to that of the second semiconductor layer. Said semiconductor substrate and said second semiconductor layer and the fourth semiconductor layer a single crystal Si, a semiconductor according to claim 1 or 2, wherein said first semiconductor layer and said third semiconductor layer is characterized by a single-crystal SiGe Device manufacturing method.

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